DE102004039787A1 - Handling system, has handling modules, where substrate handling unit is arranged on one of modules for separate substrate-transfer from carrier that with vertically aligned substrate is transferred between two modules - Google Patents

Abstract

The system has a flat substrate for vertical transport of loading and unloading of substrates. Handling modules (M1, M2) are provided, where a substrate handling unit is arranged on one of handling modules for a separate substrate-transfer from a carrier. The carrier with vertically aligned substrate is transferred between a processing unit and modules, respectively and between two modules. An independent claim is also included for a method for operation of a handling system.

Description

The The invention relates to a handling system for loading and unloading a Process plant and a process for its operation according to the generic terms the independent one Claims.

For the production Optical displays are increasingly demanding larger substrates. such Displays are used primarily for small and medium-sized display systems for example Cell phones, DVD players, notebooks, TVs, car radios or industrial Commitment. Currently dominate with over 80% liquid crystal displays, while even alternative manufacturing processes for plasma displays with currently 15 % and organic light-emitting diodes already available with 2%. In particular, in the alternative production methods mentioned arise increased Requirements for process reliability to achieve a high uniformity the surface treatment, In particular, the coating of the substrates with increasing Substrate size and increasing Substrate weight are previously difficult to reach.

When Process plants for flat substrates for displays in cleanrooms be in the youngest Zeit prefers in-line systems with vertical transport of the substrates used in comparison with horizontal concepts Particle contamination or little or no bending of masks and therefore in principle a higher process reliability allow as horizontal systems. A process plant for the treatment of substrates usually has Process chambers and locks and a transport path. The Process chambers can Cleaning chambers, plasma treatment chambers, etching chambers, coating chambers, Heating chambers and the like and are expediently as so-called double chambers educated. A double chamber usually consists of a first and a second sub-chamber, passing along the vertical through a partition are separated and with internals for use different Process bypasses are provided. Especially when using double chambers it is appropriate, a dual transport path to use, the two with relatively low Having spaced apart partial paths. For vertical transport so-called carriers are used with the flat substrates, transported with vertically aligned substrates along the transport path become.

To the Loading and unloading a process plant is expediently a handling system used the transfer of the carrier from and to the process plant and further the transfer of the flat substrates from and to the carriers taught.

handling systems for process plants For example, they are already related to editing of LCD Substrates: From the Korean Patent Application with the application number 010001906 is already a device for transfer of LCD substrates known with a first and second vacuum transfer arm to a loaded wafer or a substrate in a first and second process chamber to transfer. Further, an apparatus for transferring of LCD substrates from the Korean patent application with the application number 1020030035182 known with a first and second vacuum transfer module and a first and second vacuum robot. Both known devices use an Asynchronous Transfer Mode (ATM) robot. A multi-level system for simultaneous loading and unloading of substrate holders with substrates is already from the Korean patent application with the application number 990065979 known. Further, from the Korean patent application with the application number 000008945 a test system for an in-line LCD system with a loading and unloading known in one unit are integrated.

The known handling systems do not allow effective loading or unloading of process plants with vertical transport of flat substrates.

task The present invention is a handling system for loading and Discharging a process plant with at least one carrier for vertical transport of flat substrates and a method of operating this system which require a small footprint and a fast and allow discharge of the process plant.

The Task is with a handling system and a procedure for Operating a handling system each solved according to the features of the independent claims. Further developments of Invention are the dependent claims refer to.

The handling system according to the invention for loading and unloading a process installation with at least one carrier which can be loaded with flat substrates for vertical transport comprises a first and a second handling module, wherein at least one of the handling modules has at least one substrate handling unit for a substrate carrier separate from the carrier. Transfer is assigned and the carrier with vertically aligned substrate of the process Position to the first handling module, from the second handling module to the process plant and between the two handling modules is transferable. It is particularly favorable if the substrate transfer takes place substantially perpendicular to the orientation of the longitudinal side of the handling unit. The handling system and the process plant are preferably housed in a clean room with a controlled atmosphere.

The functional separation according to the invention between the two handling modules together with the coupling of the two Handling modules with vertically aligned substrate increases with the number of degrees of freedom the flexibility of the system and allows shorter cycle times.

