CN2831115Y - Multi-channel microflow controlled chip - Google Patents
Multi-channel microflow controlled chip Download PDFInfo
- Publication number
- CN2831115Y CN2831115Y CN 200520041649 CN200520041649U CN2831115Y CN 2831115 Y CN2831115 Y CN 2831115Y CN 200520041649 CN200520041649 CN 200520041649 CN 200520041649 U CN200520041649 U CN 200520041649U CN 2831115 Y CN2831115 Y CN 2831115Y
- Authority
- CN
- China
- Prior art keywords
- micro
- fluidic chip
- electrode
- split tunnel
- sample
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Images
Abstract
A micro-flow control chip has the characteristics of small size and fast analyzing speed, can realize high automatization and integration, and is the developmental frontier of the current chemistry analyzing field. Although the micro-flow control chip combined with laser-induced fluorescence detection can carry out the high-flux detection of 384 channels, the multi-channel electrochemical detection is not yet successful so far. The utility model provides a multi-channel micro-flow control chip which uses polymethyl methacrylate with high molecules as materials, a monocrystal silicon male mold is made of a lithographic technique, an etching technique, etc., and microchannels are made of a hot pressing method or an in-situ polymerizing method. Electrode detecting channels are integrated on a basal chip, functional materials can be filled in electrodes, and the utility model can effectively and accurately control the distance of a working electrode and separating channels and simplifies the experimental operation. The utility model substantially exerts the advantage of the electrochemical detection in the micro-flow control chip and develops the multi-channel micro-flow control chip applied to the electrochemical detection for the first time, and can carry out analysis for samples through high efficiency and high flux.
Description
Technical field
The utility model relates to the micro-fluidic chip field, has developed a kind ofly to be material, to be applied to the multichannel micro-fluidic chip of Electrochemical Detection based on polymethylmethacrylate.The utility model also provides this chip production method and application.
Background technology
Since the notion of propositions " micro-total analysis system " such as early 1990s Manz, the integrated and portability of analytic system becomes the main development trend of Modern Analytical Instrument.Compare with traditional capillary electrophoresis technique, micro-fluidic chip has the advantage that amount of samples is few, velocity of separation is fast, but higher to the requirement of the sensitivity that detects and response speed simultaneously.The most frequently used detection mode is laser-Induced Fluorescence Detection (LIF), but this method detects required instrument costliness, and huge heaviness.(ED) is highly sensitive for Electrochemical Detection, and required instrument volume little, be easy to integrated, dimensionally with the concept matching of chip lab.The thick membrane electrode of printing, carbon paste, carbon fiber have also obtained using widely in the micro-fluidic chip Electrochemical Detection as electrode material.
The material of modal making chip is glass and quartz.Glass and quartz have good electric osmose character and optical property, can adopt the lithographic technique processing of standard, and easily channel surface is carried out modification, but be difficult to obtain the bigger passage of breadth depth ratio, the processing cost height, the sealing-in difficulty is big.High molecular polymer more and more receives publicity as the material of micro-fluidic chip.Various types of high molecular polymers comprise that dimethyl silicone polymer (PDMS), polymethylmethacrylate (PMMA), polycarbonate etc. all have been widely used in chip manufacturing.
Meanwhile, the integrated level of chip also is greatly improved, and the design form of passage is very various.The patented claim of relevant micro-fluidic chip is also increasing.United States Patent (USP) to 2001-2005 is keyword combination retrieval with microfluidic and chip, has 11 patents.Wherein the patent about multi-channel chip has 1 (200401133068, Multi-channel microfluidic chip for electrosprayionization), and this patent has designed a kind of chip that is applied to mass spectrophotometry; Patent about Electrochemical Detection is 1 (20020079219, Microfluidic chip having integrated electrodes), this patent has designed a kind of chip that electrode is integrated in one, the material of electrode can metal or conductive ink, to make electrode by electro-deposition, printing or alternate manner on plastic sheeting, this patent mainly is the making that lays particular emphasis on novel electrode.
Chinese patent to 1985-2005 is that keyword combination retrieval has 4 patents with " hyperchannel " and " chip ".Wherein the micro-fluidic chip patent is 2, is respectively: application number 02256483, denomination of invention are a kind of multi-channel chip ampere detector and detection system, and this patent has designed constant potential electric current-voltage changer arranged side by side, mainly are the designs of ampere detector; Application number: 02353129, multichannel micro-fluidic chip is design patent, has designed the multi-channel chip that is applied to laser-induced fluorescence (LIF).Is that keyword retrieval has 28 patents with " micro-fluidic " with " chip ", and the patent that wherein is applied to Electrochemical Detection is 1, application number 03145053, and denomination of invention is Electrochemical Detection-micro-fluidic chip and method for making and renovation process.This patented invention a kind of Electrochemical Detection-micro-fluidic chip, to contain the silicon rubber dimethyl silicone polymer substrate of little raceway groove aligns with electrode strip on the microslide, form microfluidic channel, distance is the 20-60 micron between microchannel outlet and the detecting electrode, and Electrochemical Detection is the styletable detecting pattern.This invention is a material with commercial chromium plate glass, produces the glass hard template by photoetching and wet corrosion technique, is used for the molded of PDMS, makes the soft template of forming the required microchannel of micro-fluidic chip and being used to make electrode.This glass hard template can be used in operation repeatedly, the little channel dimensions homogeneous of the PDMS of making, shape favorable reproducibility.Zhou Xiaomian, LinBing Cheng etc. have invented a kind of micro-fluidic chip (application number 02274236, a kind of micro-fluidic chip), the width of chip is 4～6cm, length is 7～9cm, thickness is 1～3mm, have cross configuration microchannel, this chip is integrated with the dull and stereotyped A of polymkeric substance of cross configuration microchannel by an one side and the dull and stereotyped B of sealing-in of a polymerizable material is formed by stacking; Two dull and stereotyped middle closed channels that form, any therein one flat plate is provided with the import and export of passage, and it is characterized in that: the thickness of dull and stereotyped B is 100 μ m～600 μ m.Cross configuration microchannel can by one positive one anti-phase arrange.
