EP1852002A1 - Method for producing electrically conductive patterns on a non-developable surface of an insulating substrate, and resulting device - Google Patents

Method for producing electrically conductive patterns on a non-developable surface of an insulating substrate, and resulting device

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Publication number
EP1852002A1
EP1852002A1 EP06709341A EP06709341A EP1852002A1 EP 1852002 A1 EP1852002 A1 EP 1852002A1 EP 06709341 A EP06709341 A EP 06709341A EP 06709341 A EP06709341 A EP 06709341A EP 1852002 A1 EP1852002 A1 EP 1852002A1
Authority
EP
European Patent Office
Prior art keywords
layer
electrically conductive
portions
protective material
conductive patterns
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP06709341A
Other languages
German (de)
French (fr)
Inventor
Christian Desagulier
Alain Lacombe
Bruno Esmiller
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ArianeGroup SAS
Original Assignee
Astrium SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Astrium SAS filed Critical Astrium SAS
Publication of EP1852002A1 publication Critical patent/EP1852002A1/en
Withdrawn legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/02Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
    • H05K3/06Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process
    • H05K3/061Etching masks
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01QANTENNAS, i.e. RADIO AERIALS
    • H01Q15/00Devices for reflection, refraction, diffraction or polarisation of waves radiated from an antenna, e.g. quasi-optical devices
    • H01Q15/14Reflecting surfaces; Equivalent structures
    • H01Q15/141Apparatus or processes specially adapted for manufacturing reflecting surfaces
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/0284Details of three-dimensional rigid printed circuit boards
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/09Shape and layout
    • H05K2201/09009Substrate related
    • H05K2201/09018Rigid curved substrate
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/10Using electric, magnetic and electromagnetic fields; Using laser light
    • H05K2203/107Using laser light
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/0011Working of insulating substrates or insulating layers
    • H05K3/0017Etching of the substrate by chemical or physical means
    • H05K3/0026Etching of the substrate by chemical or physical means by laser ablation
    • H05K3/0032Etching of the substrate by chemical or physical means by laser ablation of organic insulating material
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/0073Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces
    • H05K3/0082Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces characterised by the exposure method of radiation-sensitive masks
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/49002Electrical device making
    • Y10T29/49117Conductor or circuit manufacturing
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/49002Electrical device making
    • Y10T29/49117Conductor or circuit manufacturing
    • Y10T29/49124On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/49155Manufacturing circuit on or in base
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/49002Electrical device making
    • Y10T29/49117Conductor or circuit manufacturing
    • Y10T29/49124On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/49155Manufacturing circuit on or in base
    • Y10T29/49156Manufacturing circuit on or in base with selective destruction of conductive paths
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/49002Electrical device making
    • Y10T29/49117Conductor or circuit manufacturing
    • Y10T29/49124On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/49155Manufacturing circuit on or in base
    • Y10T29/49165Manufacturing circuit on or in base by forming conductive walled aperture in base

