EP0428641A1 - Opto-electronic scale-reading apparatus - Google Patents

Opto-electronic scale-reading apparatus

Info

Publication number
EP0428641A1
EP0428641A1 EP19900906323 EP90906323A EP0428641A1 EP 0428641 A1 EP0428641 A1 EP 0428641A1 EP 19900906323 EP19900906323 EP 19900906323 EP 90906323 A EP90906323 A EP 90906323A EP 0428641 A1 EP0428641 A1 EP 0428641A1
Authority
EP
European Patent Office
Prior art keywords
grating
light
network
lines
scale
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP19900906323
Other languages
German (de)
French (fr)
Inventor
David Roberts Mcmurtry
William Frank Noel Stephens
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Renishaw PLC
Original Assignee
Renishaw PLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GB898908593A external-priority patent/GB8908593D0/en
Priority claimed from GB898913039A external-priority patent/GB8913039D0/en
Application filed by Renishaw PLC filed Critical Renishaw PLC
Publication of EP0428641A1 publication Critical patent/EP0428641A1/en
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings

Definitions

  • the invention relates to optical electronic scale reading apparatus, used for example in determining the extent and direction of relative motion between scale and a readhead.
  • optical electronic scale reading apparatus used for example in determining the extent and direction of relative motion between scale and a readhead.
  • O89/05440 we disclosed the illumination of a scale for generating a set of primary diffraction orders, and consequent light modulations at an analyser grating, together with a splitting means for generating a plurality of sets of primary orders in order to provide at a single analyser grating a plurality of such light modulations in a phase shifted relationship.
  • an opto-electronic scale reading apparatus comprising a scale and a readhead, the readhead comprising: an analyser grating; an illuminating means for illuminating the scale with a single beam of light, and generating a set of primary diffraction orders, thereby to produce interference fringes in the plane of the analyser grating and a light modulation upon relative movement of the scale and the readhead; splitting means for splitting said set of primary orders of diffraction into a plurality of sets, thereby providing at a single said analyser grating a plurality of light modulations in a phase-shifted relationship; characterised by an aperature provided substantially in the plane of said splitting means for limiting the light passing from the scale to the analyser grating.
  • the splitting means may comprise any means suitable for this purpose e.g. a prism, but preferably the splitting means comprise an auxiliary grating. Lines defining the auxiliary grating may extend either parallel to, or at an angle to lines defining the analyser grating.
  • the illuminating means may be provided by a coherent beam of light incident directly upon the scale, or alternatively a beam of non-coherent light and index grating provided upbeam of the auxiliary grating.
  • the facia to light modulations are typically spatially indistinct at the analyser grating.
  • the aperture enables separate detection of the various light modulations without the need for a foccussing lens.
  • Fig. 1 shows an apparatus according to the first embodiment of the present invention.
  • Fig. 2 shows a section on the line II-II in Fig. 2;
  • Fig. 3 shows a perspective view of an apparatus according to a second embodiment of the present invention; and
  • Fig. 4 shows a section on IV-IV in Fig. 3.
  • a scale 11 has reflective marks as defined by lines 11A spaced apart in the X direction, and in an XY plane.
  • the readhead 10 is supported for movement relative to the scale 11 in the X direction, and is spaced from the scale 11 in the Z direction.
  • a readhead 10 comprises a non-coherent light source S which projects a beam of non-coherent light onto a scale 11 via an index grating 12, and an aperture Al.
  • the light source S and the index grating 12 cooperate to create a periodic light pattern, which interacts with the scale 11 to produce a set of primary diffraction orders BO, Bl and B2.
