EP1188225A4 - Electrostatic microactuator with offset and/or inclined comb drive fingers - Google Patents
Electrostatic microactuator with offset and/or inclined comb drive fingersInfo
- Publication number
- EP1188225A4 EP1188225A4 EP00923312A EP00923312A EP1188225A4 EP 1188225 A4 EP1188225 A4 EP 1188225A4 EP 00923312 A EP00923312 A EP 00923312A EP 00923312 A EP00923312 A EP 00923312A EP 1188225 A4 EP1188225 A4 EP 1188225A4
- Authority
- EP
- European Patent Office
- Prior art keywords
- offset
- comb drive
- drive fingers
- electrostatic microactuator
- inclined comb
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
- G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
- G02B6/357—Electrostatic force
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
- H02N1/002—Electrostatic motors
- H02N1/006—Electrostatic motors of the gap-closing type
- H02N1/008—Laterally driven motors, e.g. of the comb-drive type
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
- G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
- G02B6/3544—2D constellations, i.e. with switching elements and switched beams located in a plane
- G02B6/3548—1xN switch, i.e. one input and a selectable single output of N possible outputs
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
- G02B6/3582—Housing means or package or arranging details of the switching elements, e.g. for thermal isolation
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Micromachines (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US12876499P | 1999-04-12 | 1999-04-12 | |
US128764P | 1999-04-12 | ||
US464361 | 1999-12-15 | ||
US09/464,361 US6329737B1 (en) | 1998-12-15 | 1999-12-15 | Rotary electrostatic microactuator |
PCT/US2000/009919 WO2000062410A1 (en) | 1999-04-12 | 2000-04-12 | Electrostatic microactuator with offset and/or inclined comb drive fingers |
Publications (2)
Publication Number | Publication Date |
---|---|
EP1188225A1 EP1188225A1 (en) | 2002-03-20 |
EP1188225A4 true EP1188225A4 (en) | 2005-11-02 |
Family
ID=26826924
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP00923312A Withdrawn EP1188225A4 (en) | 1999-04-12 | 2000-04-12 | Electrostatic microactuator with offset and/or inclined comb drive fingers |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP1188225A4 (en) |
AU (1) | AU4346000A (en) |
CA (1) | CA2370044A1 (en) |
WO (1) | WO2000062410A1 (en) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2001043268A2 (en) * | 1999-11-29 | 2001-06-14 | Iolon, Inc. | Balanced microdevice and rotary electrostatic microactuator for use therewith |
US6903486B2 (en) | 1999-11-29 | 2005-06-07 | Iolon, Inc. | Balanced microdevice |
AU2929601A (en) | 2000-01-05 | 2001-07-16 | Iolon, Inc. | Tiltable electrostatic microactuator and method for using same |
US6671078B2 (en) | 2001-05-23 | 2003-12-30 | Axsun Technologies, Inc. | Electrostatic zipper actuator optical beam switching system and method of operation |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5998906A (en) * | 1998-01-13 | 1999-12-07 | Seagate Technology, Inc. | Electrostatic microactuator and method for use thereof |
-
2000
- 2000-04-12 EP EP00923312A patent/EP1188225A4/en not_active Withdrawn
- 2000-04-12 CA CA002370044A patent/CA2370044A1/en not_active Abandoned
- 2000-04-12 AU AU43460/00A patent/AU4346000A/en not_active Abandoned
- 2000-04-12 WO PCT/US2000/009919 patent/WO2000062410A1/en not_active Application Discontinuation
Non-Patent Citations (2)
Title |
---|
No further relevant documents disclosed * |
See also references of WO0062410A1 * |
Also Published As
Publication number | Publication date |
---|---|
WO2000062410A1 (en) | 2000-10-19 |
CA2370044A1 (en) | 2000-10-19 |
EP1188225A1 (en) | 2002-03-20 |
AU4346000A (en) | 2000-11-14 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
17P | Request for examination filed |
Effective date: 20011109 |
|
AK | Designated contracting states |
Kind code of ref document: A1 Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE |
|
RAP1 | Party data changed (applicant data changed or rights of an application transferred) |
Owner name: IOLON, INC. |
|
RBV | Designated contracting states (corrected) |
Designated state(s): DE FR GB |
|
A4 | Supplementary search report drawn up and despatched |
Effective date: 20050921 |
|
RIC1 | Information provided on ipc code assigned before grant |
Ipc: 7H 02N 1/00 A Ipc: 7G 02B 6/35 B |
|
17Q | First examination report despatched |
Effective date: 20060301 |
|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN |
|
18D | Application deemed to be withdrawn |
Effective date: 20061207 |