DE68920405T2 - Alignment device. - Google Patents

Alignment device.

Info

Publication number
DE68920405T2
DE68920405T2 DE68920405T DE68920405T DE68920405T2 DE 68920405 T2 DE68920405 T2 DE 68920405T2 DE 68920405 T DE68920405 T DE 68920405T DE 68920405 T DE68920405 T DE 68920405T DE 68920405 T2 DE68920405 T2 DE 68920405T2
Authority
DE
Germany
Prior art keywords
alignment device
alignment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE68920405T
Other languages
German (de)
Other versions
DE68920405D1 (en
Inventor
Thomas Mario Cipolla
Raymond Robert Horton
Philip Murphy
Michael Jon Palmer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of DE68920405D1 publication Critical patent/DE68920405D1/en
Application granted granted Critical
Publication of DE68920405T2 publication Critical patent/DE68920405T2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C19/00—Bearings with rolling contact, for exclusively rotary movement
    • F16C19/50—Other types of ball or roller bearings
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
    • B23K20/02—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating by means of a press ; Diffusion bonding
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67144—Apparatus for mounting on conductive members, e.g. leadframes or conductors on insulating substrates
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
    • H01L24/78—Apparatus for connecting with wire connectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/75—Apparatus for connecting with bump connectors or layer connectors
    • H01L2224/757—Means for aligning
    • H01L2224/75743—Suction holding means
    • H01L2224/75745—Suction holding means in the upper part of the bonding apparatus, e.g. in the bonding head
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/75—Apparatus for connecting with bump connectors or layer connectors
    • H01L2224/758—Means for moving parts
    • H01L2224/75821—Upper part of the bonding apparatus, i.e. bonding head
    • H01L2224/75822—Rotational mechanism
    • H01L2224/75823—Pivoting mechanism
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/78—Apparatus for connecting with wire connectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/00014—Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01005—Boron [B]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01006—Carbon [C]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01013—Aluminum [Al]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01029—Copper [Cu]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01033—Arsenic [As]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01039—Yttrium [Y]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01082—Lead [Pb]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S269/00—Work holders
    • Y10S269/903—Work holder for electrical circuit assemblages or wiring systems

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Wire Bonding (AREA)
  • Automatic Assembly (AREA)
  • Eye Examination Apparatus (AREA)
DE68920405T 1988-10-31 1989-08-01 Alignment device. Expired - Fee Related DE68920405T2 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/264,713 US4875614A (en) 1988-10-31 1988-10-31 Alignment device

Publications (2)

Publication Number Publication Date
DE68920405D1 DE68920405D1 (en) 1995-02-16
DE68920405T2 true DE68920405T2 (en) 1995-07-13

Family

ID=23007290

Family Applications (1)

Application Number Title Priority Date Filing Date
DE68920405T Expired - Fee Related DE68920405T2 (en) 1988-10-31 1989-08-01 Alignment device.

Country Status (4)

Country Link
US (1) US4875614A (en)
EP (1) EP0366880B1 (en)
JP (1) JPH0650752B2 (en)
DE (1) DE68920405T2 (en)

