EP1652205B1 - Bistable micromechanical switch, actuating method and corresponding method for realizing the same - Google Patents

Bistable micromechanical switch, actuating method and corresponding method for realizing the same Download PDF

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Publication number
EP1652205B1
EP1652205B1 EP04767777A EP04767777A EP1652205B1 EP 1652205 B1 EP1652205 B1 EP 1652205B1 EP 04767777 A EP04767777 A EP 04767777A EP 04767777 A EP04767777 A EP 04767777A EP 1652205 B1 EP1652205 B1 EP 1652205B1
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EP
European Patent Office
Prior art keywords
peripheral
substrate
switch
medial
actuating means
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EP04767777A
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German (de)
French (fr)
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EP1652205A2 (en
Inventor
Pierre-Louis Charvet
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Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
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Commissariat a lEnergie Atomique CEA
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0042—Bistable switches, i.e. having two stable positions requiring only actuating energy for switching between them, e.g. with snap membrane or by permanent magnet

Definitions

  • the invention relates to a micromechanical switch, comprising a deformable suspension bridge, attached by means of support to a substrate, and actuating means intended, from a first stable position of the switch, to deform the suspension bridge deformable so as to establish an electrical contact between at least a first conductive element formed on the substrate, between the bridge and the substrate, and a second conductive element secured to a lower face of the bridge.
  • a micromechanical switch typically comprises a deformable suspended bridge 1 attached by support means 2 to a substrate 3.
  • Actuators make it possible to deform the suspension bridge, so as to establish an electrical contact between first 5 conductive elements formed on the substrate 3 and a second conductive element 6, secured to a lower face of the bridge 1.
  • the actuators are, for example, constituted by electrodes 4a and 4b respectively formed on the bridge 1 and on the substrate 3 and between which is applied a control voltage.
  • the first conductive elements are, for example, constituted by two sections of a radiofrequency line which are connected by the second conductive element 6.
  • a conventional household switch has two stable positions and the electrical contact remains respectively established or interrupted without permanent energy supply.
  • it is complicated to manufacture a similar switch, bistable, microscopic size.
  • a first conductive element is a drop of mercury, which is displaced by electrostatic forces to establish or interrupt electrical contact between two solid conductive elements.
  • mercury is very toxic and, on the other hand, the drop moves at the slightest movement of the switch which can cause unexpected switching.
  • the document US2002 / 191897 describes a switch comprising a switching beam connected at its ends by supports fixed on a substrate.
  • the switch has a first stable position corresponding to an open position of the switch.
  • the switching beams are actuated by switching electrodes, so as to deform the switching beam to switch the switch to a second position corresponding to the closed position of the switch. To maintain contact in this second position, it is necessary to keep the switching electrodes energized.
  • the switch also comprises reconfiguration beams arranged at the periphery of the switching beam, a only side of it or on both sides of it.
  • the reconfiguration beams are fixed to the substrate by means of rigid supports.
  • the switch also comprises actuating elements cooperating with the reconfiguration beams and intended to deform them independently of the switching beam.
  • the deformation of the reconfiguration beam causes an increase in the distance between the switching beam and the electrode.
  • the deformation of the reconfiguration beams causes the appearance of return forces, within the switching beam, representative of the spring constants of the switch.
  • the object of the invention is to remedy these disadvantages and, in particular, to produce a microscopic switch having two mechanically stable positions.
  • the support means consist of two feet arranged between the bridge and the substrate so as to subdivide the bridge transversely in a median segment disposed between the feet and two peripheral segments projecting outwards and having free ends
  • the actuating means comprising peripheral actuating means and medial actuating means for deforming, respectively, respectively the peripheral segments and the median segment perpendicularly to the substrate.
  • the switch being in the first stable position, in a first phase, the middle segment and the peripheral segments are simultaneously bent towards the substrate, by means of their respective actuating means, so as to establish the electrical contact, then the peripheral actuating means are interrupted in a second phase, so as to automatically cause the spacing of the peripheral segments relative to to the substrate, the medial actuating means being interrupted in a third phase, the middle segment thus being automatically maintained in the bent position, so as to define a second stable position of the switch, wherein the electrical contact remains established.
  • the micromechanical switch shown in FIG. 2 comprises a deformable suspended bridge 1 attached to a substrate 3 by two legs 7 arranged between the bridge 1 and the substrate 3 so as to subdivide the bridge 1 transversely into a median segment 8 arranged between the two feet 7, and two peripheral segments 9 projecting outwards.
  • Two median electrostatic actuators 10 and two peripheral electrostatic actuators 11 make it possible to deform, independently, respectively the median segment 8 and the peripheral segments 9 substantially perpendicular to the substrate.
  • the actuators 10 and 11 consist of electrodes respectively formed on the substrate 3 and on the median 8 or peripheral 9 segments.
  • the actuators 10 and 11 make it possible to deform the bridge 1 so as to establish an electrical contact between a first conductive element 5 formed on the substrate 3, between the bridge 1 and the substrate 3, and a second conductive element 6, secured to the underside of the bridge 1.
  • the peripheral actuators are also in the rest position and the switch is in a first stable position.
  • the median segment 8 and the peripheral segments 9 consist of a single layer
  • a first curved layer 13 forms respectively a foot 7 and the associated peripheral segment 9, so that the feet 7 are inclined relative to the substrate 3 and that the segments
  • the peripherals 9 have free ends 15 inclined away from the substrate 3.
  • the middle segment 8 is constituted by a second curved layer 14 and thus comprises a central portion 12 slightly elevated.
  • the actuators 10 and 11 are respectively integrated in the middle and peripheral segments.
  • the switch can switch from its first stable position, corresponding to the interruption of the electrical contact (FIGS. 2 and 3), to a second stable position corresponding to an established electrical contact.
  • Figures 4 to 7 schematically illustrate the transition from the first stable position to the second stable position.
  • the switch is represented in the first stable position, the actuators being at rest, the central portion 12 of the middle segment 8 being raised and the peripheral segments 9 being inclined away from the substrate 3.
  • Localized constraints ⁇ at the peripheral segments represented by horizontal arrows in the figures, exert a compressive force on the middle segment 8 in its longitudinal direction and thus prevent the middle segment from leaving its raised position.
  • a first phase represented in FIG. 5
  • the median segment 8 and the peripheral segments 9 are simultaneously bent toward the substrate 3, respectively via the median and peripheral actuators 10 and 11.
  • FIG. 8 illustrates the return of the second stable position to the first stable position of the switch.
  • the peripheral segments 9 are bent again in the direction of the substrate 3, via the peripheral actuators 11.
  • a mechanical stress ⁇ in tension is exerted on the median segment 8 in its longitudinal direction, spreading its central portion 12 of the substrate 3.
  • the peripheral actuators 11 are then interrupted in a fifth phase, shown in Figure 9, to return the switch in its first stable position, wherein the peripheral segments 9 are inclined away from the substrate 3.
  • peripheral segments 9 are substantially in the same position (away from the substrate) in the two stable positions of the switch (FIGS. 4, 7 and 9) and change positions only provisionally (FIGS. 5 and 8) during the actuation of the switch.
  • the switch having two stable positions, the first position in which the electrical contact is interrupted, and the second position in which the electrical contact is established, only the passage from one position to another consumes energy and the switch can, after actuation, remain in each of these positions without additional energy input.
  • FIG. 10 illustrates a method of producing a micromechanical switch according to the invention.
  • the manufacture of the deformable suspension bridge 1 on the substrate 3 then comprises at least the following steps.
  • a peripheral sacrificial layer 16 is deposited on each side of the first conductive element disposed on the substrate 3.
  • at least one insulating layer 17 peripheral for example silicon nitride, is deposited on each peripheral sacrificial layer 16.
  • the peripheral insulating layers cover the front faces and the lateral faces of the two peripheral sacrificial layers.
  • the lateral faces of the peripheral insulating layers 17 arranged with respect to the first conducting element 5 are intended to form the feet 7 and the front faces of the peripheral insulating layers 17 are intended to form the peripheral segments 9.
  • a medial sacrificial layer 18 is deposited between the peripheral insulating layers 17. It comes into contact with the adjacent side faces of the two peripheral insulating layers 17 and covers the first conductive element.
  • the fourth step consists in depositing on the medial sacrificial layer 18 a median insulating layer 19. This comes into contact with each of the front faces of the two peripheral insulating layers 17, which it can partially cover, to form the middle segment 8 (FIG. 13).
  • a fifth step (FIG.
  • etching the peripheral lateral faces of the two peripheral insulating layers 17 then makes it possible to delimit the peripheral segments, in order to keep only the peripheral segments 9 and the feet 7.
  • the sacrificial layers 16 and 18 are removed (FIG. 15).
  • the peripheral insulating layer 17 may be a layer able to create a compressive stress on the median segment 8 in the longitudinal direction of the median segment 8 by a mechanical torque effect at the peripheral segments 9.
  • the peripheral insulating layer 17 may be deposited using a method setting a stress state of the peripheral insulating layer 17.
  • a “dual-frequency plasma deposition" method for example, it is possible to obtain a single layer which has a gradient of constraints.
  • the desired stress level can be obtained by adapting the thickness of the deposited layer. It is also possible to deposit several peripheral insulation layers 17 on each peripheral sacrificial layer 16 in order to produce a stress gradient compressing the median segment 8 in its longitudinal direction.
  • a stack of two layers may, for example, be made by an unconstrained layer deposited on a layer in compression, by a tension layer deposited on a non-stressed layer or by a tension layer deposited on a layer in compression.
  • a stack of three layers may, for example, be constituted by two tension layers deposited on a layer in compression or by a tension layer deposited on a non-stress layer deposited, itself, on a layer in compression. This gives a spring-like effect.
  • the median insulating layer 19 covers the front faces of the insulating peripheral layers 17 over their entire length, which amplifies the stresses between the two layers 17 and 19.
  • the electrodes of the peripheral electrostatic actuators 11 are respectively disposed between each insulating layer 17 peripheral and the associated insulating layer 19 median.
  • peripheral insulating layers 17 each cover a portion 20 of the front face of the substrate 3 disposed respectively between the lateral face of a peripheral sacrificial layer 16 and the first conductive element 5.
  • the actuators 10 and 11 may be constituted by any type of actuator namely by piezoelectric actuators, thermal, magnetic.
  • the peripheral electrodes are preferably wider, for example by a factor of three, than the median electrodes, in a plane parallel to the substrate 3, which makes it possible to reduce the driving voltage of the electrodes.
  • peripheral actuators A switch according to the invention can be used in a matrix of switches or as a simple switch. Such a switch can typically be used in telecommunication applications, particularly for radio frequency, terrestrial and space devices, in biomedical applications, relays.

