DE60220213D1 - Vorrichtung und Verfahren zur Polarisationsanalyse - Google Patents

Vorrichtung und Verfahren zur Polarisationsanalyse

Info

Publication number
DE60220213D1
DE60220213D1 DE60220213T DE60220213T DE60220213D1 DE 60220213 D1 DE60220213 D1 DE 60220213D1 DE 60220213 T DE60220213 T DE 60220213T DE 60220213 T DE60220213 T DE 60220213T DE 60220213 D1 DE60220213 D1 DE 60220213D1
Authority
DE
Germany
Prior art keywords
polarization analysis
polarization
analysis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60220213T
Other languages
English (en)
Other versions
DE60220213T2 (de
Inventor
Takeshi Nagashima
Masanori Hangyo
Kouichi Hiranaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Publication of DE60220213D1 publication Critical patent/DE60220213D1/de
Application granted granted Critical
Publication of DE60220213T2 publication Critical patent/DE60220213T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3581—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using far infrared light; using Terahertz radiation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J4/00—Measuring polarisation of light
    • G01J4/04—Polarimeters using electric detection means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3581—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using far infrared light; using Terahertz radiation
    • G01N21/3586—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using far infrared light; using Terahertz radiation by Terahertz time domain spectroscopy [THz-TDS]
DE2002620213 2001-06-27 2002-06-27 Vorrichtung und Verfahren zur Polarisationsanalyse Expired - Lifetime DE60220213T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001195395 2001-06-27
JP2001195395A JP3550381B2 (ja) 2001-06-27 2001-06-27 偏光解析装置及び偏光解析方法

Publications (2)

Publication Number Publication Date
DE60220213D1 true DE60220213D1 (de) 2007-07-05
DE60220213T2 DE60220213T2 (de) 2008-01-17

Family

ID=19033373

Family Applications (1)

Application Number Title Priority Date Filing Date
DE2002620213 Expired - Lifetime DE60220213T2 (de) 2001-06-27 2002-06-27 Vorrichtung und Verfahren zur Polarisationsanalyse

Country Status (5)

Country Link
US (1) US6847448B2 (de)
EP (1) EP1271115B1 (de)
JP (1) JP3550381B2 (de)
DE (1) DE60220213T2 (de)
TW (1) TW557359B (de)

