EP1274942B8 - Vacuum pump with two co-operating rotors - Google Patents

Vacuum pump with two co-operating rotors Download PDF

Info

Publication number
EP1274942B8
EP1274942B8 EP01927731A EP01927731A EP1274942B8 EP 1274942 B8 EP1274942 B8 EP 1274942B8 EP 01927731 A EP01927731 A EP 01927731A EP 01927731 A EP01927731 A EP 01927731A EP 1274942 B8 EP1274942 B8 EP 1274942B8
Authority
EP
European Patent Office
Prior art keywords
gear
rotor shafts
drive
vacuum pump
drive shaft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP01927731A
Other languages
German (de)
French (fr)
Other versions
EP1274942B1 (en
EP1274942A1 (en
Inventor
Manfred Behling
Lothar Brenner
Thomas Dreifert
Hartmut Kriehn
Klaus Rofall
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Oerlikon Leybold Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Leybold Vacuum GmbH filed Critical Oerlikon Leybold Vacuum GmbH
Publication of EP1274942A1 publication Critical patent/EP1274942A1/en
Publication of EP1274942B1 publication Critical patent/EP1274942B1/en
Application granted granted Critical
Publication of EP1274942B8 publication Critical patent/EP1274942B8/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0042—Driving elements, brakes, couplings, transmissions specially adapted for pumps
    • F04C29/005—Means for transmitting movement from the prime mover to driven parts of the pump, e.g. clutches, couplings, transmissions

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Permanent Magnet Type Synchronous Machine (AREA)
  • Cephalosporin Compounds (AREA)

Abstract

A vacuum pump ( 1 ) comprising a pump chamber casing ( 5 ) accommodating two co-operating rotors ( 2, 3 ) which are respectively arranged on a shaft ( 8, 9 ). A bearing/gear chamber ( 6 ) is disposed adjacent to the pump chamber casing ( 5 ) in which the rotor shafts ( 8, 9 ) are cantilevered and provided with a synchronisation gear ( 17 ). A drive motor ( 25 ) whose drive shaft ( 28 ) extending parallel to the rotor shafts ( 8, 9 ) and is provided with a drive gear ( 35 ). A gear stage ( 37 ) is disposed between the drive shaft ( 28 ) and one of the rotor shafts ( 8, 9 ). In order to provide a machine of this type which can be embodied in a compact form, the drive gear ( 35 ) of the drive shaft ( 28 ) engages directly with a driven gear ( 36 ) on one of the rotor shafts ( 8, 9 ), forming the gear stage ( 37 ).
EP01927731A 2000-04-18 2001-03-15 Vacuum pump with two co-operating rotors Expired - Lifetime EP1274942B8 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE10019066A DE10019066A1 (en) 2000-04-18 2000-04-18 Vacuum pump with two cooperating rotors has drive shaft with drive pulley engaging directly with take-off hear on rotor shaft to form transmission stage
DE10019066 2000-04-18
PCT/EP2001/002972 WO2001079701A1 (en) 2000-04-18 2001-03-15 Vacuum pump with two co-operating rotors

Publications (3)

Publication Number Publication Date
EP1274942A1 EP1274942A1 (en) 2003-01-15
EP1274942B1 EP1274942B1 (en) 2010-07-14
EP1274942B8 true EP1274942B8 (en) 2010-09-01

Family

ID=7639093

Family Applications (1)

Application Number Title Priority Date Filing Date
EP01927731A Expired - Lifetime EP1274942B8 (en) 2000-04-18 2001-03-15 Vacuum pump with two co-operating rotors

Country Status (8)

Country Link
US (1) US6964559B2 (en)
EP (1) EP1274942B8 (en)
JP (1) JP4838480B2 (en)
KR (1) KR100793456B1 (en)
AT (1) ATE474139T1 (en)
DE (2) DE10019066A1 (en)
TW (1) TW507048B (en)
WO (1) WO2001079701A1 (en)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10156180B4 (en) * 2001-11-15 2015-10-15 Oerlikon Leybold Vacuum Gmbh Cooled screw vacuum pump
DE10156179A1 (en) * 2001-11-15 2003-05-28 Leybold Vakuum Gmbh Cooling a screw vacuum pump
KR100561419B1 (en) * 2004-02-21 2006-03-16 삼성전자주식회사 Multi-head gear pump and liquid type image forming apparatus
DE102004016237A1 (en) * 2004-04-02 2005-10-20 Leybold Vakuum Gmbh Twin-shaft vacuum pump has drive pinion in form of internally toothed ring gear which encompasses driven gearwheel and at least partially axially covers both synchronizing gearwheels
DE102006030917B4 (en) 2006-06-26 2018-08-16 Pierburg Gmbh Oil pump and vacuum pump module
JP2008157446A (en) * 2006-11-30 2008-07-10 Anest Iwata Corp Driving force transmission mechanism between two or more rotary shafts, and oil-free fluid machine using the driving force transmission mechanism
JP2008138549A (en) * 2006-11-30 2008-06-19 Anest Iwata Corp Oilless fluid machine having oilless fluid machine body provided with two or more rotating shafts
US7997227B2 (en) * 2007-03-13 2011-08-16 General Electric Company Vacuum coater device and mechanism for supporting and manipulating workpieces in same
DE102007053979A1 (en) * 2007-11-13 2009-05-14 Pfeiffer Vacuum Gmbh Vacuum pump with lubricant pump
US20110293444A1 (en) * 2008-12-19 2011-12-01 Mouvex Device for pressurizing a fluid, to be directly mounted on a power take-off
US8764424B2 (en) 2010-05-17 2014-07-01 Tuthill Corporation Screw pump with field refurbishment provisions
WO2012055734A2 (en) 2010-10-27 2012-05-03 Gebr. Becker Gmbh Vacuum pump
CN102080642B (en) * 2010-12-17 2012-07-04 中国科学院遗传与发育生物学研究所 Pneumatic water pumping method for windmill
DE202017003046U1 (en) * 2017-06-09 2018-09-14 Leybold Gmbh Dry-compacting vacuum pump
DE102018113043A1 (en) * 2018-05-31 2019-12-05 FRISTAM Pumpen Schaumburg GmbH Rotary positive displacement pump

