EP2063224A4 - Angular velocity sensor - Google Patents

Angular velocity sensor

Info

Publication number
EP2063224A4
EP2063224A4 EP07792064A EP07792064A EP2063224A4 EP 2063224 A4 EP2063224 A4 EP 2063224A4 EP 07792064 A EP07792064 A EP 07792064A EP 07792064 A EP07792064 A EP 07792064A EP 2063224 A4 EP2063224 A4 EP 2063224A4
Authority
EP
European Patent Office
Prior art keywords
angular velocity
velocity sensor
sensor
angular
velocity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP07792064A
Other languages
German (de)
French (fr)
Other versions
EP2063224A1 (en
Inventor
Jirou Terada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Original Assignee
Panasonic Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Panasonic Corp filed Critical Panasonic Corp
Publication of EP2063224A1 publication Critical patent/EP2063224A1/en
Publication of EP2063224A4 publication Critical patent/EP2063224A4/en
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5726—Signal processing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/574—Structural details or topology the devices having two sensing masses in anti-phase motion
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
EP07792064A 2006-08-21 2007-08-07 Angular velocity sensor Withdrawn EP2063224A4 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2006223804 2006-08-21
JP2006223803 2006-08-21
PCT/JP2007/065395 WO2008023566A1 (en) 2006-08-21 2007-08-07 Angular velocity sensor

Publications (2)

Publication Number Publication Date
EP2063224A1 EP2063224A1 (en) 2009-05-27
EP2063224A4 true EP2063224A4 (en) 2012-05-09

Family

ID=39106653

Family Applications (1)

Application Number Title Priority Date Filing Date
EP07792064A Withdrawn EP2063224A4 (en) 2006-08-21 2007-08-07 Angular velocity sensor

Country Status (4)

Country Link
US (1) US8117913B2 (en)
EP (1) EP2063224A4 (en)
JP (1) JP5206409B2 (en)
WO (1) WO2008023566A1 (en)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20090064783A1 (en) 2006-01-24 2009-03-12 Matsushita Electric Industrial Co., Ltd. Inertial force sensor
EP2056069A1 (en) * 2006-09-21 2009-05-06 Panasonic Corporation Angular velocity sensor
JP2008076265A (en) * 2006-09-22 2008-04-03 Matsushita Electric Ind Co Ltd Inertial force sensor
US8201449B2 (en) * 2006-11-14 2012-06-19 Panasonic Corporation Sensor
EP2113744A4 (en) * 2007-02-20 2013-04-17 Panasonic Corp Inertia force sensor and composite sensor for detecting inertia force
EP2330381A4 (en) * 2008-10-07 2012-07-04 Panasonic Corp Angular velocity sensor element, angular velocity sensor and angular velocity sensor unit both using angular velocity sensor element, and signal detecting method for angular velocity sensor unit
JP5407259B2 (en) * 2008-10-07 2014-02-05 パナソニック株式会社 Angular velocity sensor element
WO2010073576A1 (en) * 2008-12-26 2010-07-01 パナソニック株式会社 Angular velocity sensor
WO2010092806A1 (en) * 2009-02-13 2010-08-19 パナソニック株式会社 Inertial force sensor and detecting element used for same
US9301975B2 (en) 2009-05-01 2016-04-05 Biocardia, Inc. Method of preparing autologous cells and method of use for therapy
US9097524B2 (en) 2009-09-11 2015-08-04 Invensense, Inc. MEMS device with improved spring system
US8534127B2 (en) 2009-09-11 2013-09-17 Invensense, Inc. Extension-mode angular velocity sensor
JP5131491B2 (en) * 2010-02-24 2013-01-30 セイコーエプソン株式会社 Gyro module
JP2011220997A (en) * 2010-03-26 2011-11-04 Seiko Epson Corp Physical quantity detection element, physical quantity detection device, and electronic device
WO2013061558A1 (en) * 2011-10-24 2013-05-02 パナソニック株式会社 Angular velocity sensor and detection element used in same
JP5831647B2 (en) * 2012-11-19 2015-12-09 株式会社村田製作所 Angular velocity detector
CN104448752B (en) * 2013-09-17 2017-01-18 比亚迪股份有限公司 Polymer product, printing ink composition and surface selective metallization method
US10466068B2 (en) * 2017-01-23 2019-11-05 Georgia Tech Research Corporation Systems and methods for operation of vibratory gyroscopes
EP4215872A1 (en) * 2022-01-25 2023-07-26 Commissariat À L'Énergie Atomique Et Aux Énergies Alternatives 3-axis gyroscope with improved performance