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  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Micromachines (AREA)
  • Push-Button Switches (AREA)
  • Hydrogenated Pyridines (AREA)

Abstract

A deformable suspension bridge is attached to a substrate by two legs arranged in such a manner as to transversally subdivide the bridge into a medial segment arranged between the legs and into two outwardly projecting peripheral segments. Peripheral actuators and medial actuators enable the peripheral segments and the medial segment to be respectively and independently deformed perpendicularly to the substrate. As a result, an electrical contact between a first conductive element formed on the substrate, while being situated between the bridge and substrate, and a second conductive element, which is integrally secured to the underside of the bridge, can be made or broken, the switch whereby taking two mechanically stable positions.

Description

Domaine technique de l'inventionTechnical field of the invention

L'invention concerne un commutateur micro-mécanique, comportant un pont suspendu déformable, rattaché par des moyens de support à un substrat, et des moyens d'actionnement destinés, à partir d'une première position stable du commutateur, à déformer le pont suspendu déformable de manière à établir un contact électrique entre au moins un premier élément conducteur formé sur le substrat, entre le pont et le substrat, et un deuxième élément conducteur, solidaire d'une face inférieure du pont.The invention relates to a micromechanical switch, comprising a deformable suspension bridge, attached by means of support to a substrate, and actuating means intended, from a first stable position of the switch, to deform the suspension bridge deformable so as to establish an electrical contact between at least a first conductive element formed on the substrate, between the bridge and the substrate, and a second conductive element secured to a lower face of the bridge.