In a development of the invention, it is provided that the first Handling module a first linear handling unit and the second Handling module has a second linear handling unit, wherein each handling unit one long side and faces and the carrier has the handling unit in vertical Alignment can be coupled and in the direction of the front sides of the handling unit is movable and the first and second handling unit respectively in a first and second spatial Position is displaceable. Preferably, in each case the two spatial Positions different from each other. The handling modules are next to each other arranged to transfer the carrier between the two Handling modules preferably a direct transfer of the carrier is provided between the first and second handling unit. Increase these features the modularity and compactness of the system.

If the first handling unit is in the first spatial position is a carrier from the process plant to the first handling unit transferable, and if the second handling unit in the first spatial Position and the first handling unit in the second spatial Position is a carrier from the first handling unit to the second handling unit transferable, wherein the two handling units to transfer the carrier between the two handling units are arranged substantially linearly one behind the other. It is intended that if the second handling unit in the second spatial Position is a carrier from the second handling unit to the process plant is transferable. Between the substrate handling unit and the first handling unit is a substrate transferable, if this is in the second position. Alternatively or additionally, between the substrate handling unit and the second handling unit a substrate transferable, if the second handling unit in the first position. The configuration according to the invention the handling units allows a spatial Decoupling of the functions Carrier Transfer and Substrate Transfer in terms of the interaction between the handling modules and the Process plant and between the two handling units.

The Process plant to which the handling system for loading and unloading with at least Assigned to a carrier has a transport path with linear Drive units to which the carrier is coupled with a transport module can be. The flat substrates are vertical from the carrier supported. The support of the substrates can be provided standing or hanging be. In the latter case, a frameless mount is preferred.

For frameless hanging support of the substrate may be provided in the carrier associated with each other, each provided with a contact surface clamping elements, wherein in the support state, the substrate is disposed between the contact surfaces. Such a holder is from the DE 10 2004 027 898 to which reference is hereby made in its entirety. It is understood that carriers with other mounting concepts, in particular frame holders, insofar as they permit vertical transport of the substrate, are also included in the invention.

In a preferred embodiment of the invention, the carrier is magnetically coupled to the drive unit. To move the carrier, a linear motor can be used. Preferred is a non-contact coupling of the carrier to the drive unit. A floating magnetic coupling of the carrier to a drive unit, as is known from US Pat DE 10 2004 037 622 and from the DE 10 2004 027 905 are known. The disclosure of these two documents is fully incorporated by reference.

It It is understood that a non-contact coupling of the Carriers by means of wheels or wheels to a provided with rails or the like drive unit is encompassed by the invention.

The handling units of the handling modules are formed in a preferred embodiment of the invention for magnetic non-contact coupling of the carrier. Preferably, a similar coupling of the carrier is provided to the handling unit analogous to the coupling to the drive unit of the process plant. Such a handling unit is analogous to a drive unit as in the documents DE 10 2004 037 622 and DE 10 2004 027 905 educated.

At least one handling unit enables both a carrier transfer and a substrate transfer. In one embodiment, the handling unit is in a carrier transfer state for one Carrier transfer and in at least one substrate transfer state for a substrate transfer displaceable. In other embodiments of the invention, a carrier transfer is not tied to a particular state of the handling unit.

In a particularly compact development of the invention is provided that if the handling unit of the first handling module in the first spatial Position is offset and the handling unit of the second handling module in the second spatial Position is offset, the two handling units with their long sides opposite each other are preferably arranged with parallel orientation. This is especially useful at a process plant with a dual transport path.

A particularly compact configuration of the handling system is realized if the handling unit of the first handling module with a turning device is coupled to an associated vertical axis of rotation and the handling unit rotatable by means of the rotating device in the respective spatial positions is. Preferably, the first spatial Position in one area of a nine o'clock position and the second spatial Position in a range of a six o'clock position. Furthermore, the Handling unit of the second handling module with a turning device coupled to another associated vertical axis of rotation and the said handling unit by means of said rotary device in their respective spatial Rotatable positions. The first spatial position the handling unit of the second handling module is preferably in one area of a six o'clock position and the second spatial one Position in a range of a three o'clock position. The position information each refer to mutually parallel polar coordinate systems perpendicular to the respective associated vertical axis of rotation and with this as a center. It is understood that other configurations and mechanisms as rotating devices, for example, pivoting devices are conceivable with which the handling units in their different inventive positions are displaceable.

