FI945124A0 - Spektrometer - Google Patents

Spektrometer

Info

Publication number
FI945124A0
FI945124A0 FI945124A FI945124A FI945124A0 FI 945124 A0 FI945124 A0 FI 945124A0 FI 945124 A FI945124 A FI 945124A FI 945124 A FI945124 A FI 945124A FI 945124 A0 FI945124 A0 FI 945124A0
Authority
FI
Finland
Prior art keywords
spektrometer
Prior art date
Application number
FI945124A
Other languages
English (en)
Inventor
Ari Lehto
Stefan Martin Lindblad
Altti Kaleva Torkkeli
Martti Juhani Blomberg
Original Assignee
Valtion Teknillinen
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Valtion Teknillinen filed Critical Valtion Teknillinen
Priority to FI945124A priority Critical patent/FI945124A0/fi
Publication of FI945124A0 publication Critical patent/FI945124A0/fi
Priority to DE69518386T priority patent/DE69518386T2/de
Priority to EP95117079A priority patent/EP0709659B1/en
Priority to US08/550,804 priority patent/US5818586A/en
Priority to JP28268195A priority patent/JP3778973B2/ja

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0256—Compact construction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0256—Compact construction
    • G01J3/0259—Monolithic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N21/03—Cuvette constructions
    • G01N21/031—Multipass arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3504—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N21/03—Cuvette constructions
    • G01N21/031—Multipass arrangements
    • G01N2021/0314—Double pass, autocollimated path
FI945124A 1994-10-31 1994-10-31 Spektrometer FI945124A0 (fi)

Priority Applications (5)

Application Number Priority Date Filing Date Title
FI945124A FI945124A0 (fi) 1994-10-31 1994-10-31 Spektrometer
DE69518386T DE69518386T2 (de) 1994-10-31 1995-10-30 Spektrometer
EP95117079A EP0709659B1 (en) 1994-10-31 1995-10-30 Spectrometer
US08/550,804 US5818586A (en) 1994-10-31 1995-10-31 Miniaturized fabry-perot spectrometer for optical analysis
JP28268195A JP3778973B2 (ja) 1994-10-31 1995-10-31 分光計

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FI945124A FI945124A0 (fi) 1994-10-31 1994-10-31 Spektrometer

Publications (1)

Publication Number Publication Date
FI945124A0 true FI945124A0 (fi) 1994-10-31

Family

ID=8541702

Family Applications (1)

Application Number Title Priority Date Filing Date
FI945124A FI945124A0 (fi) 1994-10-31 1994-10-31 Spektrometer

Country Status (5)

Country Link
US (1) US5818586A (fi)
EP (1) EP0709659B1 (fi)
JP (1) JP3778973B2 (fi)
DE (1) DE69518386T2 (fi)
FI (1) FI945124A0 (fi)