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WO2005050177A1 (ja) * 2003-11-20 2005-06-02 National Institute Of Advanced Industrial Science And Technology 光学スペクトルの測定による試料の複素誘電率測定方法及び測定装置
US7649633B2 (en) 2003-11-20 2010-01-19 National Institute Of Advanced Industrial Science And Technology Method and instrument for measuring complex dielectric constant of a sample by optical spectral measurement
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WO2006035780A1 (ja) * 2004-09-30 2006-04-06 Japan Science And Technology Agency 赤外光放射装置、赤外光検出装置および時系列変換パルス分光計測装置ならびに赤外光放射方法
JP2006170822A (ja) * 2004-12-16 2006-06-29 Tochigi Nikon Corp テラヘルツ光検出器、テラヘルツ光検出方法およびテラヘルツイメージング装置
WO2006072762A1 (en) * 2005-01-05 2006-07-13 Isis Innovation Limited Polarization sensitive electromagnetic radiation detector
TWI276425B (en) * 2005-03-23 2007-03-21 Ind Tech Res Inst System for detecting the burned degree of a skin
WO2006126707A1 (ja) * 2005-05-27 2006-11-30 Zeon Corporation グリッド偏光フィルム、グリッド偏光フィルムの製造方法、光学積層体、光学積層体の製造方法、および液晶表示装置
US7829855B2 (en) * 2006-01-17 2010-11-09 University Of Northern British Columbia Methods and apparatus for determining fibre orientation
JP4829669B2 (ja) * 2006-04-28 2011-12-07 キヤノン株式会社 検体情報取得装置、及び検体情報取得方法
JP4905454B2 (ja) * 2006-05-31 2012-03-28 株式会社村田製作所 ワイヤーグリッド用金属板、ワイヤーグリッド、およびワイヤーグリッド用金属板の製造方法
CN101210874B (zh) * 2006-12-31 2010-05-19 清华大学 测量太赫兹时域光谱的方法及设备
WO2008147575A2 (en) * 2007-01-11 2008-12-04 Rensselaer Polytechnic Institute Systems, methods, and devices for handling terahertz radiation
JP4234181B1 (ja) 2007-08-23 2009-03-04 株式会社村田製作所 ワイヤーグリッドおよびその製造方法
US8526002B2 (en) 2007-09-07 2013-09-03 Massachusetts Institute Of Technology Two-dimensional fourier transform spectrometer
JP4978515B2 (ja) * 2008-03-04 2012-07-18 ソニー株式会社 プローブ装置及びテラヘルツ分光装置
JP2009300108A (ja) 2008-06-10 2009-12-24 Sony Corp テラヘルツ分光装置
US8488119B2 (en) 2009-02-27 2013-07-16 J.A. Woollam Co., Inc. Terahertz-infrared ellipsometer system, and method of use
US8169611B2 (en) 2009-02-27 2012-05-01 University Of Nebraska Board Of Regents Terahertz-infrared ellipsometer system, and method of use
US8416408B1 (en) 2009-02-27 2013-04-09 J.A. Woollam Co., Inc. Terahertz-infrared ellipsometer system, and method of use
US8934096B2 (en) 2009-02-27 2015-01-13 University Of Nebraska Board Of Regents Terahertz-infrared ellipsometer system, and method of use
US8736838B2 (en) 2009-02-27 2014-05-27 J.A. Woollam Co., Inc. Terahertz ellipsometer system, and method of use
WO2010106589A1 (ja) * 2009-03-18 2010-09-23 株式会社村田製作所 光測定装置及び光測定方法
JPWO2011013452A1 (ja) * 2009-07-29 2013-01-07 株式会社村田製作所 被測定物の特性を測定する方法、測定装置およびフィルタ装置
JP5570771B2 (ja) * 2009-07-30 2014-08-13 グローリー株式会社 テラヘルツ光を用いた紙葉類の真偽判別方法および装置
JP5516589B2 (ja) 2009-09-03 2014-06-11 株式会社村田製作所 被測定物の特性を測定する方法、および測定システム
JP5605372B2 (ja) * 2009-12-09 2014-10-15 株式会社村田製作所 空隙配置構造体が保持された分光測定用デバイス、それに用いられる枠部材、および、分光器
US8692201B1 (en) 2011-01-26 2014-04-08 The Boeing Company Moisture detection system and method
DE102011104708A1 (de) * 2011-06-06 2012-12-06 Automation Dr. Nix Gmbh & Co. Kg Verfahren und Vorrichtung zur Bestimmung von Material-Eigenschaften einer Substrat-Probe im Tera-Hertz-Frequenzspektrum
KR20130001969A (ko) * 2011-06-28 2013-01-07 한국전자통신연구원 테라헤르츠파를 이용한 샘플의 분석 방법 및 장치
US9222881B2 (en) 2012-02-24 2015-12-29 Massachusetts Institute Of Technology Vibrational spectroscopy for quantitative measurement of analytes
JP2013228330A (ja) * 2012-04-26 2013-11-07 Jfe Steel Corp 膜厚測定装置および膜厚測定方法
DE102012220923B4 (de) * 2012-11-15 2014-07-10 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Messung einer faserrichtung eines kohlefaserwerkstoffes und herstellung eines objekts in kohlefaserverbundbauweise
US9322712B2 (en) * 2013-03-15 2016-04-26 The Johns Hopkins University Terahertz time-domain spectroscopic ellipsometry system
JP6161059B2 (ja) * 2013-03-19 2017-07-12 株式会社Ｓｃｒｅｅｎホールディングス フォトデバイス検査装置およびフォトデバイス検査方法
TWI534521B (zh) * 2013-12-09 2016-05-21 國立清華大學 類相對論輻射天線系統
JP6407635B2 (ja) * 2014-09-03 2018-10-17 有限会社スペクトルデザイン 電磁波の偏光方位計測方法及び装置
CN105628641A (zh) * 2015-12-28 2016-06-01 中国科学院重庆绿色智能技术研究院 一种实时散射型太赫兹准时域近场偏振光谱仪
JP6877713B2 (ja) * 2016-05-11 2021-05-26 有限会社スペクトルデザイン 周波数シフトテラヘルツ波発生装置及び発生方法、周波数シフトテラヘルツ波計測装置及び計測方法、断層状態検出装置及び検出方法、サンプル特性計測装置、計測方法
JP6646519B2 (ja) * 2016-05-20 2020-02-14 浜松ホトニクス株式会社 全反射分光計測装置及び全反射分光計測方法
CN106248616B (zh) * 2016-09-27 2017-10-24 深圳市太赫兹科技创新研究院有限公司 太赫兹全偏振态检测光谱仪
CN106990062B (zh) * 2017-03-14 2019-09-24 天津大学 一种基于太赫兹旋光效应的混油检测方法
CN107462849B (zh) * 2017-07-21 2020-01-03 山西大学 一种基于原子能级的射频线传输因子的测量装置及方法
CN108535550B (zh) * 2018-03-12 2020-03-20 上海理工大学 基于布鲁斯特角测量的太赫兹物质介电常数测量系统
CN108918458B (zh) * 2018-10-12 2020-12-04 北京环境特性研究所 一种确定材料太赫兹吸收峰的方法
CN109557043B (zh) * 2018-12-03 2020-03-27 昆山普尚电子科技有限公司 一种使用太赫兹电磁波检测物体的电磁特性的系统及方法
CN113655018B (zh) * 2021-10-11 2024-01-09 阜阳师范大学 一种用于多铁性材料微结构表征的太赫兹时域光谱系统

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WO2000050859A1 (en) * 1999-02-23 2000-08-31 Teraprobe Limited Method and apparatus for terahertz imaging
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JP4237363B2 (ja) 1999-11-10 2009-03-11 日本分光株式会社 赤外分光装置
JP2001151916A (ja) 1999-11-30 2001-06-05 Oji Paper Co Ltd フレキシブルプリント配線用フィルム
GB2360842B (en) * 2000-03-31 2002-06-26 Toshiba Res Europ Ltd An apparatus and method for investigating a sample
JP2002005828A (ja) * 2000-06-20 2002-01-09 Tochigi Nikon Corp 半導体の不純物濃度検査装置及び検査方法
US6556306B2 (en) * 2001-01-04 2003-04-29 Rensselaer Polytechnic Institute Differential time domain spectroscopy method for measuring thin film dielectric properties

Also Published As

Publication number Publication date
US6847448B2 (en) 2005-01-25
JP3550381B2 (ja) 2004-08-04
US20030016358A1 (en) 2003-01-23
EP1271115A2 (de) 2003-01-02
DE60220213T2 (de) 2008-01-17
TW557359B (en) 2003-10-11
EP1271115B1 (de) 2007-05-23
EP1271115A3 (de) 2005-01-26
JP2003014620A (ja) 2003-01-15

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Legal Events

Date Code Title Description
8328 Change in the person/name/address of the agent

Representative=s name: ADVOTEC. PATENT- UND RECHTSANWAELTE, 80538 MUENCHE

8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: PANASONIC CORP., KADOMA, OSAKA, JP