DE10334394B3 - Current through-feed for laser has electrical conductor fitted through sealed opening in laser housing provided with flexible electrical connection elements at its inner end - Google Patents

Abstract

The current through-feed has an electrical conductor (80) fitting through an opening in the laser housing and a sealing device (20,30,40,50) for sealing the electrical conductor in the opening, including a sealing element of a hard, non-flexible material. The electrical conductor has at least 2 flexible electrical connection elements (81,82), e.g. lamella contact pins for cooperating with the laser electrodes, at its inner end.

Description

The The present invention relates to a feedthrough device for passing through an electrical current through a separation element, in particular the housing of a laser, with an electrical conductor through a recess feasible in the separation element is, and a sealing device for sealing the electrical Conductor in the recess.

gas lasers usually have a feedthrough, for example the current in the form of power pulses to a high voltage electrode to lead, the one in a laser tube is arranged. The laser tube is filled with a gas mixture under very high pressure. This Gas mixture is common relatively aggressive. The gas pressure and especially the gas mixture Maintaining exactly is a high quality seal to be provided for the implementation.

The Lasers, for example an excimer laser, are exposed to relatively high temperature fluctuations. In order to avoid mechanical stresses, the materials should adapted to each other in their thermal expansion coefficients his. This is the only way to reduce the risk of leaks at the Seals of the bushing arise. The risk of leaks is correspondingly higher, though the electrodes are contacted several times and thus several bushings for the electrode are necessary.

According to one The state of the art in lasers that cannot be documented in printed form The Gam company achieved a certain degree of flexibility in that the inner conductor the implementation sealed against the laser tube by means of a relatively thick O-ring made of an elastomer becomes. So that can mechanical stresses due to different thermal expansions the tube and the electrode are intercepted. The O-ring allows one slight movement of the inner conductor in the bushing. Disadvantage of this solution is that gas contaminants due to the elastomer of the O-ring are caused.

Out for this reason, according to intern known, also not documented, documented status of Technology for the implementation in laser tubes Metal-ceramic connections are used. These metal-ceramic connections own a very large one reliability and tightness. However, their disadvantage is that they are relatively sensitive across from mechanical stresses due to thermal fluctuations occur.

From the pamphlets DE 101 17 976 A1 and DE 695 08 145 T2 seals or casings made of glass or ceramic are also known.

In addition, in the publication DE 199 41 896 A1 describes a hermetic connection unit for use, for example, in marine geophysics. Accordingly, in order to form a hermetic connection unit with a socket insert, the double socket insert provided with receiving members is placed on a hermetic connector.

In the other publication US 2 972 728 a connector with flexible contacts is also described. The connector parts are designed so that the contacts align themselves during the contacting process.

Finally, in the publication US 4,753,616 resilient contact pins set out. Bent metal strips are used to ensure good electrical contact.

The The object of the present invention is therefore to carry out, in particular for gas lasers to introduce the one hand high tightness and on the other hand a sufficient durability across from exhibits thermal fluctuations.

According to the invention Task solved by a feedthrough device for passing an electric current through a separation element, especially the housing of a laser, with an electrical conductor through a recess can be passed through in the separation element and a sealing device for sealing the electrical conductor in the recess, the Sealing device has a sealing element which is essentially is made of a hard, inflexible material, and the electrical Conductor at least two flexible connecting elements with which contact devices are connectable.

By the at least two connecting elements also become parallel displacements the contact devices or the elements to be contacted, while at only a tilting movement would be possible with a single flexible connecting element. This means that the two connecting elements in the manner of a double joint can be used.

Each of the at least two connecting elements is advantageously a plug connection element ment with which two contact devices can be connected in such a way that the contact devices can be moved on a straight line perpendicular to the plug-in direction. This means that the connector elements can also be pulled apart to a certain extent in the direction of insertion.

Preferably the at least two connecting elements comprise a tuft or lamella plug. Allow these plugs due to their structure a certain tilting movement, with a good contact is maintained.

The at least two connecting elements can be on a common one Axis along which also the connections of the at least two connection elements can be produced, arranged. Of course, the individual connecting elements but also regarding a connecting axis offset from each other and / or in any Be arranged at an angle to each other.

The Electrical conductors preferably consist essentially of gold. This means that the conductor is resistant to fluorine gases and others, for example aggressive gases inert.

The hard, inflexible material from which the sealing element is made is a plastic that is suitable for use in ultra-high Vacuum (UHV) and other environmental conditions, some of which have already been mentioned suitable is. The material for but the sealing elements are preferably made of a ceramic. As a rule, ceramics are more resistant than plastics.