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005233706A (en) * 2004-02-18 2005-09-02 Matsushita Electric Ind Co Ltd Angular velocity sensor
JP2006105756A (en) * 2004-10-05 2006-04-20 Matsushita Electric Ind Co Ltd Angular velocity sensor
EP2000769A2 (en) * 2006-03-27 2008-12-10 Panasonic Corporation Inertia force sensor

Family Cites Families (36)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05240874A (en) * 1991-12-06 1993-09-21 Canon Inc Angular-velocity sensor
JP3323361B2 (en) * 1995-05-29 2002-09-09 アルプス電気株式会社 Vibratory gyroscope
SE9500729L (en) * 1995-02-27 1996-08-28 Gert Andersson Apparatus for measuring angular velocity in single crystalline material and method for making such
JP3492010B2 (en) * 1995-03-29 2004-02-03 キヤノン株式会社 Vibrating gyroscope and vibration isolator
JPH08152328A (en) * 1995-07-04 1996-06-11 Nippondenso Co Ltd Angular speed sensor and its using method
JPH09105634A (en) * 1995-10-12 1997-04-22 Nippon Soken Inc Angular velocity sensor
JPH09178492A (en) * 1995-12-27 1997-07-11 Kyocera Corp Piezoelectric vibrator
JPH1047966A (en) * 1996-07-31 1998-02-20 Aisin Seiki Co Ltd Angular velocity sensor
JP3336605B2 (en) * 1997-02-12 2002-10-21 トヨタ自動車株式会社 Angular velocity sensor
JP3355998B2 (en) * 1997-05-16 2002-12-09 株式会社村田製作所 Vibrating gyro
JP4004129B2 (en) * 1998-02-09 2007-11-07 マイクロストーン株式会社 Motion sensor
JP4112684B2 (en) * 1998-06-01 2008-07-02 シチズンホールディングス株式会社 Vibrating gyro
JP2000074673A (en) * 1998-08-27 2000-03-14 Miyota Kk Compound movement sensor
US6418789B1 (en) * 1999-02-26 2002-07-16 Murata Manufacturing Co., Ltd. Vibrating gyroscope
JP3998049B2 (en) * 1999-09-13 2007-10-24 芳明 加藤 Motion sensor vibrator and vibratory gyroscope
JP2001208546A (en) 1999-11-16 2001-08-03 Matsushita Electric Ind Co Ltd Angular velocity sensor
JP2001194155A (en) * 2000-01-13 2001-07-19 Yoshiro Tomikawa Motion sensor
JP4552253B2 (en) * 2000-02-28 2010-09-29 パナソニック株式会社 Angular velocity sensor
JP2002139322A (en) * 2000-10-31 2002-05-17 Murata Mfg Co Ltd Self-diagnosable method of vibrating gyro and vibrating gyro and electronic device using the same
US6675630B2 (en) * 2001-08-17 2004-01-13 The Boeing Company Microgyroscope with electronic alignment and tuning
JP4147784B2 (en) * 2001-10-09 2008-09-10 富士通株式会社 Angular velocity sensor
JP2004077351A (en) * 2002-08-21 2004-03-11 Matsushita Electric Ind Co Ltd Angular velocity sensor
JP4163031B2 (en) * 2003-03-28 2008-10-08 日本電波工業株式会社 Tuning fork type angular velocity sensor
US6845665B2 (en) * 2003-04-28 2005-01-25 Analog Devices, Inc. Micro-machined multi-sensor providing 2-axes of acceleration sensing and 1-axis of angular rate sensing
US6880400B1 (en) * 2003-05-23 2005-04-19 The United States Of America As Represented By The Secretary Of The Navy Phase synchronized array of non-identical oscillators using coupling network
JP2005283402A (en) * 2004-03-30 2005-10-13 Fujitsu Media Device Kk Inertia sensor
JP2005283481A (en) * 2004-03-30 2005-10-13 Denso Corp Sensor system
US7640803B1 (en) * 2004-05-26 2010-01-05 Siimpel Corporation Micro-electromechanical system inertial sensor
JP2006030125A (en) * 2004-07-21 2006-02-02 Fujitsu Media Device Kk Angular velocity sensor
JP4543869B2 (en) * 2004-10-15 2010-09-15 株式会社デンソー Sensor circuit in vibration type angular velocity sensor
JP4687085B2 (en) * 2004-12-03 2011-05-25 パナソニック株式会社 Compound sensor
JP2006266969A (en) * 2005-03-25 2006-10-05 Nec Tokin Corp Tuning fork type piezo-electric oscillating gyroscope
US7886598B2 (en) * 2005-08-08 2011-02-15 Northrop Grumman Guidance And Electronics Company, Inc. Vibratory gyro bias error cancellation using mode reversal
JP4702942B2 (en) * 2005-10-14 2011-06-15 Ｎｅｃトーキン株式会社 Vibrating gyro element and vibrating gyro
JP2007327758A (en) * 2006-06-06 2007-12-20 Nec Tokin Corp Piezoelectric single-crystal oscillator and piezoelectric vibration gyroscope
JP4893335B2 (en) * 2007-01-26 2012-03-07 セイコーエプソン株式会社 Gyro module

