DE60235480D1 - VERY NARROW BAND DEVICE LASER SYSTEM WITH TWO CHAMBERS AND HIGH REPLACEMENT RATE - Google Patents

VERY NARROW BAND DEVICE LASER SYSTEM WITH TWO CHAMBERS AND HIGH REPLACEMENT RATE

Info

Publication number
DE60235480D1
DE60235480D1 DE60235480T DE60235480T DE60235480D1 DE 60235480 D1 DE60235480 D1 DE 60235480D1 DE 60235480 T DE60235480 T DE 60235480T DE 60235480 T DE60235480 T DE 60235480T DE 60235480 D1 DE60235480 D1 DE 60235480D1
Authority
DE
Germany
Prior art keywords
chambers
narrow band
laser system
band device
replacement rate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60235480T
Other languages
German (de)
Inventor
David S Knowles
Daniel J W Brown
Herve A Besaucele
David W Myers
Alexander I Ershov
William N Partlo
Richard L Sandstrom
Plash P Das
Stuart L Anderson
Igor V Fomenkov
Richard C Ujazdowski
Eckehard D Onkels
Richard M Ness
Scott T Smith
William G Hulburd
Jeffrey Oicles
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Cymer Inc
Original Assignee
Cymer Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/943,343 external-priority patent/US6567450B2/en
Priority claimed from US10/006,913 external-priority patent/US6535531B1/en
Priority claimed from US10/012,002 external-priority patent/US6625191B2/en
Application filed by Cymer Inc filed Critical Cymer Inc
Application granted granted Critical
Publication of DE60235480D1 publication Critical patent/DE60235480D1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

DE60235480T 2001-08-29 2002-08-28 VERY NARROW BAND DEVICE LASER SYSTEM WITH TWO CHAMBERS AND HIGH REPLACEMENT RATE Expired - Lifetime DE60235480D1 (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US09/943,343 US6567450B2 (en) 1999-12-10 2001-08-29 Very narrow band, two chamber, high rep rate gas discharge laser system
US10/006,913 US6535531B1 (en) 2001-11-29 2001-11-29 Gas discharge laser with pulse multiplier
US10/012,002 US6625191B2 (en) 1999-12-10 2001-11-30 Very narrow band, two chamber, high rep rate gas discharge laser system
PCT/US2002/027925 WO2003021728A2 (en) 2001-08-29 2002-08-28 Very narrow band, two chamber, high rep rate gas discharge laser system

Publications (1)

Publication Number Publication Date
DE60235480D1 true DE60235480D1 (en) 2010-04-08

Family

ID=41795371

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60235480T Expired - Lifetime DE60235480D1 (en) 2001-08-29 2002-08-28 VERY NARROW BAND DEVICE LASER SYSTEM WITH TWO CHAMBERS AND HIGH REPLACEMENT RATE

Country Status (3)

Country Link
AT (1) ATE459117T1 (en)
DE (1) DE60235480D1 (en)
MY (1) MY136595A (en)

Also Published As

Publication number Publication date
ATE459117T1 (en) 2010-03-15
MY136595A (en) 2008-10-31

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition