DE202012009070U1 - Optoelectronic sensor and receiver - Google Patents
Optoelectronic sensor and receiver Download PDFInfo
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- DE202012009070U1 DE202012009070U1 DE202012009070U DE202012009070U DE202012009070U1 DE 202012009070 U1 DE202012009070 U1 DE 202012009070U1 DE 202012009070 U DE202012009070 U DE 202012009070U DE 202012009070 U DE202012009070 U DE 202012009070U DE 202012009070 U1 DE202012009070 U1 DE 202012009070U1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
- G01S17/06—Systems determining position data of a target
- G01S17/46—Indirect determination of position data
- G01S17/48—Active triangulation systems, i.e. using the transmission and reflection of electromagnetic waves other than radio waves
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
- G01S17/04—Systems determining the presence of a target
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/481—Constructional features, e.g. arrangements of optical elements
- G01S7/4816—Constructional features, e.g. arrangements of optical elements of receivers alone
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
- H01L25/03—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
- H01L25/04—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
- H01L25/041—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L31/00
- H01L25/042—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L31/00 the devices being arranged next to each other
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48225—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
- H01L2224/48227—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Remote Sensing (AREA)
- Radar, Positioning & Navigation (AREA)
- Computer Networks & Wireless Communication (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Life Sciences & Earth Sciences (AREA)
- Sustainable Development (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Measurement Of Optical Distance (AREA)
Abstract
Empfangselement (3) für einen optoelektronischen Sensor, umfassend eine erste Photodiode (31b) und eine zweite Photodiode (32b), die nebeneinander auf einer Leiterplatte (5) angeordnet sind, dadurch gekennzeichnet, dass die erste Photodiode (31b) eine PIN-Photodiode ist und dass die zweite Photodiode (32b) eine NIP-Photodiode ist.Receiving element (3) for an optoelectronic sensor, comprising a first photodiode (31b) and a second photodiode (32b), which are arranged side by side on a printed circuit board (5), characterized in that the first photodiode (31b) is a PIN photodiode and that the second photodiode (32b) is a NIP photodiode.
Description
Die vorliegende Erfindung betrifft ein Empfangselement für einen optoelektronischen Sensor. Weiterhin betrifft die Erfindung einen optoelektronischen Sensor, der das erfindungsgemäße Empfangselement umfasst.The present invention relates to a receiving element for an optoelectronic sensor. Furthermore, the invention relates to an optoelectronic sensor comprising the receiving element according to the invention.
Stand der TechnikState of the art
Optoelektronische Sensoren zur Abstandsbestimmung, wie beispielsweise Lichttaster mit Hintergrundausblendung (HGA) arbeiten nach dem Triangulationsverfahren: Ein Sender emittiert Licht und beleuchtet ein Objekt im Erfassungsbereich mittels einer Sendelinse. Die Lichtstrahlen werden von dem Objekt diffus zum Sensor zurückreflektiert und von einer Empfangslinse auf ein PSD-Element (Position-Sensitive-Device) oder eine CCD-Zeile (Charge-Coupled-Device) als Empfangselement fokussiert. Je nach Objektabstand treffen die Lichtstrahlen unter einem anderen Winkel auf die Empfangslinse, was sich im Wandern der lateralen Lichtverteilung auf dem PSD bemerkbar macht. Da beim Triangulationsverfahren die Lage des Lichtfokuspunkts auf dem PSD-Element bzw. der CCD-Zeile ausgewertet wird, und nicht die Amplitude des aus der reflektierten Strahlung resultierenden Photostroms, ist das Abstandsignal in der Theorie unabhängig von den Reflektionseigenschaften eines Objekts. Die sogenannte Grauwertverschiebung (GWV) geht daher theoretisch gegen null. Hierbei handelt es sich um die Abstandsdifferenz des Sensorschaltpunktes bei einer Einstellung mit unterschiedlichen Objektreflektivitäten. Mit einer Normmessplatte wird der Sensor auf einen Abstand eingestellt. Mit einer anderen Normmessplatte wird der damit erreichte Abstand gemessen. Die Differenz dieser beiden Schaltpunkte in % wird als Grauwertverschiebung bezeichnet. Je kleiner die Grauwertverschiebung desto farbunabhängiger arbeitet der Sensor. In der Realität ist die Abstandsauswertung trotzdem von der Empfangsenergie abhängig und diese beeinflusst wiederum die Grauwertverschiebung des Sensor, welche typischerweise bis zu 10% betragen kann.Optoelectronic sensors for distance determination, such as light sensors with background suppression (HGA) work according to the triangulation method: A transmitter emits light and illuminates an object in the detection area by means of a transmitting lens. The light beams are diffused back from the object to the sensor and focused by a receiving lens on a PSD (Position Sensitive Device) or a CCD line (Charge-Coupled-Device) as a receiving element. Depending on the object distance, the light rays strike the receiving lens at a different angle, which is noticeable in the wandering of the lateral light distribution on the PSD. In the triangulation method, since the position of the light focus is evaluated on the PSD element and the CCD line rather than the amplitude of the photocurrent resulting from the reflected radiation, the distance signal is in theory independent of the reflection properties of an object. The so-called gray value shift (GWV) therefore theoretically approaches zero. This is the distance difference of the sensor switching point at a setting with different object reflectivities. With a standard measuring plate, the sensor is set to a distance. With another standard measuring plate, the distance thus achieved is measured. The difference between these two switching points in% is called gray value shift. The smaller the gray value shift, the more color-independent the sensor works. In reality, the distance evaluation still depends on the received energy and this in turn affects the gray value shift of the sensor, which can typically be up to 10%.
