FR1075634A - Notched wheel grinding device to observe the work performed - Google Patents
Notched wheel grinding device to observe the work performedInfo
- Publication number
- FR1075634A FR1075634A FR1075634DA FR1075634A FR 1075634 A FR1075634 A FR 1075634A FR 1075634D A FR1075634D A FR 1075634DA FR 1075634 A FR1075634 A FR 1075634A
- Authority
- FR
- France
- Prior art keywords
- observe
- grinding device
- work performed
- wheel grinding
- notched wheel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D7/00—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor
- B24D7/12—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor with apertures for inspecting the surface to be abraded
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR1075634T | 1953-03-12 |
Publications (1)
Publication Number | Publication Date |
---|---|
FR1075634A true FR1075634A (en) | 1954-10-19 |
Family
ID=9607260
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR1075634D Expired FR1075634A (en) | 1953-03-12 | 1953-03-12 | Notched wheel grinding device to observe the work performed |
Country Status (1)
Country | Link |
---|---|
FR (1) | FR1075634A (en) |
Cited By (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0738561A1 (en) * | 1995-03-28 | 1996-10-23 | Applied Materials, Inc. | Apparatus and method for in-situ endpoint detection and monitoring for chemical mechanical polishing operations |
US5964643A (en) * | 1995-03-28 | 1999-10-12 | Applied Materials, Inc. | Apparatus and method for in-situ monitoring of chemical mechanical polishing operations |
US6524164B1 (en) | 1999-09-14 | 2003-02-25 | Applied Materials, Inc. | Polishing pad with transparent window having reduced window leakage for a chemical mechanical polishing apparatus |
US6537133B1 (en) | 1995-03-28 | 2003-03-25 | Applied Materials, Inc. | Method for in-situ endpoint detection for chemical mechanical polishing operations |
US6676717B1 (en) | 1995-03-28 | 2004-01-13 | Applied Materials Inc | Apparatus and method for in-situ endpoint detection for chemical mechanical polishing operations |
US6716085B2 (en) | 2001-12-28 | 2004-04-06 | Applied Materials Inc. | Polishing pad with transparent window |
US6719818B1 (en) | 1995-03-28 | 2004-04-13 | Applied Materials, Inc. | Apparatus and method for in-situ endpoint detection for chemical mechanical polishing operations |
US6849152B2 (en) | 1992-12-28 | 2005-02-01 | Applied Materials, Inc. | In-situ real-time monitoring technique and apparatus for endpoint detection of thin films during chemical/mechanical polishing planarization |
US6876454B1 (en) | 1995-03-28 | 2005-04-05 | Applied Materials, Inc. | Apparatus and method for in-situ endpoint detection for chemical mechanical polishing operations |
US6910944B2 (en) | 1995-03-28 | 2005-06-28 | Applied Materials, Inc. | Method of forming a transparent window in a polishing pad |
US6991517B2 (en) | 1999-02-04 | 2006-01-31 | Applied Materials Inc. | Linear polishing sheet with window |
US6994607B2 (en) | 2001-12-28 | 2006-02-07 | Applied Materials, Inc. | Polishing pad with window |
US7001242B2 (en) | 2002-02-06 | 2006-02-21 | Applied Materials, Inc. | Method and apparatus of eddy current monitoring for chemical mechanical polishing |
US7037403B1 (en) | 1992-12-28 | 2006-05-02 | Applied Materials Inc. | In-situ real-time monitoring technique and apparatus for detection of thin films during chemical/mechanical polishing planarization |
US7264536B2 (en) | 2003-09-23 | 2007-09-04 | Applied Materials, Inc. | Polishing pad with window |
-
1953
- 1953-03-12 FR FR1075634D patent/FR1075634A/en not_active Expired
Cited By (37)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7569119B2 (en) | 1992-12-28 | 2009-08-04 | Applied Materials, Inc. | In-situ real-time monitoring technique and apparatus for detection of thin films during chemical/mechanical polishing planarization |
US6849152B2 (en) | 1992-12-28 | 2005-02-01 | Applied Materials, Inc. | In-situ real-time monitoring technique and apparatus for endpoint detection of thin films during chemical/mechanical polishing planarization |
US7024063B2 (en) | 1992-12-28 | 2006-04-04 | Applied Materials Inc. | In-situ real-time monitoring technique and apparatus for endpoint detection of thin films during chemical/mechanical polishing planarization |
US7582183B2 (en) | 1992-12-28 | 2009-09-01 | Applied Materials, Inc. | Apparatus for detection of thin films during chemical/mechanical polishing planarization |
US7037403B1 (en) | 1992-12-28 | 2006-05-02 | Applied Materials Inc. | In-situ real-time monitoring technique and apparatus for detection of thin films during chemical/mechanical polishing planarization |