État de la techniqueState of the art

Comme représenté à la figure 1, un commutateur micro-mécanique comporte typiquement un pont 1 suspendu déformable rattaché par des moyens 2 de support à un substrat 3. Des actionneurs permettent de déformer le pont suspendu, de manière à établir un contact électrique entre des premiers éléments 5 conducteurs formés sur le substrat 3 et un deuxième élément 6 conducteur, solidaire d'une face inférieure du pont 1. Les actionneurs sont, par exemple, constitués par des électrodes 4a et 4b formées respectivement sur le pont 1 et sur le substrat 3 et entre lesquelles est appliquée une tension électrique de commande. Les premiers éléments 5 conducteurs sont, par exemple, constitués par deux tronçons d'une ligne radiofréquence qui sont reliés par le deuxième élément 6 conducteur. Lorsque les moyens d'actionnement 4 sont interrompus (annulation de la tension de commande), le pont 1 revient dans son état non-déformé, c'est-à-dire sa position stable, et le contact électrique est interrompu. Afin de maintenir un contact électrique, il est alors nécessaire de continuer l'actionnement, ce qui peut augmenter la consommation électrique du commutateur. Par ailleurs, si on a un problème sur la commande (ou sur la tension), le contact électrique n'est plus assuré.As represented in FIG. 1, a micromechanical switch typically comprises a deformable suspended bridge 1 attached by support means 2 to a substrate 3. Actuators make it possible to deform the suspension bridge, so as to establish an electrical contact between first 5 conductive elements formed on the substrate 3 and a second conductive element 6, secured to a lower face of the bridge 1. The actuators are, for example, constituted by electrodes 4a and 4b respectively formed on the bridge 1 and on the substrate 3 and between which is applied a control voltage. The first conductive elements are, for example, constituted by two sections of a radiofrequency line which are connected by the second conductive element 6. When the actuating means 4 are interrupted (cancellation of the control voltage), the bridge 1 returns in its undistorted state, ie its stable position, and the electrical contact is interrupted. In order to maintain electrical contact, it is then necessary to continue the operation, which can increase the power consumption of the switch. Moreover, if we have a problem on the control (or on the voltage), the electrical contact is no longer assured.

Au contraire, un interrupteur domestique classique a deux positions stables et le contact électrique reste respectivement établi ou interrompu sans apport d'énergie permanent. Cependant, il est compliqué de fabriquer un commutateur analogue, bistable, de taille microscopique.On the contrary, a conventional household switch has two stable positions and the electrical contact remains respectively established or interrupted without permanent energy supply. However, it is complicated to manufacture a similar switch, bistable, microscopic size.

Dans un commutateur bistable microscopique connu, un premier élément conducteur est constitué par une goutte de mercure, qui est déplacée par l'intermédiaire de forces électrostatiques pour établir ou interrompre un contact électrique entre deux éléments conducteurs solides. Cependant, d'une part, le mercure est très toxique et, d'autre part, la goutte se déplace au moindre mouvement du commutateur ce qui peut provoquer des commutations inopinées.In a known microscopic bistable switch, a first conductive element is a drop of mercury, which is displaced by electrostatic forces to establish or interrupt electrical contact between two solid conductive elements. However, on the one hand, mercury is very toxic and, on the other hand, the drop moves at the slightest movement of the switch which can cause unexpected switching.

Le document US2002/191897 décrit un commutateur comportant une poutre de commutation reliée à ses extrémités par des supports fixés sur un substrat. Le commutateur présente une première position stable correspondant à une position ouverte du commutateur. Les poutres de commutation sont actionnées par des électrodes de commutation, de manière à déformer la poutre de commutation pour faire passer le commutateur dans une seconde position correspondant à la position fermée du commutateur. Pour maintenir le contact dans cette seconde position, il est nécessaire de maintenir les électrodes de commutation sous tension. Le commutateur comporte également des poutres de reconfiguration disposées à la périphérie de la poutre de commutation, d'un seul côté de celle-ci ou de part et d'autre de celle-ci. Les poutres de reconfiguration sont fixées au substrat par l'intermédiaire de supports rigides. Le commutateur comporte également des éléments d'actionnement coopérant avec les poutres de reconfiguration et destinés à les déformer indépendamment de la poutre de commutation. Dans un premier cas, lorsque le commutateur est dans sa première position stable, la déformation de la poutre de reconfiguration entraîne une augmentation de la distance entre la poutre de commutation et l'électrode. Dans un second cas, la déformation des poutres de reconfiguration entraîne l'apparition de forces de rappel, à l'intérieur de la poutre de commutation, représentatives des constantes de ressort du commutateur. Ces moyens de reconfiguration (poutres de reconfiguration et éléments d'actionnement associés) permettent, uniquement dans la première position stable du commutateur, de configurer et d'ajuster la tension qui sera nécessaire à la commutation du commutateur. En effet, la tension de commutation dépend soit de la distance entre la poutre et l'électrode, soit de la valeur des forces de rappel engendrées par la déformation des poutres de reconfiguration.The document US2002 / 191897 describes a switch comprising a switching beam connected at its ends by supports fixed on a substrate. The switch has a first stable position corresponding to an open position of the switch. The switching beams are actuated by switching electrodes, so as to deform the switching beam to switch the switch to a second position corresponding to the closed position of the switch. To maintain contact in this second position, it is necessary to keep the switching electrodes energized. The switch also comprises reconfiguration beams arranged at the periphery of the switching beam, a only side of it or on both sides of it. The reconfiguration beams are fixed to the substrate by means of rigid supports. The switch also comprises actuating elements cooperating with the reconfiguration beams and intended to deform them independently of the switching beam. In a first case, when the switch is in its first stable position, the deformation of the reconfiguration beam causes an increase in the distance between the switching beam and the electrode. In a second case, the deformation of the reconfiguration beams causes the appearance of return forces, within the switching beam, representative of the spring constants of the switch. These reconfiguration means (reconfiguration beams and associated actuating elements) make it possible, only in the first stable position of the switch, to configure and adjust the voltage that will be necessary to switch the switch. In fact, the switching voltage depends either on the distance between the beam and the electrode, or on the value of the return forces generated by the deformation of the reconfiguration beams.

