FR1327674A - Beam deflection system for electrified carriers - Google Patents

Beam deflection system for electrified carriers

Info

Publication number
FR1327674A
FR1327674A FR903005A FR903005A FR1327674A FR 1327674 A FR1327674 A FR 1327674A FR 903005 A FR903005 A FR 903005A FR 903005 A FR903005 A FR 903005A FR 1327674 A FR1327674 A FR 1327674A
Authority
FR
France
Prior art keywords
electrified
carriers
beam deflection
deflection system
electrified carriers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR903005A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
WC Heraus GmbH and Co KG
Original Assignee
WC Heraus GmbH and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE1961H0043528 external-priority patent/DE1248175B/en
Application filed by WC Heraus GmbH and Co KG filed Critical WC Heraus GmbH and Co KG
Priority to FR903005A priority Critical patent/FR1327674A/en
Application granted granted Critical
Publication of FR1327674A publication Critical patent/FR1327674A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/3002—Details
    • H01J37/3007—Electron or ion-optical systems
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
FR903005A 1961-08-31 1962-07-05 Beam deflection system for electrified carriers Expired FR1327674A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR903005A FR1327674A (en) 1961-08-31 1962-07-05 Beam deflection system for electrified carriers

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE1961H0043528 DE1248175B (en) 1961-08-31 1961-08-31 Electron gun
FR903005A FR1327674A (en) 1961-08-31 1962-07-05 Beam deflection system for electrified carriers

Publications (1)

Publication Number Publication Date
FR1327674A true FR1327674A (en) 1963-05-17

Family

ID=25979810

Family Applications (1)

Application Number Title Priority Date Filing Date
FR903005A Expired FR1327674A (en) 1961-08-31 1962-07-05 Beam deflection system for electrified carriers

Country Status (1)

Country Link
FR (1) FR1327674A (en)

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