If according to a Development of the invention, at least one of the rotating devices a change a radial distance of the respective handling unit of the respective vertical axis of rotation, is another geometric Degree of freedom gained, with which the compactness of the handling system significantly increased can be.

In A further development of the invention is a flexible and precise transfer to ensure the substrates from and to the handling units, that the substrate handling unit as a multi-axis robot preferably is formed with one or more Saugnapfgreifern.

At least One of the handling modules is a transfer module with at least one assigned to linear transfer unit. The transfer unit can be moved be. To the filling or emptying the process plant with carriers can be a transfer of Carriers between the transfer unit and the handling unit at least of a handling module until a predetermined number of carriers is present in the process plant. It is useful if the transfer unit is linear and has a longitudinal side the carrier to the transfer unit with vertical orientation a charged substrate coupled and along the longitudinal side is movable, because then the same or a similar concept of interaction between handling unit and carrier can be used as in the handling units of the handling modules.

At least one of the handling modules and / or the transfer module is a buffer assigned. In a simple embodiment, the buffer an array having at least two linear buffer units, wherein each buff unit one long side and end faces and the carrier can be coupled to the buffing unit and is movable in the direction of the end faces. The buffer will be advantageous for the storage of carriers, which are temporarily not used or for replacement are used.

In a development of the invention is to fill or empty the buffer this assigned a load module. Preferably, the loading module is in an atmospheric arranged separate from the buffer area. To the atmospheric Separation between the area where the charging module is located, and the buffer a lock device is provided which in a preferred embodiment has lock units assigned to the individual buffer units, with which an individual input or discharge of individual Carriers out of the buffer possible is.

The Linear transfer unit is preferably for a similar coupling as the handling unit or the drive unit is formed. Likewise are the buffing unit and the charging unit for a similar coupling the carrier trained.

In the method according to the invention for operating a handling system for loading or unloading a process installation with at least one carrier, a first and a second handling module is provided, wherein at least one of the modules is assigned at least one substrate handling unit for a substrate transfer separate from the carrier. The carrier becomes a vertically oriented substrate from the process plant to the first handling module, from the second handling module to the process plant and between the two handling modules transferred. The separation of functions between the two handling modules with simultaneous coupling of the two handling modules increases the flexibility in loading and unloading carriers with the number of degrees of freedom and enables shorter cycle times. The invention also includes an empty transport of the carrier without a substrate, the carrier occupying a position which is unchanged relative to the transport with the substrate.

In a development of the invention, it is provided that the first Handling module a first linear handling unit and the second Handling module has a second linear handling unit, wherein each handling unit one long side and end faces, and the carrier to the handling unit with vertical Orientation of the substrate can be coupled and in the direction of the end faces the handling unit is movable. The first and second handling unit is in each case in a first and second spatial position displaceable. The handling modules are arranged side by side, with a direct or indirect transfer of the carrier between the first and second handling unit he follows.

According to the inventive method is a carrier is transferred from the process plant to the first handling unit and the first handling unit is placed in a second spatial position, so that optionally a substrate with which the carrier is charged is transferable to the substrate handling unit.

In Another step is the second handling unit in a first spatial Position offset. Subsequently becomes a carrier from the first handling unit to the second handling unit transferred, with the two handling units substantially are arranged linearly one behind the other.

In a further step is optionally a substrate of a Substrate handling unit for second handling unit transferred. Furthermore, the second handling unit in a second spatial position and the carrier from said handling unit to the process plant transferred.

With the method according to the invention will be an accelerated implementation of carrier transfer and substrate transfer between the handling units and the process plant or the handling units and the substrate handling units allows.