From the patent retrieval of relevant micro-fluidic chip as can be seen, although chip material and electrode material that the micro-fluidic chip Electrochemical Detection is adopted are varied, the method for making of chip has also had considerable progress than traditional glass-chip, but do not break through single pass limitation yet, therefore, the advantage of Electrochemical Detection in micro-fluidic chip really do not brought into play.
Summary of the invention
The purpose of this utility model provides a kind of multichannel micro-fluidic chip that is applied to Electrochemical Detection.
The utility model provides a kind of multichannel micro-fluidic chip.This chip is made up of electrode (8) in buffer pool (1), sample cell (2), waste liquid pool (3), detection cell (4), sample intake passage (5), split tunnel (6), electrode channel (7) and the electrode channel etc.Buffer pool (1) stretches out plurality of separate passage (6), on every split tunnel (6), electrode (8) in a sample cell (2), detection cell (4), sample intake passage (5) and electrode channel (7) and the electrode channel (7) is respectively arranged, and detection cell (4) is at the other end of split tunnel (6); Sample cell (2) communicates with split tunnel (6) by sample intake passage (5); Electrode channel (7) one ends communicate with external power supply, and the other end is near detection cell (4).Not connected between different split tunnels, sample intake passage, sample cell, the detection cell.
In the micro-fluidic chip of the present utility model, the height of split tunnel (6), sample intake passage (5), electrode channel (7) is 25～100 microns, and width is 25～100 microns, and the length of split tunnel (6) is 40～80 millimeters.
In the micro-fluidic chip of the present utility model, electrode channel (7) is the 25-50 micron with the distance at detection cell (4) edge.
In the micro-fluidic chip of the present utility model, 1～5 millimeter of sample intake passage (5) length, the intersection point of sample intake passage (5) and split tunnel (6) is 35～75 millimeters to the distance between split tunnel (6) far-end end points.
In the micro-fluidic chip of the present utility model, the diameter of sample cell (2) is 1～3 millimeter, and the diameter of detection cell (4) is 3～6 millimeters, and the distance between each detection cell (4) center of circle is 8～15 millimeters.
In the micro-fluidic chip of the present utility model, parallel between each split tunnel, parallel between adjacent two split tunnels (6), distance is 7～20 millimeters between adjacent two split tunnels (6).
In the micro-fluidic chip of the present utility model, parallel between each electrode channel (7), distance is 7～20mm between adjacent two electrode channels (7).
In the micro-fluidic chip of the present utility model, sample intake passage (5) is 30～90 degree with split tunnel (6) angle.
In the micro-fluidic chip of the present utility model, the xsect of buffer pool (1) is a parallelogram, and wide is 4～10 millimeters, and length is 24～49 millimeters, and the angle between long and wide is 30～90 to spend.
In the micro-fluidic chip of the present utility model, can also increase a waste liquid pool (3) on every sense channel, waste liquid pool (3) communicates with split tunnel by another section sample intake passage, and the diameter of waste liquid pool (3) is 1～3mm.
In the micro-fluidic chip of the present utility model, the height of buffer pool (1), sample cell (2), detection cell (4), waste liquid pool (3) is 1～3mm.
Micro-fluidic chip of the present utility model can be with organic glass as material.For example, adopting high molecular polymers such as dimethyl silicone polymer (PDMS), polymethylmethacrylate (PMMA), polycarbonate is material, in an embodiment of the present utility model, with the material of polymethylmethacrylate as micro-fluidic chip.
The port number of micro-fluidic chip of the present utility model can determine that as the character of used material, the quantity of testing sample reaches the wherein nature difference of each composition according to actual conditions, the wiring of external voltage control instrument, or the like.In an embodiment of the present utility model, prepared the multichannel micro-fluidic chip of one 4 passage.
Multichannel micro-fluidic chip of the present utility model can prepare as follows:
(1) on substrate, makes split tunnel, sample intake passage and electrode channel with pressure sintering or situ aggregation method, and in electrode channel, fill function carbon paste material as working electrode;
(2) on cover plate, adopt the diamond punching to make buffer pool, make sample cell, detection cell and waste liquid pool by laser boring;
(3) involution substrate and cover plate.
Above-mentioned preparation method concrete operations as follows:
(1) making of silicon mold
The chip design figure is drawn with CAD software, and the figure live width is 25～100 μ m, adopts the output of high-resolution laser photocomposing system on transparent film (background transparent, required image are black), promptly gets mask.
On substrate, deposit one deck silicon nitride film as sacrifice layer by chemical vapor deposition (CVD), on this substrate, cover one deck SU-8 light-sensitive emulsion (positive optical cement), in baking oven, handle 10～15min for 60 ℃ by the rotation film coating technique; Photo etched mask is covered on the substrate, the principle by exposure image with the figure transfer on the photo etched mask to the optical cement layer of substrate surface; Method by dry etching is processed into the spatial structure with certain depth with the planar figure on the optical cement layer again.Can obtain the silicon mold of lobed passage.The formpiston of making is used H successively
2O
2: H
2SO
4Solution (volume ratio is 1: 4), acetone and redistilled water clean, to remove the oxide on surface.
(2) duplicate passage by pressure sintering or situ aggregation method
PMMA organic glass sheet is cut into certain size; ultrasonic cleaning; naturally dry; in hot-press arrangement, the PMMA substrate is heated to softening temperature (106 ℃), by in that to apply certain pressure on the silicon mold (afterburning 20～30kN) on 4 inches areas, and keep 30～60s; can on the PMMA substrate, suppress microchannel with the formpiston complementation; under the condition of pressurization, formpiston and the PMMA substrate that is carved with the microchannel are cooled off the back demoulding together then, just obtain required microchannel.