Objet de l'inventionObject of the invention

L'invention a pour but de remédier à ces inconvénients et, en particulier, de réaliser un commutateur microscopique ayant deux positions mécaniquement stables.The object of the invention is to remedy these disadvantages and, in particular, to produce a microscopic switch having two mechanically stable positions.

Selon l'invention, ce but est atteint par les revendications annexées et, plus particulièrement, par le fait que les moyens de support sont constitués par deux pieds disposés entre le pont et le substrat de manière à subdiviser le pont transversalement en un segment médian disposé entre les pieds et deux segments périphériques faisant saillie vers l'extérieur et comportant des extrémités libres, les moyens d'actionnement comportant des moyens d'actionnement périphériques et des moyens d'actionnement médians permettant de déformer, indépendamment, respectivement les segments périphériques et le segment médian perpendiculairement au substrat.According to the invention, this object is achieved by the appended claims and, more particularly, by the fact that the support means consist of two feet arranged between the bridge and the substrate so as to subdivide the bridge transversely in a median segment disposed between the feet and two peripheral segments projecting outwards and having free ends, the actuating means comprising peripheral actuating means and medial actuating means for deforming, respectively, respectively the peripheral segments and the median segment perpendicularly to the substrate.

Selon une méthode d'actionnement d'un contact électrique d'un commutateur micro-mécanique selon l'invention, le commutateur étant dans la première position stable, dans une première phase, le segment médian et les segments périphériques sont simultanément fléchis en direction du substrat, par l'intermédiaire de leurs moyens d'actionnement respectifs, de manière à établir le contact électrique, ensuite, les moyens d'actionnement périphériques sont interrompus dans une deuxième phase, de manière à provoquer automatiquement l'écartement des segments périphériques par rapport au substrat, les moyens d'actionnement médians étant interrompus dans une troisième phase, le segment médian étant ainsi automatiquement maintenu en position fléchie, de manière à définir une seconde position stable du commutateur, dans laquelle le contact électrique reste établi.According to a method of actuating an electrical contact of a micromechanical switch according to the invention, the switch being in the first stable position, in a first phase, the middle segment and the peripheral segments are simultaneously bent towards the substrate, by means of their respective actuating means, so as to establish the electrical contact, then the peripheral actuating means are interrupted in a second phase, so as to automatically cause the spacing of the peripheral segments relative to to the substrate, the medial actuating means being interrupted in a third phase, the middle segment thus being automatically maintained in the bent position, so as to define a second stable position of the switch, wherein the electrical contact remains established.

L'invention a également pour but un procédé de réalisation d'un commutateur micro-mécanique selon l'invention, caractérisé en ce que la fabrication du pont suspendu déformable sur le substrat comporte :

  • le dépôt d'une couche sacrificielle périphérique sur le substrat, de chaque côté du premier élément conducteur,
  • le dépôt d'au moins une couche isolante périphérique sur chaque couche sacrificielle périphérique, de manière à couvrir les faces avant et les faces latérales des deux couches sacrificielles périphériques pour former les segments périphériques et les pieds,
  • le dépôt d'une couche sacrificielle médiane, entre les couches isolantes périphériques, venant en contact avec les faces latérales adjacentes des deux couches isolantes périphériques et couvrant le premier élément conducteur,
  • le dépôt, sur la couche sacrificielle médiane, d'une couche isolante médiane venant en contact avec chacune des faces avant des deux couches isolantes périphériques pour former le segment médian,
  • la gravure des faces latérales périphériques des deux couches isolantes périphériques, de manière à délimiter les segments périphériques,
  • l'enlèvement des couches sacrificielles.
The invention also aims at a method for producing a micromechanical switch according to the invention, characterized in that the production of the deformable suspension bridge on the substrate comprises:
  • depositing a peripheral sacrificial layer on the substrate, on each side of the first conductive element,
  • depositing at least one peripheral insulating layer on each peripheral sacrificial layer, so as to cover the front faces and the lateral faces of the two peripheral sacrificial layers to form the peripheral segments and the feet,
  • depositing a medial sacrificial layer, between the peripheral insulating layers, coming into contact with the lateral faces adjacent to the two peripheral insulating layers and covering the first conductive element,
  • depositing, on the medial sacrificial layer, a median insulating layer coming into contact with each of the front faces of the two peripheral insulating layers to form the median segment,
  • the etching of the peripheral lateral faces of the two peripheral insulating layers, so as to delimit the peripheral segments,
  • the removal of the sacrificial layers.

Description sommaire des dessinsBrief description of the drawings

D'autres avantages et caractéristiques ressortiront plus clairement de la description qui va suivre de modes particuliers de réalisation de l'invention donnés à titre d'exemples non limitatifs et représentés aux dessins annexés, dans lesquels :

  • La figure 1 montre un commutateur micro-mécanique selon l'art antérieur.
  • Les figures 2 et 3 représentent deux modes de réalisation particuliers d'un commutateur micro-mécanique selon l'invention.
  • Les figures 4 à 7, d'une part, et 8 et 9, d'autre part, illustrent schématiquement respectivement les différentes phases de l'établissement et de l'interruption d'un contact électrique d'un commutateur micro-mécanique selon l'invention.
  • Les figures 10 à 15 illustrent un procédé de réalisation d'un commutateur micro-mécanique selon l'invention.
  • La figure 16 représente une variante d'un commutateur micro-mécanique fabriqué selon le procédé de réalisation illustré aux figures 10 à 15.
Other advantages and features will emerge more clearly from the following description of particular embodiments of the invention given by way of non-limiting example and represented in the accompanying drawings, in which:
  • Figure 1 shows a micromechanical switch according to the prior art.
  • Figures 2 and 3 show two particular embodiments of a micromechanical switch according to the invention.
  • FIGS. 4 to 7, on the one hand, and 8 and 9, on the other hand, schematically illustrate respectively the different phases of the establishment and interruption of an electrical contact of a micromechanical switch according to FIG. 'invention.
  • Figures 10 to 15 illustrate a method of producing a micromechanical switch according to the invention.
  • FIG. 16 represents a variant of a micromechanical switch manufactured according to the embodiment method illustrated in FIGS. 10 to 15.

