Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Original Assignee
Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE4446489Aexternal-prioritypatent/DE4446489C1/en
Application filed by Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eVfiledCriticalFraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Application grantedgrantedCritical
Publication of DE19581457D2publicationCriticalpatent/DE19581457D2/en
DE19581457D1994-12-231995-12-22
Process for manipulating micro or light components and device for carrying out the process
Expired - LifetimeDE19581457D2
(en)