Definitions

  • the present invention relates to a method for producing electrically conductive patterns on a non-developable three-dimensional surface of an insulating substrate. Although not exclusively, it is particularly suitable for producing, on a surface at least approximately in the form of a paraboloid, a hyperboloid, etc., a polarization grid (frequency reuse antenna) or a series of resonant patterns (dichroic antennas).
  • the invention also relates to devices comprising such a substrate, said non-developable surface carrying said electrically conductive patterns, made according to the method.
  • the outline of said patterns is mechanically traced thereon by means of a tool that digs grooves whose depth is at least equal to the thickness of said layer of protection, and then said layers are subjected to the action of a chemical agent capable of selectively attacking said electrically conductive material without attacking said material. protection, this etching operation being continued for a time sufficient for said electrically conductive material to be removed over its entire thickness above said grooves, after which the parts of said layer are peeled off from the substrate; electrically conductive material exterior to said patterns.
  • electrically conductive patterns can be made directly on non-developable three-dimensional surfaces without resorting to a mask or an auxiliary substrate with which, moreover, it would be technically difficult to obtain optical characteristics. They are as precise in their shape as in their position on the said surfaces.
  • a tool for the tracing of the contours of said electrically conductive patterns, a tool provided with at least one etching tip or at least one cutting blade is used, said tool being mounted in a machine (eg controlled digital and five axes of rotation) responsible for moving relative to the non-developable surface.
  • a machine eg controlled digital and five axes of rotation
  • the implementation of this known method allows the realization of high quality grid reflectors, able to work in the Ku band (from 1 1 to 18 GHz) and formed of at least one network of parallel conductive wires, these conductors son having a width of 0.25 mm, a thickness of 35 micrometers and being distributed in a pitch of 1 mm on an area at least approximately in the form of paraboloid, whose opening diameter can reach 2300 mm.
  • the edge effects become significant, the tips or blades pushing, in the manner of a plow, the conductive material of reduced thickness and reducing the adhesion of the conductive wires to the substrate; and - the zones between wires are fragile and are therefore liable to break during peeling.
  • the present invention aims to overcome these disadvantages.
  • the method for producing electrically conductive patterns on a non-developable three-dimensional surface of an electrically insulating substrate the method according to which one begins by uniformly covering said non-developable surface with a layer of an electrically conductive material, which is in turn covered with a layer of a protective material, after which portions of said layer of protective material which do not cover areas of said layer of electrically conductors trice to form said patterns, and then removing portions of said layer of electrically conductive material discovered by the removal of said portions of said layer of protective material, is remarkable in that the removal of portions of the layer of protective material , which do not cover said zones of said layer of electrically conductive material to form said patterns, is made by laser ablation using a laser head that is moved, with respect to said non-developable surface covered with said layer of electrically conductive material and said layer of protective material, to cover all portions of said layer of protective material which do not cover said areas of said layer of electrically conductive material to form said electrically conductive patterns.
  • the portions of the layer of electrically conductive material are removed by the action of a chemical agent capable of attacking the material electrically conductive without attacking said protective material.
  • said chemical agent may be iron perchloride, when said layer is copper.
  • said protective material insensitive to the action of said chemical agent, may be an organic varnish.
  • a device such as a reflector for example, comprising an electrically insulating substrate carrying electrically conductive patterns on one of its non-developable surfaces with three dimensions and remarkable in that said electrically conductive patterns are realized by the implementation of the method according to the invention specified above.
  • FIG. 1 schematically represents an antenna device, whose reflector is provided with electrically conductive patterns produced by the implementation of the method according to the present invention.
  • FIGS. 3A to 3D schematically illustrate, in section, steps of the method according to the present invention, applied to the production of the electrically conductive patterns of FIGS. 1 and 2.
  • FIG. 1 diagrammatically shows a device antenna 1 provided with an antenna reflector 2 (shown in diametral section), supported by a bearing surface 3, via a support 4.
  • the reflector 2 comprises an electrically insulating substrate 5 (for example made of composite material), the surface 6 opposite the support 4 is concave and has a non-developable shape, for example the at least approximate shape of a paraboloid, a hyperbolo ⁇ de, etc ...
  • the reflector 2 carries electrically conductive patterns, formed in the example shown by conductors 7 parallel to each other and equidistant.
  • Each conductor 7 has a rectangular section of width et and thickness e and the distribution pitch of the parallel conductors 7 is designated p.
  • a separation zone 8 band-shaped having a width equal to p (see also Figure 2).
  • the reflector 2 begins by uniformly covering the non-developable surface 6 of the substrate 5 by a layer 9 of an electrically conductive material (see Figure 3A) of thickness equal to e .
  • a layer 9 may, for example, be deposited under vacuum on the surface 6 or be attached thereto by gluing. It may be metallic and for example constituted by copper or aluminum.
  • said layer of electrically conductive material 9 is covered by a layer 10 of a protective material, for example an organic varnish.
  • the laser protective ablation portions of the protective material layer 10 are then laser-ablated by means of a moving laser head. Placing the separation zones 8, that is to say which do not cover the zones of the layer 9 to form the conductors 7. After this laser ablation, it does not remain on the layer of electrically conductive material anymore. 9 lines 10.7 protective material, above the future conductors 7 and having the width I.
  • the protective lines 10.7 and the conductive layer 9 are subjected to the action of a chemical agent, for example applied by spraying or dipping.
  • This chemical agent attacks, between the lines 10.7, the layer of electrically conductive material 9, without attacking said lines 10.7 of protective material.
  • the chemical agent then selectively eliminating the conductive layer 9, is for example iron perchloride, when the layer 9 is copper.
  • the action of the chemical agent on the conductive layer 9 is continued until it is removed over its entire thickness in line with the separation zones 8 ( Figure 3C). This results in driver training 7.
  • the removal of the lines 10.7 covering the conductors 7 is also carried out.
  • the protective material of the layer 10 for example an organic varnish
  • the protective material of the layer 10 is chosen to possess characteristics that make it compatible with the environment. (eg spatial) in which the reflector will be called to work.
  • the lines 10.7 can then remain on the conductors 7 and serve as protection therefor, for example against corrosion.
  • the laser ablation speed can be very fast (for example 0.3 m / s) and that one can use multiple ablation laser sources simultaneously;
  • the ablation can resume after partial reconstitution of the layer 10 of protective material, without alteration of the substrate 5 and the conductive layer 9 ;

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)

Abstract

The invention concerns a method for producing electrically conductive patterns on a non-developable surface of an insulating substrate, and the resulting device. The invention is characterized in that it consists in: coating the non-developable surface (6) uniformly with a layer of electrically conductive material (9), which is in turn coated with a layer of protective material (10), and then, using a mobile laser head, eliminating by laser ablation the portions of said protective substance layer (10) which do not cover said electrically conductive patterns, then eliminating the portions of said electrically conductive material (9) exposed by the elimination of said portions of said protective material layer (10)

