EP0366056B1 - Internal diameter saw blade - Google Patents
Internal diameter saw blade Download PDFInfo
- Publication number
- EP0366056B1 EP0366056B1 EP89119695A EP89119695A EP0366056B1 EP 0366056 B1 EP0366056 B1 EP 0366056B1 EP 89119695 A EP89119695 A EP 89119695A EP 89119695 A EP89119695 A EP 89119695A EP 0366056 B1 EP0366056 B1 EP 0366056B1
- Authority
- EP
- European Patent Office
- Prior art keywords
- internal diameter
- saw blade
- coating
- diameter saw
- mechanical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D1/00—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor
- B28D1/02—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor by sawing
- B28D1/12—Saw-blades or saw-discs specially adapted for working stone
- B28D1/121—Circular saw blades
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D5/00—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting only by their periphery; Bushings or mountings therefor
- B24D5/12—Cut-off wheels
- B24D5/126—Cut-off wheels having an internal cutting edge
Definitions
- the invention relates to an inner hole saw for separating thin slices from a rod, for example made of monocrystalline silicon, which consists of a thin circular core sheet provided with an inner hole in its center, which has a coating of diamond, boron nitride or other hard material grains with one in the edge region of the inner hole Bond carries.
- Internal hole saws of this type are used in particular in the electronics industry for separating so-called “wafers”, that is to say extremely thin slices from a monocrystalline silicon rod, as are used in particular for the production of so-called chips.
- the inner hole saws have a core sheet for this purpose, which has a thickness of, for example, only 0.15 mm or 150 ⁇ m, which has a hole in the center, the edge of which is provided with a coating in which diamond grains are arranged in a dense arrangement are embedded.
- the bond of the diamond grains consists of an electroplated metal coating, which is preferably a nickel matrix.
- the arrangement of the hard material covering is not limited to the cylindrical inner edge of the hole. Rather, the diamond coating extends on both sides of the core blade at the edge zones adjoining the hole with a width of approximately 2 mm.
- the thin core blade is clamped in a clamping ring in order to produce high rigidity.
- a clamping ring is arranged in a machine, from which it is set in rapid rotation during operation of the internal hole saw.
- the distance from the edge of the inner hole to the clamping ring must be chosen at least so large that rods with a corresponding diameter size can be cut.
- the advantage of such saws is that they can be used to produce small cutting widths and thus only a small loss of material from the material to be sawn. This is of particular advantage when processing expensive materials such as monocrystalline semiconductor materials.
- brittle hard materials such as. B. ceramics, quartz glass, glass, minerals but also metals.
- the reproducible setting of different diamond concentrations is difficult, in other words that it is difficult to use different diamond concentrations in the nickel matrix when the diamond grains are galvanically bonded, in order to adapt the saw to the material to be processed or high diamond concentrations or very low concentrations to take advantage of.
- Inner hole saws therefore have particular problems because they have to be stretched for their use, in contrast to normal grinding wheels or external saws, in which no such internal stresses or strains occur as a result of clamping.
- the object of the invention is to provide an internal hole saw whose mechanical and thermal properties can be specifically adapted to the materials to be processed and different operating conditions and which does not have the disadvantages associated with frequent re-sharpening.
- the hard material bodies are embedded in a high-temperature-resistant synthetic resin bond, which is applied to the core sheet by casting or pressing, the coating adhesion on the core sheet being supported by a mechanical anchoring, and the synthetic resin having an elongation at break of more than 2%, a tensile strength of than 20 N / mm2 and a glass transition temperature of 200 to 400 ° C.
- These are preferably epoxy resins, polyimides, flexible phenolic resins.
- the properties of the internal hole saw according to the invention can be adapted to the materials to be machined by the use of fillers made of metallic or non-metallic materials, whereby a sufficient hold of the diamond or other hard material grains can be influenced, in which the grains are coated with a metallic or are provided with non-metallic material.
- the additives can also prove to be useful for sufficient resistance of the synthetic resin to the coolants commonly used when using internal hole saws, which are usually water with an alkaline or acidic additive.
- the covering is applied in powder form on the core sheet.
- the two are then heated together, the powder being pressed simultaneously at a temperature in the range of the glass transition temperature of the chosen resin.
- the coating is poured in the liquid state within a mold on the core sheet, as is possible in particular when using epoxy resins.
- a subsequent attachment of a prefabricated covering to the core sheet can also be provided as an alternative.
- Such attachment can be done using an adhesive consisting of two components.
- fillers can influence tensile strength or elongation at break, for example.
- fibrous or needle-shaped materials such as glass, carbon or metal fibers come into consideration.