  • the primary diffraction orders BO, Bl and B2 interfere with each other to produce a set of interference fringes at an analyser grating 13, which upon relative movement of the scale 11 and the readhead 10 cause a light modulation.
  • an auxiliary grating 14 is placed in the path of the primary orders of diffraction BO, Bl and B2.
  • the lines of grating 14 extend parallel to the lines of the analyser grating 13, and the auxiliary grating 14 interacts with the set of primary orders B0, Bl and B2 to generate three sets of such primary orders; each set of primary orders corresponding to a secondary order of diffraction DO, DI and D2 produced by the auxiliary grating 14.
  • the gratings 13, 14 may be provided on opposite sides of a glass plate 10A which may also have the grating 12 provided thereon. Typical values for the pitch of the gratings are 0.008mm for the gratings 12, 13, and 0.004mm for the grating 14. Generally, the pitch of grating 14 is selected to give a required separation of the split beams DO, DI and D2, in the plane of the transducers Tl, T2 and T3.
  • each one set of primary orders can be made to produce a light modulation having a phase shift (PI, P2, P3) relative to the other light modulations.
  • PI, P2, P3 phase shift relative to the other light modulations.
  • the three sets of primary orders are spatially distinct at the analyser grating 13.
  • this is not an essential feature of the present invention, and by displacing the transducers Tl, T2, and T3, spatially separate light modulations corresponding to each of the sets of primary orders may be detected.
  • the outputs of the transducers Tl, T2, and T3 are typically an electrical signal whose amplitude is proportional to the intensity of light incident upon the transducer. These outputs may be sent to a quadrature circuit which produces two sinusoidally varying outputs having a quadrature relationship; such a circuit is shown in our copending patent application WO87/07943.
  • a readhead 10 comprises a non-coherent light source S, which projects light onto a scale 11 via an index grating 12, and at an angle ⁇ to the normal of the scale.
  • the scale interacts with the periodic light pattern produced by the light source S and index grating 12 o, produce a set of primary diffraction orders B0, Bl, and B2 which interfere with each other at the analyser grating 13 to produce fringes, and a light modulation consequent to movement of the readhead 10 relative to the scale 11.
  • the present invention differs from the first embodiment in that a single aperture A3 is provided which extends in the X direction.
  • auxiliary grating 14 is provided in the part of the aperature in register with the analyser grating 13.
  • the auxiliary grating 14 generates a plurality of sets of primary orders, each one corresponding to a secondary order DO, DI and D2.
  • the lines 14A of the auxiliary grating 14 extend substantially to the X direction, but are offset therefrom by an angle ⁇ . Consequently, each one of the secondary orders DO, DI, and D2 is offset from the other secondary orders in the X direction.
  • each one set of primary orders B0, Bl, and B2 is offset from each other set of primary orders in the X direction, and the light modulations corresponding to each set of primary orders will occur in a phase-shifted relationship.
  • the offset of the three orders is indicated schematically by the points of intersection Rl, R2, and R3.
  • Each of the light modulations is seen by a transducer Tl, T2, T3, which produces an electrical signal corresponding to the intensity of light incident thereupon.
  • a beam of coherent light is incident directly upon the scale, thus obviating the need for the index grating 12.
  • smaller apertures will usually be provided than for a corresponding beam of non-coherent light.
  • the orders +1,0, and -l are sufficient. Further orders, i.e. +2, -2 and beyond may be used but are unnecessary in this case.
  • the analyser grating maybe a phase grating such that the +2, -2 orders are avoided and further orders are so weak as to be negligible.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)

Abstract

Une tête de lecture (10) est mobile par rapport à une réglette (11) dans un sens dénommé X. Les lignes (11A) portées sur la réglette s'étendent dans le sens Y, la réglette s'étendant sur un plan XY. Une source de lumière (S) donne un faisceau lumineux non-cohérent qui passe par un réseau gradué (12) et frappe ladite réglette (11). La lumière provenant du réseau gradué (12) passe à travers une ouverture (A3) pour aboutir à la réglette, et la réglette coopère avec le dessin de lumière créé par ledit réseau (12) de manière à produire une série d'ordres de diffraction (B0, B1 et B2). Lesdits ordres de diffraction primaires (B0, B1 et B2) sont caractérisés par une interférence mutuelle de manière à créer une modulation de lumière sur un réseau d'analyse (13). Le réseau gradué et les réseaux d'analyse sont mutuellement adjacents sur une seule plaque de verre. Ladite plaque de verre est pourvue d'un réseau auxiliaire (14) située de l'autre côté (2) et aligné avec le réseau d'analyse (13). Les lignes (14A) dudit réseau auxiliaire s'étendent essentiellement dans le sens X, mais sont décalées par rapport au sens X d'un degré approximativement. Le réseau auxiliaire (14) divise la série d'ordres primaires (B0, B1 et B2) en trois séries semblables d'ordres primaires, chacune correspondant à un ordre de diffraction secondaire (D0, D1 et D2) réalisé au niveau du réseau auxiliaire (14). Le décalage des lignes (14A) sur ledit réseau (14) provoque, de manière réciproque, des modulations de lumières qui correspondent à un parmi de nombreux décalages d'ordres de diffraction primaires de sorte que lesdites lignes ont une différence de phase par rapport à toutes les autres modulations de lumière. Chaque modulation de lumière est détectée par un transducteur photosensible (T1, T2, et T3), chaque transducteur étant décalé par rapport au réseau d'analyse (13) dans le sens Z pour permettre la séparation spatiale des trois modulations de lumière en déphasage.A read head (10) is movable relative to a strip (11) in a direction called X. The lines (11A) carried on the strip extend in the Y direction, the strip extending on an XY plane. A light source (S) gives a non-coherent light beam which passes through a graduated network (12) and strikes said strip (11). The light coming from the graduated network (12) passes through an opening (A3) to reach the strip, and the strip cooperates with the pattern of light created by said network (12) so as to produce a series of diffraction orders. (B0, B1 and B2). Said primary diffraction orders (B0, B1 and B2) are characterized by mutual interference so as to create a light modulation on an analysis network (13). The graduated network and the analysis networks are mutually adjacent on a single glass plate. Said glass plate is provided with an auxiliary network (14) located on the other side (2) and aligned with the analysis network (13). The lines (14A) of said auxiliary network extend essentially in the X direction, but are offset from the X direction by approximately one degree. The auxiliary network (14) divides the series of primary orders (B0, B1 and B2) into three similar series of primary orders, each corresponding to a secondary diffraction order (D0, D1 and D2) produced at the level of the auxiliary network (14). The offset of the lines (14A) on said array (14) reciprocally causes light modulations which correspond to one of many offsets of primary diffraction orders so that said lines have a phase difference with respect to all other light modulations. Each light modulation is detected by a photosensitive transducer (T1, T2, and T3), each transducer being offset relative to the analysis network (13) in the Z direction to allow the spatial separation of the three light modulations in phase shift.