Family Cites Families (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2446194A (en) * 1943-07-30 1948-08-03 Samiran David Pump construction
US2880676A (en) * 1956-03-26 1959-04-07 Succop Anna Louise Motor and pump combination
US2937807A (en) * 1956-12-26 1960-05-24 Heraeus Gmbh W C High vacuum pumps
US3651705A (en) * 1970-10-14 1972-03-28 Fiat Spa Gears for toothed belt drives, particularly for motors for automotive vehicles, made of synthetic material
US3796526A (en) * 1972-02-22 1974-03-12 Lennox Ind Inc Screw compressor
SE455719B (en) * 1979-09-24 1988-08-01 Isartaler Schraubenkompressor COMPRESSOR SYSTEM WITH A SCRAP COMPRESSOR
US4674960A (en) * 1985-06-25 1987-06-23 Spectra-Physics, Inc. Sealed rotary compressor
JP2511870B2 (en) * 1986-03-20 1996-07-03 株式会社日立製作所 Screen-vacuum pump device
US4877385A (en) * 1987-01-20 1989-10-31 General Motors Corporation Positive displacement rotary mechanism
JPS63198789A (en) 1987-02-13 1988-08-17 Hitachi Ltd Foil-free vacuum pump
DE3706588C2 (en) * 1987-02-26 1993-12-02 Mannesmann Ag Drive device for rotary piston compressors
US4943215A (en) 1988-02-29 1990-07-24 Leybold Aktiengesellschaft Multistage vacuum pump with bore for fouling removal
EP0332741B1 (en) * 1988-02-29 1991-09-18 Leybold Aktiengesellschaft Multistage vacuum pump
JPH0758074B2 (en) * 1988-04-28 1995-06-21 株式会社日立製作所 Oil-free screw compressor device
JP2635406B2 (en) 1989-04-20 1997-07-30 株式会社神戸製鋼所 Oil-free screw pump device
FR2656658B1 (en) * 1989-12-28 1993-01-29 Cit Alcatel MIXED TURBOMOLECULAR VACUUM PUMP, WITH TWO ROTATION SHAFTS AND WITH ATMOSPHERIC PRESSURE DISCHARGE.
DE69123898T3 (en) 1990-08-01 2004-08-05 Matsushita Electric Industrial Co., Ltd., Kadoma Rotary system for liquid media
US5454700A (en) * 1993-05-08 1995-10-03 Ishikawajima-Harima Jukogyo Kabushiki Kaisha Bearing support for a lysholm compressor
US5443644A (en) * 1994-03-15 1995-08-22 Kashiyama Industry Co., Ltd. Gas exhaust system and pump cleaning system for a semiconductor manufacturing apparatus
JPH08144977A (en) * 1994-11-24 1996-06-04 Kashiyama Kogyo Kk Compound dry vacuum pump
SE506513C2 (en) * 1995-10-23 1997-12-22 Lysholm Techn Ab Transmission with a two-piece connector
JPH1193873A (en) 1997-09-22 1999-04-06 Aisin Seiki Co Ltd Vacuum pump
DE19745616A1 (en) * 1997-10-10 1999-04-15 Leybold Vakuum Gmbh Cooling system for helical vacuum pump
DE19820523A1 (en) * 1998-05-08 1999-11-11 Peter Frieden Spindle screw pump assembly for dry compression of gases
JP3668616B2 (en) 1998-09-17 2005-07-06 株式会社日立産機システム Oil-free screw compressor
DE19945871A1 (en) 1999-09-24 2001-03-29 Leybold Vakuum Gmbh Screw pump, in particular screw vacuum pump, with two pump stages

Also Published As

Publication number Publication date
KR20020091213A (en) 2002-12-05
DE50115557D1 (en) 2010-08-26
JP2004501308A (en) 2004-01-15
KR100793456B1 (en) 2008-01-14
WO2001079701A1 (en) 2001-10-25
US20030152468A1 (en) 2003-08-14
ATE474139T1 (en) 2010-07-15
EP1274942B1 (en) 2010-07-14
TW507048B (en) 2002-10-21
US6964559B2 (en) 2005-11-15
EP1274942A1 (en) 2003-01-15
DE10019066A1 (en) 2001-10-25
JP4838480B2 (en) 2011-12-14

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