- the thermal conductivity can be influenced by metallic fillers and the coefficient of friction can be reduced by using dry lubricants such as graphite or polytetrafluoroethylene (PTFE).
- dry lubricants such as graphite or polytetrafluoroethylene (PTFE).
- mechanical clamping or anchoring can be used by the arrangement of holes in the core sheet, which leads to bridging between the two covering sides or by the arrangement of grooves in the core sheet. Adhesion is also possible, as is adhesion by chemical reaction with the core sheet material, in particular provided that the core sheet also consists of a fiber-reinforced plastic.
- the liability of the covering is improved by roughening the core sheet beforehand. This can be done mechanically, for example by sandblasting or grinding. Instead, chemical roughening can be done by using acids or by electrolytic etching.
- FIGS. 1 to 3 of an internal hole saw for separating thin slices from a rod 1 made of monocrystalline silicon has a core sheet 3 which is made of sheet metal and has a thickness of, for example, 0.15 mm.
- the core sheet 3 is provided with an inner hole 4, the cylindrical wall area of which is provided with a covering 5 which consists of diamond grains which are held in a plastic bond.
- the covering 5 extends on both sides of the core sheet 3 over an edge width of, for example, 2 mm beyond the edge of the inner hole 4.
- the core sheet 3 is provided with holes 6 which are arranged concentrically immediately next to the edge of the inner hole and which, according to FIG. 2, are penetrated by the diamond covering 5, so that bridges are formed between the two lateral covering sections, leading to the adhesion of the covering 5 Contribute to core sheet 3.
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Mining & Mineral Resources (AREA)
- Polishing Bodies And Polishing Tools (AREA)
Description
Die Erfindung betrifft eine Innenlochsäge zum Abtrennen dünner Scheibenvoneinem Stab beispielsweise aus monokristallinem Silizium, die aus einem dünnen, in seiner Mitte mit einem Innenloch versehenen kreisförmigen Kernblatt besteht, das in dem Randbereich des Innenloches einen Belag aus Diamant-, Bornitrid - oder anderen Hartstoffkörnern mit einer Bindung trägt.The invention relates to an inner hole saw for separating thin slices from a rod, for example made of monocrystalline silicon, which consists of a thin circular core sheet provided with an inner hole in its center, which has a coating of diamond, boron nitride or other hard material grains with one in the edge region of the inner hole Bond carries.
Derartige Innenlochsägen finden insbesondere Anwendung in der Elektronikindustrie zum Abtrennen von sogenannten "Wafers", das heißt extrem dünnen Scheiben von einem monokristallinem Siliziumstab, wie sie insbesondere Verwendung finden für die Herstellung sogenannter Chips. Die Innenlochsägen besitzen dafür ein Kernblech, das eine Dicke aufweist von beispielsweise lediglich 0,15 mm bzw. 150 µm, das im Zentrum ein Loch aufweist, dessen Kante rundherum mit einem Belag versehen ist, in dem in dichter Anordnung Diamantkörner eingebettet sind. Bei bekannten Innenlochsägen besteht die Bindung der Diamantkörner aus einem galvanisch aufgetragenen Metallbelag, wobei es sich vorzugsweise um eine Nickelmatrix handelt. Die Anordnung des Hartstoffbelages ist dabei nicht beschränkt auf die zylinderförmige Lochinnenkante. Vielmehr erstreckt sich der Diamantbelag auf beiden Seiten des Kernblattes an den an das Loch anschließenden Randzonen in einer Breite von etwa 2 mm.Internal hole saws of this type are used in particular in the electronics industry for separating so-called “wafers”, that is to say extremely thin slices from a monocrystalline silicon rod, as are used in particular for the production of so-called chips. The inner hole saws have a core sheet for this purpose, which has a thickness of, for example, only 0.15 mm or 150 µm, which has a hole in the center, the edge of which is provided with a coating in which diamond grains are arranged in a dense arrangement are embedded. In known internal hole saws, the bond of the diamond grains consists of an electroplated metal coating, which is preferably a nickel matrix. The arrangement of the hard material covering is not limited to the cylindrical inner edge of the hole. Rather, the diamond coating extends on both sides of the core blade at the edge zones adjoining the hole with a width of approximately 2 mm.