Spezielle kostengünstige Sensoren, deren Schaltabstand fest eingestellt sein soll, sollen ohne preistreibende Elektronikbauteile, wie beispielsweise das PSD-Elemtent, auskommen. So ist es beispielsweise bekannt, das PSD-Element bzw. die CCD-Zeile durch eine Doppelphotodiode oder durch eine Anordnung zweier unmittelbar aneinander montierter Photodioden als Emfangselement zu ersetzen. In erster Näherung schaltet der Sensor, wenn der durch die diffuse Reflektion erzeugte Lichtpunkt beide Photodioden gleichstark beleuchtet. Ein nachgeschalteter Differenzverstärker bildet die Differenz aus beiden Photoströmen, welches dann als Eingangssignal der nächsten Auswertestufe dient. Die Doppelphotodiode kann dabei so geschaltet werden, dass beide Photodioden eine gemeinsame Kathode aufweisen. Werden die beiden Photodioden in Reihe geschaltet, kann auf den Differenzverstärker verzichtet werden.Special low-cost sensors, the switching distance should be set permanently, should be without expensive electronic components, such as the PSD Elemtent get along. Thus, for example, it is known to replace the PSD element or the CCD line by a double photodiode or by an arrangement of two photodiodes mounted directly adjacent to one another as a receiving element. In a first approximation, the sensor switches when the light spot generated by the diffuse reflection illuminates both photodiodes with equal intensity. A downstream differential amplifier forms the difference between the two photocurrents, which then serves as the input signal of the next evaluation stage. The double photodiode can be switched so that both photodiodes have a common cathode. If the two photodiodes are connected in series, the differential amplifier can be dispensed with.
Der Abstand beider Photodioden zueinander bestimmt maßgeblich die Sensoreigenschaften wie die Grauwertverschiebung oder die Hysterese bei Veränderung des Abstands zwischen Sensor und zu untersuchendem Objekt. Grundsätzlich gilt, dass Grauwertverschiebung und Hysterese umso geringer sind, je kleiner der Abstand zwischen den Photodioden ist. Allerdings können in bekannten Sensoren mit Doppelphotodiode die Fern- wie Nahbereichsdiode nicht beliebig dicht nebeneinander positioniert werden, da andernfalls die Gefahr besteht, dass durch mögliche Die-Kleber-Reste ein Kurzschluss verursacht wird.The distance between the two photodiodes determines the sensor properties such as the gray value shift or the hysteresis when changing the distance between the sensor and the object to be examined. Basically, the smaller the distance between the photodiodes, the lower the gray value shift and hysteresis. However, in known sensors with double photodiode the distance and near-range diode can not be positioned arbitrarily close to each other, otherwise there is a risk that caused by possible die-glue residues a short circuit.
Es ist Aufgabe der vorliegenden Erfindung, ein Empfangselement für einen optoelektronischen Sensor bereitzustellen, in dem keine teuren elektronischen Bauteile zum Einsatz kommen und welches gegenüber bekannten Empfangselementen eine verbesserte Grauwertverschiebung und Hysterese aufweist.It is an object of the present invention to provide a receiving element for an optoelectronic sensor in which no expensive electronic components are used and which has an improved gray value shift and hysteresis compared to known receiving elements.