Description

Procédé pour la réalisation de motifs électriquement conducteurs sur une surface non développable d'un substrat isolant, et dispositif obtenu.Process for producing electrically conductive patterns on a non-developable surface of an insulating substrate, and device obtained
La présente invention concerne un procédé pour la réalisation de motifs électriquement conducteurs sur une surface non développable à trois dimensions d'un substrat isolant. Quoique non exclusivement, elle est particulièrement appropriée à la réalisation, sur une surface au moins approximativement en forme de paraboloïde, d'hyperboloïde, etc ... d'une grille de polarisation (antenne à réutilisation de fréquence) ou d'une série de motifs résonnants (antennes dichroïques). L'invention concerne aussi les dispositifs comportant un tel substrat dont ladite surface non développable porte lesdits motifs électriquement conducteurs, réalisés conformé- ment au procédé.The present invention relates to a method for producing electrically conductive patterns on a non-developable three-dimensional surface of an insulating substrate. Although not exclusively, it is particularly suitable for producing, on a surface at least approximately in the form of a paraboloid, a hyperboloid, etc., a polarization grid (frequency reuse antenna) or a series of resonant patterns (dichroic antennas). The invention also relates to devices comprising such a substrate, said non-developable surface carrying said electrically conductive patterns, made according to the method.
On sait que, pour réaliser un circuit imprimé sur une face plane d'un substrat électriquement isolant, on commence par recouvrir uniformément ladite surface d'une couche d'un métal, tel que le cuivre ou l'aluminium, après quoi cette couche métallique est elle-même uniformé- ment recouverte d'un produit photosensible. Ensuite, le produit photosensible est exposé à un faisceau lumineux, à travers un masque correspondant au circuit imprimé à obtenir. Une telle exposition rend chimiquement résistantes les parties du produit photosensible se trouvant à l'aplomb des parties de la couche métallique devant former le circuit im- primé, de sorte qu'une attaque chimique appropriée permet ensuite d'éliminer sélectivement les portions du produit photosensible qui n'ont pas été rendues chimiquement résistantes par l'exposition, ainsi que les portions de couche métallique se trouvant sous celles-ci.It is known that, in order to produce a printed circuit on a plane face of an electrically insulating substrate, it is first of all uniformly covering said surface with a layer of a metal, such as copper or aluminum, after which this metal layer is itself uniformly covered with a photosensitive product. Then, the photosensitive product is exposed to a light beam, through a mask corresponding to the printed circuit to obtain. Such exposure renders chemically resistant the portions of the photosensitive material directly above the portions of the metal layer to form the printed circuit, so that appropriate etching can then selectively remove the portions of the photosensitive product. which have not been made chemically resistant by exposure, as well as the portions of metal layer under them.
A la suite de ladite attaque chimique, on obtient donc le circuit im- primé désiré. Dans le cas où l'on désirerait appliquer cette méthode à la réalisation de circuits imprimés sur une surface non plus plane, mais non déve- loppable à trois dimensions, on se heurterait à des difficultés au moment de l'application du masque sur ladite surface. En effet, pour des raisons évidentes de commodité de réalisation et de précision, un tel masque est plan. Aussi, il faudrait soit découper ledit masque en pièces d'aires réduites et appliquer en les juxtaposant lesdites pièces sur ladite surface non développable, soit réaliser ledit masque en un matériau souple pouvant être appliqué par déformation sur celle-ci. Dans les deux cas, le circuit im- primé obtenu serait peu précis, aussi bien en ce qui concerne la forme que la position des motifs qui le composent.As a result of said chemical attack, the desired printed circuit is thus obtained. In the case where it is desired to apply this method to the production of printed circuits on a surface which is no longer flat, but can not be developed in three dimensions, difficulties would be encountered when the mask is applied to said surface. . Indeed, for obvious reasons of convenience and accuracy, such a mask is flat. Also, it would be necessary to cut said mask into pieces of reduced areas and apply by juxtaposing said parts on said non-developable surface, or to make said mask of a flexible material that can be applied by deformation thereon. In both cases, the printed circuit obtained would be imprecise, both as regards the shape and the position of the patterns which compose it.
On remarquera de plus que si, en variante, on réalise ledit circuit imprimé sur un substrat auxiliaire plan destiné à être appliqué ultérieurement sur la surface non développable, on se heurte aux mêmes difficultés que celles mentionnées ci-dessus à propos des masques.It will be noted moreover that if, in a variant, said printed circuit is made on a plane auxiliary substrate intended to be subsequently applied to the non-developable surface, the same difficulties as those mentioned above with regard to the masks are encountered.