Description

OPTO-ELECTRONIC SCALE-READING APPARATUS
The invention relates to optical electronic scale reading apparatus, used for example in determining the extent and direction of relative motion between scale and a readhead. In our co-pending International Application No O89/05440 we disclosed the illumination of a scale for generating a set of primary diffraction orders, and consequent light modulations at an analyser grating, together with a splitting means for generating a plurality of sets of primary orders in order to provide at a single analyser grating a plurality of such light modulations in a phase shifted relationship.
The present invention provides a simplified construction of such an apparatus. According to the present invention there is provided an opto-electronic scale reading apparatus comprising a scale and a readhead, the readhead comprising: an analyser grating; an illuminating means for illuminating the scale with a single beam of light, and generating a set of primary diffraction orders, thereby to produce interference fringes in the plane of the analyser grating and a light modulation upon relative movement of the scale and the readhead; splitting means for splitting said set of primary orders of diffraction into a plurality of sets, thereby providing at a single said analyser grating a plurality of light modulations in a phase-shifted relationship; characterised by an aperature provided substantially in the plane of said splitting means for limiting the light passing from the scale to the analyser grating.
The splitting means may comprise any means suitable for this purpose e.g. a prism, but preferably the splitting means comprise an auxiliary grating. Lines defining the auxiliary grating may extend either parallel to, or at an angle to lines defining the analyser grating.
The illuminating means may be provided by a coherent beam of light incident directly upon the scale, or alternatively a beam of non-coherent light and index grating provided upbeam of the auxiliary grating.
The facia to light modulations are typically spatially indistinct at the analyser grating. However, the aperture enables separate detection of the various light modulations without the need for a foccussing lens.
Embodiments to the present invention will now be described, by way of example, and with reference to the accompanying drawings in which;
Fig. 1 shows an apparatus according to the first embodiment of the present invention. Fig. 2 shows a section on the line II-II in Fig. 2; Fig. 3 shows a perspective view of an apparatus according to a second embodiment of the present invention; and Fig. 4 shows a section on IV-IV in Fig. 3.
The apparatus of the two illustrated embodiments is described with reference to three mutually perpendicular directions X,Y, and Z. A scale 11 has reflective marks as defined by lines 11A spaced apart in the X direction, and in an XY plane. The readhead 10 is supported for movement relative to the scale 11 in the X direction, and is spaced from the scale 11 in the Z direction.
Referring now specifically to Figs. 1 and 2, a readhead 10 comprises a non-coherent light source S which projects a beam of non-coherent light onto a scale 11 via an index grating 12, and an aperture Al. The light source S and the index grating 12 cooperate to create a periodic light pattern, which interacts with the scale 11 to produce a set of primary diffraction orders BO, Bl and B2. The primary diffraction orders BO, Bl and B2 interfere with each other to produce a set of interference fringes at an analyser grating 13, which upon relative movement of the scale 11 and the readhead 10 cause a light modulation. In the example shown however an auxiliary grating 14 is placed in the path of the primary orders of diffraction BO, Bl and B2. The lines of grating 14 extend parallel to the lines of the analyser grating 13, and the auxiliary grating 14 interacts with the set of primary orders B0, Bl and B2 to generate three sets of such primary orders; each set of primary orders corresponding to a secondary order of diffraction DO, DI and D2 produced by the auxiliary grating 14. The gratings 13, 14 may be provided on opposite sides of a glass plate 10A which may also have the grating 12 provided thereon. Typical values for the pitch of the gratings are 0.008mm for the gratings 12, 13, and 0.004mm for the grating 14. Generally, the pitch of grating 14 is selected to give a required separation of the split beams DO, DI and D2, in the plane of the transducers Tl, T2 and T3.