In a preferred embodiment of the method is the first handling unit with a turning device coupled to a vertical axis of rotation and is by means of the rotating device in the respective spatial Position turned. By the inventive use of an associated Vertical axis of rotation leaves a particularly simple and reliable control of the reach from the handling units to take spatial positions.

at a predetermined length the long side the first handling unit, a predetermined length of the second handling unit and a predetermined distance between the two handling units is at a rotational movement of at least one of the two handling units reduced by the respective vertical axis of rotation of the radial distance. Of the specified distance between the two handling units during transfer from and to the process plant can thus be chosen arbitrarily small. This is important in a process plant with a dual transport path with a small distance between the two sub-paths and one corresponding Short distance of the handling unit during a transfer to the process plant. The reduction of the radial distance may be before carrying out the Rotational movement done. In a further embodiment, the reduction the radial distance during the rotational movement are made.

Further is at least one handling unit in a third spatial Position movable. For emptying the process plant with carriers If a carrier is transferred from the process plant to the first handling unit, the handling unit is moved to the third spatial position and the transfer unit into a spatial Position offset in which a transfer of the carrier to the transfer unit possible is. Analog is a filling the process plant with carriers.

following The invention will be described in more detail with reference to drawings, from which also independent from the summary in the claims further features, details and Advantages of the invention result.

It show in a schematic representation

1 in an upper view an overview of a handling system according to the invention,

2 to 12 the handling system according to the invention in steps of the method according to the invention.

1 shows a schematic representation of the handling system according to the invention for loading and unloading a process plant with handling modules, a transfer module, a buffer and a loading module. The loading of a handling unit, a transfer unit, a beaver unit or a loading unit with a carrier is punctured by the indicated in each unit. The loading of the carrier with a substrate is not included in the drawing. The spatial position or configuration of the various modules may vary in different embodiments of the invention.

To control the system not shown control units are provided with sensors and actuators. Process plant and handling system are preferably arranged in a clean room. With PA1 and PA2 drive units of a dual transport path of a process plant are designated. A carrier (not shown), which can be loaded and unloaded with flat substrates for vertical transport, can be coupled to a drive unit PA1 or PA2. In 1 are shown with arrows moving directions of the carrier in the drive units PA1 and PA2. The invention also includes a process plant with a non-dual transport path.

The handling system comprises a first and a second handling module M1 and M2, which in the embodiment of the 1 are designed as rotary modules. The modules M1 and M2 are in a frame construction 10 accommodated. To increase the stability of the frame construction 10 are cross braces 25 . 25a intended.

At least between the components M1, M2, PA1 and PA2 is a transport the flat substrates only with vertical orientation. As far as the carriers without substrate loading, they have the same spatial Orientation as in a transport with substrate loading.

the Module M1 is a multi-axis robot R1 as a substrate handling unit assigned. The module M2 is also a multi-axis robot R2 as substrate handling unit assigned. It is understood that also variants of the system with only one robot or with several robots or substrate handling units are encompassed by the invention.

the Module M1 is assigned to a transfer module T. The transfer module T a buffer B is associated with carrier buffer units. The buffer B is assigned a load module L. The loading module L can in a separated from the process plant and the handling system by a wall Be arranged area.

each Module M1, M2 has a linear handling unit H1, H2, respectively a long side and two faces on. To the handling units H1, H2 is a carrier coupled. The coupling can be magnetic, in particular contactless, or mechanically with rollers or wheels and a rail system respectively. A coupled to a handling unit carrier can in the direction of the end faces of the handling unit by means of itself known drive units are moved.

In a preferred embodiment For example, a handling unit has at least one storage module with a storage stator and an active or passive magnetically mounted bearing rotor and a drive module. It is understood that for the active magnetic storage a control device is provided, for the sake of simplicity however, the illustration is not shown in the drawings.

A handling unit H1, H2 can accommodate one or more carriers. If necessary, each handling unit H1, H2 can be put into a carrier-transfer state in that a transfer of a carrier beyond the limit of the respective handling unit can take place. In the presentation of the 1 For example, a transfer of a carrier from the drive unit PA1 to the handling unit H1 and from the handling unit H1 to the handling unit H2 can take place. Furthermore, (not shown in FIG 1 ) from the handling unit H2 a carrier transfer to the drive unit PA2 done. It is understood that the specific design of the carrier transfer state depends on the respective structural design of the handling unit. As from the representation of 1 it can be seen, in a carrier transfer, a gap between the respective handling unit and the drive unit or another handling unit must be overcome.