Pour remédier à ces inconvénients et permettre de réaliser des circuits imprimés précis, directement sur des surfaces à trois dimensions non développables, on peut mettre en œuvre le procédé décrit dans les documents US-4 738 746 ; EP-O 241 331 et FR-2 596 230. Dans ce pro- cédé, tout comme dans celui rappelé ci-dessus, on commence par recouvrir uniformément ladite surface, alors non développable à trois dimensions, d'une couche d'une matière électriquement conductrice, que l'on recouvre à son tour d'une couche d'une matière de protection. Après formation desdites couches de matière conductrice et de matière de protec- tion, on trace mécaniquement sur celles-ci le contour desdits motifs au moyen d'un outil creusant des sillons dont la profondeur est au moins égale à l'épaisseur de ladite couche de protection, puis on soumet lesdites couches à l'action d'un agent chimique susceptible d'attaquer sélectivement ladite matière électriquement conductrice sans attaquer ladite ma- tière de protection, cette opération d'attaque chimique étant poursuivie pendant un temps suffisant pour que ladite matière électriquement conductrice soit éliminée sur toute son épaisseur à l'aplomb desdits sillons, après quoi on sépare du substrat, par pelage, les parties de ladite couche de matière électriquement conductrice extérieures auxdits motifs.In order to overcome these drawbacks and to make it possible to produce precise printed circuits directly on non-developable three-dimensional surfaces, the method described in US Pat. No. 4,738,746 can be implemented; EP-0 241 331 and FR-2 596 230. In this process, as in the one mentioned above, one begins by uniformly covering said surface, then undevelopable three-dimensional, a layer of a material. electrically conductive, which is in turn covered with a layer of a protective material. After forming said layers of conductive material and protective material, the outline of said patterns is mechanically traced thereon by means of a tool that digs grooves whose depth is at least equal to the thickness of said layer of protection, and then said layers are subjected to the action of a chemical agent capable of selectively attacking said electrically conductive material without attacking said material. protection, this etching operation being continued for a time sufficient for said electrically conductive material to be removed over its entire thickness above said grooves, after which the parts of said layer are peeled off from the substrate; electrically conductive material exterior to said patterns.
Ainsi, grâce à ce dernier procédé, on peut réaliser directement des motifs électriquement conducteurs sur des surfaces non développables à trois dimensions sans avoir recours à un masque ou un substrat auxiliaire avec lesquels, d'ailleurs, il serait techniquement difficile d'obtenir des mo- tifs aussi précis tant au niveau de leur forme que de leur position sur lesdi- tes surfaces.Thus, by virtue of this latter method, electrically conductive patterns can be made directly on non-developable three-dimensional surfaces without resorting to a mask or an auxiliary substrate with which, moreover, it would be technically difficult to obtain optical characteristics. They are as precise in their shape as in their position on the said surfaces.
Dans un tel procédé antérieur, pour le traçage des contours desdits motifs électriquement conducteurs, on utilise un outil pourvu d'au moins une pointe de gravure ou d'au moins une lame coupante, ledit outil étant monté dans une machine (par exemple à commande numérique et à cinq axes de rotation) chargée de le déplacer relativement à la surface non développable.In such an earlier method, for the tracing of the contours of said electrically conductive patterns, a tool provided with at least one etching tip or at least one cutting blade is used, said tool being mounted in a machine (eg controlled digital and five axes of rotation) responsible for moving relative to the non-developable surface.
On peut ainsi réaliser des dispositifs à surface non développable portant des motifs électriquement conducteurs, de façon aisée et précise. Par exemple, la mise en œuvre de ce procédé connu permet la réalisation de réflecteurs à grille de grande qualité, aptes à travailler dans la bande Ku (de 1 1 à 18 GHz) et formés d'au moins un réseau de fils conducteurs parallèles, ces fils conducteurs ayant une largeur de 0,25 mm, une épaisseur de 35 micromètres et étant répartis au pas de 1 mm sur une surface au moins approximativement en forme de paraboloïde, dont le diamètre d'ouverture peut atteindre 2300 mm.It is thus possible to produce non-developable surface devices carrying electrically conductive patterns in an easy and precise manner. For example, the implementation of this known method allows the realization of high quality grid reflectors, able to work in the Ku band (from 1 1 to 18 GHz) and formed of at least one network of parallel conductive wires, these conductors son having a width of 0.25 mm, a thickness of 35 micrometers and being distributed in a pitch of 1 mm on an area at least approximately in the form of paraboloid, whose opening diameter can reach 2300 mm.
Cependant, ce procédé antérieur présente des limites d'ordre technique et économique. Par exemple, si à la place d'un réflecteur à grille destiné à travailler dans Ia bande Ku, on désire réaliser un tel réflecteur destiné à la bande Ka (de 20 à 30 GHz), la largeur, l'épaisseur et le pas de répartition des fils conducteurs deviennent plus faibles (par exemple respectivement 0, 1 25 mm, 18 micromètres et 0,5 mm) et il en résulte des difficultés dues à la plus faible largeur et à la plus faible épaisseur des fils conducteurs et des zones entre fils :However, this prior process has technical and economic limits. For example, if instead of a grid reflector for working in the Ku-band, it is desired to make such a reflector for the Ka band (from 20 to 30 GHz), the width, the thickness and the distribution pitch of the conducting wires become smaller (for example 0.15 mm, 18 micrometers and 0.5 mm respectively) and This results in difficulties due to the smallest width and the smallest thickness of the conductive wires and the zones between wires:
- les paramètres de traçage des motifs conducteurs (pression et disposition des pointes ou des lames de gravure) et les paramètres d'attaque chimique (durée) deviennent plus sensibles, de sorte qu'il en résulte des défauts géométriques et une fragilisation des fils conducteurs lors du pelage ;- The trace parameters of the conductive patterns (pressure and arrangement of the tips or etching blades) and the etching parameters (duration) become more sensitive, so that geometric defects and embrittlement of the conductive threads result. when peeling;
