FR2148801A5 - Plasma generator - for charged particles using solenoid field in two electrode discharge chambers - Google Patents

Plasma generator - for charged particles using solenoid field in two electrode discharge chambers

Info

Publication number
FR2148801A5
FR2148801A5 FR7128566A FR7128566A FR2148801A5 FR 2148801 A5 FR2148801 A5 FR 2148801A5 FR 7128566 A FR7128566 A FR 7128566A FR 7128566 A FR7128566 A FR 7128566A FR 2148801 A5 FR2148801 A5 FR 2148801A5
Authority
FR
France
Prior art keywords
window
anode
charged particles
plasma generator
discharge chambers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7128566A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHUKHIN IVAN
PLESHIVTSEV NIKOLAI
SEMASHKO NIKOLAI
Original Assignee
CHUKHIN IVAN
PLESHIVTSEV NIKOLAI
SEMASHKO NIKOLAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHUKHIN IVAN, PLESHIVTSEV NIKOLAI, SEMASHKO NIKOLAI filed Critical CHUKHIN IVAN
Priority to FR7128566A priority Critical patent/FR2148801A5/en
Application granted granted Critical
Publication of FR2148801A5 publication Critical patent/FR2148801A5/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/48—Generating plasma using an arc
    • H05H1/50—Generating plasma using an arc and using applied magnetic fields, e.g. for focusing or rotating the arc

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Plasma Technology (AREA)

Abstract

A disc anode with annular window and a coaxial cathode are used, the discharge being radial due to the combined field of a pair of series opposition connected solenoids whose fields individually meet on a plane approx. in the centre of the main anode and a mirror image anode without window. A third anode in the form of an annulus lying on the central plane is added, and external to the window are extraction and acceleration electrodes for the beam of charged particles emitted through the window and also focusing electrodes esp. a third solenoid coaxial with the other 2. All the solenoids are shielded with soft iron and may be axially adjustable. Generator increases current density in arc and reduced radial component of velocity in emergent beam so making focusing easier.
FR7128566A 1971-08-04 1971-08-04 Plasma generator - for charged particles using solenoid field in two electrode discharge chambers Expired FR2148801A5 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR7128566A FR2148801A5 (en) 1971-08-04 1971-08-04 Plasma generator - for charged particles using solenoid field in two electrode discharge chambers

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7128566A FR2148801A5 (en) 1971-08-04 1971-08-04 Plasma generator - for charged particles using solenoid field in two electrode discharge chambers

Publications (1)

Publication Number Publication Date
FR2148801A5 true FR2148801A5 (en) 1973-03-23

Family

ID=9081452

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7128566A Expired FR2148801A5 (en) 1971-08-04 1971-08-04 Plasma generator - for charged particles using solenoid field in two electrode discharge chambers

Country Status (1)

Country Link
FR (1) FR2148801A5 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4885068A (en) * 1988-09-08 1989-12-05 Joshin Uramoto Sheet plasma sputtering method and an apparatus for carrying out the method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4885068A (en) * 1988-09-08 1989-12-05 Joshin Uramoto Sheet plasma sputtering method and an apparatus for carrying out the method
EP0357824A1 (en) * 1988-09-08 1990-03-14 Joshin Uramoto A sheet plasma sputtering method and an apparatus for carrying out the method

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Legal Events

Date Code Title Description
ST Notification of lapse