EP2146194A3 - Temperature compensated force sensor unit - Google Patents

Temperature compensated force sensor unit Download PDF

Info

Publication number
EP2146194A3
EP2146194A3 EP09165795A EP09165795A EP2146194A3 EP 2146194 A3 EP2146194 A3 EP 2146194A3 EP 09165795 A EP09165795 A EP 09165795A EP 09165795 A EP09165795 A EP 09165795A EP 2146194 A3 EP2146194 A3 EP 2146194A3
Authority
EP
European Patent Office
Prior art keywords
sensor unit
force sensor
temperature compensated
compensated force
detecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP09165795A
Other languages
German (de)
French (fr)
Other versions
EP2146194B1 (en
EP2146194A2 (en
Inventor
Takeshi Ohsato
Yasuhiko Jinbu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Honda Motor Co Ltd
Original Assignee
Honda Motor Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Honda Motor Co Ltd filed Critical Honda Motor Co Ltd
Publication of EP2146194A2 publication Critical patent/EP2146194A2/en
Publication of EP2146194A3 publication Critical patent/EP2146194A3/en
Application granted granted Critical
Publication of EP2146194B1 publication Critical patent/EP2146194B1/en
Not-in-force legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/26—Auxiliary measures taken, or devices used, in connection with the measurement of force, e.g. for preventing influence of transverse components of force, for preventing overload
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/18—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
  • Measurement Of Force In General (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

A force sensor unit includes: a detection section (1, 1') constituted of a main unit (1) detecting external force and changes in temperature, and a sub unit (1') detecting the changes in temperature, detecting the external force; and an attenuator (4') dampening the external force and imparting the dampened force to the detection section (1, 1').
EP09165795A 2008-07-18 2009-07-17 Temperature compensated force sensor unit Not-in-force EP2146194B1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008187038A JP5604035B2 (en) 2008-07-18 2008-07-18 Force sensor unit

Publications (3)

Publication Number Publication Date
EP2146194A2 EP2146194A2 (en) 2010-01-20
EP2146194A3 true EP2146194A3 (en) 2010-02-17
EP2146194B1 EP2146194B1 (en) 2012-01-18

Family

ID=41138774

Family Applications (1)

Application Number Title Priority Date Filing Date
EP09165795A Not-in-force EP2146194B1 (en) 2008-07-18 2009-07-17 Temperature compensated force sensor unit

Country Status (4)

Country Link
US (1) US8196477B2 (en)
EP (1) EP2146194B1 (en)
JP (1) JP5604035B2 (en)
AT (1) ATE542115T1 (en)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5243704B2 (en) * 2006-08-24 2013-07-24 本田技研工業株式会社 Force sensor
JP5243988B2 (en) * 2009-02-10 2013-07-24 本田技研工業株式会社 Multi-axis force sensor and acceleration sensor
JP5627556B2 (en) * 2011-10-31 2014-11-19 アイシン精機株式会社 Load detection device for vehicle seat
US8757001B2 (en) * 2012-09-27 2014-06-24 Honeywell International Inc. Mechanically coupled force sensor on flexible platform assembly structure
EP3425362B1 (en) 2013-03-12 2020-12-09 Stryker Corporation Sensor assembly and method for measuring forces and torques
JP6188231B2 (en) * 2014-02-26 2017-08-30 アルプス電気株式会社 LOAD DETECTING DEVICE AND ELECTRONIC DEVICE USING THE LOAD DETECTING DEVICE
CN106124115A (en) * 2016-07-27 2016-11-16 同济大学 A kind of electromagnetic compensation formula three-dimensional moment sensor
CN106248272A (en) * 2016-07-27 2016-12-21 同济大学 A kind of take into account the method improving torque sensor range on the premise of sensitivity
EP3580539A4 (en) 2017-02-09 2020-11-25 Nextinput, Inc. Integrated digital force sensors and related methods of manufacture
US11243125B2 (en) 2017-02-09 2022-02-08 Nextinput, Inc. Integrated piezoresistive and piezoelectric fusion force sensor
US10634695B2 (en) * 2017-04-26 2020-04-28 Minebea Mitsumi Inc. Force sensor
WO2019023552A1 (en) 2017-07-27 2019-01-31 Nextinput, Inc. A wafer bonded piezoresistive and piezoelectric force sensor and related methods of manufacture
US11579028B2 (en) 2017-10-17 2023-02-14 Nextinput, Inc. Temperature coefficient of offset compensation for force sensor and strain gauge
WO2019099821A1 (en) * 2017-11-16 2019-05-23 Nextinput, Inc. Force attenuator for force sensor
JP6919964B2 (en) 2018-01-29 2021-08-18 ミネベアミツミ株式会社 Sensor chip and force sensor device
CN113447170B (en) * 2020-03-26 2023-08-15 精量电子公司 Force detection device
JP2022101140A (en) * 2020-12-24 2022-07-06 ミネベアミツミ株式会社 Distortion-generating body and force sensor device
JP2022142116A (en) * 2021-03-16 2022-09-30 ミネベアミツミ株式会社 Strain body and force sensor device
JP2022142118A (en) * 2021-03-16 2022-09-30 ミネベアミツミ株式会社 Sensor chip and force sensor device
JP2022142117A (en) * 2021-03-16 2022-09-30 ミネベアミツミ株式会社 Sensor chip, and force sensor device
CN115112286A (en) * 2021-03-19 2022-09-27 美蓓亚三美株式会社 Strain body and force sensor device