Description de modes particuliers de réalisationDescription of particular embodiments

Le commutateur micro-mécanique représenté à la figure 2 comporte un pont 1 suspendu déformable, rattaché à un substrat 3 par deux pieds 7 disposés entre le pont 1 et le substrat 3 de manière à subdiviser le pont 1 transversalement en un segment médian 8 disposé entre les deux pieds 7, et deux segments périphériques 9 faisant saillie vers l'extérieur. Deux actionneurs électrostatiques 10 médians et deux actionneurs électrostatiques 11 périphériques permettent de déformer, indépendamment, respectivement le segment médian 8 et les segments périphériques 9 sensiblement perpendiculairement au substrat. Les actionneurs 10 et 11 sont constitués par des électrodes formées respectivement sur le substrat 3 et sur les segments médian 8 ou périphériques 9.The micromechanical switch shown in FIG. 2 comprises a deformable suspended bridge 1 attached to a substrate 3 by two legs 7 arranged between the bridge 1 and the substrate 3 so as to subdivide the bridge 1 transversely into a median segment 8 arranged between the two feet 7, and two peripheral segments 9 projecting outwards. Two median electrostatic actuators 10 and two peripheral electrostatic actuators 11 make it possible to deform, independently, respectively the median segment 8 and the peripheral segments 9 substantially perpendicular to the substrate. The actuators 10 and 11 consist of electrodes respectively formed on the substrate 3 and on the median 8 or peripheral 9 segments.

A partir de la première position stable, illustrée sur la figure 2, les actionneurs 10 et 11 permettent de déformer le pont 1 de manière à établir un contact électrique entre un premier élément 5 conducteur formé sur le substrat 3, entre le pont 1 et le substrat 3, et un deuxième élément 6 conducteur, solidaire de la face inférieure du pont 1.From the first stable position, illustrated in FIG. 2, the actuators 10 and 11 make it possible to deform the bridge 1 so as to establish an electrical contact between a first conductive element 5 formed on the substrate 3, between the bridge 1 and the substrate 3, and a second conductive element 6, secured to the underside of the bridge 1.

A la figure 3, les actionneurs 10 périphériques sont également en position de repos et le commutateur est dans une première position stable. Tandis que sur la figure 2, le segment médian 8 et les segments périphériques 9 sont constitués par une couche unique, sur la figure 3, une première couche 13 courbe forme respectivement un pied 7 et le segment périphérique 9 associé, de manière à ce que les pieds 7 soient inclinés par rapport au substrat 3 et que les segments périphériques 9 comportent des extrémités libres 15 inclinées à l'écart du substrat 3. A la figure 3, le segment médian 8 est constitué par une deuxième couche 14 courbe et comporte ainsi une partie centrale 12 légèrement surélevée. Les actionneurs 10 et 11 sont respectivement intégrés dans les segments médian et périphériques.In FIG. 3, the peripheral actuators are also in the rest position and the switch is in a first stable position. While in FIG. 2, the median segment 8 and the peripheral segments 9 consist of a single layer, in FIG. 3 a first curved layer 13 forms respectively a foot 7 and the associated peripheral segment 9, so that the feet 7 are inclined relative to the substrate 3 and that the segments The peripherals 9 have free ends 15 inclined away from the substrate 3. In Figure 3, the middle segment 8 is constituted by a second curved layer 14 and thus comprises a central portion 12 slightly elevated. The actuators 10 and 11 are respectively integrated in the middle and peripheral segments.

Le commutateur peut basculer de sa première position stable, correspondant à l'interruption du contact électrique (figures 2 et 3), à une seconde position stable, correspondant à un contact électrique établi. Les figures 4 à 7 illustrent schématiquement le passage de la première position stable à la seconde position stable. A la figure 4, le commutateur est représenté dans la première position stable, les actionneurs étant au repos, la partie centrale 12 du segment médian 8 étant surélevé et les segments périphériques 9 étant inclinés à l'écart du substrat 3. Des contraintes σ localisées au niveau des segments périphériques, représentées par des flèches horizontales sur les figures, exercent une force de compression sur le segment médian 8 dans son sens longitudinal et empêchent, ainsi, le segment médian de quitter sa position surélevée. Dans une première phase, représentée à la figure 5, le segment médian 8 et les segments périphériques 9 sont simultanément fléchis en direction du substrat 3, respectivement par l'intermédiaire des actionneurs médians 10 et périphériques 11. Ceci permet d'établir le contact électrique entre le premier élément 5 conducteur et le deuxième élément 6 conducteur. Pendant la première phase, l'actionnement des actionneurs périphériques 11 provoque des contraintes σ exerçant une force de tension sur le segment médian 8 dans son sens longitudinal (figure 5). Puis, les actionneurs périphériques 11 sont interrompus dans une deuxième phase, représentée à la figure 6. Ceci provoque automatiquement l'écartement des segments périphériques 9 par rapport au substrat 3 et, dans cette position finale de la deuxième phase, des contraintes σ de compression sur le segment médian 8 dans son sens longitudinal (figure 6). Ensuite, les actionneurs médians 10 sont interrompus dans une troisième phase. Le segment médian 8 est alors automatiquement maintenu en position fléchie par des contraintes σ en compression effectuées par les segments périphériques 9, définissant ainsi une seconde position stable du commutateur, représentée à la figure 7, dans laquelle le contact électrique reste établi. Ainsi, les trois phases successives d'actionnement permettent de faire passer le commutateur de sa première position stable (figure 4) à sa seconde position stable (figure 7).The switch can switch from its first stable position, corresponding to the interruption of the electrical contact (FIGS. 2 and 3), to a second stable position corresponding to an established electrical contact. Figures 4 to 7 schematically illustrate the transition from the first stable position to the second stable position. In FIG. 4, the switch is represented in the first stable position, the actuators being at rest, the central portion 12 of the middle segment 8 being raised and the peripheral segments 9 being inclined away from the substrate 3. Localized constraints σ at the peripheral segments, represented by horizontal arrows in the figures, exert a compressive force on the middle segment 8 in its longitudinal direction and thus prevent the middle segment from leaving its raised position. In a first phase, represented in FIG. 5, the median segment 8 and the peripheral segments 9 are simultaneously bent toward the substrate 3, respectively via the median and peripheral actuators 10 and 11. This makes it possible to establish the electrical contact. between the first conductive element 5 and the second conductive element 6. During the first phase, the actuation of the peripheral actuators 11 causes stresses σ exerting a tension force on the median segment 8 in its longitudinal direction (FIG. 5). Then, the peripheral actuators 11 are interrupted in a second phase, shown in FIG. 6. This automatically causes the peripheral segments 9 to move away from the substrate 3 and, in this final position of the second phase, compression stresses σ on the median segment 8 in its longitudinal direction (FIG. 6). Then, the medial actuators 10 are interrupted in a third phase. The median segment 8 is then automatically maintained in the bent position by compression stresses σ performed by the peripheral segments 9, thus defining a second stable position of the switch, shown in FIG. 7, in which the electrical contact remains established. Thus, the three successive phases of operation make it possible to move the switch from its first stable position (FIG. 4) to its second stable position (FIG. 7).