Für eine Benutzung einer derartigen Innenlochsäge wird das dünne Kernblatt in einem Spannring eingespannt, um eine hohe Steifigkeit hervorzurufen. Ein solcher Spannring ist in einer Maschine angeordnet, von der er beim Betrieb der Innenlochsäge in eine schnelle Rotation versetzt wird. Der Abstand vom Rand des Innenloches bis zum Spannring muß dabei mindestens so groß gewählt sein, daß sich Stäbe mit entsprechender Durchmessergröße schneiden lassen. Als Vorteil solcher Sägen ergibt sich, daß mit ihnen geringe Schnittbreiten zu erzeugen sind und damit nur ein geringer Materialverlust des zu sägenden Materials. Das ist von besonderem Vorteil bei der Bearbeitung kostspieliger Werkstoffe wie monokristalliner Halbleitermaterialien.To use such an internal hole saw, the thin core blade is clamped in a clamping ring in order to produce high rigidity. Such a clamping ring is arranged in a machine, from which it is set in rapid rotation during operation of the internal hole saw. The distance from the edge of the inner hole to the clamping ring must be chosen at least so large that rods with a corresponding diameter size can be cut. The advantage of such saws is that they can be used to produce small cutting widths and thus only a small loss of material from the material to be sawn. This is of particular advantage when processing expensive materials such as monocrystalline semiconductor materials.
Neben monokristallinem Silizium lassen sich jedoch naturgemäß auch andere Materialien verarbeiten und zwar insbesondere sprödharte Werkstoffe wie z. B. Keramik, Quarzglas, Glas, Mineralien aber auch Metalle.In addition to monocrystalline silicon, other materials can of course also be processed, in particular brittle hard materials such as. B. ceramics, quartz glass, glass, minerals but also metals.
Einer Anpassung bekannter Innenlochsägen an den jeweils zu bearbeitenden Werkstoff sind jedoch enge Grenzen gesetzt, wenn die Hartstoffkörner, bei denen es sich überwiegend um Diamantkörner handelt, in bekannter Weise galvanisch gebunden sind.However, there are narrow limits to adapting known internal hole saws to the material to be machined if the hard material grains, which are predominantly diamond grains, are galvanically bonded in a known manner.
So ist einerseits die reproduzierbare Einstellung unterschiedlicher Diamantkonzentrationen erschwert, das heißt mit anderen Worten daß es schwierig ist, bei einer galvanischen Bindung der Diamantkörner unterschiedliche Diamantkonzentrationen in der Nickelmatrix auszunutzen, um dadurch die Säge dem zu bearbeitenden Material anzupassen bzw. hohe Diamantkonzentrationen oder sehr niedrige Konzentrationen auszunutzen.On the one hand, the reproducible setting of different diamond concentrations is difficult, in other words that it is difficult to use different diamond concentrations in the nickel matrix when the diamond grains are galvanically bonded, in order to adapt the saw to the material to be processed or high diamond concentrations or very low concentrations to take advantage of.
Darüber hinaus sind die mechanischen sowie thermischen Eigenschaften einer galvanischen Bindungsmatrix nur in engen Grenzen zu variieren. Das wirkt sich unter anderem stark aus auf den Schärfezustand von Innenlochsägen. Die Diamantkörner werden zwar in einer galvanischen Bindung gut gehalten bei einem relativ geringen Bindungsverschleiß. Nach einer gewissen Einsatzzeit stumpft jedoch ein Teil der Diamantkörner durch Verschleiß ab, so daß die Säge geschärft werden muß in dem Sinne, daß Diamantkörner freigelegt werden. Bei diesem Vorgang werden stumpfe Diamantkörner herausgerissen und die galvanische Bindung soweit zurückgesetzt, daß scharfkantige Diamantkörner freigelegt werden. Der Nachteil liegt dabei jedoch darin, daß bei diesen Sägen der Schärfezustand nicht über eine längere Zeit konstant ist und damit nicht eine kontinuierliche Wirkung gewährleistet ist. Hinzu kommen als Nachteile der erhöhte Zeitaufwand durch Schärfen und die Verminderung der Standzeit infolge der Entfernung von ansich noch brauchbaren Diamantkörnern.In addition, the mechanical and thermal properties of a galvanic bond matrix can only be varied within narrow limits. Among other things, this has a strong impact on the sharpness of internal hole saws. The diamond grains are well held in a galvanic bond with a relatively low bond wear. After a certain period of use, however, some of the diamond grains become dull due to wear, so that the saw has to be sharpened in the sense that diamond grains are exposed. In this process, blunt diamond grains are torn out and the galvanic bond is reset to such an extent that sharp-edged diamond grains are exposed will. The disadvantage, however, is that the sharpness of these saws is not constant over a long period of time and therefore a continuous effect is not guaranteed. In addition there are disadvantages of the increased expenditure of time due to sharpening and the reduction of the service life due to the removal of diamond grains which are still usable.