- lors du traçage des fils conducteurs, les effets de bords deviennent significatifs, les pointes ou les lames repoussant, à la manière d'un soc, la matière conductrice d'épaisseur réduite et diminuant l'adhérence des fils conducteurs sur le substrat ; et - les zones entre fils sont fragiles et sont donc susceptibles de se rompre lors du pelage.when tracing the conducting wires, the edge effects become significant, the tips or blades pushing, in the manner of a plow, the conductive material of reduced thickness and reducing the adhesion of the conductive wires to the substrate; and - the zones between wires are fragile and are therefore liable to break during peeling.
Il en résulte que l'on doit veiller à ce que l'outil exerce un traçage toujours parfait et que le déroulement du procédé doit être ralenti, ce qui accroît les coûts de fabrication d'un tel réflecteur. La présente invention a pour objet de remédier à ces inconvénients.As a result, care must be taken to ensure that the tool always performs perfect tracing and that the process flow must be slowed down, which increases the manufacturing costs of such a reflector. The present invention aims to overcome these disadvantages.
A cette fin, selon l'invention, le procédé permettant de réaliser des motifs électriquement conducteurs sur une surface non développable à trois dimensions d'un substrat électriquement isolant, procédé selon lequel on commence par recouvrir uniformément ladite surface non développable d'une couche d'une matière électriquement conductrice, que l'on recouvre à son tour d'une couche d'une matière de protection, après quoi on élimine les portions de ladite couche de matière de protection qui ne recouvrent pas des zones de ladite couche de matière électriquement conduc- trice devant former lesdits motifs, puis on élimine les portions de ladite couche de matière électriquement conductrice découvertes par l'élimination desdites portions de ladite couche de matière de protection, est remarquable en ce que l'élimination des portions de la couche de matière de protection, qui ne recouvrent pas lesdites zones de ladite couche de matière électriquement conductrice devant former lesdits motifs, est réalisée par ablation laser à l'aide d'une tête laser que l'on déplace, par rapport à ladite surface non développable recouverte de ladite couche de matière électriquement conductrice et de ladite couche de matière de protection, pour couvrir toutes les portions de ladite couche de matière de protection qui ne recouvrent pas lesdites zones de ladite couche de matière électriquement conductrice devant former lesdits motifs électriquement conducteurs.To this end, according to the invention, the method for producing electrically conductive patterns on a non-developable three-dimensional surface of an electrically insulating substrate, the method according to which one begins by uniformly covering said non-developable surface with a layer of an electrically conductive material, which is in turn covered with a layer of a protective material, after which portions of said layer of protective material which do not cover areas of said layer of electrically conductors trice to form said patterns, and then removing portions of said layer of electrically conductive material discovered by the removal of said portions of said layer of protective material, is remarkable in that the removal of portions of the layer of protective material , which do not cover said zones of said layer of electrically conductive material to form said patterns, is made by laser ablation using a laser head that is moved, with respect to said non-developable surface covered with said layer of electrically conductive material and said layer of protective material, to cover all portions of said layer of protective material which do not cover said areas of said layer of electrically conductive material to form said electrically conductive patterns.
Ainsi, grâce à la présente invention, on s'affranchit de tout contact mécanique avec la couche de matière de protection et avec la couche de matière électriquement conductrice lors de la réalisation desdits motifs électriquement conducteurs, ce qui permet d'éviter les inconvénients mentionnés ci-dessus concernant le procédé conforme au document US-4 738 746. On remarquera que le document US-5 364 493 décrit déjà un procédé permettant de réaliser des motifs électriquement conducteurs sur un substrat par ablation laser. Toutefois, dans ce document, on prévoit un faisceau laser fixe traversant un masque plan, de sorte que le procédé décrit ne peut être approprié à la réalisation de motifs électriquement conducteurs sur une surface non développable à trois dimensions.Thus, thanks to the present invention, it eliminates any mechanical contact with the layer of protective material and with the layer of electrically conductive material during the production of said electrically conductive patterns, which avoids the disadvantages mentioned herein. above with regard to the process according to US Pat. No. 4,738,746. It will be noted that the document US Pat. No. 5,364,493 already describes a method for producing electrically conductive patterns on a substrate by laser ablation. However, in this document, there is provided a fixed laser beam passing through a plane mask, so that the method described can not be suitable for producing electrically conductive patterns on a non-developable three-dimensional surface.
Pour le déplacement de la tête laser prévue par le procédé conforme à la présente invention, on peut avantageusement utiliser une machine semblable à celle mentionnée ci-dessus, prévue pour la mise en œuvre du procédé antérieur du document US-4 738 746. Dans un mode de réalisation avantageux, les portions de la couche de matière électriquement conductrice, découvertes par l'ablation laser desdites portions de la couche de matière de protection, sont éliminées par l'action d'un agent chimique susceptible d'attaquer la matière électri- quement conductrice sans attaquer ladite matière de protection.For the movement of the laser head provided by the process according to the present invention, it is advantageous to use a machine similar to that mentioned above, provided for the implementation of the previous method of US-4,738,746. In an advantageous embodiment, the portions of the layer of electrically conductive material, discovered by laser ablation of said portions of the layer of protective material, are removed by the action of a chemical agent capable of attacking the material electrically conductive without attacking said protective material.