Les figures 8 et 9 illustrent le retour de la seconde position stable à la première position stable du commutateur. En effet, dans une quatrième phase, représentée à la figure 8, les segments périphériques 9 sont de nouveau fléchis en direction du substrat 3, par l'intermédiaire des actionneurs périphériques 11. Une contrainte mécanique σ en tension s'exerce sur le segment médian 8 dans son sens longitudinal, écartant sa partie centrale 12 du substrat 3. Les actionneurs périphériques 11 sont ensuite interrompus dans une cinquième phase, représentée à la figure 9, pour ramener le commutateur dans sa première position stable, dans laquelle les segments périphériques 9 sont inclinés à l'écart du substrat 3.Figures 8 and 9 illustrate the return of the second stable position to the first stable position of the switch. Indeed, in a fourth phase, represented in FIG. 8, the peripheral segments 9 are bent again in the direction of the substrate 3, via the peripheral actuators 11. A mechanical stress σ in tension is exerted on the median segment 8 in its longitudinal direction, spreading its central portion 12 of the substrate 3. The peripheral actuators 11 are then interrupted in a fifth phase, shown in Figure 9, to return the switch in its first stable position, wherein the peripheral segments 9 are inclined away from the substrate 3.

Les segments périphériques 9 sont sensiblement dans la même position (à l'écart du substrat) dans les deux positions stables du commutateur (figures 4, 7 et 9) et ne changent de position que provisoirement (figures 5 et 8) lors de l'actionnement du commutateur.The peripheral segments 9 are substantially in the same position (away from the substrate) in the two stable positions of the switch (FIGS. 4, 7 and 9) and change positions only provisionally (FIGS. 5 and 8) during the actuation of the switch.

Le commutateur ayant deux positions stables, la première position dans laquelle le contact électrique est interrompu, et la seconde position dans laquelle le contact électrique est établi, seul le passage d'une position à l'autre consomme de l'énergie et le commutateur peut, après actionnement, rester dans chacune de ces positions sans apport d'énergie supplémentaire.The switch having two stable positions, the first position in which the electrical contact is interrupted, and the second position in which the electrical contact is established, only the passage from one position to another consumes energy and the switch can, after actuation, remain in each of these positions without additional energy input.

Les figures 10 à 15 illustrent un procédé de réalisation d'un commutateur micro-mécanique selon l'invention. Pour des raisons de clarté, les étapes de la fabrication des électrodes constituant les actionneurs 10 et 11 ne sont pas représentées. La fabrication du pont 1 suspendu déformable sur le substrat 3 comporte alors au moins les étapes suivantes. Dans une première étape, représentée à la figure 10, une couche sacrificielle 16 périphérique est déposée de chaque côté du premier élément 5 conducteur disposé sur le substrat 3. Puis, dans une deuxième étape représentée à la figure 11, au moins une couche isolante 17 périphérique, par exemple en nitrure de silicium, est déposée sur chaque couche sacrificielle 16 périphérique. Les couches isolantes 17 périphériques couvrent les faces avant et les faces latérales des deux couches sacrificielles 16 périphériques. Les faces latérales des couches isolantes 17 périphériques disposées vis-à-vis du premier élément 5 conducteur sont destinées à former les pieds 7 et les faces avant des couches isolantes 17 périphériques sont destinées à former les segments périphériques 9. Ensuite, dans une troisième étape, représentée à la figure 12, une couche sacrificielle 18 médiane est déposée entre les couches isolantes 17 périphériques. Elle vient en contact avec les faces latérales adjacentes des deux couches isolantes 17 périphériques et couvre le premier élément 5 conducteur. La quatrième étape consiste à déposer sur la couche sacrificielle 18 médiane une couche isolante 19 médiane. Celle-ci vient en contact avec chacune des faces avant des deux couches isolantes 17 périphériques, qu'elle peut recouvrir partiellement, pour former le segment médian 8 (figure 13). Dans une cinquième étape (figure 14), une gravure des faces latérales périphériques des deux couches isolantes 17 périphériques permet ensuite de délimiter les segments périphériques, de manière à ne conserver que les segment périphériques 9 et les pieds 7. Dans une sixième étape, les couches sacrificielles 16 et 18 sont enlevées (figure 15).Figures 10 to 15 illustrate a method of producing a micromechanical switch according to the invention. For the sake of clarity, the steps of manufacturing the electrodes constituting the actuators 10 and 11 are not shown. The manufacture of the deformable suspension bridge 1 on the substrate 3 then comprises at least the following steps. In a first step, represented in FIG. 10, a peripheral sacrificial layer 16 is deposited on each side of the first conductive element disposed on the substrate 3. Then, in a second step shown in FIG. 11, at least one insulating layer 17 peripheral, for example silicon nitride, is deposited on each peripheral sacrificial layer 16. The peripheral insulating layers cover the front faces and the lateral faces of the two peripheral sacrificial layers. The lateral faces of the peripheral insulating layers 17 arranged with respect to the first conducting element 5 are intended to form the feet 7 and the front faces of the peripheral insulating layers 17 are intended to form the peripheral segments 9. Then, in a third stage , represented in FIG. 12, a medial sacrificial layer 18 is deposited between the peripheral insulating layers 17. It comes into contact with the adjacent side faces of the two peripheral insulating layers 17 and covers the first conductive element. The fourth step consists in depositing on the medial sacrificial layer 18 a median insulating layer 19. This comes into contact with each of the front faces of the two peripheral insulating layers 17, which it can partially cover, to form the middle segment 8 (FIG. 13). In a fifth step (FIG. 14), etching the peripheral lateral faces of the two peripheral insulating layers 17 then makes it possible to delimit the peripheral segments, in order to keep only the peripheral segments 9 and the feet 7. In a sixth step, the sacrificial layers 16 and 18 are removed (FIG. 15).