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WO1998027411A1 (de) * 1996-12-17 1998-06-25 Laboratorium Für Physikalische Elektronik Institut Für Quantenelektronik Verfahren zum aufbringen eines mikrosystems oder wandlers auf ein substrat und nach diesem verfahren herstellbare vorrichtung
DE19717145C2 (de) * 1997-04-23 1999-06-02 Siemens Ag Verfahren zur selektiven Detektion von Gasen und Gassensor zu dessen Durchführung
US6067840A (en) * 1997-08-04 2000-05-30 Texas Instruments Incorporated Method and apparatus for infrared sensing of gas
FR2768813B1 (fr) * 1997-09-19 1999-10-22 Commissariat Energie Atomique Spectrometre photoacoustique miniaturise
EP0951069A1 (en) * 1998-04-17 1999-10-20 Interuniversitair Microelektronica Centrum Vzw Method of fabrication of a microstructure having an inside cavity
EP0951068A1 (en) 1998-04-17 1999-10-20 Interuniversitair Micro-Elektronica Centrum Vzw Method of fabrication of a microstructure having an inside cavity
IT1303228B1 (it) * 1998-08-11 2000-11-02 Istituto Elettrotecnico Naz Ga Dispositivo sensore ottico di gas in materiale poroso.
AU5681299A (en) * 1998-08-20 2000-03-27 Lucid, Inc. Spectrophotometer system
US6197257B1 (en) * 1998-08-20 2001-03-06 Microsense Of St. Louis, Llc Micro sensor device
US6535753B1 (en) 1998-08-20 2003-03-18 Microsense International, Llc Micro-invasive method for painless detection of analytes in extra-cellular space
US6163377A (en) * 1999-07-23 2000-12-19 Cv Us, Inc. Colorimeter
DE19957682A1 (de) * 1999-12-01 2001-06-07 Deutsche Telekom Ag Vorrichtung zur optischen Spektroskopie und Verfahren zu dessen Herstellung
AT408149B (de) * 1999-12-22 2001-09-25 Scan Messtechnik Gmbh Spektrometrische sonde
FI20000339A (fi) 2000-02-16 2001-08-16 Nokia Mobile Phones Ltd Mikromekaaninen säädettävä kondensaattori ja integroitu säädettävä resonaattori
US6590710B2 (en) 2000-02-18 2003-07-08 Yokogawa Electric Corporation Fabry-Perot filter, wavelength-selective infrared detector and infrared gas analyzer using the filter and detector
US6396711B1 (en) * 2000-06-06 2002-05-28 Agere Systems Guardian Corp. Interconnecting micromechanical devices
US7425453B1 (en) * 2001-03-14 2008-09-16 The United States Of America As Represented By The Secretary Of The Navy Integrated circuit porphyrin-based optical Fabry-Perot chemical sensor
EP1436578B1 (en) * 2001-09-21 2008-06-18 Datacolor Holding Ag Colorimeter
US6996312B2 (en) * 2003-04-29 2006-02-07 Rosemount, Inc. Tunable fabry-perot filter
US7061618B2 (en) 2003-10-17 2006-06-13 Axsun Technologies, Inc. Integrated spectroscopy system
JP2005208009A (ja) * 2004-01-26 2005-08-04 Denso Corp 赤外線検知式ガスセンサ
US7305158B2 (en) * 2004-04-15 2007-12-04 Davidson Instruments Inc. Interferometric signal conditioner for measurement of absolute static displacements and dynamic displacements of a Fabry-Perot interferometer
US7492463B2 (en) * 2004-04-15 2009-02-17 Davidson Instruments Inc. Method and apparatus for continuous readout of Fabry-Perot fiber optic sensor
EP1681540A1 (en) 2004-12-21 2006-07-19 Davidson Instruments, Inc. Multi-channel array processor
US7864329B2 (en) 2004-12-21 2011-01-04 Halliburton Energy Services, Inc. Fiber optic sensor system having circulators, Bragg gratings and couplers
EP1869737B1 (en) 2005-03-16 2021-05-12 Davidson Instruments, Inc. High intensity fabry-perot sensor
US7415049B2 (en) 2005-03-28 2008-08-19 Axsun Technologies, Inc. Laser with tilted multi spatial mode resonator tuning element
WO2007033069A2 (en) 2005-09-13 2007-03-22 Davidson Instruments Inc. Tracking algorithm for linear array signal processor for fabry-perot cross-correlation pattern and method of using same
US7355714B2 (en) * 2005-12-29 2008-04-08 Xerox Corporation Reconfigurable MEMS fabry-perot tunable matrix filter systems and methods
US7684051B2 (en) 2006-04-18 2010-03-23 Halliburton Energy Services, Inc. Fiber optic seismic sensor based on MEMS cantilever
WO2007126475A2 (en) 2006-04-26 2007-11-08 Davidson Instruments, Inc. Fiber optic mems seismic sensor with mass supported by hinged beams
JP5123492B2 (ja) * 2006-05-22 2013-01-23 オリンパス株式会社 分光画像観察用光学装置
US8115937B2 (en) 2006-08-16 2012-02-14 Davidson Instruments Methods and apparatus for measuring multiple Fabry-Perot gaps
JP4432947B2 (ja) * 2006-09-12 2010-03-17 株式会社デンソー 赤外線式ガス検出器
US7787128B2 (en) 2007-01-24 2010-08-31 Halliburton Energy Services, Inc. Transducer for measuring environmental parameters
US7817274B2 (en) 2007-10-05 2010-10-19 Jingyun Zhang Compact spectrometer
WO2009070459A1 (en) 2007-11-30 2009-06-04 Jingyun Zhang Miniature spectrometers working with cellular phones and other portable electronic devices
US8670129B2 (en) 2009-09-03 2014-03-11 Axsun Technologies, Inc. Filtered ASE swept source for OCT medical imaging
US8526472B2 (en) 2009-09-03 2013-09-03 Axsun Technologies, Inc. ASE swept source with self-tracking filter for OCT medical imaging
JP6141074B2 (ja) * 2012-04-25 2017-06-07 キヤノン株式会社 走査光学装置および画像形成装置
TW201610415A (zh) * 2014-09-10 2016-03-16 張議聰 光學式氣體感測裝置及其感測系統
CN107250740A (zh) 2014-11-06 2017-10-13 光谱引擎股份公司 光学测量系统
CN111183343A (zh) 2017-10-06 2020-05-19 生物辐射实验室股份有限公司 蛋白质定量设备
EP3919890B1 (de) * 2020-06-05 2023-12-13 Hahn-Schickard-Gesellschaft für angewandte Forschung e.V. Photoakustische spektroskopie an gasgemischen über abstimmbares fabry-pérot-interferometer