The required instrument of pressure sintering is simple, and is easy to operate, but the passage easy deformation.We have attempted employing ultraviolet light initiation in-situ polymerization methyl methacrylate and have prepared micro-fluidic chip, the polymer monomer methyl methacrylate is mixed with initiating agent, and add a certain amount of functional monomer (methacrylic acid or 4-vinylpridine etc.).With injecting mould in this potpourri, adopt uv-light polymerization, after the chip demoulding, promptly obtain being carved with the PMMA substrate of microchannel, this method can effectively be eliminated the problem of channel deformation.
In electrode channel, fill carbon paste (or other functional material) carefully as working electrode, scrape off unnecessary carbon paste, under infrared lamp, solidified 12～16 hours.
(3) on cover plate, make liquid storage tank
Conventional chip manufacturing mostly adopts the diamond punching, and the buffer pool in the utility model adopts the diamond punching.Because the utility model development is multi-channel chip, the relative position between sample cell, waste liquid pool, the detection cell is required very accurate, so laser boring is adopted in the making of sample cell, waste liquid pool, detection cell.PMMA can be biodegradable into volatile micromolecule under action of ultraviolet laser.Prepare photo etched mask to determine punch position with Copper Foil, by microcobjective and photo etched mask, laser energy is focused on the light degradable PMMA cover plate, make photo etched mask on the PMMA cover plate, in institute's delimited area laser splash take place with Ultra-Violet Laser.Adjust the umber of pulse that laser intensity and cover plate surface are accepted, the may command depth of laser ablation.Can obtain the liquid storage tank hole of accurately big or small and position by method provided by the utility model.
(4) chip involution
Aim at PMMA substrate and cover plate at microscopically, make about electrode channel and detection cell Edge Distance 25～50 μ m (electrode channel and split tunnel end-to-end distance from), this substrate and cover plate is fixing with two cover glasses clampings, be placed on insulation 10～15min in 108 ℃ of baking ovens, can obtain required PMMA multichannel micro-fluidic chip.
Chip is connected with opertaing device, adds parting liquid and sample, control voltage is finished separation, analysis and the detection of sample.Its principle is, under effect of electric field, utilizes the difference of each composition mobility in damping fluid in the sample and realizes separating, and the composition to be measured in the sample after the separation arrives detection cell successively and is detected.Owing to a plurality of detection cells that the utility model is designed are independent mutually, therefore can carry out high throughput testing to the same substance in the sample, also can adopt different electrochemical detection methods measure to the multiple material in the sample.
Concrete determination step is as follows:
Passage to chip carries out modification and modification at first, according to actual needs.
Secondly, in multi-channel chip synoptic diagram shown in Figure 3, in buffer pool 1, insert platinum filament and separate positive pole, in sample cell 2, insert platinum filament, in waste liquid pool 3, insert platinum filament as the sample introduction negative pole as high pressure sample introduction positive pole as high pressure.4 is detection cell, is three-electrode system in the pond: working electrode, contrast electrode and to electrode.Working electrode is drawn with copper wire with elargol, and contrast electrode is homemade Ag/AgCl electrode, is platinum filament to electrode.Relative position between three electrodes is seen Fig. 4.Brass wire diameter is 0.5～1mm, long 1～2cm, and the diameter of platinum filament is 0.5～1mm, long 1～2cm, contrast electrode is homemade Ag/AgCl contrast electrode.Ag length is about 0.5～1mm, and long 1～2cm makes it to deposit the thick AgCl of the about 100～300nm of last layer by plating, promptly gets the Ag/AgCl contrast electrode.
Once more, the extension line of all electrodes on the chip is connected to the corresponding work electrode connection of multi-channel electrochemical analyzer, to utmost point wiring and contrast electrode Wiring port.
Then, the making alive wiring with the micro-fluidic chip high-voltage power supply connects liquid storage tank respectively.
Subsequently, the method setting and the parameter setting of electrochemical analyser are set according to actual needs; The voltage applying mode of micro-fluidic chip high-voltage power supply is set in program.
At last, adopt the vacuum decompression method to make the sample intake passage of multi-channel chip and split tunnel all be full of buffer solution.Add sample in sample cell 2, apply high pressure, sample solution promptly is full of sample intake passage 5, when the high pressure between startup liquid storage tank 1 and the detection cell 4, the sample solution of split tunnel and sample intake passage crossing promptly is brought into split tunnel, opens the program of having set, and sample is measured.
The utility model has been given full play to the advantage of Electrochemical Detection in micro-fluidic chip, first multichannel micro-fluidic chip is successfully applied to Electrochemical Detection.Micro-fluidic chip of the present utility model is used to identify the sample of industries such as chemical industry, biology, medicine, can separate simultaneously, the composition in analysis and the detection of complex sample, avoid the expensive and interference problem that causes by fluorescent reagent in the existing conventional method of analysis again, had high flux and highly sensitive advantage.In addition, the channel width of micro-fluidic chip of the present utility model is dark bigger, and preparation process is simple and easy, and is with low cost, and therefore, the utility model will have boundless application prospect in the Electrochemical Detection field.
Description of drawings
Fig. 1 is multichannel micro-fluidic chip mask design figure.Wherein radius of a circle is 4 inches (identical with monocrystalline silicon mould size); 5 is sample intake passage, and length is 1～5mm, and 5 belows, three line segments on same straight line with it are sample intake passage, and size is identical with 5; 6 is split tunnel, and length is 40～80mm.5 and 6 angle is 30～60 degree, the degree of functioning of sample intake passage is 35～75mm (5 and 6 intersection point is to the distance between the end points of split tunnel right side), three parallel with it line segments of 6 tops also are split tunnel, size is identical with 6, adjacent two split tunnel vertical intervals are 8～15mm, and level interval is 6～10mm between the adjacent two split tunnel end points.The live width of all passages is 25～100 μ m; 7 is the working electrode passage, and length is 7～9mm, and there are three parallel with it line segments on 7 right sides, are the working electrode passage, and length is respectively 13～15,19～21,25～27mm, and horizontal range is 6～10mm between adjacent two working electrodes.