Bei Innenlochsägen treten somit besondere Probleme auf, weil sie gedehnt werden müssen für ihren Einsatz, im Gegensatz zu normalen Schleifscheiben, bzw. Außensägen, bei denen nicht derartige Eigenspannungen oder Dehnungen infolge einer Einspannung auftreten.Inner hole saws therefore have particular problems because they have to be stretched for their use, in contrast to normal grinding wheels or external saws, in which no such internal stresses or strains occur as a result of clamping.
Bisher erschien es deshalb nicht möglich, im Bereich des Innenloches einer Innenlochsäge eine Kunststoffbindung vorzusehen, die ausreichende Eigenschaften aufweist, denn ein solcher Kunststoff muß einerseits geeignet sein für eine ausreichende Halterung der Diamantkörner und außerdem für einen sogenannten Selbstschärfeprozeß, das heißt für eine Zurücksetzung der Bindung gegenüber den Diamantkörnern beim Einsatz. Unabhängig davon muß jedoch der Kunststoff eine ausreichende Dehnfähigkeit aufweisen und eine besonders hohe Temperaturwiderstandsfähigkeit, das heißt er darf einerseits nicht weich werden beim Einsatz, während er sich andererseits zurücksetzt zum Zwecke der Schärfung bzw. der fortlaufenden Selbstschärfung. Eine solche Zurücksetzung darf jedoch nicht infolge einer Er weichung stattfinden, sondern durch die mechanische Beanspruchung der Oberfläche des Kunststoffes.So far, it has therefore not seemed possible to provide a plastic bond in the area of the inner hole of an inner hole saw that has sufficient properties, because such a plastic must be suitable for sufficient holding of the diamond grains and also for a so-called self-sharpening process, i.e. for resetting the bond compared to the diamond grains in use. Regardless of this, however, the plastic must have sufficient elasticity and a particularly high temperature resistance, that is, it must on the one hand not become soft during use, while on the other hand it resets for the purpose of sharpening or continuous self-sharpening. However, such a reset may not result from an Er softening take place, but by the mechanical stress on the surface of the plastic.
Aufgabe der Erfindung ist es, eine Innenlochsäge zu schaffen, die sich in ihren mechanischen und thermischen Eigenschaften gezielt den zu bearbeitenden Werkstoffen und unterschiedlichen Einsatzbedingungen anpassen läßt und die nicht die mit einem häufigen Nachschärfen verbundenen Nachteile mit sich bringt. Gemäß der Erfindung ist dafür vorgesehen, daß die Hartstoffkörper in einer hochtemperaturfesten Kunstharzbindung eingebettet sind, die durch ein Gießen oder Pressen auf das Kernblatt aufgebracht ist, wobei die Belaghaftung auf dem Kernblatt durch eine mechanische Verankerung unterstützt ist, und das Kunstharz eine Bruchdehnung von mehr als 2 %, eine Zugfestigkeit von als 20 N/mm² und eine Glasübergangstemperatur von 200 bis 400°C aufweist.The object of the invention is to provide an internal hole saw whose mechanical and thermal properties can be specifically adapted to the materials to be processed and different operating conditions and which does not have the disadvantages associated with frequent re-sharpening. According to the invention, it is provided that the hard material bodies are embedded in a high-temperature-resistant synthetic resin bond, which is applied to the core sheet by casting or pressing, the coating adhesion on the core sheet being supported by a mechanical anchoring, and the synthetic resin having an elongation at break of more than 2%, a tensile strength of than 20 N / mm² and a glass transition temperature of 200 to 400 ° C.
Der Einsatz eines derartigen hochtemperaturfesten Kunstharzes als Bindung für die Diamantkörner hat nicht nur den Vorteil, die beim Spannen der Säge auftretende Dehnung des Kernblattes rißfrei und ohne ein Ablösen vom Kernblatt zu ertragen infolge einer hohen Dehnbarkeit und einer großen Zugfestigkeit. Ein weiterer wesentlicher Vorteil liegt vielmehr in dem Umstand, daß sich eine solche Säge beim Gebrauch selbst schärft durch eine Zurücksetzung des Bindungsmaterials bei seiner Beanspruchung, so daß die mit einem Nach schärfen verbundenen Nachteile entfallen.The use of such a high-temperature-resistant synthetic resin as a bond for the diamond grains not only has the advantage that the elongation of the core blade occurring during tensioning of the saw can be borne without cracks and without detachment from the core blade owing to its high elasticity and great tensile strength. Rather, another major advantage lies in the fact that such a saw sharpens itself during use by resetting the binding material when it is used, so that the aftermath sharpen associated disadvantages are eliminated.