La couche isolante périphérique 17 peut être une couche apte à créer une contrainte en compression sur le segment médian 8 dans le sens longitudinal du segment médian 8 par un effet de couple mécanique au niveau des segments périphériques 9. Afin d'obtenir un effet de couple, la couche isolante périphérique 17 peut être déposée en utilisant un procédé fixant un état de contrainte de la couche isolante périphérique 17. Par un procédé de type "dépôt plasma bifréquence", par exemple, il est possible d'obtenir une seule couche qui présente un gradient de contraintes. Le niveau de contrainte souhaité peut être obtenu en adaptant l'épaisseur de la couche déposée. Il est également possible de déposer plusieurs couches isolantes 17 périphériques sur chaque couche sacrificielle 16 périphérique afin de réaliser un gradient de contraintes comprimant le segment médian 8 dans son sens longitudinal. Un empilement de deux couches peut, par exemple, être réalisé par une couche non-contrainte déposée sur une couche en compression, par une couche en tension déposée sur une couche non-contrainte ou par une couche en tension déposée sur une couche en compression. Un empilement de trois couches peut, par exemple, être constitué par deux couches en tension déposées sur une couche en compression ou par une couche en tension déposée sur une couche non-contrainte déposée, elle-même, sur une couche en compression. On obtient, ainsi, un effet de type ressort.The peripheral insulating layer 17 may be a layer able to create a compressive stress on the median segment 8 in the longitudinal direction of the median segment 8 by a mechanical torque effect at the peripheral segments 9. In order to obtain a torque effect , the peripheral insulating layer 17 may be deposited using a method setting a stress state of the peripheral insulating layer 17. By a "dual-frequency plasma deposition" method, for example, it is possible to obtain a single layer which has a gradient of constraints. The desired stress level can be obtained by adapting the thickness of the deposited layer. It is also possible to deposit several peripheral insulation layers 17 on each peripheral sacrificial layer 16 in order to produce a stress gradient compressing the median segment 8 in its longitudinal direction. A stack of two layers may, for example, be made by an unconstrained layer deposited on a layer in compression, by a tension layer deposited on a non-stressed layer or by a tension layer deposited on a layer in compression. A stack of three layers may, for example, be constituted by two tension layers deposited on a layer in compression or by a tension layer deposited on a non-stress layer deposited, itself, on a layer in compression. This gives a spring-like effect.

Dans un mode préférentiel de réalisation, représenté à la figure 16, la couche isolante 19 médiane recouvre les faces avant des couches isolantes 17 périphériques sur toute leur longueur, ce qui amplifie les contraintes entre les deux couches 17 et 19. Ainsi, après la suppression des couches sacrificielles, les extrémités libres 15 des segment périphériques 9 et la partie centrale 12 du segment médian 8 se relèvent automatiquement à l'écart du substrat. Dans un mode de réalisation non-représenté, les électrodes des actionneurs électrostatiques 11 périphériques sont disposées respectivement entre chaque couche isolante 17 périphérique et la couche isolante 19 médiane associée.In a preferred embodiment, shown in FIG. 16, the median insulating layer 19 covers the front faces of the insulating peripheral layers 17 over their entire length, which amplifies the stresses between the two layers 17 and 19. Thus, after the deletion sacrificial layers, the free ends 15 of the peripheral segments 9 and the central portion 12 of the middle segment 8 are automatically raised away from the substrate. In an embodiment not shown, the electrodes of the peripheral electrostatic actuators 11 are respectively disposed between each insulating layer 17 peripheral and the associated insulating layer 19 median.

Sur la figure 16, les couches isolantes 17 périphériques couvrent chacune une partie 20 de la face avant du substrat 3 disposée respectivement entre la face latérale d'une couche sacrificielle 16 périphérique et le premier élément 5 conducteur.In FIG. 16, the peripheral insulating layers 17 each cover a portion 20 of the front face of the substrate 3 disposed respectively between the lateral face of a peripheral sacrificial layer 16 and the first conductive element 5.

L'invention n'est pas limitée aux modes de réalisation particuliers représentés. En particulier, les actionneurs 10 et 11 peuvent être constitués par tout type d'actionneur à savoir par des actionneurs piézoélectriques, thermiques, magnétiques. Dans le cas d'actionneurs électrostatiques, les électrodes périphériques sont, de préférence, plus larges, par exemple d'un facteur trois, que les électrodes médianes, dans un plan parallèle au substrat 3, ce qui permet de réduire la tension de pilotage des actionneurs périphériques. Un commutateur selon l'invention peut être utilisé dans une matrice d'interrupteurs ou comme interrupteur simple. Un tel commutateur peut typiquement être utilisé dans des applications de télécommunication, en particulier pour des dispositifs radiofréquence, terrestres et spatiaux, dans des applications biomédicales, des relais.The invention is not limited to the particular embodiments shown. In particular, the actuators 10 and 11 may be constituted by any type of actuator namely by piezoelectric actuators, thermal, magnetic. In the case of electrostatic actuators, the peripheral electrodes are preferably wider, for example by a factor of three, than the median electrodes, in a plane parallel to the substrate 3, which makes it possible to reduce the driving voltage of the electrodes. peripheral actuators. A switch according to the invention can be used in a matrix of switches or as a simple switch. Such a switch can typically be used in telecommunication applications, particularly for radio frequency, terrestrial and space devices, in biomedical applications, relays.