Fig. 2 is the silicon mold synoptic diagram after the scribing.
Fig. 3 is applied to the multichannel micro-fluidic chip synoptic diagram of Electrochemical Detection.Wherein, 1: buffer pool; 2 is sample cell; 3 is waste liquid pool; 4 is detection cell.5 is sample intake passage; 6 is split tunnel; 7 is the working electrode passage.
Fig. 4 is split tunnel outlet and working electrode relative position synoptic diagram.Wherein, 4 is detection cell; 6 is split tunnel; 8 for the carbon paste of filling as working electrode; 9 is the Pt silk, as to electrode; 10 is the Ag/AgCl contrast electrode.
Embodiment
The making of embodiment 1 A sheet
The A sheet is a substrate, and its making comprises silicon mold, separates the making of sample introduction microchannel, working electrode, and concrete manufacturing process is:
(1) making of mask: adopt CAD software to draw design drawing shown in Figure 1, sample intake passage length (referring to the distance between sample cell and the waste liquid pool edge) is 2.828mm, article 4, the working electrode passage length be respectively 7,13,19,25mm, level interval is 6mm between adjacent two working electrodes, the long 50mm of split tunnel, the intersection point of sample intake passage and split tunnel is 45mm apart from split tunnel right side end points, and adjacent two split tunnel vertical intervals are 7mm, and all live widths are 50 μ m.Adopt the output of high-resolution laser photocomposing system on transparent film this design drawing, promptly get photo etched mask.
(2) making of silicon mold: on substrate, deposit one deck silicon nitride film as sacrifice layer by chemical vapor deposition (CVD) at 550～700 ℃, on this substrate, cover one deck SU-8 light-sensitive emulsion (positive optical cement), in baking oven, handle 10min for 60 ℃ by the rotation film coating technique; Photo etched mask is covered on the substrate, the principle by exposure image with the figure transfer on the photo etched mask to the optical cement layer of substrate surface; Method by dry etching is processed into the spatial structure with certain depth with the planar figure on the optical cement layer again.Can obtain the silicon mold of lobed passage, dark and the wide 50 μ m that are of passage.The formpiston of making is used H successively
2O
2: H
2SO
4Solution (volume ratio is 1: 4), acetone and redistilled water clean, to remove the oxide on surface.
(3) duplicate the microchannel by pressure sintering
Substrate thickness is 0.5～2mm, and in the present embodiment, the substrate thickness of selecting for use is 1mm.The PMMA organic glass sheet cut growth that 1mm is thick is square; be of a size of 4.0 * 8.0cm; ultrasonic cleaning is dried naturally, in hot-press arrangement the PMMA substrate is heated to 106 ℃; by applying certain pressure (afterburning 20kN on 4 inches areas) on the silicon mold; and keep 30s, can on the PMMA substrate, suppress the microchannel with the formpiston complementation, then under the condition of pressurization; formpiston and the PMMA substrate that is carved with the microchannel are cooled off the back demoulding together, just obtain required microchannel.
(4) making of working electrode
The making of embodiment 2 B sheets
The B sheet is a cover plate, and its structure comprises various liquid storage tanks hole, comprises independently electrochemical investigating pond of 1 buffer pool, 4 sample cells, 4 waste liquid pools and 4.Concrete manufacturing process is:
(1) the B sheet is of a size of 4.0 * 8.0cm, and thickness is 1～3mm, and selecting thickness in the present embodiment for use is the PMMA of 2mm.Wash cover plate with distilled water, and place the NaOH solution of 0.1mol/L to soak 30min, dry up with the distilled water washing and with nitrogen again.
(2) making of buffer pool: the xsect of buffer pool is a parallelogram, and wide is 5mm, long is 34mm, and the angle between long and wide is 45 degree.Because to the buffer pool size requirements is not accurate especially, adopt the diamond punching to get final product in the present embodiment.The height of buffer pool is the thickness of B sheet, i.e. 2mm.
(3) making of sample cell, waste liquid pool and electrochemical investigating pond: adopt LAM66 laser ablation machine to carry out laser boring.Prepare photo etched mask with Copper Foil, accurately determine the position of required punching.With Ultra-Violet Laser by microcobjective and photo etched mask, laser energy is focused on the light degradable PMMA cover plate, the selection laser frequency is 50Hz, the pulse that corresponding unit length is accepted laser is set at 500 pulses/mm, in the zone that photo etched mask defined laser splash takes place, sample cell and waste liquid pool are that diameter is the circular hole of 1mm, and electrochemical investigating pond is that diameter is the circular hole of 3mm, the height of liquid storage tank is the thickness of B sheet, i.e. 2mm.
Embodiment 3 A sheets and the involution of B sheet and the making of electrode
Adopt pressure sintering that A sheet and B sheet are carried out involution.Concrete manufacturing process is:
(1) with A sheet, the ultrasonic cleaning of B sheet, dries naturally.
(2) the A sheet is accurately aimed at microscopically with the B sheet, the distance that makes working electrode and liquid storage tank edge is about 30 μ m.Behind the aligned position, substrate and cover plate fixed to clamp with two blocks of glass sheet put into baking oven, temperature programme to 108 ℃ is incubated 2 minutes, and programmed cooling to 45 ℃ gets final product again.
(3) making of each electrode: it is the Pt silk that being used to of buffer pool 1 the inside provides the electrode of high pressure, and long 10mm, diameter are 0.5mm; The electrode of sample cell 2 and waste liquid pool 3 is long 5mm, and diameter is 0.5mm; Detection cell 4 is three electrode work systems, and working electrode is drawn with copper wire with elargol, and brass wire diameter is 0.5mm, and long 1cm is long 5mm to electrode, and diameter is 0.5mm, and contrast electrode is homemade Ag/AgCl contrast electrode.Ag length is about 1.5cm, and diameter is 0.5mm, makes it to deposit the thick AgCl of the about 300nm of last layer by plating, promptly gets the Ag/AgCl contrast electrode.