Offenbarung der ErfindungDisclosure of the invention
Diese Aufgabe wird durch das erfindungsgemäße Empfangselement für einen optoelektronischen Sensor gelöst. Dieses umfasst eine erste Photodiode und eine zweite Photodiode, die nebeneinander auf einer Leiterplatte angeordnet sind. Die erste Photodiode ist eine PIN-Photodiode (Positive-Intrinsic-Negative) und die zweite Photodiode ist eine NIP-Photodiode (Negative-Intrinsic-Positive). Eine PIN-Photodiode wird p-side-up auf einer Leiterplatte angeordnet, sodass die aktive Fläche der Photodiode die Kathode darstellt und die der Leiterplatte zugewandte Seite der Photodiode die Anode darstellt. Eine NIP-Photodiode wird n-side-up auf einer Leiterplatte angeordnet, so dass ihre aktive Fläche die Anode darstellt und ihre der Leiterplatte zugewandte Seite die Kathode darstellt.This object is achieved by the receiving element according to the invention for an optoelectronic sensor. This comprises a first photodiode and a second photodiode, which are arranged side by side on a printed circuit board. The first photodiode is a PIN photodiode (Positive-Intrinsic-Negative) and the second photodiode is a NIP-photodiode (Negative-Intrinsic-Positive). A PIN photodiode is placed p-side-up on a circuit board such that the active area of the photodiode represents the cathode and the side of the photodiode facing the circuit board represents the anode. An NIP photodiode is placed n-side-up on a circuit board so that its active area is the anode and its side facing the circuit board is the cathode.
Indem erfindungsgemäß zwei unterschiedlich gepolte Photodioden verwendet werden, ist es möglich, diese ohne Sicherheitsabstand nebeneinander zu positionieren. Vorzugsweise werden die beiden Photodioden sogar so angeordnet, dass ein Rand der ersten Photodiode einen Rand der zweiten Photodiode berührt.By using two differently polarized photodiodes according to the invention, it is possible to position them next to one another without safety distance. Preferably, the two photodiodes are even arranged so that an edge of the first photodiode touches an edge of the second photodiode.
Der Abstand zwischen der lichtempfindlichen Fläche der ersten Photodiode und der lichtempfindlichen Fläche der zweiten Photodiode liegt erfindungsgemäß vorzugsweise im Bereich von Null bis 250 μm, besonders bevorzugt im Bereich von 180 μm bis 250 μm. Dies ermöglicht eine Verbesserung von Grauwertverschiebung und Hysterese.The distance between the photosensitive surface of the first photodiode and the photosensitive surface of the second photodiode is according to the invention preferably in the range of zero to 250 .mu.m, particularly preferably in the range of 180 .mu.m to 250 microns. This allows an improvement of gray level shift and hysteresis.
Während bei herkömmlichen Empfangselementen jede Photodiode mit einem eigenen Bondpad mit der Leiterplatte verbunden wird, ist dies aufgrund der erfindungsgemäßen unterschiedlichen Polung der Photodioden nicht notwendig. Es ist daher bevorzugt, dass beide Photodioden mittels eines gemeinsamen Bondpads mit der Leiterplatte verbunden sind.While in conventional receiving elements, each photodiode is connected to its own bonding pad with the circuit board, this is not necessary due to the different polarity of the photodiodes according to the invention. It is therefore preferred that both photodiodes are connected to the printed circuit board by means of a common bond pad.
Um in dem Empfangselement auf einen Differenzverstärker verzichten zu können, was Kosten und Bauraum auf der Leiterplatte einspart, ist es bevorzugt, dass die erste Photodiode und die zweite Photodiode in Reihe geschaltet sind.In order to dispense with a differential amplifier in the receiving element, which saves costs and space on the circuit board, it is preferred that the first photodiode and the second photodiode are connected in series.
Der erfindungsgemäße optoelektronische Sensor umfasst eine Lichtquelle und ein erfindungsgemäßes Empfangselement. Bei der Lichtquelle kann es sich beispielsweise um eine LED, eine Laserdiode oder einen Laser handeln. Der optoelektronische Sensor ist insbesondere ein Lichttaster oder eine Reflexlichtschranke. Durch die Verwendbarkeit des erfindungsgemäßen Empfangselements in unterschiedlichen optoelektronischen Sensoren kann durch die identische Hauptbestückung ein kostensparender Stückzahleffekt erzielt werden.The optoelectronic sensor according to the invention comprises a light source and a receiving element according to the invention. The light source may be, for example, an LED, a laser diode or a laser. The optoelectronic sensor is in particular a light scanner or a reflex light barrier. Due to the usability of the receiving element according to the invention in different optoelectronic sensors can be achieved by the identical main assembly, a cost-saving piece-rate effect.