Claims (12)

  1. Micromechanical switch, comprising a deformable suspension bridge (1), attached by support means (2) to a substrate (3), and actuating means (4) designed, from a first stable position of the switch, to deform the deformable suspension bridge (1) in such a manner as to make an electrical contact between at least one first conductive element (5) formed on the substrate (3), between the bridge (1) and the substrate (3), and a second conductive element (6), integrally secured to the underside of the bridge (1), switch characterized in that the support means are formed by two legs (7) arranged between the bridge (1) and the substrate (3) in such a manner as to subdivide the bridge (1) transversally into a medial segment (8) located between the legs (7) and two outwardly projecting peripheral segments (9) comprising free ends (15), the actuating means comprising peripheral actuating means (11) and medial actuating means (10) enabling the peripheral segments (9) and the medial segment (8) to be respectively and independently deformed perpendicularly to the substrate (3).
  2. Switch according to claim 1, characterized in that the medial segment (8) comprises a raised central part (12) in the first stable position of the switch.
  3. Switch according to one of the claims 1 and 2, characterized in that the free ends (15) are inclined away from the substrate (3) in the rest position of the peripheral actuating means (11).
  4. Switch according to any one of the claims 1 to 3, characterized in that the actuating means are formed by electrodes respectively formed on the substrate (3) and on the peripheral (9) and medial (8) segments.
  5. Switch according to any one of the claims 1 to 3, characterized in that the legs (7) are inclined.
  6. Method for actuating an electrical contact of a micromechanical switch according to any one of the claims 1 to 5, characterized in that, the switch being in the first stable position, in a first phase, the medial segment (8) and peripheral segments (9) are simultaneously flexed in the direction of the substrate (3), by means of their respective actuating means (10, 11), in such a manner as to make the electrical contact, then the peripheral actuating means (11) are interrupted in a second phase so as to automatically make the peripheral segments (9) move away from the substrate (3), the medial actuating means (10) being interrupted in a third phase, the medial segment (8) thus being automatically kept in the flexed position so as to define a second stable position of the switch in which position the electrical contact remains made.
  7. Method according to claim 6, characterized in that, the switch being in the second stable position, in a fourth phase, the peripheral segments (9) are flexed in the direction of the substrate (3), by means of the peripheral actuating means (11), so as to exert a mechanical stress on the medial segment (8) and to move the central part (12) thereof away from the substrate (3), the peripheral actuating means (11) being interrupted in a fifth phase to move the switch to its first stable position.
  8. Method for realizing a micromechanical switch according to any one of the claims 1 to 5, characterized in that fabrication of the deformable suspension bridge (1) on the substrate (3) comprises:
    - deposition of a peripheral sacrificial layer (16) on the substrate (3), on each side of the first conductive element (5),
    - deposition of at least one peripheral insulating layer (17) on each peripheral sacrificial layer (16) so as to cover the front surfaces and the side surfaces of the two peripheral sacrificial layers (16) to form the peripheral segments (9) and the legs (7),
    - deposition of a medial sacrificial layer (18) between the peripheral insulating layers (17), coming into contact with the adjacent side surfaces of the two peripheral insulating layers (17) and covering the first conductive element (5),
    - deposition, on the medial sacrificial layer (18), of a medial insulating layer (19) coming into contact with each of the front surfaces of the two peripheral insulating layers (17) so as to form the medial segment (8),
    - etching of the peripheral side surfaces of the two peripheral insulating layers (17) so as to delineate the peripheral segments (9),
    - removal of the sacrificial layers (16, 18).
  9. Method for realizing a micromechanical switch according to claim 8, characterized in that the medial insulating layer (19) is deposited at least partially on the front surface of the peripheral insulating layers (17).
  10. Method for realizing a micromechanical switch according to one of the claims 8 and 9, characterized in that the peripheral insulating layers (17) are each deposited on a part (20) of the front surface of the substrate (3) respectively arranged between the side surface of one of the peripheral sacrificial layers (16) and the first conductive element (5).
  11. Method for realizing a micromechanical switch according to any one of the claims 8 to 10, characterized in that deposition of the peripheral insulating layers (17) is performed so as to generate a stress gradient in the peripheral insulating layers (17).
  12. Method for realizing a micromechanical switch according to claim 11, characterized in that deposition of the peripheral insulating layers (17) is performed so as to generate, once the medial segment (8) has been deposited, a compression stress on the medial segment (8) in the longitudinal direction of the medial segment (8).
EP04767777A 2003-08-01 2004-07-26 Bistable micromechanical switch, actuating method and corresponding method for realizing the same Not-in-force EP1652205B1 (en)

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FR0309534A FR2858459B1 (en) 2003-08-01 2003-08-01 BISTABLE MICRO-MECHANICAL SWITCH, ACTUATION METHOD AND CORRESPONDING EMBODIMENT
PCT/FR2004/001988 WO2005015594A2 (en) 2003-08-01 2004-07-26 Bistable micromechanical switch, actuating method and corresponding method for realizing the same

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US7763818B2 (en) * 2005-07-29 2010-07-27 Brigham Young University Spherical bistable mechanism
KR101188438B1 (en) * 2006-02-20 2012-10-08 삼성전자주식회사 Mems switch of downward type and method for producing the same
EP1850360A1 (en) * 2006-04-26 2007-10-31 Seiko Epson Corporation Microswitch with a first actuated portion and a second contact portion
WO2007145294A1 (en) * 2006-06-15 2007-12-21 Panasonic Corporation Electromechanical element and electric apparatus using same
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US9783977B2 (en) * 2015-11-20 2017-10-10 University Of South Florida Shape-morphing space frame apparatus using unit cell bistable elements
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US7342472B2 (en) 2008-03-11
FR2858459B1 (en) 2006-03-10
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DE602004008648T2 (en) 2008-06-26
FR2858459A1 (en) 2005-02-04
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WO2005015594A3 (en) 2005-06-09
US20060192641A1 (en) 2006-08-31

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