US6860791B2 (en) | 1995-03-28 | 2005-03-01 | Applied Materials, Inc. | Polishing pad for in-situ endpoint detection |
EP0738561A1 (en) * | 1995-03-28 | 1996-10-23 | Applied Materials, Inc. | Apparatus and method for in-situ endpoint detection and monitoring for chemical mechanical polishing operations |
US8556679B2 (en) | 1995-03-28 | 2013-10-15 | Applied Materials, Inc. | Substrate polishing metrology using interference signals |
US6719818B1 (en) | 1995-03-28 | 2004-04-13 | Applied Materials, Inc. | Apparatus and method for in-situ endpoint detection for chemical mechanical polishing operations |
US6537133B1 (en) | 1995-03-28 | 2003-03-25 | Applied Materials, Inc. | Method for in-situ endpoint detection for chemical mechanical polishing operations |
US5964643A (en) * | 1995-03-28 | 1999-10-12 | Applied Materials, Inc. | Apparatus and method for in-situ monitoring of chemical mechanical polishing operations |
US6876454B1 (en) | 1995-03-28 | 2005-04-05 | Applied Materials, Inc. | Apparatus and method for in-situ endpoint detection for chemical mechanical polishing operations |
US6875078B2 (en) | 1995-03-28 | 2005-04-05 | Applied Materials, Inc. | Apparatus and method for in-situ endpoint detection for chemical mechanical polishing operations |
EP1108501A2 (en) * | 1995-03-28 | 2001-06-20 | Applied Materials, Inc. | Apparatus and method for in-situ endpoint detection and monitoring for chemical mechanical polishing operations |
US6910944B2 (en) | 1995-03-28 | 2005-06-28 | Applied Materials, Inc. | Method of forming a transparent window in a polishing pad |
US8092274B2 (en) | 1995-03-28 | 2012-01-10 | Applied Materials, Inc. | Substrate polishing metrology using interference signals |
US7841926B2 (en) | 1995-03-28 | 2010-11-30 | Applied Materials, Inc. | Substrate polishing metrology using interference signals |
US7775852B2 (en) | 1995-03-28 | 2010-08-17 | Applied Materials, Inc. | Apparatus and method for in-situ endpoint detection for chemical mechanical polishing operations |
EP1108501A3 (en) * | 1995-03-28 | 2001-12-05 | Applied Materials, Inc. | Apparatus and method for in-situ endpoint detection and monitoring for chemical mechanical polishing operations |
US8506356B2 (en) | 1995-03-28 | 2013-08-13 | Applied Materials, Inc. | Apparatus and method for in-situ endpoint detection for chemical mechanical polishing operations |
US7118450B2 (en) | 1995-03-28 | 2006-10-10 | Applied Materials, Inc. | Polishing pad with window and method of fabricating a window in a polishing pad |
US7731566B2 (en) | 1995-03-28 | 2010-06-08 | Applied Materials, Inc. | Substrate polishing metrology using interference signals |
US7011565B2 (en) | 1995-03-28 | 2006-03-14 | Applied Materials, Inc. | Forming a transparent window in a polishing pad for a chemical mechanical polishing apparatus |
US6676717B1 (en) | 1995-03-28 | 2004-01-13 | Applied Materials Inc | Apparatus and method for in-situ endpoint detection for chemical mechanical polishing operations |
US7255629B2 (en) | 1995-03-28 | 2007-08-14 | Applied Materials, Inc. | Polishing assembly with a window |
US6991517B2 (en) | 1999-02-04 | 2006-01-31 | Applied Materials Inc. | Linear polishing sheet with window |
US7189141B2 (en) | 1999-09-14 | 2007-03-13 | Applied Materials, Inc. | Polishing pad with transparent window having reduced window leakage for a chemical mechanical polishing apparatus |
US7677959B2 (en) | 1999-09-14 | 2010-03-16 | Applied Materials, Inc. | Multilayer polishing pad and method of making |
US6524164B1 (en) | 1999-09-14 | 2003-02-25 | Applied Materials, Inc. | Polishing pad with transparent window having reduced window leakage for a chemical mechanical polishing apparatus |
US6896585B2 (en) | 1999-09-14 | 2005-05-24 | Applied Materials, Inc. | Polishing pad with transparent window having reduced window leakage for a chemical mechanical polishing apparatus |
US7198544B2 (en) | 2001-12-28 | 2007-04-03 | Applied Materials, Inc. | Polishing pad with window |
US6994607B2 (en) | 2001-12-28 | 2006-02-07 | Applied Materials, Inc. | Polishing pad with window |
US6716085B2 (en) | 2001-12-28 | 2004-04-06 | Applied Materials Inc. | Polishing pad with transparent window |
US7591708B2 (en) | 2002-02-06 | 2009-09-22 | Applied Materials, Inc. | Method and apparatus of eddy current monitoring for chemical mechanical polishing |
US7001242B2 (en) | 2002-02-06 | 2006-02-21 | Applied Materials, Inc. | Method and apparatus of eddy current monitoring for chemical mechanical polishing |
US7264536B2 (en) | 2003-09-23 | 2007-09-04 | Applied Materials, Inc. | Polishing pad with window |
US7547243B2 (en) | 2003-09-23 | 2009-06-16 | Applied Materials, Inc. | Method of making and apparatus having polishing pad with window |
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