If necessary, a handling unit H1, H2 can also be set into a substrate transfer state for a substrate transfer. In a substrate transfer, a carrier coupled to the handling unit is loaded or unloaded with a flat substrate. Preferably, a movement of the substrate takes place substantially in a direction perpendicular to the direction of movement, which the carrier can execute along the longitudinal side of the handling unit. Optionally, in a substrate transfer, a locking device of the carrier for a substrate is opened or closed. The substrate transfer can be in the in 1 illustrated embodiment of takeover of the substrate by the robot R1, R2 done, this purpose a suction cup gripper 110 having. As is known, a subsequent transfer of the substrate to a conveyor system 120 . 120a respectively.

The Nandling unit H1 is to enable a carrier transfer, in a first spatial position movable. The first spatial Position of handling unit H1 is the spatial position of the drive unit PA1 adjusted.

The handling unit H1 is further displaceable in a second spatial position. The handlings In the second spatial position, unit H1 is optionally displaceable into a substrate transfer state, wherein optionally a substrate with which the carrier is loaded can be taken over by the robot. The second spatial position is different from the first spatial position of the handling unit H1.

In the embodiment of the 1 is the first handling unit with a turning device 30 to a vertical axis of rotation 35 coupled. By means of the rotary device 30 the handling unit H1 is rotatable in different spatial positions. The first spatial position and the second spatial position preferably have an angular position different from 45 degrees.

In the embodiment of the 1 the module M2 is analogous to the module M1. The handling unit H2 is equipped with a turning device 30a to a vertical axis of rotation 35a coupled and by means of said rotary device 30a rotatable in different spatial positions. It is understood that other configurations and mechanisms are conceivable as rotating devices, with which the handling units H1, H2 are displaceable in their various positions according to the invention.

The handling unit H2 can be moved into a first and a second spatial position. The first spatial position and the second spatial position preferably have an angular position different from 45 degrees. For transferring the carrier between the two handling units, wherein a carrier is transferred from the first handling unit to the second handling unit, the two handling units are arranged substantially linearly one behind the other. The first spatial position of the handling unit H2 is in a range of a six o'clock position in the embodiment 1 , In this position, the handling unit H2 can optionally be moved into a substrate transfer state, with a substrate optionally being transferred from the robot R2 to the handling unit H2. The handling unit H2 is in the second spatial position in an area of a three o'clock position. In the second spatial position, the handling unit H2 can be moved into a carrier transfer state and the carrier of handling unit H2 can be transferred into the process plant. For this purpose, a transfer of the carrier from handling unit H2 to operating unit PA2 takes place.

is the handling unit H1 in the first spatial position and the handling unit H2 in the second spatial Position, are the two handling units H1, H2 with their long sides each other opposite or arranged with parallel orientation of the longitudinal sides.

One or both of the rotary devices 30 . 30a allow a change in a radial distance of each coupled to the rotating device handling units H1 and H2 from the respective vertical axis of rotation 35 . 35a , In the embodiment of the 1 have the turning devices 30 . 30a holding arms 40 . 40a on, on which the handling units H1, H2 are arranged. For simplicity, only one of the support arms is provided with reference numerals.

The change in the radial distance can be achieved by pulling or pivoting the retaining arms 40 . 40a done, for each a motor 45 . 45a is provided. The change in the radial distance of the handling units H1 or H2 from the respective vertical axis of rotation allows an extremely compact design of the system and a practically arbitrarily small distance of the handling units H1 and H2, if they occupy the first and second spatial position.

The transfer module T has a frame construction 300 . 305 on with a linear transfer unit 310 which can receive a carrier loaded with a substrate or unloaded. The transfer unit 310 is linear along the frame construction 305 movable. Preferably, the transfer unit is 310 similarly designed as a handling unit H1, H2 or a drive unit PA1, PA2. Details of the function of the transfer unit will be discussed later.

Buffer B is an array with a number of buffers 210 formed by a frame construction 205 be held and can accommodate carriers. To fill the Buffer B can be a transfer of carriers from the transfer unit 310 into one of the buffers 210 respectively. For controlling a single buffing unit 210 can the transfer unit 310 be moved along the array. Likewise, a discharge of the buffer can take place by a carrier from a buffer unit of the array into the transfer unit 310 is transferred.