De préférence, ledit agent chimique peut être du perchlorure de fer, lorsque ladite couche est en cuivre.Preferably, said chemical agent may be iron perchloride, when said layer is copper.
Par ailleurs, ladite matière de protection, insensible à l'action dudit agent chimique, peut être un vernis organique. Après élimination des portions de ladite couche de matière électriquement conductrice découvertes par l'ablation laser desdites portions de ladite couche de matière de protection, on peut soit éliminer, soit laisser subsister les restes de ladite couche de matière de protection recouvrant lesdits motifs électriquement conducteurs. L'invention concerne, de plus, un dispositif, tel qu'un réflecteur par exemple, comportant un substrat électriquement isolant portant des motifs électriquement conducteurs sur une de ses surfaces non dévelop- pable à trois dimensions et remarquable en ce que lesdits motifs électriquement conducteurs sont réalisés par la mise en œuvre du procédé selon l'invention spécifié ci-dessus.Moreover, said protective material, insensitive to the action of said chemical agent, may be an organic varnish. After removal of the portions of said layer of electrically conductive material discovered by laser ablation of said portions of said layer of protective material, it is possible either to eliminate or leave the remains of said layer of protective material covering said electrically conductive patterns. The invention also relates to a device, such as a reflector for example, comprising an electrically insulating substrate carrying electrically conductive patterns on one of its non-developable surfaces with three dimensions and remarkable in that said electrically conductive patterns are realized by the implementation of the method according to the invention specified above.
Les figures du dessin annexé feront bien comprendre comment l'invention peut être réalisée. Sur ces figures, des références identiques désignent des éléments semblables.The figures of the appended drawing will make it clear how the invention can be realized. In these figures, identical references designate similar elements.
La figure 1 représente schématiquement un dispositif d'antenne, dont le réflecteur est pourvu de motifs électriquement conducteurs réalisés par la mise en œuvre du procédé conforme à la présente invention.FIG. 1 schematically represents an antenna device, whose reflector is provided with electrically conductive patterns produced by the implementation of the method according to the present invention.
La figure 2 est une vue de face schématique agrandie d'une partie du réflecteur de la figure 1 , illustrant la forme et la disposition desdits motifs électriquement conducteurs. Les figures 3A à 3D illustrent schématiquement, en coupe, des étapes du procédé conforme à la présente invention, appliqué à la réalisation des motifs électriquement conducteurs des figures 1 et 2.Figure 2 is an enlarged schematic front view of a portion of the reflector of Figure 1, illustrating the shape and arrangement of said electrically conductive patterns. FIGS. 3A to 3D schematically illustrate, in section, steps of the method according to the present invention, applied to the production of the electrically conductive patterns of FIGS. 1 and 2.
Sur les figures 2 et 3A à 3D, la surface du réflecteur portant les- dits motifs électriquement conducteurs, bien que concave et non dévelop- pable, est représentée plane pour des facilités de dessin- Sur la figure 1 , on a représenté schématiquement un dispositif d'antenne 1 pourvu d'un réflecteur d'antenne 2 (représenté en coupe diamétrale), supporté par une surface d'appui 3, par l'intermédiaire d'un sup- port 4.In FIGS. 2 and 3A to 3D, the surface of the reflector carrying the said electrically conductive patterns, although concave and non-developable, is shown flat for ease of drawing. FIG. 1 diagrammatically shows a device antenna 1 provided with an antenna reflector 2 (shown in diametral section), supported by a bearing surface 3, via a support 4.
Le réflecteur 2 comporte un substrat électriquement isolant 5 (par exemple réalisé en matériau composite), dont la surface 6 opposée au support 4 est concave et présente une forme non développable, par exemple la forme au moins approximative d'un paraboloïde, d'un hyper- boloïde, etc ... Sur cette surface 6 non développable à trois dimensions, le réflecteur 2 porte des motifs électriquement conducteurs, formés, dans l'exemple représenté, par des conducteurs 7 parallèles les uns aux autres et équidistants. Chaque conducteur 7 présente une section rectangulaire de largeur £ et d'épaisseur e et le pas de répartition des conducteurs pa- rallèles 7 est désigné par p. Ainsi, entre deux conducteurs 7 adjacents est ménagée une zone de séparation 8, en forme de bande ayant une largeur égale à p (voir également la figure 2).The reflector 2 comprises an electrically insulating substrate 5 (for example made of composite material), the surface 6 opposite the support 4 is concave and has a non-developable shape, for example the at least approximate shape of a paraboloid, a hyperboloïde, etc ... On this surface 6 non-developable three-dimensional, the reflector 2 carries electrically conductive patterns, formed in the example shown by conductors 7 parallel to each other and equidistant. Each conductor 7 has a rectangular section of width et and thickness e and the distribution pitch of the parallel conductors 7 is designated p. Thus, between two adjacent conductors 7 is formed a separation zone 8, band-shaped having a width equal to p (see also Figure 2).
Pour la réalisation du réflecteur 2 illustré schématiquement par les figures 1 et 2, on commence par recouvrir uniformément la surface non développable 6 du substrat 5 par une couche 9 d'une matière électriquement conductrice (voir la figure 3A) d'épaisseur égale à e. Une telle couche 9 peut, par exemple, être déposée sous vide sur la surface 6 ou être rapportée sur cette dernière par collage. Elle peut être métallique et par exemple constituée par du cuivre ou de l'aluminium. Ensuite, par tout moyen connu, on recouvre ladite couche de matière électriquement conductrice 9 par une couche 10 d'une matière de protection, par exemple un vernis organique.For the realization of the reflector 2 schematically illustrated in Figures 1 and 2, it begins by uniformly covering the non-developable surface 6 of the substrate 5 by a layer 9 of an electrically conductive material (see Figure 3A) of thickness equal to e . Such a layer 9 may, for example, be deposited under vacuum on the surface 6 or be attached thereto by gluing. It may be metallic and for example constituted by copper or aluminum. Then, by any known means, said layer of electrically conductive material 9 is covered by a layer 10 of a protective material, for example an organic varnish.