The making of 1 A sheet
The A sheet is a substrate, and its making comprises silicon mold, separates the making of sample introduction microchannel, working electrode, and concrete manufacturing process is:
(1) making of mask: adopt CAD software to draw design drawing shown in Figure 1, sample intake passage length is 4mm, article 4, the working electrode passage length be respectively 8,15,22,29mm, level interval is 8mm between adjacent two working electrodes, the long 40mm of split tunnel, the intersection point of sample intake passage and split tunnel is 35mm apart from split tunnel right side end points, and the angle between sample intake passage and the split tunnel is 30 degree.Adjacent two split tunnel vertical intervals are 7mm, and all live widths are 100 μ m.Adopt the output of high-resolution laser photocomposing system on transparent film this design drawing, promptly get photo etched mask.
(2) making of silicon mold: on substrate, deposit one deck silicon nitride film as sacrifice layer by chemical vapor deposition (CVD) at 550～700 ℃, on this substrate, cover one deck SU-8 light-sensitive emulsion (positive optical cement), in baking oven, handle 10min for 60 ℃ by the rotation film coating technique; Photo etched mask is covered on the substrate, the principle by exposure image with the figure transfer on the photo etched mask to the optical cement layer of substrate surface; Method by dry etching is processed into the spatial structure with certain depth with the planar figure on the optical cement layer again.Can obtain the silicon mold of lobed passage, dark and the wide 100 μ m that are of passage.The formpiston of making is used H successively
2O
2: H
2SO
4Solution (volume ratio is 1: 4), acetone and redistilled water clean, to remove the oxide on surface.
(3) adopt original position initiated polymerization method to duplicate the on-chip microchannel of PMMA
Be of a size of 4 * 8cm through the silicon mould after the scribing, will dry, adopt the original position initiated polymerization to duplicate the microchannel with ultrasonic the cleaning of the PMMA substrate (thickness 0.5mm) of the same size of silicon mould.Test the condition that has obtained light-initiated in-situ polymerization by series of optimum, set up the methyl methacrylate ultraviolet light initiation in-situ polymerization that uses and prepared the micro-fluidic chip technology.The prescription of polymeric solution is: monomers methyl methacrylate 100ml, photo-thermal mixed initiator azoisobutyronitrile 0.2g, light trigger styrax 0.2g and noumenal modification agent such as methacrylic acid 1 one 2g.Polymerizing condition is: 80-90 ℃ of hot pre-polymerization temperature, pre-polymerization time 15-20min.This potpourri is injected mould, adopt uv-light polymerization.The photopolymerization condition is behind the injection molding: temperature 20-35 ℃, ultraviolet wavelength 356nm, power 20w, with uviol lamp apart from 5-6cm, the about 30-60min of polymerization time.The compound quick light-initiated system that is made up of azoisobutyronitrile and styrax can shorten the photopolymerization time greatly, use traditional light trigger benzoin methyl ether to need 4-6h, and thermal polymerization needs 8-10h, the photopolymerization system also can adopt a day light initiation polymerization, because be rapid polymerization, avoid ultraviolet light excessively to shine chip, prevented the problem of chip jaundice.
(4) making of working electrode
The making of 2 B sheets
The B sheet is a cover plate, and its structure comprises various liquid storage tanks hole, comprises independently electrochemical investigating pond of 1 buffer pool, 4 sample cells, 4 waste liquid pools and 4.Concrete manufacturing process is:
(1) the B sheet is of a size of 4.0 * 8.0cm, and selecting thickness in the present embodiment for use is the PMMA of 3mm.Wash cover plate with distilled water, and place the NaOH solution of 0.1mol/L to soak 30min, dry up with the distilled water washing and with nitrogen again.
(2) making of buffer pool: the xsect of buffer pool is a parallelogram, and wide is 5mm, long is 46mm, and the angle between long and wide is 30 degree.Because to the buffer pool size requirements is not accurate especially, adopt the diamond punching to get final product in the present embodiment.The height of buffer pool is the thickness of B sheet, i.e. 3mm.Buffer pool is respectively 7mm and 10mm apart from the distance of lower limb on the cover plate.
(3) making of sample cell, waste liquid pool and electrochemical investigating pond: adopt LAM66 laser ablation machine to carry out laser boring.Prepare photo etched mask with Copper Foil, accurately determine the position of required punching.With Ultra-Violet Laser by microcobjective and photo etched mask, laser energy is focused on the light degradable PMMA cover plate, the selection laser frequency is 50Hz, the pulse that corresponding unit length is accepted laser is set at 800 pulses/mm, laser splash takes place in the zone that photo etched mask defined, sample cell and waste liquid pool are that diameter is the circular hole of 2mm, and electrochemical investigating pond is that diameter is the circular hole of 5mm.The electrochemical investigating pond distance of center circle of the rightmost side is 4.5mm from the cover plate right side edge, is 11mm apart from cover plate upper edge distance.The height of liquid storage tank is the thickness of B sheet, i.e. 3mm.
The involution of 3 A sheets and B sheet and the making of electrode
Adopt pressure sintering that A sheet and B sheet are carried out involution.Concrete manufacturing process is:
(1) with A sheet, the ultrasonic cleaning of B sheet, dries naturally.
(2) the A sheet is accurately aimed at microscopically with the B sheet, the distance that makes working electrode and liquid storage tank edge is about 50 μ m.Behind the aligned position, substrate and cover plate fixed to clamp with two blocks of glass sheet put into baking oven, temperature programme to 108 ℃ is incubated 2 minutes, and programmed cooling to 45 ℃ gets final product again.