Family Cites Families (14)

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JPS5866039A (ja) * 1981-10-15 1983-04-20 Fujitsu Ltd 漏洩ガス検出装置
JPS58143242A (ja) * 1982-02-19 1983-08-25 Fujitsu Ltd 漏洩ガス検出装置
US4859060A (en) * 1985-11-26 1989-08-22 501 Sharp Kabushiki Kaisha Variable interferometric device and a process for the production of the same
US4904036A (en) * 1988-03-03 1990-02-27 American Telephone And Telegraph Company, At&T Bell Laboratories Subassemblies for optoelectronic hybrid integrated circuits
FR2638847B1 (fr) * 1988-11-04 1990-12-14 Commissariat Energie Atomique Dispositif optique integre pour la mesure d'indice de refraction d'un fluide
JPH0766982B2 (ja) * 1989-03-29 1995-07-19 シャープ株式会社 波長選択性受光素子
DE3925692C1 (fi) * 1989-08-03 1990-08-23 Hartmann & Braun Ag, 6000 Frankfurt, De
US5026992A (en) * 1989-09-06 1991-06-25 Gaztech Corporation Spectral ratioing technique for NDIR gas analysis using a differential temperature source
JPH04337403A (ja) * 1991-05-14 1992-11-25 Olympus Optical Co Ltd 光集積型変位センサー
JPH0567769A (ja) * 1991-09-05 1993-03-19 Sony Corp ３次元光電子集積回路装置
JPH0669491A (ja) * 1992-08-18 1994-03-11 Fujitsu Ltd 光送受信装置
FI96450C (fi) * 1993-01-13 1996-06-25 Vaisala Oy Yksikanavainen kaasun pitoisuuden mittausmenetelmä ja -laitteisto
DE4334578C2 (de) * 1993-10-11 1999-10-07 Dirk Winfried Rossberg Spektral abstimmbarer Infrarot-Sensor
US5444249A (en) * 1994-02-14 1995-08-22 Telaire Systems, Inc. NDIR gas sensor

Also Published As

Publication number Publication date
US5818586A (en) 1998-10-06
JP3778973B2 (ja) 2006-05-24
DE69518386T2 (de) 2001-04-05
JPH08278249A (ja) 1996-10-22
EP0709659A3 (en) 1997-01-08
EP0709659A2 (en) 1996-05-01
DE69518386D1 (de) 2000-09-21
EP0709659B1 (en) 2000-08-16

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Legal Events

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