DE602005027312D1 - METHOD FOR PRODUCING A PIEZOELECTRIC ELEMENT - Google Patents

METHOD FOR PRODUCING A PIEZOELECTRIC ELEMENT

Info

Publication number
DE602005027312D1
DE602005027312D1 DE200560027312 DE602005027312T DE602005027312D1 DE 602005027312 D1 DE602005027312 D1 DE 602005027312D1 DE 200560027312 DE200560027312 DE 200560027312 DE 602005027312 T DE602005027312 T DE 602005027312T DE 602005027312 D1 DE602005027312 D1 DE 602005027312D1
Authority
DE
Germany
Prior art keywords
producing
piezoelectric element
piezoelectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE200560027312
Other languages
German (de)
Inventor
Takashi Abe
Li Li
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Science and Technology Agency
Original Assignee
Japan Science and Technology Agency
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Japan Science and Technology Agency filed Critical Japan Science and Technology Agency
Publication of DE602005027312D1 publication Critical patent/DE602005027312D1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/08—Shaping or machining of piezoelectric or electrostrictive bodies
    • H10N30/081—Shaping or machining of piezoelectric or electrostrictive bodies by coating or depositing using masks, e.g. lift-off
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/08—Shaping or machining of piezoelectric or electrostrictive bodies
    • H10N30/082—Shaping or machining of piezoelectric or electrostrictive bodies by etching, e.g. lithography
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/43—Electric condenser making
    • Y10T29/435—Solid dielectric type

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Micromachines (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Drying Of Semiconductors (AREA)
DE200560027312 2004-02-02 2005-01-27 METHOD FOR PRODUCING A PIEZOELECTRIC ELEMENT Active DE602005027312D1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2004025780A JP4012156B2 (en) 2004-02-02 2004-02-02 Method for manufacturing piezoelectric element
PCT/JP2005/001564 WO2005074052A1 (en) 2004-02-02 2005-01-27 Method for fabricating piezoelectric element

Publications (1)

Publication Number Publication Date
DE602005027312D1 true DE602005027312D1 (en) 2011-05-19

Family

ID=34823997

Family Applications (1)

Application Number Title Priority Date Filing Date
DE200560027312 Active DE602005027312D1 (en) 2004-02-02 2005-01-27 METHOD FOR PRODUCING A PIEZOELECTRIC ELEMENT

Country Status (7)

Country Link
US (1) US7770273B2 (en)
EP (1) EP1713135B1 (en)
JP (1) JP4012156B2 (en)
KR (1) KR100838188B1 (en)
CN (1) CN100477315C (en)
DE (1) DE602005027312D1 (en)
WO (1) WO2005074052A1 (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5349289B2 (en) * 2007-02-27 2013-11-20 株式会社東芝 Coating device
WO2012018561A1 (en) * 2010-07-26 2012-02-09 Fujifilm Corporation Forming a device having a curved piezoelectric membrane
EP2625522B1 (en) 2010-10-05 2019-09-25 ANPAC Bio-Medical Science Co., Ltd. Micro-devices for disease detection
CN103562728B (en) 2011-03-24 2016-08-17 安派科生物医学科技有限公司 Micro element for disease detection
FR2988912A1 (en) 2012-04-02 2013-10-04 St Microelectronics Crolles 2 ENERGY RECOVERY DEVICE
FR2988911A1 (en) * 2012-04-02 2013-10-04 St Microelectronics Crolles 2 CURVED PLATE AND METHOD OF MANUFACTURE
WO2014123519A1 (en) 2013-02-06 2014-08-14 Empire Technology Development Llc Devices, systems, and methods for detecting odorants
US20160349216A1 (en) * 2014-01-30 2016-12-01 Empire Technology Development Llc Odor sensors

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4487828A (en) * 1983-06-03 1984-12-11 At&T Technologies, Inc. Method of manufacturing printed circuit boards
US4826564A (en) * 1987-10-30 1989-05-02 International Business Machines Corporation Method of selective reactive ion etching of substrates
US5178989A (en) * 1989-07-21 1993-01-12 Board Of Regents, The University Of Texas System Pattern forming and transferring processes
JP3183033B2 (en) * 1994-05-16 2001-07-03 ブラザー工業株式会社 Method for manufacturing nozzle plate of ink ejecting apparatus
US5722162A (en) * 1995-10-12 1998-03-03 Fujitsu Limited Fabrication procedure for a stable post
GB9600469D0 (en) * 1996-01-10 1996-03-13 Secr Defence Three dimensional etching process
JP3731348B2 (en) 1998-06-09 2006-01-05 松下電器産業株式会社 Piezoelectric vibrator
US6530652B1 (en) * 1998-12-30 2003-03-11 Samsung Electronics Co., Ltd. Micro actuator and ink jet printer head manufactured using the same
JP2000232095A (en) 1999-02-12 2000-08-22 Nippon Telegr & Teleph Corp <Ntt> Formation method for fine pattern of semiconductor surface
JP3594864B2 (en) * 2000-01-25 2004-12-02 Ｔｄｋ株式会社 Method for manufacturing thin-film magnetic head
JP3368885B2 (en) * 2000-03-15 2003-01-20 株式会社村田製作所 Manufacturing method of surface acoustic wave device
JP3539630B2 (en) * 2000-03-22 2004-07-07 Ｔｄｋ株式会社 Method for manufacturing thin-film magnetic head
US6420202B1 (en) * 2000-05-16 2002-07-16 Agere Systems Guardian Corp. Method for shaping thin film resonators to shape acoustic modes therein
JP2002368572A (en) 2001-06-05 2002-12-20 Yoshiaki Nagaura Piezoelectric element or electronic material, electroacoustic transducer and production method therefor
JP2002048907A (en) 2000-08-01 2002-02-15 Canon Inc Method for manufacturing diffractive optical device
US6926850B2 (en) * 2001-07-26 2005-08-09 Lucent Technologies Inc. Method for making micro lenses
JP2003168941A (en) 2001-11-30 2003-06-13 Kinseki Ltd Convex working method for small piezoelectric blank plate
JP2003234632A (en) 2002-02-08 2003-08-22 Canon Inc Crystal resonator and its manufacturing method
US20040016718A1 (en) * 2002-03-20 2004-01-29 Ruey-Jen Hwu Micro-optic elements and method for making the same
JP4133580B2 (en) 2003-05-21 2008-08-13 独立行政法人科学技術振興機構 Processing method of piezoelectric material

Also Published As

Publication number Publication date
WO2005074052A1 (en) 2005-08-11
KR100838188B1 (en) 2008-06-16
US7770273B2 (en) 2010-08-10
US20070130739A1 (en) 2007-06-14
CN1914745A (en) 2007-02-14
CN100477315C (en) 2009-04-08
EP1713135A4 (en) 2009-01-07
EP1713135B1 (en) 2011-04-06
JP4012156B2 (en) 2007-11-21
KR20070004582A (en) 2007-01-09
EP1713135A1 (en) 2006-10-18
JP2005217370A (en) 2005-08-11

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