By adjusting various parameters of the apparatus (e.g. the incident angle of the beam upon the scale 11, the width of the aperatures Al and A2, the pitch of the gratings, and the separation of the gratings 13 and 14) each one set of primary orders can be made to produce a light modulation having a phase shift (PI, P2, P3) relative to the other light modulations. In the diagrammatic representation shown of this embodiment in Fig. 1 the three sets of primary orders are spatially distinct at the analyser grating 13. However, this is not an essential feature of the present invention, and by displacing the transducers Tl, T2, and T3, spatially separate light modulations corresponding to each of the sets of primary orders may be detected. The outputs of the transducers Tl, T2, and T3 are typically an electrical signal whose amplitude is proportional to the intensity of light incident upon the transducer. These outputs may be sent to a quadrature circuit which produces two sinusoidally varying outputs having a quadrature relationship; such a circuit is shown in our copending patent application WO87/07943.
A second embodiment of the present invention will now be described "with reference to Figs. 3 and 4. A readhead 10 comprises a non-coherent light source S, which projects light onto a scale 11 via an index grating 12, and at an angle α to the normal of the scale. As described in the previous embodiment, the scale interacts with the periodic light pattern produced by the light source S and index grating 12 o, produce a set of primary diffraction orders B0, Bl, and B2 which interfere with each other at the analyser grating 13 to produce fringes, and a light modulation consequent to movement of the readhead 10 relative to the scale 11. The present invention differs from the first embodiment in that a single aperture A3 is provided which extends in the X direction. The part of the aperture in register with the index grating 12 is completely clear, whereas an auxiliary grating 14 is provided in the part of the aperature in register with the analyser grating 13. As with the previous embodiment, the auxiliary grating 14 generates a plurality of sets of primary orders, each one corresponding to a secondary order DO, DI and D2. The lines 14A of the auxiliary grating 14 extend substantially to the X direction, but are offset therefrom by an angle θ. Consequently, each one of the secondary orders DO, DI, and D2 is offset from the other secondary orders in the X direction. Thus, each one set of primary orders B0, Bl, and B2 is offset from each other set of primary orders in the X direction, and the light modulations corresponding to each set of primary orders will occur in a phase-shifted relationship. The offset of the three orders is indicated schematically by the points of intersection Rl, R2, and R3. Each of the light modulations is seen by a transducer Tl, T2, T3, which produces an electrical signal corresponding to the intensity of light incident thereupon. These signals are processed as discussed in the first embodiment. Referring now to Fig. 4, it can be seen that the three sets of primary orders are not spatially distinct at the analyser grating 13. However, as discussed above, the offset of the transducers Tl, T2 and T3 from the readhead 10 in the Z direction enables a satisfactory separation of these orders.
One of the consequences of the grating 14 having lines 14A which extend substantially parallel to the X direction, is that the phases corresponding to the orders DI and D2 are each offset in the same direction with respect to the phase corresponding to the order DO by some amount Δ. This offet results in the Lisajous figure corresponding to the outputs of the quadrature circuit (discussed above) becoming elliptical. Perfect quadrature signals produce a circular Lisajous figure. This eliptical Lisajous figure is undesirable since interpolation of the quadrature outputs becomes inaccurate, and the apparatus is much more susceptible to misalignment of the readhead and scale. Thus, to compensate for this, certain design parameters (for example the angle θ of the lines on the auxiliary grating 14, the thickness of the glass plate, and the angle α at which light is incident from the index grating 12 onto the scale 11) must be changed. The following parameters have been found to provide suitable quadratures outputs for an angle θ of 41 minutes: plate thickness 0.95mm; angle α = 30° plate thickness 0.61mm; angle a = 23° plate thickness 0.03mm; angle a - 11° The width of the apertures is to be chosen to enable individual detection of each of the phase-shifted light modulations by their respective transducer. The width of the aperture is thus chosen having regard to all other parameters of the apparatus.
In a modification of the present invention, a beam of coherent light is incident directly upon the scale, thus obviating the need for the index grating 12. In this modification, smaller apertures will usually be provided than for a corresponding beam of non-coherent light.
It has been found that for the purpose of processing the transducer outputs, the orders +1,0, and -l are sufficient. Further orders, i.e. +2, -2 and beyond may be used but are unnecessary in this case. The analyser grating maybe a phase grating such that the +2, -2 orders are avoided and further orders are so weak as to be negligible.