The buffer B is coupled to a charging module L. Preferably, Buffer B and Loading Module L are arranged in atmospherically separated areas. For this purpose, on one side of the buffer B is a lock device 225 provided, which is formed in a preferred embodiment as a plurality of locks, each associated with one of the buffing units. For loading or unloading the buffer B by means of the loading module L is a loading unit 230 provided along a frame construction 220 movable and can accommodate carriers. It is understood that the charging unit 230 may be constructed similar to the transfer unit 310 ,

The following are individual steps of the inventive method for operating the handling system based on 2 to 11 explained in more detail. For simplicity, in the illustration of these figures, reference is made in part to the reference numerals already in the 1 shown components have been omitted. Furthermore, the drive units PA1, PA2 of the process plant in the 2 to 11 not shown.

According to the invention can different spatial Positions and states the handling units H1 and H2 in different ways in time combined, depending on what speeds carriers provided by the drive units PA1, PA2 for transfer or can be removed. It also matters whether one or two robots R1, R2 are present are and at what speed the substrate transfer between the robots and the handling units.

Basically a distinction between a continuous operation and other modes.

at Continuous operation will be a number of carriers in a stream within of the system process plant - handling system transferred without being removed in the area of the handling system Carrier or added become. in principle In continuous operation, two directions - clockwise and counterclockwise - are possible.

The 2 to 5 show steps of the method according to the invention, in which a loading and unloading of a process plant can be done with carriers in continuous operation.

In 2 a carrier has come out of the process plant and has been taken over by module M1. Handling unit H1 is loaded with a carrier. The holding arms of the rotating device are in an extended state. In 3 is the handling unit H1 in the second spatial position. The robot R1 can unload the handling unit H1. In 4 the carrier has been transferred to the holding device H2. The robot R2 can load the carrier with a substrate. The robot R1 is in 4 in his starting position 2 returned. In 5 the handling unit H2 occupies the second spatial position. The robot R2 is in the position of 2 returned. The carrier optionally loaded with a substrate can be transferred from the handling unit H2 to the process plant. Handling unit H1 is located in 5 back in the first spatial position and can take over a new carrier from the process plant.

The first spatial Position of handling unit H1 is in a range of nine o'clock position and the second spatial Position in a range of a six o'clock position. The first spatial position the handling unit H2 is in a range of a six o'clock position and the second spatial Position in a range of a three o'clock position. The position information relate each on mutually parallel polar coordinate systems perpendicular to the respective associated vertical axis of rotation and with this as a center.

In 6 and 7 are intermediate steps in the transition of handling unit H1 from the in 2 illustrated configuration to the in 3 shown configuration shown. In 6 It can be seen that the radial distance between the handling unit H1 and the vertical axis of rotation 35 is reduced to ensure an unobstructed by the module M2 and the handling unit H2 rotation. In 7 is the rotation of the handling unit H1 about the vertical axis of rotation 35 already done. The distance of the handling unit H1 from the vertical axis of rotation 35 is in 7 even less. Analogously, the radial distance between the handling unit H2 and the associated vertical axis of rotation 35a in a rotational movement about the vertical axis of rotation 35a reduced. Preferably, the reduction of said distances in each case before the execution of the rotational movement, although in principle a reduction during the rotational movement is conceivable.

In the 8th to 12 the inventive transfer of a carrier from the module M1 to the loading module L is shown. Again, intermediate steps in the rotation are provided with retracted retaining arms.

The handling unit H1 takes in 8th a spatial position that allows a transfer of the carrier to the transfer unit of the transfer module, as in 9 is shown. The movable transfer unit 310 picks up the carrier from the handling unit H1 and is moved to a position that is a predetermined buffing unit 210 Buffer B is assigned. Subsequently, a transfer of the carrier takes place in the desired buffing unit 210 instead of. In the buffoon unit 210 The carrier can be stored for a predetermined time and then via the lock device 225 to the loading unit 230 of the loading module L are transferred. Likewise, a transfer of a carrier from the loading module L to the buffer B and / or from the buffer B to the transfer module T and / or from the transfer module T to the module M1 is possible.

Carrier transfers between the modules M1, T, B and L are particularly useful when a Carrier be exchanged or the process plant emptied with carriers or filled shall be.

M1

handling module 1

H1

handling unit 1

M2

handling module 2

H2

handling unit 2

PA1

drive unit

PA2

drive unit

R1

robot 1

R2

robot 2

T

transfer module

B

buffer

L

loading module

10

frame

20 20a

cross brace

25 25a

cross brace

30 30a

holder

35, 35a

Vertical axis of rotation

40 40a

holding arm

45, 45a

engine

110 110a

grab

120 120a

Conveyor

200

frame

205

cross brace

210

buffer array

220

frame

225

lock

230

unloading

300

frame

305

frame

310

transfer unit

Claims (29)

Handling system for loading and unloading a process plant with at least one carrier that is loaded and unloaded with at least one flat substrate for vertical transport of the substrate, characterized in that a first and a second handling module is provided, wherein at least one of the handling modules at least one Substrate handling unit is assigned for a carrier-separate substrate transfer and that the carrier with vertically aligned substrate between the process plant and the first handling module, the process plant and the second handling module and between the two handling modules is transferable. Handling system according to claim 1, characterized that the first handling module is a first linear handling unit and the second handling module a second linear handling unit each handling unit having a longitudinal side and two end faces the carrier can be coupled to the handling unit and in Direction of the front sides of the handling unit is movable. Handling system according to Claim 1 or 2, characterized that the handling modules are arranged side by side. Handling system according to at least one of claims 1 to 3, characterized in that for transfer between the two Handling modules of the carrier directly between the first and second handling unit is transferable. Handling system according to at least one of claims 2 to 4, characterized in that the first and second handling unit each displaceable in a first and second spatial position are and that if the first handling unit in its first spatial Position is the carrier from the process plant to the first handling unit is transferable, and, if the second handling unit in their first spatial Position and the first handling unit in its second spatial Position is the carrier from the first handling unit to the second handling unit is transferable, wherein the two handling units to transfer the carrier between the two handling modules in are arranged substantially linearly one behind the other, and that, if the second handling unit in its second spatial Position is the carrier of the second handling unit in the Process plant is transferable, and that, a substrate between the substrate handling unit and the first handling unit transferable if it is in its second position and / or a substrate between the substrate handling unit and the second handling unit transferable if it is in its first position. Handling system according to claim 5, characterized in that that, if the first handling unit in its first spatial Position and the second handling unit in their second spatial Position is offset, the two handling units with their long sides each other opposite preferably with parallel orientation of the longitudinal sides, are arranged. Handling system according to claim 5 or 6, characterized that the first handling unit with a rotating device to a associated vertical axis of rotation is coupled and by means of the rotating device in their respective spatial Position is rotatable and / or that the second handling unit with a Rotary device coupled to an associated vertical axis of rotation is and the said handling unit by means of said rotary device in their respective spatial Position is rotatable. Handling system according to at least one of claims 5 to 7, characterized in that in each case the first and second positions relative to a vertical axis of rotation at an angle of substantially 45 degrees have different angular positions. Handling system according to claim 7 or 8, characterized the first handling unit has a first spatial position in an area of a Nine o'clock position and a second spatial position in a range of six o'clock position and / or the second handling unit a first spatial position in an area a six o'clock position and a second spatial position in one area a three o'clock position, where the position information refer to the respective associated vertical axes of rotation. Handling system according to at least one of claims 6 to 9, characterized in that at least one of the rotating devices a change a radial distance of the respective handling unit of hers assigned vertical axis allowed. Handling system according to at least one of the preceding Claims, characterized in that the substrate handling unit is a multi-axis robot, preferably formed with one or more suction cup grippers is. Handling system according to at least one of the preceding Claims, characterized in that at least one of the handling modules a transfer module with at least one, preferably movable transfer unit assigned and a transfer of carriers between the transfer unit and the handling unit of the said handling module is provided. Handling system according to claim 12, characterized in that that the transfer unit is linear and has a longitudinal side and two end faces, wherein the carrier to the transfer unit can be coupled and moved in the direction of the end faces. Handling system according to at least one of the preceding Claims, characterized in that at least one of the handling modules and / or the transfer module assigned a buffer for storage of carriers is. Handling system according to claim 14, characterized in that that the buffer is an array with preferably at least two buffer units wherein each buffing unit has a longitudinal side and two end faces and the carrier can be coupled to the buffing