Dabei handelt es sich vorzugsweise um Epoxyharze, Polyimide, flexibilisierte Phenolharze.These are preferably epoxy resins, polyimides, flexible phenolic resins.
Die Eigenschaften der erfindungsgemäßen Innenlochsäge lassen sich den zu bearbeitenden Werkstoffen im übrigen anpassen durch die Verwendung von Füllstoffen aus metallischen oder nichtmetallischen Materialien, wobei ein ausreichender Halt der Diamant- oder anderer Hartstoffkörner beeinflußt werden kann, in dem die Körner mit einem Überzug aus einem metallischen oder nichtmetallischen Material versehen sind. Die Zusatzstoffe können sich im übrigen als zweckmäßig zeigen für eine ausreichende Beständigkeit des Kunstharzes gegenüber den üblicherweise verwendeten Kühlmitteln beim Einsatz der Innenlochsägen, bei denen es sich in der Regel um Wasser handelt mit einem alkalischen oder sauren Zusatz.The properties of the internal hole saw according to the invention can be adapted to the materials to be machined by the use of fillers made of metallic or non-metallic materials, whereby a sufficient hold of the diamond or other hard material grains can be influenced, in which the grains are coated with a metallic or are provided with non-metallic material. The additives can also prove to be useful for sufficient resistance of the synthetic resin to the coolants commonly used when using internal hole saws, which are usually water with an alkaline or acidic additive.
Beim Auftragen des Hartstoffkornbelages im Preßverfahren wird der Belag in pulverförmiger Form auf dem Kernblatt aufgetragen. Danach werden beide gemeinsam erhitzt, wobei das Pulver gleichzeitig verpreßt wird bei einer Temperatur im Bereich der Glasübergangstemperatur des gewählten Harzes. Demgegenüber wird beim Gießverfahren der Belag in flüssigem Zustand innerhalb einer Form auf dem Kernblatt vergossen, wie es insbesondere möglich ist bei Verwendung von Epoxyharzen.When applying the hard material grain covering in the pressing process, the covering is applied in powder form on the core sheet. The two are then heated together, the powder being pressed simultaneously at a temperature in the range of the glass transition temperature of the chosen resin. In contrast, in the casting process, the coating is poured in the liquid state within a mold on the core sheet, as is possible in particular when using epoxy resins.
Darüber hinaus kann aber auch als Alternative eine nachträgliche Befestigung eines vorgefertigten Belages auf dem Kernblatt vorgesehen sein. Ein solche Befestigung kann unter Ausnutzung eines Klebers erfolgen, der aus zwei Komponenten besteht.In addition, a subsequent attachment of a prefabricated covering to the core sheet can also be provided as an alternative. Such attachment can be done using an adhesive consisting of two components.
Durch die Verwendung von Füllstoffen lassen sich beispielsweise die Zugfestigkeit oder die Bruchdehnung beeinflussen. Dafür kommen faserartige bzw. nadelförmige Materialien wie beispielsweise Glas-, Kohleoder Metallfasern in Betracht.The use of fillers can influence tensile strength or elongation at break, for example. For this, fibrous or needle-shaped materials such as glass, carbon or metal fibers come into consideration.
Durch metallische Füllstoffe läßt sich die Wärmeleitfähigkeit beeinflussen und durch die Verwendung von Trockenschmierstoffen wie beispielsweise Graphit oder Polytetrafluoräthylen (PTFE) der Reibungskoeffizient reduzieren. Um neben der vorteilhaften Dehnbarkeit des Belages auch seine ausreichende Haftung auf dem Kernblatt sicher zu stellen, kann eine mechanische Verklammerung bzw. Verankerung ausgenutzt werden durch die Anordnung von Löchern im Kernblatt, welche zu einer Brückenbildung zwischen den beiden Belagseiten führt oder durch die Anordnung von Nuten im Kernblatt. Daneben ist ein Verkleben möglich wie auch eine Haftung durch eine chemische Raktion mit dem Kernblattmaterial und zwar insbesondere unter der Voraussetzung, daß das Kernblatt ebenfalls aus einem faserverstärktem Kunststoff besteht.The thermal conductivity can be influenced by metallic fillers and the coefficient of friction can be reduced by using dry lubricants such as graphite or polytetrafluoroethylene (PTFE). In order to ensure not only the advantageous elasticity of the covering, but also its sufficient adhesion to the core sheet, mechanical clamping or anchoring can be used by the arrangement of holes in the core sheet, which leads to bridging between the two covering sides or by the arrangement of grooves in the core sheet. Adhesion is also possible, as is adhesion by chemical reaction with the core sheet material, in particular provided that the core sheet also consists of a fiber-reinforced plastic.
Die Haftung des Belages wird im übrigen verbessert durch ein vorausgehendes Aufrauhen des Kernblattes. Dies kann erfolgen mechanisch beispielsweise durch Sandstrahlen oder Schleifen. Stattdessen kann ein chemisches Aufrauhen erfolgen durch den Einsatz von Säuren oder durch ein elektrolytisches Ätzen.The liability of the covering is improved by roughening the core sheet beforehand. This can be done mechanically, for example by sandblasting or grinding. Instead, chemical roughening can be done by using acids or by electrolytic etching.
Ausführungsbeispiele der Erfindung sind nachstehend unter Bezugnahme auf eine Zeichnung erläutert.Embodiments of the invention are explained below with reference to a drawing.
In der Zeichnung zeigen:
- Figur 1: eine Innenlochsäge im Teilausschnitt mit einem Siliziumstab;
- Figur 2: eine Innenlochsäge im Teilausschnitt mit einer mechanischen Verklammerung des Belages;
- Figur 3: eine Innenlochsäge in der Seitenansicht mit Bohrungen im Innenlochbereich und
-
Figur 4 und 5: eine Innenlochsäge mit Nuten für die Halterung des Belages.
- Figure 1: an internal hole saw in partial section with a silicon rod;
- Figure 2: an internal hole saw in partial section with a mechanical clamping of the covering;
- Figure 3: an inner hole saw in side view with holes in the inner hole area and
- Figures 4 and 5: an internal hole saw with grooves for holding the covering.
Die in den Figuren 1 bis 3 wiedergegebene Ausführungsform einer Innenlochsäge für das Abtrennen dünner Scheiben von einem Stab 1 aus monokristallinem Silizium weist ein aus Metallblech bestehendes Kernblatt 3 auf, das eine Stärke hat von beispielsweise 0,15 mm. Das Kernblatt 3 ist mit einem Innenloch 4 versehen, dessen zylindrischer Wandbereich mit einem Belag 5 versehen ist, welcher aus Diamantkörnern besteht, die in einer Kunststoffbindung gehalten sind. Der Belag 5 erstreckt sich auf beiden Seiten des Kernblattes 3 über eine Randbreite von beispielsweise 2 mm über den Rand des Innenloches 4 hinaus.The embodiment shown in FIGS. 1 to 3 of an internal hole saw for separating thin slices from a rod 1 made of monocrystalline silicon has a
Für eine verbesserte Haftung ist das Kernblatt 3 mit konzentrisch unmittelbar neben dem Rand des Innenloches angeordneten Löchern 6 versehen, die entsprechend Figur 2 von dem Diamantbelag 5 durchdrungen sind, so daß sich zwischen den beiden seitlichen Belagabschnitten Brücken bilden, die zu der Haftung des Belages 5 auf dem Kernblatt 3 beitragen.For improved adhesion, the
Bei der Ausführung nach den Figuren 4 und 5 sind anstelle von Löchern 6 zwei ringförmige Nuten 7 vorgesehen, in welche der Belag 5 eingreift.In the embodiment according to FIGS. 4 and 5, instead of
Claims (7)
- Internal diameter saw blade to separate thin slices of a rod for example of monocrystalline silicium, comprising a thin circular central blade provided with an internal hole in its middle which bears a coating with diamond, boron nitride or other hard material grains in the marginal area of the internal hole, characterized in that the hard material grains are embedded in a high temperature resistant synthetic resin bond wich is applied onto the central blade (3) by casting or pressing, the bonding of the coating on the central blade (3) being assisted by mechanical bond and the synthetic resin having a breaking elongation higher than 2%, a tensile strength higher than 20 N/mm² and a vitreous transition temperature of 200 to 400° C.
- Internal diameter saw blade according to claim 1, characterized by the use of a synthetic resin of the group of the epoxy resins, the polyamids, the flexibilized phenolic resins.
- Internal diameter saw blade according to claim 1, characterized in that the hard material grains are coated with a cover.
- Internal diameter saw blade according to one or several preceding claims, characterized in that holes (6) are placed concentrically at a distance of the internal hole edge (4) for a mechanical bond of the coating (5) in the central blade (3). holes which form bonding bridges between the lateral coating sections.
- Internal diameter saw blade according to one or several preceding claims, characterized in that a peripheral groove (7) is placed on both sides of the central blade (3) for a mechanical bonding of the coating (5).
- Internal diameter saw blade according to one or several preceding claims, characterized in that the central blade (3) is pretreated by applying a galvanic coating for a mechanical bonding of the synthetic resin bonding.
