DE69111314D1 - Laserschneideverfahren. - Google Patents

Laserschneideverfahren.

Info

Publication number
DE69111314D1
DE69111314D1 DE69111314T DE69111314T DE69111314D1 DE 69111314 D1 DE69111314 D1 DE 69111314D1 DE 69111314 T DE69111314 T DE 69111314T DE 69111314 T DE69111314 T DE 69111314T DE 69111314 D1 DE69111314 D1 DE 69111314D1
Authority
DE
Germany
Prior art keywords
cutting process
laser cutting
laser
cutting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69111314T
Other languages
English (en)
Other versions
DE69111314T2 (de
Inventor
Norio Karube
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fanuc Corp
Original Assignee
Fanuc Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fanuc Corp filed Critical Fanuc Corp
Application granted granted Critical
Publication of DE69111314D1 publication Critical patent/DE69111314D1/de
Publication of DE69111314T2 publication Critical patent/DE69111314T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/073—Shaping the laser spot
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0643—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/0665—Shaping the laser beam, e.g. by masks or multi-focusing by beam condensation on the workpiece, e.g. for focusing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • B23K26/1435—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor involving specially adapted flow control means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • B23K26/1462—Nozzles; Features related to nozzles
    • B23K26/1464—Supply to, or discharge from, nozzles of media, e.g. gas, powder, wire
    • B23K26/1476—Features inside the nozzle for feeding the fluid stream through the nozzle
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
DE69111314T 1990-01-19 1991-01-11 Laserschneideverfahren. Expired - Fee Related DE69111314T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2010029A JPH03216287A (ja) 1990-01-19 1990-01-19 レーザ切断加工方法
PCT/JP1991/000022 WO1991010533A1 (en) 1990-01-19 1991-01-11 Method of laser cutting work

Publications (2)

Publication Number Publication Date
DE69111314D1 true DE69111314D1 (de) 1995-08-24
DE69111314T2 DE69111314T2 (de) 1996-01-11

Family

ID=11738971

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69111314T Expired - Fee Related DE69111314T2 (de) 1990-01-19 1991-01-11 Laserschneideverfahren.

Country Status (5)

Country Link
US (1) US5237150A (de)
EP (1) EP0464213B1 (de)
JP (1) JPH03216287A (de)
DE (1) DE69111314T2 (de)
WO (1) WO1991010533A1 (de)