Conformément à la présente invention et comme illustré par la fi- gure 3B, on procède ensuite, à l'aide d'une tête laser mobile, à l'ablation laser des portions de la couche de matière de protection 10 qui se trouvent à l'aplomb des zones de séparation 8, c'est-à-dire qui ne recouvrent pas les zones de la couche 9 devant former les conducteurs 7. Après cette ablation laser, il ne reste donc plus sur la couche de matière électri- quement conductrice 9 que des lignes 10.7 de matière de protection, à l'aplomb des futurs conducteurs 7 et présentant la largeur I.In accordance with the present invention and as illustrated in FIG. 3B, the laser protective ablation portions of the protective material layer 10 are then laser-ablated by means of a moving laser head. Placing the separation zones 8, that is to say which do not cover the zones of the layer 9 to form the conductors 7. After this laser ablation, it does not remain on the layer of electrically conductive material anymore. 9 lines 10.7 protective material, above the future conductors 7 and having the width I.
Après l'opération illustrée par la figure 3B, on soumet les lignes de protection 10.7 et la couche conductrice 9 à l'action d'un agent chimique, par exemple appliqué par projection ou par trempage. Cet agent chimique attaque, entre les lignes 10.7, la couche de matière électriquement conductrice 9, sans attaquer lesdites lignes 10.7 de matière de protection. L'agent chimique, éliminant alors sélectivement la couche conductrice 9, est par exemple du perchlorure de fer, lorsque la couche 9 est en cuivre. L'action de l'agent chimique sur la couche conductrice 9 est poursuivie jusqu'à ce que celle-ci soit éliminée sur toute son épaisseur à l'aplomb des zones de séparation 8 (figure 3C). Il en résulte la formation des conducteurs 7.After the operation illustrated in FIG. 3B, the protective lines 10.7 and the conductive layer 9 are subjected to the action of a chemical agent, for example applied by spraying or dipping. This chemical agent attacks, between the lines 10.7, the layer of electrically conductive material 9, without attacking said lines 10.7 of protective material. The chemical agent, then selectively eliminating the conductive layer 9, is for example iron perchloride, when the layer 9 is copper. The action of the chemical agent on the conductive layer 9 is continued until it is removed over its entire thickness in line with the separation zones 8 (Figure 3C). This results in driver training 7.
Ensuite, un rinçage est effectué sur l'ensemble du substrat 5 et desdites couches 9 et 10 partiellement découpées.Then, rinsing is performed on the entire substrate 5 and said layers 9 and 10 partially cut.
Eventuellement, on procède de plus à l'élimination des lignes 10.7 recouvrant les conducteurs 7 (figure 3D). Cependant, la matière de protection de la couche 10 (par exemple un vernis organique) est choisie pour posséder des caractéristiques qui la rende compatible de l'environnement (par exemple spatial) dans lequel le réflecteur sera appelé à travailler. Aussi, les lignes 10.7 peuvent alors subsister sur les conducteurs 7 et servir de protection à ceux-ci, par exemple contre la corrosion.Optionally, the removal of the lines 10.7 covering the conductors 7 (FIG. 3D) is also carried out. However, the protective material of the layer 10 (for example an organic varnish) is chosen to possess characteristics that make it compatible with the environment. (eg spatial) in which the reflector will be called to work. Also, the lines 10.7 can then remain on the conductors 7 and serve as protection therefor, for example against corrosion.
De ce qui précède, on remarquera que le procédé conforme à Ia présente invention est :From the foregoing, it will be appreciated that the method according to the present invention is:
- économique et rapide, notamment du fait que la vitesse d'ablation laser peut être très rapide (par exemple 0,3 m/s) et que l'on peut utiliser plusieurs sources laser d'ablation simultanément ;- Economical and fast, especially since the laser ablation speed can be very fast (for example 0.3 m / s) and that one can use multiple ablation laser sources simultaneously;
- réversible, puisqu'une erreur de programmation de la machine ou une anomalie d'ablation peut être corrigée, l'ablation pouvant reprendre après reconstitution partielle de la couche 10 de matière de protection, sans altération du substrat 5 et de la couche conductrice 9 ;- Reversible, since a programming error of the machine or an ablation anomaly can be corrected, the ablation can resume after partial reconstitution of the layer 10 of protective material, without alteration of the substrate 5 and the conductive layer 9 ;
- robuste, puisqu'il s'affranchit de la découpe mécanique de motifs très fins ; et - versatile, puisqu'il permet la réalisation de motifs conducteurs de formes variées.- robust, since it frees itself from the mechanical cutting of very fine patterns; and - versatile, since it allows the realization of conductive patterns of various shapes.
A titre d'exemple, on mentionne ci-après que la mise en œuvre du procédé selon l'invention a permis de fabriquer un réflecteur tel que celui représenté sur les figures 1 et 2 avec £ = 0,125 mm, p = 0,5 mm et e = 18 micromètres, le diamètre D de l'ouverture dudit réflecteur étant égal àBy way of example, it is mentioned hereinafter that the implementation of the method according to the invention made it possible to manufacture a reflector such as that represented in FIGS. 1 and 2 with = = 0.125 mm, p = 0.5 mm. and e = 18 micrometers, the diameter D of the aperture of said reflector being equal to
2300 mm. 2300 mm.