unit and in Direction of the front sides is movable. Handling system according to claim 14 or 15, characterized characterized in that the buffer is a loading module for filling or Emptying associated with carriers. Method for operating a handling system for Loading and unloading of a process plant with at least one carrier, the with flat substrates for a vertical transport is loadable and dischargeable, characterized that a first and a second handling module is provided, wherein at least one of the handling modules at least one substrate handling unit for one is assigned by the carrier separate substrate transfer and that the carrier with vertically aligned substrate between the process plant and the first handling module, the process plant and the second Handling module and between the two handling modules is transferred and, as far as the carriers are transferred without substrate loading, the same spatial Orientation as provided for a transport with substrate loading is. Method according to claim 10, characterized in that that the first handling module is a first linear handling unit and the second handling module a second linear handling unit each handling unit having a longitudinal side and two end faces the carrier can be coupled to the handling unit and in Direction of the front sides of the handling unit is moved, and that the handling modules are arranged side by side, with the transfer between the two handling modules of the carrier directly between the first and second handling unit is transferred. Method according to claim 18, characterized that the first and second handling unit each in a first and second spatial Position is displaceable, and that, if the first handling unit in their first spatial Position is, if necessary, the carrier from the process plant the first handling unit is transferred, and if the second handling unit in its first spatial position and the first Handling unit in its second spatial position, the Carrier, where appropriate, from the first handling unit to the second handling unit is transferred, with the two handling units for transfer the carrier between the two handling modules substantially linear are arranged one behind the other, and if so the second handling unit in her second spatial Position is, if necessary, the carrier of the second handling unit is transferred to the process plant, and that possibly a substrate between the substrate handling unit and the first Handling unit is transferred, if this in their second Position is and / or optionally a substrate between the substrate handling unit and the second handling unit is transferred, if this in their first position. A method according to claim 19, characterized ge indicates that the first handling unit is coupled to a rotary device to an associated vertical axis of rotation and is rotated by means of the rotary device in the respective spatial positions and / or the second handling unit is coupled with a rotating device to an associated vertical axis of rotation and said handling unit by means of said rotary device in their respective spatial position is rotated. Method according to claim 19 or 20, characterized that each of the first and second spatial position relative to the vertical axis of rotation is an angle 45 degrees different Have angular position. Method according to claim 20 or 21, characterized the first handling unit has a first spatial position in an area of a Nine o'clock position and a second spatial position in a range of six o'clock position and / or that the second handling unit a first spatial Position in one area of a six o'clock position and a second spatial Position in a range of a three o'clock position, wherein the position information on the respective associated vertical axes of rotation Respectively. Method according to at least one of claims 19 to 22, characterized in that at least one rotating device a change a radial distance of the coupled with her handling unit allowed by the vertical axis of rotation. Method according to claim 23, characterized that at a given length of long side the first handling unit, a predetermined length of the longitudinal side of the second handling unit and a predetermined distance between the two handling units, at predetermined positions of the rotary devices associated Vertical pivot axes, said rotating device in a rotary motion at least one of the two handling units about their associated vertical axis of rotation, the radial distance, preferably for collision avoidance between the two handling units, is reduced. Method according to Claim 24, characterized that a reduction of the radial distance before carrying out the Rotational motion takes place. Method according to claim 24 or 25, characterized that a reduction of the radial distance during the implementation of the rotational movement he follows. Method according to at least one of the preceding Method claims, characterized in that preferably for filling or emptying of the process plant with carriers at least one of the handling modules a transfer module associated with at least one preferably movable transfer unit is. Method according to Claim 27, characterized that for stuffing the process plant with carriers the transfer unit into one position where appropriate, a transfer of a carrier from the transfer unit to the handling unit of said handling module and then one Transfer of the carrier into the process plant by means of the second handling module he follows. Method according to Claim 28, characterized that for the emptying of the process plant with carriers a transfer of a Carriers from the process plant to the handling unit of said handling module and the transfer unit is placed in a position where appropriate subsequently a transfer of a carrier from the handling unit of said Handling module to the transfer unit is done.