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2139768A (en) * 1983-05-09 1984-11-14 Setra Systems Inc Weighing system
US4709342A (en) * 1983-08-03 1987-11-24 Hitachi, Ltd. Tactile sensing apparatus
DE4111148A1 (en) * 1991-04-06 1992-10-08 Bosch Gmbh Robert SENSOR
EP1739401A1 (en) * 2005-06-28 2007-01-03 HONDA MOTOR CO., Ltd. Force sensor
US20080066562A1 (en) * 2006-08-30 2008-03-20 Honda Motor Co., Ltd. Chip for force sensor and force sensor

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6461628A (en) * 1987-09-02 1989-03-08 Ricoh Kk Force detecting device
JP2001183248A (en) * 1999-12-24 2001-07-06 Furukawa Electric Co Ltd:The Transmission line load sensor devcie and its installing method
JP3970640B2 (en) 2002-03-05 2007-09-05 本田技研工業株式会社 6-axis force sensor
JP2004239621A (en) * 2003-02-03 2004-08-26 Japan Science & Technology Agency Three-dimensional pressure sensor
JP2005169541A (en) * 2003-12-10 2005-06-30 Hitachi Metals Ltd Semiconductor device and its manufacturing method
JP4107235B2 (en) * 2003-12-25 2008-06-25 株式会社デンソー Mechanical sensor structure
DE102004045188A1 (en) * 2004-09-17 2006-03-30 Engelbert Mages Impact force measuring means
JP4680566B2 (en) * 2004-10-26 2011-05-11 本田技研工業株式会社 Multi-axis force sensor chip and multi-axis force sensor using the same
JP2007113957A (en) * 2005-10-18 2007-05-10 Hitachi Ltd Friction force sensor and tire with friction force sensor

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2139768A (en) * 1983-05-09 1984-11-14 Setra Systems Inc Weighing system
US4709342A (en) * 1983-08-03 1987-11-24 Hitachi, Ltd. Tactile sensing apparatus
DE4111148A1 (en) * 1991-04-06 1992-10-08 Bosch Gmbh Robert SENSOR
EP1739401A1 (en) * 2005-06-28 2007-01-03 HONDA MOTOR CO., Ltd. Force sensor
US20080066562A1 (en) * 2006-08-30 2008-03-20 Honda Motor Co., Ltd. Chip for force sensor and force sensor

Also Published As

Publication number Publication date
EP2146194B1 (en) 2012-01-18
US8196477B2 (en) 2012-06-12
ATE542115T1 (en) 2012-02-15
JP2010025735A (en) 2010-02-04
EP2146194A2 (en) 2010-01-20
US20100011885A1 (en) 2010-01-21
JP5604035B2 (en) 2014-10-08

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