The According to the invention, the sealing device can be equipped with a metal flange be with which the sealing device on the recess of the separating element is fixable. This type of sealing is characterized by its simple and safe construction. At the same time, it is only a minor one Number of seals required.

The present invention will now be explained in more detail with reference to the accompanying drawings, which represents a cross section through a bushing device according to the invention.

The below in more detail described embodiment represents a preferred embodiment of the present invention.

According to the embodiment shown in the figure, a bushing device according to the invention has an inner conductor (core), which is essentially cylindrical, and a bore 11 has as a socket. The end of the inner conductor protruding outwards (based on the typical mounting position on a laser tube, not shown) 10 is designed like a flange. The inner conductor 10 is in a ceramic tube 20 arranged. This ceramic tube 20 serves as electrical insulation for a metal flange 40 on one shoulder 21 of the ceramic tube 20 is supported. The metal flange 40 is with screws 30 equipped with which it can be attached to the aluminum tube of an excimer laser, for example.

To increase the sealing effect is on the flange 40 axially adjacent a metal seal 50 that are near the shoulder 21 of the ceramic tube 20 extends radially outwards. This seal structure is suitable for maintaining an ultra-high vacuum inside a laser tube. The laser tube is not shown in the figure, but the terms "inside" and "outside" indicate how the feedthrough device is installed in the laser tube.

In the socket 11 of the inner conductor 10 is a flexible inner conductor 80 with lamella plug 81 plugged in. The slats 70 the slat connector 81 ensure adequate contact quality. In the socket 11 of the fixed inner conductor 10 is the movable inner conductor 80 tiltable around point P1. A lateral offset of the lamella plug at point P1 is not possible. On the first slat connector 81 opposite end of the movable inner conductor 80 is a second lamella plug 82 intended. The electrode (not shown) of an excimer laser can be plugged onto this. Depending on the geometry of the socket of the electrode, the lamellar connector also has 82 a tipping point P2 around which the movable inner conductor 80 is tiltable.

The respective lamella plugs are around the tipping points P1 and P2 81 and 82 tiltable in any direction, ie also from the drawing level. This enables the electrode of the laser attached to the lamella connector 82 is connected, in all degrees of freedom compared to the fixed inner conductor 10 be moved in a frame of, for example, 0.5 mm. In this way, stresses can be absorbed, which arise because the components involved move slightly (a few 1/10 mm) due to thermal expansion. If the connection were rigid, the ceramic tube in particular would 20 break. In the case of an excimer laser, this could be very disadvantageous, since poisonous laser gas might escape. The function of the laser would then also no longer be guaranteed.

Instead of the slat connector 81 and 82 could also be used tuft connector or other connector that allows at least a slight tilting movement. It is only essential in the arrangement according to the invention that the power supply to the high-voltage electrode by means of an intermediate piece, here of the movable inner conductor 80 , and two flexible connectors, here tuft or lamella plugs, is realized, so that all degrees of freedom between the electrode and the laser tube are open.

10

inner conductor

11

drilling

20

ceramic tube

21

shoulder

30

screw

40

metal flange

50

metal seal

70

slats

80

Portable inner conductor

81, 82

laminated plugs

P1, P2

tipping points

Claims (8)

Feed-through device for passing an electrical current through a separation element, in particular the housing of a laser, with - an electrical conductor ( 80 ), which can be passed through a recess in the separation element and - a sealing device ( 20 . 30 . 40 . 50 ) for sealing the electrical conductor ( 80 ) in the recess, characterized in that - the sealing device ( 20 . 30 . 40 . 50 ) a sealing element ( 20 ), which is essentially made of a hard, inflexible material and - the electrical conductor ( 80 ) at least two flexible connecting elements ( 81 . 82 ) having. Bushing device according to claim 1, wherein each of the at least two connecting elements ( 81 . 82 ) is a plug connection element with which two contact devices can be connected in such a way that the contact devices can be moved on a straight line perpendicular to the plug direction of the at least two plug connection elements. Feedthrough device according to claim 1 or 2, wherein the at least two connecting elements ( 81 . 82 ) include a tuft or lamella plug. Feedthrough device according to one of the preceding claims, wherein the at least two connecting elements ( 81 . 82 ) on a common axis along which the connections of the at least two connecting elements ( 81 . 82 ) can be produced, are arranged. Feedthrough device according to one of the preceding claims, wherein the electrical conductor ( 80 ) consists essentially of gold. Through device according to any one of the preceding claims, wherein the hard, inflexible material is a plastic. Through device according to one of the claims 1 to 5, the hard, inflexible material being a ceramic. Feedthrough device according to one of the preceding claims, wherein the sealing device ( 20 . 30 . 40 . 50 ) a metal flange ( 40 ) with which the sealing device can be fixed to the recess of the separating element.