Claims

REVENDICATIONS
1 . Procédé permettant de réaliser des motifs électriquement conducteurs (7) sur une surface non développable à trois dimensions (6) d'un substrat électriquement isolant (5), procédé selon lequel on commence par recouvrir uniformément ladite surface non développable (6) d'une couche d'une matière électriquement conductrice (9), que l'on recouvre à son tour d'une couche d'une matière de protection (10), après quoi on élimine les portions de ladite couche de matière de protection (10) qui ne recouvrent pas des zones de ladite couche de matière électrique- ment conductrice (9) devant former lesdits motifs (7), puis on élimine les portions de ladite couche de matière électriquement conductrice (9) découvertes par l'élimination desdites portions de ladite couche de matière de protection (10), caractérisé en ce que l'élimination des portions de la couche de matière de protection (10), qui ne recouvrent pas lesdites zones de ladite couche de matière électriquement conductrice (9) devant former lesdits motifs (7), est réalisée par ablation laser à l'aide d'une tête laser mobile que l'on déplace, par rapport à ladite surface non développable (6) recouverte de ladite couche de matière électriquement conductrice (9) et de ladite couche de matière de protection (10), pour couvrir toutes les portions de ladite couche de matière de protection qui ne recouvrent pas lesdites zones de ladite couche de matière électriquement conductrice devant former lesdits motifs électriquement conducteurs (7).1. A method for producing electrically conductive patterns (7) on a non-developable three-dimensional surface (6) of an electrically insulating substrate (5), wherein first uniformly covering said non-developable surface (6) with a layer of an electrically conductive material (9), which is in turn covered with a layer of a protective material (10), after which portions of said layer of protective material (10) which do not cover areas of said layer of electrically conductive material (9) to form said patterns (7), then remove portions of said layer of electrically conductive material (9) discovered by removal of said portions of said layer of protective material (10), characterized in that the removal of the portions of the layer of protective material (10), which do not cover said areas of said layer of electrically conductor (9) to form said patterns (7), is performed by laser ablation with the aid of a moving laser head that is moved, with respect to said non-developable surface (6) covered with said layer of electrically conductor (9) and said layer of protective material (10), to cover all portions of said layer of protective material which do not cover said areas of said layer of electrically conductive material to form said electrically conductive patterns (7) .
2. Procédé selon la revendication 1 , caractérisé en ce que les portions de la couche de matière électriquement conductrice (9), découvertes par l'ablation laser desdites portions de la couche de matière de protection (10), sont éliminées par l'action d'un agent chimique susceptible d'attaquer la matière électriquement conductrice sans attaquer ladite matière de protection. 2. Method according to claim 1, characterized in that the portions of the layer of electrically conductive material (9), discovered by laser ablation of said portions of the layer of protective material (10), are removed by the action a chemical agent capable of attacking the electrically conductive material without attacking said protective material.
3. Procédé selon la revendication 2, caractérisé en ce que l'agent chimique éliminant ladite couche de matière conductrice (9) est du perchlorure de fer, lorsque ladite couche (9) est en cuivre. 3. Method according to claim 2, characterized in that the chemical agent removing said layer of conductive material (9) is iron perchloride, when said layer (9) is copper.
4. Procédé selon l'une des revendications 2 ou 3, caractérisé en ce que ladite matière de protection (10), insensible à l'action dudit agent chimique, est un vernis organique.4. Method according to one of claims 2 or 3, characterized in that said protective material (10), insensitive to the action of said chemical agent, is an organic varnish.
5. Procédé selon l'une des revendications 1 à 4, caractérisé en ce que, après élimination des portions de ladite couche de matière électriquement conductrice (9) découvertes par l'ablation laser desdites portions de ladite couche de matière de protection (10), on élimine les restes (10.7) de ladite couche de matière de protection (10) recouvrant lesdits motifs électriquement conducteurs (7).5. Method according to one of claims 1 to 4, characterized in that, after removal of the portions of said layer of electrically conductive material (9) discovered by laser ablation said portions of said layer of protective material (10) the remnants (10.7) of said layer of protective material (10) covering said electrically conductive patterns (7) are eliminated.
6. Procédé selon l'une des revendications 1 à 4, caractérisé en ce que, après élimination des portions de ladite couche de matière électriquement conductrice (9) découvertes par l'ablation laser desdites portions de ladite couche de matière de protection (10), on laisse subsister les restes (10.7) de ladite couche de matière de protection (10) recouvrant lesdits motifs électriquement conducteurs (7). 6. Method according to one of claims 1 to 4, characterized in that, after removal of the portions of said layer of electrically conductive material (9) discovered by laser ablation said portions of said layer of protective material (10) leaving the remainders (10.7) of said layer of protective material (10) covering said electrically conductive patterns (7).
7. Dispositif comportant un substrat électriquement isolant (5) portant des motifs électriquement conducteurs (7) sur une de ses surfaces non développable à trois dimensions (6), caractérisé en ce que lesdits motifs électriquement conducteurs (7) sont réalisés par la mise en œuvre du procédé spécifié sous l'une des revendi- cations 1 à 6. 7. Device comprising an electrically insulating substrate (5) carrying electrically conductive patterns (7) on one of its non-developable three-dimensional surfaces (6), characterized in that said electrically conductive patterns (7) are realized by the implementation of the process specified in one of claims 1 to 6.
EP06709341A 2005-02-23 2006-02-20 Method for producing electrically conductive patterns on a non-developable surface of an insulating substrate, and resulting device Withdrawn EP1852002A1 (en)

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FR0501815A FR2882490B1 (en) 2005-02-23 2005-02-23 METHOD FOR MAKING ELECTRICALLY CONDUCTIVE PATTERNS ON A NON-DEVELOPABLE SURFACE OF AN INSULATING SUBSTRATE, AND DEVICE OBTAINED
PCT/FR2006/000373 WO2006090050A1 (en) 2005-02-23 2006-02-20 Method for producing electrically conductive patterns on a non-developable surface of an insulating substrate, and resulting device

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US8296480B2 (en) * 2009-11-30 2012-10-23 Lsi Corporation Context execution in a media controller architecture
US10516216B2 (en) 2018-01-12 2019-12-24 Eagle Technology, Llc Deployable reflector antenna system
US10707552B2 (en) 2018-08-21 2020-07-07 Eagle Technology, Llc Folded rib truss structure for reflector antenna with zero over stretch

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FR2882490A1 (en) 2006-08-25

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