Kurze Beschreibung der ZeichnungenBrief description of the drawings
Ausführungsformen der ErfindungEmbodiments of the invention
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DE202012009070U DE202012009070U1 (en) | 2012-09-21 | 2012-09-21 | Optoelectronic sensor and receiver |
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DE202012009070U DE202012009070U1 (en) | 2012-09-21 | 2012-09-21 | Optoelectronic sensor and receiver |
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Cited By (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2017174491A1 (en) * | 2016-04-06 | 2017-10-12 | Trinamix Gmbh | Detector for an optical detection of at least one object |
US10412283B2 (en) | 2015-09-14 | 2019-09-10 | Trinamix Gmbh | Dual aperture 3D camera and method using differing aperture areas |
US10775505B2 (en) | 2015-01-30 | 2020-09-15 | Trinamix Gmbh | Detector for an optical detection of at least one object |
US10823818B2 (en) | 2013-06-13 | 2020-11-03 | Basf Se | Detector for optically detecting at least one object |
US10890491B2 (en) | 2016-10-25 | 2021-01-12 | Trinamix Gmbh | Optical detector for an optical detection |
US10948567B2 (en) | 2016-11-17 | 2021-03-16 | Trinamix Gmbh | Detector for optically detecting at least one object |
US10955936B2 (en) | 2015-07-17 | 2021-03-23 | Trinamix Gmbh | Detector for optically detecting at least one object |
US11041718B2 (en) | 2014-07-08 | 2021-06-22 | Basf Se | Detector for determining a position of at least one object |
US11060922B2 (en) | 2017-04-20 | 2021-07-13 | Trinamix Gmbh | Optical detector |
US11067692B2 (en) | 2017-06-26 | 2021-07-20 | Trinamix Gmbh | Detector for determining a position of at least one object |
US11125880B2 (en) | 2014-12-09 | 2021-09-21 | Basf Se | Optical detector |
US11211513B2 (en) | 2016-07-29 | 2021-12-28 | Trinamix Gmbh | Optical sensor and detector for an optical detection |
US11428787B2 (en) | 2016-10-25 | 2022-08-30 | Trinamix Gmbh | Detector for an optical detection of at least one object |
DE202022102299U1 (en) | 2022-04-28 | 2023-08-10 | Sick Ag | Receiving element for an optoelectronic sensor and optoelectronic sensor |
US11860292B2 (en) | 2016-11-17 | 2024-01-02 | Trinamix Gmbh | Detector and methods for authenticating at least one object |
-
2012
- 2012-09-21 DE DE202012009070U patent/DE202012009070U1/en not_active Expired - Lifetime
Cited By (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10823818B2 (en) | 2013-06-13 | 2020-11-03 | Basf Se | Detector for optically detecting at least one object |
US11041718B2 (en) | 2014-07-08 | 2021-06-22 | Basf Se | Detector for determining a position of at least one object |
US11125880B2 (en) | 2014-12-09 | 2021-09-21 | Basf Se | Optical detector |
US10775505B2 (en) | 2015-01-30 | 2020-09-15 | Trinamix Gmbh | Detector for an optical detection of at least one object |
US10955936B2 (en) | 2015-07-17 | 2021-03-23 | Trinamix Gmbh | Detector for optically detecting at least one object |
US10412283B2 (en) | 2015-09-14 | 2019-09-10 | Trinamix Gmbh | Dual aperture 3D camera and method using differing aperture areas |
WO2017174491A1 (en) * | 2016-04-06 | 2017-10-12 | Trinamix Gmbh | Detector for an optical detection of at least one object |
US11211513B2 (en) | 2016-07-29 | 2021-12-28 | Trinamix Gmbh | Optical sensor and detector for an optical detection |
US10890491B2 (en) | 2016-10-25 | 2021-01-12 | Trinamix Gmbh | Optical detector for an optical detection |
US11428787B2 (en) | 2016-10-25 | 2022-08-30 | Trinamix Gmbh | Detector for an optical detection of at least one object |
US11415661B2 (en) | 2016-11-17 | 2022-08-16 | Trinamix Gmbh | Detector for optically detecting at least one object |
US10948567B2 (en) | 2016-11-17 | 2021-03-16 | Trinamix Gmbh | Detector for optically detecting at least one object |
US11635486B2 (en) | 2016-11-17 | 2023-04-25 | Trinamix Gmbh | Detector for optically detecting at least one object |
US11698435B2 (en) | 2016-11-17 | 2023-07-11 | Trinamix Gmbh | Detector for optically detecting at least one object |
US11860292B2 (en) | 2016-11-17 | 2024-01-02 | Trinamix Gmbh | Detector and methods for authenticating at least one object |
US11060922B2 (en) | 2017-04-20 | 2021-07-13 | Trinamix Gmbh | Optical detector |
US11067692B2 (en) | 2017-06-26 | 2021-07-20 | Trinamix Gmbh | Detector for determining a position of at least one object |
DE202022102299U1 (en) | 2022-04-28 | 2023-08-10 | Sick Ag | Receiving element for an optoelectronic sensor and optoelectronic sensor |
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