(3) making of each electrode: it is the Pt silk that being used to of buffer pool 1 the inside provides the electrode of high pressure, and diameter is 1mm, long 45mm, and wherein inserting the buffer pool partial-length is 40mm; The electrode of sample cell 2 and waste liquid pool 3 is long 2cm, and diameter is 0.5mm; Detection cell 4 is three electrode work systems, and working electrode is drawn with copper wire with elargol, and brass wire diameter is 0.5mm, and long 2cm is long 2cm to electrode, and diameter is 0.5mm, and contrast electrode is homemade Ag/AgCl contrast electrode.Ag length is about 1.5cm, and diameter is 0.5mm, makes it to deposit the thick AgCl of the about 100nm of last layer by plating, promptly gets the Ag/AgCl contrast electrode.
(1) making of multichannel micro-fluidic chip
(2) preparation simulation phosphate hydrolytic enzyme
The catalytic active center of organophosphor hydrolytic enzyme is two bivalent metal ions and four clusters that the histidine residue is formed.In natural phosphate hydrolytic enzyme, metallic ion is Zn
2+, work as Zn
2+Be other bivalent metal ion such as Co
2+, Ni
2+, Cd
2+When replacing, this cluster still has catalytic action to the hydrolysis of organophosphate.We adopt a series of bivalent metal ion as function monomer, simulate the phosphate hydrolytic enzyme in the hope of the molecular engram that obtains catalytic performance the best, and imprinted polymer is modified channel interior.Because the organophosphate agricultural chemicals can generate p-nitrophenol under the catalytic action of simulation phosphate hydrolytic enzyme, can detect with the ampere method.
Adopt standard method preparation simulation phosphate hydrolytic enzyme.Be about to function monomer and be arranged in solution around the microsphere, after the crosslinked drying its grinding, fragmentation, screening are obtained the molecular engram medium of certain particle diameter, last wash-out is removed template molecule.Typical preparation process is as follows: with 1mmol 4 (5) vinyl imidazoles, 4mmol diethyl (4-nitrobenzyl) phosphate (diethyl (4-nitrobenzyl) phosphonate, D4NP), 2mmolCoCl
2Be dissolved in the 250ml chloroform.Add the fine initiated polymerization of 0.1mmol azo two isobutyls behind the vacuum outgas 5min, 60 ℃ of water-bath 24h obtain blue polymer.Polymkeric substance sieves after mechanical lapping.Get particle diameter and be the partical about 25 μ m,, remove D4NP with methyl alcohol and acetate extracting, dry then, promptly get molecular engram and simulate the phosphate hydrolytic enzyme.
Wait the catalytic performance of describing imprinted polymer with catalytic activity (reaction velocity), selectivity.Continue to use characterizing method, as carry out structural characterization such as specific area measuring, pore volume mensuration, pore size and measure of spread, hole shape mensuration etc. by adsorption experiment to molecularly imprinted polymer to traditional polymer.Adopt the chemical composition analysis to molecularly imprinted polymer such as ultimate analysis, gravimetric analysis, nuclear magnetic resonance.
(3) modification of multichannel micro-fluidic chip and modification
PMMA chip channel inside is hydrophobic nature, need carry out molecular engram can being simulated the phosphate hydrolytic enzyme after the modification and modify channel interior.
To simulate the phosphate hydrolytic enzyme by sol-gel process and modify channel interior, can increase substantially the specific surface area of catalysis, can improve catalytic efficiency greatly.
(4) adopt electrochemical process to detect
At first, three electrode extension line on 4 channel chip is connected to the corresponding work electrode of electrochemical workstation (CHI1030, Shanghai occasion China instrument company), to electrode and contrast electrode connecting line port.
Secondly, the making alive wiring with micro-fluidic chip high-voltage power supply (CDY-500L, instrument and meter research institute of Chemical Inst., Shandong Prov.) connects each liquid storage tank respectively.
Once more, the method setting and the parameter setting of electrochemical analyser are set according to actual needs: method is set at Amperometric Detection Coupled (amperometric i-t curve), sampling time is set at 300s, detects current potential and is made as 0.9V (vs.Ag/AgCl), and sensitivity is made as 1 * 10
-6A.The voltage applying mode of micro-fluidic chip high-voltage power supply is set in program.Sample introduction voltage is made as 300V, and sample injection time is 20s; Separation voltage is made as 300V, and applying the high pressure time is 240s.
At last, adopt vacuum pump that each separation, sample introduction microchannel are full of solution, the micro-fluidic chip passage is used 0.1MHCl, redistilled water, 0.1MNaOH, redistilled water, buffer solution for cleaning successively.Borax-NaOH the damping fluid (pH is 9.6) that in buffer pool 1, adds 20mmol/L, in sample cell 2, add organophosphorus pesticide paraoxon standard solution (or actual sample, promptly through the seawater of 0.22 μ m membrane filtration), borax-NaOH the damping fluid (pH is 9.6) that in waste liquid pool 3, adds 20mmol/L, apply the sample introduction high pressure, standard (sample) solution promptly is full of sample intake passage 5, when the high pressure between startup buffer pool 1 and the detection cell 4, the standard of split tunnel and sample intake passage crossing (sample) solution promptly is brought into split tunnel, open the electrochemical workstation program of having set, by detection, can carry out quantitative measurement to the organophosphorus pesticide in the sample to organophosphorus pesticide hydrolysate p-nitrophenol.The organophosphorus pesticide paraoxon standard solution that in sample cell 2, adds variable concentrations, the peak current of mensuration paraoxon hydrolysate p-nitrophenol oxidation peak, the pairing linear dependence of concentration that can set up peak current and organophosphorus pesticide concerns.Under the condition that sets, the appearance time of p-nitrophenol is about 52s, and measurement result shows that the testing result relative standard deviation is less than 10% (n=3) between the different passages, and 3 measurement result relative standard deviations of same passage are less than 5%.Sample introduction 1 * 10
-5Mmol/L paraoxon, the mean concentration that 4 passages obtain are 9.6 * 10
-6The mmol/L relative deviation is 4%.Above result shows, efficient, the fast measuring that are applied to actual sample that the multichannel micro-fluidic galvanochemistry chip that the utility model is developed can be successful.
Claims (10)
1. multichannel micro-fluidic chip, it is characterized in that, this chip buffer pool (1) stretches out plurality of separate passage (6), on every split tunnel (6), electrode (8) in a sample cell (2), detection cell (4), sample intake passage (5) and electrode channel (7) and the electrode channel (7) is respectively arranged, and detection cell (4) is at the other end of split tunnel (6); Sample cell (2) communicates with split tunnel (6) by sample intake passage (5); Electrode channel (7) one ends communicate with external power supply, and the other end is near detection cell (4).
2. the micro-fluidic chip shown in claim 1, it is characterized in that, the height of the split tunnel of this micro-fluidic chip (6), sample intake passage (5), electrode channel (7) is 25～100 microns, and width is 25～100 microns, and the length of split tunnel (6) is 40～80 millimeters.
3. the micro-fluidic chip shown in claim 1 is characterized in that, the electrode channel of this micro-fluidic chip (7) is the 25-50 micron with the distance at detection cell (4) edge.
4. the micro-fluidic chip shown in claim 1 is characterized in that, 1～5 millimeter of the sample intake passage of this micro-fluidic chip (5) length, and the intersection point of sample intake passage (5) and split tunnel (6) is 35～75 millimeters to the distance between split tunnel (6) far-end end points.
5. the micro-fluidic chip shown in claim 1 is characterized in that, the diameter of this micro-fluidic chip sample cell (2) is 1～3 millimeter, and the diameter of detection cell (4) is 3～6 millimeters, and the distance between each detection cell (4) center of circle is 8～15 millimeters.
6. the micro-fluidic chip shown in claim 1 is characterized in that, and is parallel between each split tunnel (6) of this micro-fluidic chip, and distance is 7～20 millimeters between adjacent two split tunnels (6).
7. the micro-fluidic chip shown in claim 1 is characterized in that, and is parallel between each electrode channel (7) of this micro-fluidic chip, and distance is 7～20 millimeters between adjacent two electrode channels (7).
8. the micro-fluidic chip shown in claim 1 is characterized in that, the sample intake passage of this micro-fluidic chip (5) is 30～90 degree with split tunnel (6) angle.
9. the micro-fluidic chip shown in claim 1 is characterized in that, the xsect of this micro-fluidic chip buffer pool (1) is a parallelogram, and wide is 4～10 millimeters, and length is 24～49 millimeters, and the angle between long and wide is 30～90 to spend.
10. the micro-fluidic chip shown in claim 1, it is characterized in that, also have a waste liquid pool (3) on every sense channel of this micro-fluidic chip, waste liquid pool (3) communicates with split tunnel (6) by another section sample intake passage (5), and the diameter of waste liquid pool (3) is 1～3 millimeter.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200520041649 CN2831115Y (en) | 2005-05-19 | 2005-05-19 | Multi-channel microflow controlled chip |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200520041649 CN2831115Y (en) | 2005-05-19 | 2005-05-19 | Multi-channel microflow controlled chip |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2831115Y true CN2831115Y (en) | 2006-10-25 |
Family
ID=37136043
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200520041649 Expired - Lifetime CN2831115Y (en) | 2005-05-19 | 2005-05-19 | Multi-channel microflow controlled chip |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2831115Y (en) |
Cited By (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100401048C (en) * | 2005-05-19 | 2008-07-09 | 复旦大学 | Multiple channel micro-flow control chip, process for making same and use thereof |
| CN101806715A (en) * | 2010-04-28 | 2010-08-18 | 复旦大学 | Variable-volume microfluidic chip for colorimetric assay |
| CN101614690B (en) * | 2009-07-27 | 2012-05-16 | 中国科学院长春应用化学研究所 | Multi-channel electrochemical analyzer |
| CN103045469A (en) * | 2013-01-17 | 2013-04-17 | 复旦大学 | Quantitative detector for multi-channel loop-mediated nucleic acid isothermal amplification (LAMP) |
| CN104251875A (en) * | 2009-05-29 | 2014-12-31 | 生命技术公司 | Method for controlling fluid flow in fluidics circuit, and fluid control device |
| CN105170206A (en) * | 2015-09-24 | 2015-12-23 | 基蛋生物科技股份有限公司 | Micro-fluidic chip achieving multi-index detection |
| CN105538716A (en) * | 2016-01-08 | 2016-05-04 | 中国石油大学(北京) | Sample pool suitable for detecting high-water-content oil by terahertz spectrum and manufacturing method of sample pool |
| CN106563517A (en) * | 2016-10-26 | 2017-04-19 | 杭州霆科生物科技有限公司 | Micro-fluidic chip and detection system for detecting formaldehyde and pH value of textile |
| CN107245755A (en) * | 2017-04-21 | 2017-10-13 | 深圳大学 | The light assisted electrochemical etching device synchronously tested suitable for Multi-example |
| CN107576711A (en) * | 2017-08-30 | 2018-01-12 | 成都安普利菲能源技术有限公司 | High-flux electric chemical detection system and high-flux electric chemical detection method |
| CN109856130A (en) * | 2018-12-27 | 2019-06-07 | 南京祥中生物科技有限公司 | Detection method and chip system based on micro-fluidic chip and microarray chip technology |
| CN110196245A (en) * | 2018-02-26 | 2019-09-03 | 成都艾立本科技有限公司 | A kind of laser induced breakdown spectroscopy detection system |
| CN110231369A (en) * | 2019-07-15 | 2019-09-13 | 南通科技职业学院 | A kind of detection device and detection method of chicken meat |
| WO2023159532A1 (en) * | 2022-02-24 | 2023-08-31 | 江苏大学 | Method for detecting organophosphorus pesticides by using microfluidic chip based on fluorescent sensing film |
| US11951474B2 (en) | 2008-10-22 | 2024-04-09 | Life Technologies Corporation | Fluidics systems for sequential delivery of reagents |