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US5016804A (en) * 1989-01-10 1991-05-21 Siemens Aktiengesellschaft Soldering apparatus having at least one stirrup electrode
US4982890A (en) * 1989-01-10 1991-01-08 Siemens Aktiengesellschaft Soldering means having at least one stirrup electrode and two soldering webs lying opposite one another or four soldering webs lying opposite one another in pairs
JPH02303100A (en) * 1989-05-17 1990-12-17 Matsushita Electric Ind Co Ltd Mounting method for component
US5051555A (en) * 1990-02-26 1991-09-24 Universal Instruments Corporation Hot-bar suspension system
US5052606A (en) * 1990-06-29 1991-10-01 International Business Machines Corp. Tape automated bonding feeder
US5207467A (en) * 1990-08-31 1993-05-04 International Business Machines Corporation Monitor for detecting the absence of an electronic component on a vacuum pickup
JP2835983B2 (en) * 1990-10-31 1998-12-14 株式会社新川 Bonding head
US5092510A (en) * 1990-11-20 1992-03-03 International Business Machines Corporation Method and apparatus for circuit board support during component mounting
US5185509A (en) * 1991-02-19 1993-02-09 Toddco General, Inc. Robotic arm tool mounting apparatus
US5150827A (en) * 1991-11-22 1992-09-29 Hughes Aircraft Company Self-leveling reflow solder head with double pivot
ATA70592A (en) * 1992-04-03 1996-02-15 Alcatel Austria Ag POSITIONING DEVICE FOR ASSEMBLING PCBS
US5371654A (en) * 1992-10-19 1994-12-06 International Business Machines Corporation Three dimensional high performance interconnection package
US20050062492A1 (en) * 2001-08-03 2005-03-24 Beaman Brian Samuel High density integrated circuit apparatus, test probe and methods of use thereof
US5377897A (en) * 1993-07-29 1995-01-03 Zimmer; Gero Compensation of non-parallelism (balancing) of a first body to a second body
US5368217A (en) * 1993-08-25 1994-11-29 Microelectronics And Computer Technology Corporation High force compression flip chip bonding method and system
US20020053734A1 (en) 1993-11-16 2002-05-09 Formfactor, Inc. Probe card assembly and kit, and methods of making same
US5683026A (en) * 1995-05-31 1997-11-04 Sony Corporation Pressure-bonding unit and pressure-bonding head unit
US6047875A (en) * 1995-09-20 2000-04-11 Unitek Miyachi Coporation Reflow soldering self-aligning fixture
US8033838B2 (en) 1996-02-21 2011-10-11 Formfactor, Inc. Microelectronic contact structure
US6019154A (en) * 1996-09-20 2000-02-01 Motorola, Inc. Self leveling operation stage for ultrasonic welding
US6041996A (en) * 1996-11-22 2000-03-28 Matsushita Electric Industrial Co., Ltd. Method of pressure bonding a bumped electronic part and an apparatus for pressure bonding a bumped electronic part
JP3298810B2 (en) * 1997-07-09 2002-07-08 株式会社新川 Die bonding equipment
US5996434A (en) * 1997-07-29 1999-12-07 Swanson; David W. Pressure head with dual horns
US6012711A (en) * 1997-12-10 2000-01-11 International Business Machines Corporation Alignment device for establishing a coplanar relationship between first and second surfaces
JP4544755B2 (en) * 2001-01-17 2010-09-15 パナソニック株式会社 Bonding head and component mounting device
US7296727B2 (en) * 2001-06-27 2007-11-20 Matsushita Electric Industrial Co., Ltd. Apparatus and method for mounting electronic components
DE10304777B4 (en) * 2003-02-05 2006-11-23 Infineon Technologies Ag Method for producing a chip using a heat and pressure process using a thermoplastic material and apparatus for carrying out the method
TWI234804B (en) * 2004-08-03 2005-06-21 Chunghwa Picture Tubes Ltd Chip compressing mechanism and chip compressing process
WO2007079769A1 (en) * 2005-12-23 2007-07-19 Alphasem Gmbh Tool for picking up, placing or pressing a flat object, and use of the tool
DE102006003735A1 (en) * 2006-01-26 2007-08-09 Infineon Technologies Ag Arrangement for fixing electronic components on a support
WO2008052594A1 (en) * 2006-10-31 2008-05-08 Alphasem Gmbh Device for positioning and/or pressing a planar component relative to a substrate and method for positioning a picking tool relative to a substrate
US7845543B1 (en) * 2009-11-17 2010-12-07 Asm Assembly Automation Ltd Apparatus and method for bonding multiple dice
US8113411B2 (en) * 2010-03-30 2012-02-14 Flextronics Ap, Llc Universal radio frequency shield removal
US8683882B2 (en) 2011-09-23 2014-04-01 Ascent Ventures, Llc Apparatus for ultrasonic transducer or other contact sensor placement against a test material
US8387851B1 (en) * 2012-05-04 2013-03-05 Asm Technology Singapore Pte. Ltd. Apparatus for aligning a bonding tool of a die bonder
US9334066B2 (en) * 2013-04-12 2016-05-10 The Boeing Company Apparatus for automated rastering of an end effector over an airfoil-shaped body
TWI531013B (en) * 2013-06-26 2016-04-21 Shinkawa Kk Wafer holding tool for flip chip bonding and method for flip chip bonding
US20180109661A1 (en) * 2016-10-14 2018-04-19 Steven Palen Mobile device stand
JP6984179B2 (en) * 2017-05-30 2021-12-17 Tdk株式会社 Manufacturing method of thermocompression bonding equipment and electronic parts

