EP1613203A4 - Digital micromirror device having a window transparent to ultraviolet (uv) light - Google Patents
Digital micromirror device having a window transparent to ultraviolet (uv) lightInfo
- Publication number
- EP1613203A4 EP1613203A4 EP04758020A EP04758020A EP1613203A4 EP 1613203 A4 EP1613203 A4 EP 1613203A4 EP 04758020 A EP04758020 A EP 04758020A EP 04758020 A EP04758020 A EP 04758020A EP 1613203 A4 EP1613203 A4 EP 1613203A4
- Authority
- EP
- European Patent Office
- Prior art keywords
- ultraviolet
- light
- micromirror device
- digital micromirror
- window transparent
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
- B81B7/0032—Packages or encapsulation
- B81B7/0067—Packages or encapsulation for controlling the passage of optical signals through the package
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/04—Optical MEMS
- B81B2201/042—Micromirrors, not used as optical switches
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Computer Hardware Design (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Radiation-Therapy Devices (AREA)
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/395,660 US7023605B2 (en) | 2003-03-24 | 2003-03-24 | Digital micromirror device having a window transparent to ultraviolet (UV) light |
US10/395,661 US7161727B2 (en) | 2003-03-24 | 2003-03-24 | Digital micromirror device having a window transparent to ultraviolet (UV) light |
US10/395,662 US6859311B2 (en) | 2003-03-24 | 2003-03-24 | Digital micromirror device having a window transparent to ultraviolet (UV) light |
PCT/US2004/008735 WO2004084710A2 (en) | 2003-03-24 | 2004-03-23 | Digital micromirror device having a window transparent to ultraviolet (uv) light |
Publications (2)
Publication Number | Publication Date |
---|---|
EP1613203A2 EP1613203A2 (en) | 2006-01-11 |
EP1613203A4 true EP1613203A4 (en) | 2009-12-09 |
Family
ID=33102138
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP04758020A Withdrawn EP1613203A4 (en) | 2003-03-24 | 2004-03-23 | Digital micromirror device having a window transparent to ultraviolet (uv) light |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP1613203A4 (en) |
JP (1) | JP2006521580A (en) |
CA (1) | CA2520104A1 (en) |
WO (1) | WO2004084710A2 (en) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102004030803A1 (en) * | 2004-06-25 | 2006-01-19 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Highly reflective coated micromechanical mirror, process for its preparation and its use |
KR20080087089A (en) * | 2005-12-15 | 2008-09-30 | 코닌클리케 필립스 일렉트로닉스 엔.브이. | Mems beam scanner system and method |
NL2003534A (en) * | 2008-10-24 | 2010-04-27 | Asml Holding Nv | Anti-reflective coating for optical elements. |
US8421995B2 (en) | 2008-10-24 | 2013-04-16 | Asml Holding N.V. | Anti-reflective coating for optical elements |
CN110200574B (en) * | 2019-06-27 | 2022-02-18 | 京东方科技集团股份有限公司 | Endoscopic imaging device |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2000048046A1 (en) * | 1999-02-12 | 2000-08-17 | Corning Incorporated | Vacuum ultraviolet transmitting silicon oxyfluoride lithography glass |
WO2001067977A1 (en) * | 2000-03-13 | 2001-09-20 | Memphis Eye & Cataract Associates Ambulatory Surgery Center (D.B.A.) Meca Laser And Surgery Center | Laser eye surgery system using wavefront sensor analysis to control digital micromirror device (dmd) mirror patterns |
US20020056560A1 (en) * | 2000-11-16 | 2002-05-16 | Liu Jwei Wien | MEMS enclosure |
US20020146200A1 (en) * | 2001-03-16 | 2002-10-10 | Kudrle Thomas David | Electrostatically actuated micro-electro-mechanical devices and method of manufacture |
WO2002100795A1 (en) * | 2001-06-13 | 2002-12-19 | Raytheon Company | Lid with window hermetically sealed to frame, and a method of making it |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6745449B2 (en) * | 2001-11-06 | 2004-06-08 | Raytheon Company | Method and apparatus for making a lid with an optically transmissive window |
US6639313B1 (en) * | 2002-03-20 | 2003-10-28 | Analog Devices, Inc. | Hermetic seals for large optical packages and the like |
-
2004
- 2004-03-23 WO PCT/US2004/008735 patent/WO2004084710A2/en active Search and Examination
- 2004-03-23 EP EP04758020A patent/EP1613203A4/en not_active Withdrawn
- 2004-03-23 CA CA002520104A patent/CA2520104A1/en not_active Abandoned
- 2004-03-23 JP JP2006507454A patent/JP2006521580A/en active Pending
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2000048046A1 (en) * | 1999-02-12 | 2000-08-17 | Corning Incorporated | Vacuum ultraviolet transmitting silicon oxyfluoride lithography glass |
WO2001067977A1 (en) * | 2000-03-13 | 2001-09-20 | Memphis Eye & Cataract Associates Ambulatory Surgery Center (D.B.A.) Meca Laser And Surgery Center | Laser eye surgery system using wavefront sensor analysis to control digital micromirror device (dmd) mirror patterns |
US20020056560A1 (en) * | 2000-11-16 | 2002-05-16 | Liu Jwei Wien | MEMS enclosure |
US20020146200A1 (en) * | 2001-03-16 | 2002-10-10 | Kudrle Thomas David | Electrostatically actuated micro-electro-mechanical devices and method of manufacture |
WO2002100795A1 (en) * | 2001-06-13 | 2002-12-19 | Raytheon Company | Lid with window hermetically sealed to frame, and a method of making it |
Also Published As
Publication number | Publication date |
---|---|
CA2520104A1 (en) | 2004-10-07 |
JP2006521580A (en) | 2006-09-21 |
EP1613203A2 (en) | 2006-01-11 |
WO2004084710A3 (en) | 2006-03-23 |
WO2004084710A2 (en) | 2004-10-07 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
17P | Request for examination filed |
Effective date: 20051013 |
|
AK | Designated contracting states |
Kind code of ref document: A2 Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PL PT RO SE SI SK TR |
|
AX | Request for extension of the european patent |
Extension state: AL LT LV MK |
|
PUAK | Availability of information related to the publication of the international search report |
Free format text: ORIGINAL CODE: 0009015 |
|
RIC1 | Information provided on ipc code assigned before grant |
Ipc: G02B 26/00 20060101AFI20060410BHEP |
|
DAX | Request for extension of the european patent (deleted) | ||
A4 | Supplementary search report drawn up and despatched |
Effective date: 20091111 |
|
RIC1 | Information provided on ipc code assigned before grant |
Ipc: G02B 26/08 20060101ALI20091105BHEP Ipc: G02B 1/02 20060101ALI20091105BHEP Ipc: G02B 26/00 20060101AFI20060410BHEP |
|
17Q | First examination report despatched |
Effective date: 20100222 |
|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN |
|
18D | Application deemed to be withdrawn |
Effective date: 20100706 |