-
2005
- 2005-05-19 CN CN 200520041649 patent/CN2831115Y/en not_active Expired - Lifetime
Cited By (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100401048C (en) * | 2005-05-19 | 2008-07-09 | 复旦大学 | Multiple channel micro-flow control chip, process for making same and use thereof |
| US11951474B2 (en) | 2008-10-22 | 2024-04-09 | Life Technologies Corporation | Fluidics systems for sequential delivery of reagents |
| US11040344B2 (en) | 2008-10-22 | 2021-06-22 | Life Technologies Corporation | Fluidics system for sequential delivery of reagents |
| US10478816B2 (en) | 2008-10-22 | 2019-11-19 | Life Technologies Corporation | Fluidics system for sequential delivery of reagents |
| CN104251875B (en) * | 2009-05-29 | 2017-07-18 | 生命技术公司 | Method and flow control apparatus for the fluid stream in controlling stream control loop |
| CN104251875A (en) * | 2009-05-29 | 2014-12-31 | 生命技术公司 | Method for controlling fluid flow in fluidics circuit, and fluid control device |
| CN101614690B (en) * | 2009-07-27 | 2012-05-16 | 中国科学院长春应用化学研究所 | Multi-channel electrochemical analyzer |
| CN101806715A (en) * | 2010-04-28 | 2010-08-18 | 复旦大学 | Variable-volume microfluidic chip for colorimetric assay |
| CN101806715B (en) * | 2010-04-28 | 2011-12-07 | 复旦大学 | Variable-volume microfluidic chip for colorimetric assay |
| CN103045469A (en) * | 2013-01-17 | 2013-04-17 | 复旦大学 | Quantitative detector for multi-channel loop-mediated nucleic acid isothermal amplification (LAMP) |
| CN105170206A (en) * | 2015-09-24 | 2015-12-23 | 基蛋生物科技股份有限公司 | Micro-fluidic chip achieving multi-index detection |
| CN105170206B (en) * | 2015-09-24 | 2017-06-16 | 基蛋生物科技股份有限公司 | A kind of micro-fluidic chip of multiple determination |
| CN105538716A (en) * | 2016-01-08 | 2016-05-04 | 中国石油大学(北京) | Sample pool suitable for detecting high-water-content oil by terahertz spectrum and manufacturing method of sample pool |
| CN106563517A (en) * | 2016-10-26 | 2017-04-19 | 杭州霆科生物科技有限公司 | Micro-fluidic chip and detection system for detecting formaldehyde and pH value of textile |
| CN107245755A (en) * | 2017-04-21 | 2017-10-13 | 深圳大学 | The light assisted electrochemical etching device synchronously tested suitable for Multi-example |
| CN107576711A (en) * | 2017-08-30 | 2018-01-12 | 成都安普利菲能源技术有限公司 | High-flux electric chemical detection system and high-flux electric chemical detection method |
| CN110196245A (en) * | 2018-02-26 | 2019-09-03 | 成都艾立本科技有限公司 | A kind of laser induced breakdown spectroscopy detection system |
| CN109856130A (en) * | 2018-12-27 | 2019-06-07 | 南京祥中生物科技有限公司 | Detection method and chip system based on micro-fluidic chip and microarray chip technology |
| CN110231369A (en) * | 2019-07-15 | 2019-09-13 | 南通科技职业学院 | A kind of detection device and detection method of chicken meat |
| WO2023159532A1 (en) * | 2022-02-24 | 2023-08-31 | 江苏大学 | Method for detecting organophosphorus pesticides by using microfluidic chip based on fluorescent sensing film |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN2831115Y (en) | Multi-channel microflow controlled chip | |
| CN100401048C (en) | Multiple channel micro-flow control chip, process for making same and use thereof | |
| CN109825426B (en) | Integrated liquid drop micro-fluidic chip structure, preparation method and micro-fluidic chip assembly | |
| CN101281136B (en) | Microflow control chip used for ultraviolet-visible absorption detection and preparation thereof | |
| CN108499619B (en) | Membrane integrated type micro-fluidic filter chip and preparation method and application thereof | |
| GB2349349A (en) | Variable volume vessel for assay purposes | |
| CN100387980C (en) | Preparation method of polymer microflow control chip having metal microelectrode | |
| CN1705884A (en) | Analyzing tool and device | |
| CN1633597A (en) | Slide cassette for fluidic injection | |
| CN1330154A (en) | Cell microarray chip and its preparing process | |
| CN201421455Y (en) | Special micro-fluidic chip for syphilis diagnosis | |
| CN1591001A (en) | Laser induced fluorescence and light absorption bifunction detecting microflow controlled electrophoresis ehip | |
| CN102183388A (en) | Preparation method of free flow electrophoresis chip with two-dimensional depth | |
| CN1712967A (en) | Silicon rubber micro-fluid control chip with polyvinyl alcohol surface coating and surface modification thereof | |
| CN109971609B (en) | Digital PCR chip and preparation method thereof | |
| JP4044044B2 (en) | Electrophoresis device, electrophoresis apparatus, electrophoresis method and specimen detection method | |
| CN107262168A (en) | A kind of micro-fluidic SERS chips of PDMS self-primings sample introduction and preparation method thereof | |
| CN111812091A (en) | Chip gel electrophoresis and on-line UV-VIS imaging detection device thereof | |
| CN201449391U (en) | Syphilis diagnosing device containing electrodes covered by gold colloid antigenic sensitive films | |
| CN106959332B (en) | The automatic fine sampling device and its control method of electrophoresis detection instrument | |
| CN1563420A (en) | Microchip with multichannel electrodes, preparation method and application | |
| CN213423201U (en) | Micro-fluidic chip for cancer marker detection | |
| KR100762532B1 (en) | Sample analysis method using microchip | |
| KR101083976B1 (en) | Apparatus for separating sample by using microchip and method thereof | |
| CN113820487A (en) | Micro-fluidic chip for cancer marker detection and preparation method thereof |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Effective date of abandoning: 20080709 |
|
| C25 | Abandonment of patent right or utility model to avoid double patenting |