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DE4215561C2 (de) * 1991-11-19 1995-04-06 Fraunhofer Ges Forschung Verfahren und Vorrichtung zum Abtragen von Werkstoff eines relativbewegten metallenen Werkstücks
JP2829192B2 (ja) * 1992-05-15 1998-11-25 住友電気工業株式会社 レ−ザビ−ムスキャナ
JP2658809B2 (ja) * 1992-08-27 1997-09-30 三菱電機株式会社 レーザ加工装置
US5776220A (en) * 1994-09-19 1998-07-07 Corning Incorporated Method and apparatus for breaking brittle materials
WO1996020062A1 (fr) * 1994-12-23 1996-07-04 Kondratenko Vladimir Stepanovi Procede de coupe de materiaux non metalliques et dispositif de mise en ×uvre dudit procede
US5834094A (en) * 1996-09-30 1998-11-10 Surface Technologies Ltd. Bearing having micropores and design method thereof
DE19715537C2 (de) * 1997-04-14 1999-08-05 Schott Glas Verfahren und Vorrichtung zum Durchtrennen von flachen Werkstücken aus sprödem Material, insbesondere aus Glas
MY120533A (en) * 1997-04-14 2005-11-30 Schott Ag Method and apparatus for cutting through a flat workpiece made of brittle material, especially glass.
DE19830237C2 (de) * 1998-07-07 2001-10-04 Schott Spezialglas Gmbh Verfahren und Vorrichtung zum Schneiden eines Werkstückes aus sprödbrüchigem Werkstoff
JP4162772B2 (ja) * 1998-09-09 2008-10-08 日酸Ｔａｎａｋａ株式会社 レーザピアシング方法およびレーザ切断装置
DE19856347C2 (de) * 1998-12-07 2002-12-19 Schott Spezialglas Gmbh Verfahren und Vorrichtung zum Schneiden eines dünnen Werkstücks aus sprödbrüchigem Werkstoff
US6331693B1 (en) * 1999-06-28 2001-12-18 Cincinnati Incorporated Beam delivery system
DE19952331C1 (de) 1999-10-29 2001-08-30 Schott Spezialglas Gmbh Verfahren und Vorrichtung zum schnellen Schneiden eines Werkstücks aus sprödbrüchigem Werkstoff mittels Laserstrahlen
DE29922544U1 (de) 1999-12-22 2001-05-03 Kuka Schweissanlagen Gmbh Blasvorrichtung für eine Lasereinrichtung
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JP4182034B2 (ja) * 2004-08-05 2008-11-19 ファナック株式会社 切断加工用レーザ装置
EP1657020A1 (de) * 2004-11-10 2006-05-17 Synova S.A. Verfahren und Vorrichtung zur Optimierung der Kohärenz eines Flüssigkeitsstrahls für eine Materialbearbeitung und Flüssigkeitsdüse für eine solche Vorrichtung
JP2007095936A (ja) * 2005-09-28 2007-04-12 Mitsubishi Electric Corp 炭酸ガスレーザ加工機及び炭酸ガスレーザ加工方法
US8895892B2 (en) * 2008-10-23 2014-11-25 Corning Incorporated Non-contact glass shearing device and method for scribing or cutting a moving glass sheet
US8274743B2 (en) * 2010-04-08 2012-09-25 Scaggs Michael J Thermally compensating lens for high power lasers
KR102096048B1 (ko) * 2012-10-10 2020-04-02 삼성디스플레이 주식회사 레이저 가공장치
US10100393B2 (en) 2013-02-21 2018-10-16 Nlight, Inc. Laser patterning of multi-layer structures
US9260337B2 (en) 2014-01-09 2016-02-16 Corning Incorporated Methods and apparatus for free-shape cutting of flexible thin glass
US10069271B2 (en) 2014-06-02 2018-09-04 Nlight, Inc. Scalable high power fiber laser
CN106471140B (zh) * 2014-07-03 2019-02-05 新日铁住金株式会社 激光加工装置
WO2016009978A1 (ja) * 2014-07-15 2016-01-21 株式会社トヨコー レーザ照射装置
US11311967B2 (en) * 2014-08-19 2022-04-26 Lumileds Llc Sapphire collector for reducing mechanical damage during die level laser lift-off
CN107111051A (zh) 2014-10-20 2017-08-29 可利雷斯股份有限公司 光学组件和用于产生这样的光学组件的方法
US9837783B2 (en) 2015-01-26 2017-12-05 Nlight, Inc. High-power, single-mode fiber sources
US10050404B2 (en) 2015-03-26 2018-08-14 Nlight, Inc. Fiber source with cascaded gain stages and/or multimode delivery fiber with low splice loss
KR102572643B1 (ko) * 2015-05-13 2023-08-31 루미리즈 홀딩 비.브이. 다이 레벨의 레이저 리프트-오프 중에 기계적 손상을 줄이기 위한 사파이어 수집기
PL3308202T3 (pl) 2015-06-09 2021-12-20 Corelase Oy Sposób i urządzenie do obróbki laserowej oraz jego podzespół optyczny
CN107924023B (zh) 2015-07-08 2020-12-01 恩耐公司 具有用于增加的光束参数乘积的中心折射率受抑制的纤维
EP3519871A1 (de) * 2016-09-29 2019-08-07 NLIGHT, Inc. Einstellbare strahleigenschaften
US10730785B2 (en) 2016-09-29 2020-08-04 Nlight, Inc. Optical fiber bending mechanisms
JP6450784B2 (ja) * 2017-01-19 2019-01-09 ファナック株式会社 レーザ加工機
JP6450783B2 (ja) 2017-01-19 2019-01-09 ファナック株式会社 レーザ加工ヘッド用ノズル
EP3731991B1 (de) 2017-12-29 2023-04-26 Corelase OY Laserverarbeitungsvorrichtung und -verfahren
DE102019103659B4 (de) * 2019-02-13 2023-11-30 Bystronic Laser Ag Gasführung, Laserschneidkopf und Laserschneidmaschine

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Also Published As

Publication number Publication date
EP0464213B1 (de) 1995-07-19
WO1991010533A1 (en) 1991-07-25
DE69111314T2 (de) 1996-01-11
US5237150A (en) 1993-08-17
EP0464213A1 (de) 1992-01-08
EP0464213A4 (en) 1993-09-29
JPH03216287A (ja) 1991-09-24

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee