DK0548470T4 - Pressure sensor with a membrane of semiconductor material - Google Patents

Pressure sensor with a membrane of semiconductor material

Info

Publication number
DK0548470T4
DK0548470T4 DK92116069T DK92116069T DK0548470T4 DK 0548470 T4 DK0548470 T4 DK 0548470T4 DK 92116069 T DK92116069 T DK 92116069T DK 92116069 T DK92116069 T DK 92116069T DK 0548470 T4 DK0548470 T4 DK 0548470T4
Authority
DK
Denmark
Prior art keywords
membrane
pressure sensor
semiconductor material
semiconductor
sensor
Prior art date
Application number
DK92116069T
Other languages
Danish (da)
Other versions
DK0548470T3 (en
Inventor
Lothar Schultheis
Wolfgang Huber
Original Assignee
Landis & Gyr Tech Innovat
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=4264742&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DK0548470(T4) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Landis & Gyr Tech Innovat filed Critical Landis & Gyr Tech Innovat
Publication of DK0548470T3 publication Critical patent/DK0548470T3/en
Application granted granted Critical
Publication of DK0548470T4 publication Critical patent/DK0548470T4/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/147—Details about the mounting of the sensor to support or covering means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0007—Fluidic connecting means
    • G01L19/0038—Fluidic connecting means being part of the housing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0627—Protection against aggressive medium in general
    • G01L19/0645—Protection against aggressive medium in general using isolation membranes, specially adapted for protection

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)
DK92116069T 1991-12-24 1992-09-19 Pressure sensor with a membrane of semiconductor material DK0548470T4 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH384691 1991-12-24

Publications (2)

Publication Number Publication Date
DK0548470T3 DK0548470T3 (en) 1995-11-06
DK0548470T4 true DK0548470T4 (en) 2000-04-17

Family

ID=4264742

Family Applications (1)

Application Number Title Priority Date Filing Date
DK92116069T DK0548470T4 (en) 1991-12-24 1992-09-19 Pressure sensor with a membrane of semiconductor material

Country Status (3)

Country Link
EP (1) EP0548470B2 (en)
DE (1) DE59202616D1 (en)
DK (1) DK0548470T4 (en)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5889211A (en) * 1995-04-03 1999-03-30 Motorola, Inc. Media compatible microsensor structure and methods of manufacturing and using the same
DE19614458C2 (en) * 1996-04-12 1998-10-29 Grundfos As Pressure or differential pressure sensor and method for its production
US6140144A (en) * 1996-08-08 2000-10-31 Integrated Sensing Systems, Inc. Method for packaging microsensors
DE19840829B4 (en) * 1998-09-07 2005-10-20 Siemens Ag Method for attaching a micromechanical sensor in a housing and sensor arrangement
DE19845537A1 (en) * 1998-10-02 2000-04-13 Grundfos A S Bjerringbro Sensor and process for its manufacture
DE19938868B4 (en) * 1999-08-17 2005-11-24 Siemens Ag Sensor device and method for producing a sensor device
DE10227479A1 (en) * 2002-06-19 2004-01-08 Endress + Hauser Gmbh + Co. Kg pressure gauge
US8161811B2 (en) 2009-12-18 2012-04-24 Honeywell International Inc. Flow sensors having nanoscale coating for corrosion resistance
DE102014103142A1 (en) * 2014-03-10 2015-09-10 Endress + Hauser Gmbh + Co. Kg pressure transducers
JP6781259B2 (en) * 2016-07-21 2020-11-04 株式会社鷺宮製作所 Pressure sensor

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55112864U (en) * 1979-02-02 1980-08-08
DD268055A1 (en) * 1988-01-06 1989-05-17 Messgeraetewerk Zwonitz Veb K INTO A CATHETER ADJUSTABLE MEASURING SENSOR, ESPECIALLY PRESSURE MEASURING SENSOR
US4815471A (en) * 1988-08-01 1989-03-28 Precision Interconnect Corporation Catheter assembly

Also Published As

Publication number Publication date
DK0548470T3 (en) 1995-11-06
EP0548470B2 (en) 1999-12-08
EP0548470B1 (en) 1995-06-21
EP0548470A1 (en) 1993-06-30
DE59202616D1 (en) 1995-07-27

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