- Internal diameter saw blade according to one or several preceding claims, characterized in that the central blade (3= is pretreated by mechanical or chemical blasting.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE3836587 | 1988-10-27 | ||
| DE3836587A DE3836587A1 (en) | 1988-10-27 | 1988-10-27 | INSIDE HOLE SAW |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| EP0366056A2 EP0366056A2 (en) | 1990-05-02 |
| EP0366056A3 EP0366056A3 (en) | 1990-12-12 |
| EP0366056B1 true EP0366056B1 (en) | 1992-12-30 |
Family
ID=6366019
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EP89119695A Expired - Lifetime EP0366056B1 (en) | 1988-10-27 | 1989-10-24 | Internal diameter saw blade |
Country Status (2)
| Country | Link |
|---|---|
| EP (1) | EP0366056B1 (en) |
| DE (2) | DE3836587A1 (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4024751C2 (en) * | 1990-08-03 | 1995-06-08 | Wacker Chemitronic | Method and device for internal hole sawing of rod-shaped workpieces, in particular semiconductor rods |
| WO1999042783A1 (en) * | 1998-02-18 | 1999-08-26 | Cubic Defense Systems, Inc. | Laser diode assembly for use in a small arms transmitter |
| KR100804049B1 (en) * | 2006-11-16 | 2008-02-18 | 신한다이아몬드공업 주식회사 | Diamond toos and segment manufacturing method of the same |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL42790C (en) * | 1935-02-14 | |||
| GB1208408A (en) * | 1968-11-29 | 1970-10-14 | Hinmar Associates Inc | Abrasive cutting tool and method |
| US3619152A (en) * | 1969-09-16 | 1971-11-09 | Tetrahedron Associates | Cutting tool with boron filament composite |
| DD95335A1 (en) * | 1972-04-03 | 1973-01-22 | ||
| US3765132A (en) * | 1972-04-06 | 1973-10-16 | Carborundum Co | Free cutting internal diamond grinding wheel |
| IE42894B1 (en) * | 1975-07-28 | 1980-11-05 | Gen Electric | Improvements in coated diamond and cubic boron mitride particles and processes thereof |
| DE2700037A1 (en) * | 1977-01-03 | 1978-07-06 | Richard Hahn Diamantwerkzeuge | Blade for circular saw - has diamond splinters placed into radial slits of blank and forced above blade surface by pressing tool to leave webs between teeth |
| DE2740891C3 (en) * | 1977-09-10 | 1980-11-13 | Ernst 8909 Niederraunau Spielvogel | Peripheral grinding wheel |
| DE3218562A1 (en) * | 1981-07-10 | 1983-01-20 | Tyrolit-Schleifmittelwerke Swarovski KG, 6130 Schwaz, Tirol | Circular saw blade |
| JPS62193776A (en) * | 1986-02-18 | 1987-08-25 | Sanwa Daiyamondo Kogyo Kk | Hard work cutting circular saw |
| DE3606581A1 (en) * | 1986-02-28 | 1987-09-03 | Nkk Nihon Structure Co | Grinding or cutting disc |
| DE3639700A1 (en) * | 1986-11-20 | 1988-06-01 | Winter & Sohn Ernst | INSIDE HOLE SAW |
| US4776316A (en) * | 1987-04-29 | 1988-10-11 | Ashkenazi Brian I | Wafering device and method of using same |
| JPH01115574A (en) * | 1987-10-27 | 1989-05-08 | Canon Inc | Extremely thin cutting blade |
-
1988
- 1988-10-27 DE DE3836587A patent/DE3836587A1/en not_active Withdrawn
-
1989
- 1989-10-24 DE DE8989119695T patent/DE58903164D1/en not_active Expired - Fee Related
- 1989-10-24 EP EP89119695A patent/EP0366056B1/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| EP0366056A3 (en) | 1990-12-12 |
| EP0366056A2 (en) | 1990-05-02 |
| DE3836587A1 (en) | 1990-05-03 |
| DE58903164D1 (en) | 1993-02-11 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| DE2730130C2 (en) | Method for manufacturing semiconductor components | |
| DE3045760A1 (en) | METHOD FOR SURFACE GRINDING OF FLAT PANELS AND THE LIKE | |
| DE2846398A1 (en) | PROCESS FOR SEPARATING A SEMICONDUCTOR PLATE INTO SEVERAL PLAETS | |
| AT398403B (en) | KNIFE ROLLER AND COMB KNIFE FOR KNIFE SHAFT CUTTER | |
| DE3609251A1 (en) | TURNING INTERNAL KNIFE FOR AN ELECTRIC SHAVER AND MANUFACTURING METHOD THEREFOR | |
| DE102010034694A1 (en) | Multiple blade assembly with erodible spacer | |
| DE102010050897B4 (en) | Carrier device and method for cutting a block of material attached to the carrier device | |
| EP0366056B1 (en) | Internal diameter saw blade | |
| DE3114687A1 (en) | Cutting blade | |
| EP0293941B1 (en) | Method for the sharpening of parting tools for parting off slices of rod- or blockshaped works, and cutting process | |
| EP0432637B1 (en) | Device for dressing the cutting edge of a cutting-off tool for severing slices from an ingot or block-like workpiece, especially semiconductor material, use and sewing method for the same | |
| EP0715919B1 (en) | Method and saw blade for sawing steel workpieces | |
| EP0268152B1 (en) | Internal diameter cutting wheel | |
| EP0099004A1 (en) | Cutting die, in particular for contour-cutting, and a method of manufacturing it | |
| DE3300796C2 (en) | Inner diameter saw | |
| DE8108082U1 (en) | DRESSING TOOL | |
| DE3300804C2 (en) | Inner diameter saw | |
| DE2719741A1 (en) | Abrasive disc for slitting semiconductor wafers - is made by bonding galvanically made abrasive disc onto metal disc | |
| DE3305695A1 (en) | Apparatus for slicing semiconductor material | |
| WO2000078505A1 (en) | Grinding wheel, grinding system and method for grinding a blade | |
| DE102010049472A1 (en) | Wire saw for cutting e.g. single crystal ingots of raw silicon for producing silicon wafer utilized for manufacturing computer chip in semiconductor industry, has stripping bars attached to wire field over breadth of field cutting surface | |
| AT521162B1 (en) | Carrier body for a grinding tool | |
| DE3908153C2 (en) | Internal cutting disc | |
| DE2700037A1 (en) | Blade for circular saw - has diamond splinters placed into radial slits of blank and forced above blade surface by pressing tool to leave webs between teeth | |
| DE102021201070A1 (en) | Honing stone, method for producing a honing stone and honing tool |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
| AK | Designated contracting states |
Kind code of ref document: A2 Designated state(s): BE DE FR GB IT |
|
| PUAL | Search report despatched |
Free format text: ORIGINAL CODE: 0009013 |
|
| AK | Designated contracting states |
Kind code of ref document: A3 Designated state(s): BE DE FR GB IT |
|
| 17P | Request for examination filed |
Effective date: 19901207 |
|
| 17Q | First examination report despatched |
Effective date: 19920507 |
|
| GRAA | (expected) grant |
Free format text: ORIGINAL CODE: 0009210 |
|
| AK | Designated contracting states |
Kind code of ref document: B1 Designated state(s): BE DE FR GB IT |
|
| GBT | Gb: translation of ep patent filed (gb section 77(6)(a)/1977) |
Effective date: 19930105 |
|
| ET | Fr: translation filed | ||
| ITF | It: translation for a ep patent filed |
Owner name: DE DOMINICIS & MAYER S.R.L. |
|
| REF | Corresponds to: |
Ref document number: 58903164 Country of ref document: DE Date of ref document: 19930211 |
|
| PLBE | No opposition filed within time limit |
Free format text: ORIGINAL CODE: 0009261 |
|
| STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT |
|
| 26N | No opposition filed | ||
| PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: GB Payment date: 19951016 Year of fee payment: 7 |
|
| PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: FR Payment date: 19951025 Year of fee payment: 7 |
|
| PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: DE Payment date: 19951127 Year of fee payment: 7 |
|
| PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: BE Payment date: 19951206 Year of fee payment: 7 |
|
| PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: GB Effective date: 19961024 |
|
| PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: BE Effective date: 19961031 |
|
| BERE | Be: lapsed |
Owner name: ERNST WINTER & SOHN G.M.B.H. & CO. Effective date: 19961031 |
|
| GBPC | Gb: european patent ceased through non-payment of renewal fee |
Effective date: 19961024 |
|
| PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: FR Effective date: 19970630 |
|
| PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: DE Effective date: 19970701 |
|
| REG | Reference to a national code |
Ref country code: FR Ref legal event code: ST |
|
| PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: IT Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES;WARNING: LAPSES OF ITALIAN PATENTS WITH EFFECTIVE DATE BEFORE 2007 MAY HAVE OCCURRED AT ANY TIME BEFORE 2007. THE CORRECT EFFECTIVE DATE MAY BE DIFFERENT FROM THE ONE RECORDED. Effective date: 20051024 |