Claims

1. Opto-electronic scale reading apparatus comprising a scale (11) and a readhead (10) the readhead (10) comprising:
an analyser grating (13) illuminating means (3,12,) for illuminating the scale (11) with a single beam of light, and generating a set of primary diffraction orders (B0, B1,B2) thereby to produce interference fringes in the plane of the analyser grating (13) and a light modulation upon relative movement of the scale (11) and the readhead (10) , splitting means (14) for splitting said set fo primary orders (B0, Bl, B2) of diffraction into a plurality of sets thereby providing at a single said analyser grating (13) , a plurality of light modulations in a phase-shifted relationship, characterised by : an aperture (Al, A2;A3) provided substantially in the plane of said splitting means (14) for limiting the light passing from the scale (11) to the analyser grating 13) .
2. An apparatus according to claim 1, wherein the splitting means (14) comprises an auxiliary grating (14) for generating secondary diffraction orders (DO, DI, D2) each one corresponding to one of said plurality of sets of primary diffraction orders (B0, Bl, B2) .
3. An apparatus according to claim 2 wherein the analyser grating (13) and the auxiliary grating (14) are provided on opposite sides of a single glass plate.
4. An apparatus according to claim 2 or claim 3 wherein the analyser grating (13) and the auxiliary grating (14) each have a periodic structure defined by spaced lines and the lines (14A) of the auxiliary grating (14) extend at an angle (90-θ) to the lines of the analyser grating.
5. An apparatus according to claim 2 or claim 3 wherein the analyser grating (13) and the auxiliary grating (14) each have a periodic structure defined by spaced lines and the lines of the auxiliary grating (14) extend parallel to the lines of the analyser grating (13) .
6. An apparatus according to any one of the preceding claims wherein the illuminating means is a beam of coherent light.
7. An apparatus according to any one of claims 1 to 5 wherein the illuminating means (3,12) is a beam of non-coherent light, and an index grating (12) is provided in the path of said light upbeam of the auxiliary grating (14).
8. An apparatus according to claim 7 as dependent upon claim 3 wherein the index grating (12) is provided on said glass plate adjacent the analyser grating (13) .
9. An apparatus according to claim 8 further comprising a further aperture (A1;A3) in the path of the light incident upon the scale, and between the index grating (12) and the scale (11) .
10. An apparatus according to any one of the preceding claims wherein said phase-shifted light modulation are spatially indistinct at the analyser grating (13) .
EP19900906323 1989-04-15 1990-04-12 Opto-electronic scale-reading apparatus Withdrawn EP0428641A1 (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
GB8908593 1989-04-15
GB898908593A GB8908593D0 (en) 1989-04-15 1989-04-15 Opto-electronic scale-reading apparatus
GB898913039A GB8913039D0 (en) 1989-06-07 1989-06-07 Opto-electronic scale reading apparatus
GB8913039 1989-06-07

Publications (1)

Publication Number Publication Date
EP0428641A1 true EP0428641A1 (en) 1991-05-29

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EP19900906323 Withdrawn EP0428641A1 (en) 1989-04-15 1990-04-12 Opto-electronic scale-reading apparatus

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EP (1) EP0428641A1 (en)
JP (1) JPH03505633A (en)
WO (1) WO1990013006A1 (en)

Families Citing this family (7)

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Publication number Priority date Publication date Assignee Title
EP0486050B1 (en) * 1990-11-16 1998-02-04 Canon Kabushiki Kaisha Method and apparatus for measuring displacement
JP2862417B2 (en) * 1990-11-16 1999-03-03 キヤノン株式会社 Displacement measuring device and method
JPH06160114A (en) * 1992-11-26 1994-06-07 Ono Sokki Co Ltd Encoder
JP3210111B2 (en) * 1992-12-24 2001-09-17 キヤノン株式会社 Displacement detector
GB9425907D0 (en) * 1994-12-22 1995-02-22 Renishaw Plc Opto-electronic scale reading apparatus
DE19524725C1 (en) * 1995-07-07 1996-07-11 Zeiss Carl Jena Gmbh Photoelectric encoder for scanning optical structures, e.g. for angle measurement device,
JP2010230409A (en) * 2009-03-26 2010-10-14 Olympus Corp Optical encoder

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Publication number Priority date Publication date Assignee Title
DE2451668A1 (en) * 1974-10-31 1976-05-06 Leitz Ernst Gmbh ARRANGEMENT FOR THE GEOMETRIC SEPARATION OF LIGHT FLOWS IN IMAGING SYSTEMS
DE2451994A1 (en) * 1974-11-02 1976-11-04 Fromund Prof Dipl Phys Hock Optical measuring system for resolving direction of movement - produces sinusoidal functions of coordinates using diffraction gratings
GB8729066D0 (en) * 1987-12-12 1988-01-27 Renishaw Plc Opto-electronic scale-reading apparatus

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Title
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WO1990013006A1 (en) 1990-11-01
JPH03505633A (en) 1991-12-05

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