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005233706A (en) * 2004-02-18 2005-09-02 Matsushita Electric Ind Co Ltd Angular velocity sensor
JP2006105756A (en) * 2004-10-05 2006-04-20 Matsushita Electric Ind Co Ltd Angular velocity sensor
EP2000769A2 (en) * 2006-03-27 2008-12-10 Panasonic Corporation Inertia force sensor

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO2008023566A1 *

Also Published As

Publication number Publication date
US8117913B2 (en) 2012-02-21
JP5206409B2 (en) 2013-06-12
US20100218604A1 (en) 2010-09-02
WO2008023566A1 (en) 2008-02-28
EP2063224A1 (en) 2009-05-27
JPWO2008023566A1 (en) 2010-01-07

Similar Documents

Publication Publication Date Title
EP2063223A4 (en) Angular velocity sensor
EP2063224A4 (en) Angular velocity sensor
GB2452864B (en) Sensor system
EP2053413A4 (en) Sensor
GB2438953B (en) Sensor arrangement
EP2041519A4 (en) Steering angle sensor
EP1705457A4 (en) Angular velocity sensor
EP1775551A4 (en) Angular speed sensor
GB2435518B (en) Position sensor
EP1947420A4 (en) Inertial force sensor
EP2076062A4 (en) Ultrasonic sensor
EP2068119A4 (en) Physical quantity sensor
GB0623043D0 (en) Sensor devices
GB0616838D0 (en) Velocity detector
EP2037285A4 (en) Combined sensor
EP1734337A4 (en) Angular velocity sensor
GB2444373B (en) Inertial sensor
EP1986465A4 (en) Ultrasonic sensor
EP2351982A4 (en) Angular velocity sensor
EP2071294A4 (en) Displacement sensor
EP2026077A4 (en) Acceleration sensor
EP2093590A4 (en) Distance image sensor
EP1990253A4 (en) Torque sensor
HK1128802A1 (en) Separated sensor
EP1978330A4 (en) Inertial force sensor

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 20090210

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC MT NL PL PT RO SE SI SK TR

AX Request for extension of the european patent

Extension state: AL BA HR MK RS

DAX Request for extension of the european patent (deleted)
RBV Designated contracting states (corrected)

Designated state(s): DE FR GB

A4 Supplementary search report drawn up and despatched

Effective date: 20120410

17Q First examination report despatched

Effective date: 20130926

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN

18D Application deemed to be withdrawn

Effective date: 20160402