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US1059545A (en) * 1912-03-21 1913-04-22 Paulin Karl Kunze Device for obtaining intimate contact with, engaging, or clamping bodies of any shape.
US2325387A (en) * 1940-12-09 1943-07-27 Fredrickson Ernst Waldemar Work clamping device
US3259367A (en) * 1964-01-13 1966-07-05 Superior Scaffold Co Shoring jack
GB1150661A (en) * 1965-04-08 1969-04-30 Ampep Ind Products Ltd Improvements relating to Bearing Units
US3574923A (en) * 1967-06-15 1971-04-13 Western Electric Co Compensating base for simultaneously bonding multiple leads
US3529759A (en) * 1967-06-15 1970-09-22 Bell Telephone Labor Inc Apparatus for bonding a beam-lead device to a substrate
US3442432A (en) * 1967-06-15 1969-05-06 Western Electric Co Bonding a beam-leaded device to a substrate
US3608809A (en) * 1968-08-16 1971-09-28 Western Electric Co Apparatus for uniform multiple-lead bonding
US3669333A (en) * 1970-02-02 1972-06-13 Western Electric Co Bonding with a compliant medium
US3823863A (en) * 1973-02-16 1974-07-16 Western Electric Co Compensating base for lead-frame bonding
US3905537A (en) * 1974-07-08 1975-09-16 Western Electric Co Method and apparatus for compensating for substance variations during lead frame bonding
US3957185A (en) * 1975-08-25 1976-05-18 Western Electric Company, Inc. Methods of and apparatus for thermocompression bonding with a compensating system
JPS5252369A (en) * 1975-10-25 1977-04-27 Fujitsu Ltd Junction head
DE2640613C2 (en) * 1976-09-09 1985-03-07 Siemens AG, 1000 Berlin und 8000 München Method and device for contacting circuit components in a layer circuit
JPS5737842A (en) * 1980-08-19 1982-03-02 Seiko Epson Corp Device for gang bonding
JPS58215286A (en) * 1982-06-09 1983-12-14 Nissan Motor Co Ltd Holder for electrode chip
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US4600228A (en) * 1984-05-31 1986-07-15 Sperry Corporation Lockable compliant end effector apparatus
JPS62256441A (en) * 1986-04-30 1987-11-09 Hitachi Ltd Die-bonder
JPS63200541A (en) * 1987-02-17 1988-08-18 Toshiba Corp Mechanism for adjusting inclination of bonding tool
USH539H (en) * 1987-04-01 1988-11-01 The United States Of America As Represented By The Secretary Of The Navy Arcuate rolling bearing

Also Published As

Publication number Publication date
US4875614A (en) 1989-10-24
EP0366880A3 (en) 1991-05-29
EP0366880B1 (en) 1995-01-04
DE68920405D1 (en) 1995-02-16
EP0366880A2 (en) 1990-05-09
JPH0650752B2 (en) 1994-06-29
JPH02137241A (en) 1990-05-25

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee