CN2804851Y - High precision atomic force microscope - Google Patents
High precision atomic force microscope Download PDFInfo
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- CN2804851Y CN2804851Y CNU2004200604408U CN200420060440U CN2804851Y CN 2804851 Y CN2804851 Y CN 2804851Y CN U2004200604408 U CNU2004200604408 U CN U2004200604408U CN 200420060440 U CN200420060440 U CN 200420060440U CN 2804851 Y CN2804851 Y CN 2804851Y
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- cantilever
- micro
- mirror body
- high precision
- atomic force
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Abstract
The utility model relates to a high precision atomic force microscope body which relates to a nano detecting device. The utility model mainly solves the problem of measurement of an atomic pattern of an insulator surface with high precision, and has the technical scheme that a micro cantilever is added between microscope body for scanning a tunnel and a specimen stage, and the displacement of the micro cantilever is controlled by an adjusting mechanism. A lower piezoelectric ceramic and a slope power adjusting mechanism are arranged below the specimen stage for controlling the scanning of the horizontal direction of the specimen stage and the displacement of the vertical direction. The purposes of the utility model is to conduct the microscopic analysis of a solid surface and nano processing.
Description
Technical field:
The utility model relates to nanometer measuring device, it is the mirror body of the atomic force microscope of Measuring Object surface atom pattern, mainly be made up of micro-cantilever, piezoelectric ceramics, stepper, speed change system, scanning tunnel microscope mirror body, its purposes is to do solid surface microscopic analysis and nanoprocessing.
Background technology:
The mirror body of high precision scanning tunnel microscope is disclosed in ZL02 2 21502.6, it is fast that its purpose provides the chaining pin speed of feed, chaining pin and sample room are every the degree of regulation height, but sample stage precise displacement, but pinpoint is measured the mirror body with the high precision scanning tunnel microscope of processing, formation is a chaining pin, testing sample is through bias voltage, microgalvanometer is formed the measurement loop of tunnel current, chaining pin is fixed on the chaining pin seat through piezoelectric ceramics, the chaining pin seat through steel ball by two adjusting levers, a vertical electric feeding mechanism supports, sample stage be fixed on horizontal X to Y on electric platforms, the sample coordinate is detected by position transducer, said apparatus all is positioned at the radome of vibration isolation, and weak point is its not atom pattern of energy measurement insulator surface.The atomic force microscope of invention in 1986 can solve this difficult problem, its principle of work is that an end to the tetchy micro-cantilever of faint power is fixed, its other end has a probe to remove the atom pattern of perception sample surfaces by interatomic repulsive force, measuring micro-cantilever fluctuating situation is the key point of making atomic force microscope mirror body, useful optical method is measured micro-cantilever fluctuating situation, this method requires optical measuring device that high enlargement factor is arranged, and this makes that the difficulty of actual fabrication and use is very big.
Summary of the invention:
The purpose of this utility model is to avoid above-mentioned weak point of the prior art and provides a kind of energy measurement insulator surface atom pattern, measuring accuracy height, the mirror body of easy to operate atomic force microscope.
The purpose of this utility model can reach by following measure:
A kind of mirror body of high precision atomic force microscope, comprise micro-cantilever, sample stage, scanning tunnel microscope mirror body, stepper, speed change system, between the chaining pin and sample stage of scanning tunnel microscope mirror body, horizontal suspended one micro-cantilever, the one end is fixed on the insulated column, and insulated column and bracket sleeve tube are slidingly matched, on the tinsel of its other end, horizontal fixed one area is the sheet metal of 1.5 * 1.5 mm sqs, has under the sheet metal and the rectangular probe of micro-cantilever, and probe points to sample surfaces; Support is fixed on the low bottom-disc of mirror body, and the micro-cantilever governor motion is arranged on it, and the lower piezoelectric pottery between electric platforms, is installed, vertically to inclined-plane motorized adjustment mechanism at sample stage and X successively in position that can the three-dimensional regulation micro-cantilever.
The purpose of this utility model can also reach by following measure:
The micro-cantilever governor motion has three coordinate regulating devices, vertical direction adopts the screw thread pair mode to regulate, can coarse adjustment and fine setting, horizontal radial also adopts the screw thread pair mode to regulate, promote the insulated column inner nut by bolt, insulated column is slided along sleeve, the adjusting of corner direction is finished by worm gear pair, its type of drive can be manual, also can be electronic.
The used tinsel of micro-cantilever must be high temperature resistant, and its power elastic constant is low, mechanics resonant frequency height.
Vertically form by motor, worm gear pair, screw thread pair, inclined plane slide block, spherical guide to inclined-plane motorized adjustment mechanism, the driven by motor worm gear pair, worm gear pair drives screw thread pair, promotes inclined plane slide block is made vertical direction along spherical guide displacement.
This is practical to have following advantage compared to existing technology:
But the atom pattern of 1 high-acruracy survey insulator surface can accurately be located, and accurately adjusts the spacing distance of chaining pin and micro-cantilever sheet metal, micro-cantilever probe and sample surfaces.
2, each governor motion is only finished a kind of job function, and the single-minded performance the best that helps to make governor motion of function, but the position regulated at will of chaining pin, micro-cantilever, sample stage operate not only accurately but also convenient.
Description of drawings:
The drawing of accompanying drawing is described as follows:
Fig. 1 is the atomic force microscope schematic diagram.
Fig. 2 is mirror body structure figure.
Fig. 3 is the micro-cantilever governor motion.
Fig. 4 is vertically to inclined-plane motorized adjustment mechanism.
Numbering 1-sample among the figure; 2-micro-cantilever probe; The 3-sheet metal; The chaining pin of 4-scanning tunnel microscope mirror body; The 5-microgalvanometer; 6 bias voltages; 7-tinsel micro-cantilever; The 8-insulated column; The 9-support; 10-vibration isolation dish; The 11-adjusting lever; 12-Y is to electric platforms; 13-X is to electric platforms; 14-Z is to inclined-plane motorized adjustment mechanism; 15-lower piezoelectric pottery; The 16-sample stage; 17-Z is to the motorized adjustment bar; 18-chaining pin seat; The last piezoelectric ceramics of 19-; The 20-steel ball; 21-vertical (Z to) coarse adjustment; 22-corner (θ to) fine setting; The 23-sleeve; 24-vertical (Z to) fine setting; 25-level (r to) fine setting; The 26-stop screw; The 27-base; The 28-spherical guide; The 29-inclined plane slide block; The 30-screw thread pair; The 31-wooden partition; The 32-worm gear pair; The 33-motor.
Embodiment:
The fundamental diagram of atomic force microscope is as shown in Figure 1:
End to the tetchy micro-cantilever of faint power is fixed on the support through insulated column, the probe of its other end is when sample moves, because the effect of repelling between atom, can make the micro-cantilever dipping and heaving, and the tinsel micro-cantilever, be fixed on the measurement loop that sheet metal above it, chaining pin, microgalvanometer, bias voltage are formed tunnel current, the micro-cantilever dipping and heaving makes measures loop generation corresponding tunnel current value, after sending computer workstation to handle the tunnel current value that collects, can on display screen, see the atom pattern of sample surfaces.
The mirror body structure can be referring to Fig. 2, Fig. 3:
The mirror body of high precision atomic force microscope, comprise micro-cantilever, sample stage, scanning tunnel microscope mirror body, stepper, speed change system, between the chaining pin (4) and sample stage (16) of scanning tunnel microscope mirror body, horizontal suspended one micro-cantilever (7), the one end is fixed on the insulated column (8), insulated column and support (9) sleeve (23) is slidingly matched, on the tinsel of its other end (7), horizontal fixed one area is the sheet metal (3) of 1.5 * 1.5 mm sqs, have under the sheet metal and the rectangular probe of micro-cantilever (7) (2), probe points to sample surfaces (1); Support is fixed on the low bottom-disc of mirror body, and micro-cantilever governor motion (21,22,24,25) is arranged on it, position that can the three-dimensional regulation micro-cantilever; Between electric platforms (13), lower piezoelectric pottery (15) is installed successively, at sample stage (16) and X vertically to inclined-plane motorized adjustment mechanism (14).The used tinsel (7) of micro-cantilever must be high temperature resistant, and its power elastic constant is low, mechanics resonant frequency height.
On the basis of existing scanning tunnel microscope mirror body, between chaining pin and sample stage, added core parts one micro-cantilever of atomic force microscope mirror body, micro-cantilever is fixed on the support through insulated column, support is equipped with the governor motion of micro-cantilever, this mechanism can make micro-cantilever make three-D displacement, in sample stage and X the lower piezoelectric pottery has been installed between electric platforms, Z is to inclined-plane motorized adjustment mechanism, the lower piezoelectric pottery is finished horizontal scanning, Z can be vertically to the clearance distance of regulating between micro-cantilever and the sample stage to inclined-plane motorized adjustment mechanism, and the displacement of chaining pin vertical direction is still regulated to the motorized adjustment bar by Z, and last piezoelectric ceramics only drives the chaining pin sampling.
The micro-cantilever governor motion is as shown in Figure 3:
The micro-cantilever governor motion has three-dimensional regulating device (21,22,24,25), vertical direction adopts the screw thread pair mode to regulate, can coarse adjustment (21) and fine setting (24), horizontal radial also adopts the screw thread pair mode to regulate (25), promote the insulated column inner nut by bolt, insulated column is slided along sleeve, the adjusting of corner direction is finished by worm gear pair (22), the type of drive of mechanism can be manual, also can be electronic.
Worm gear pair is finished the corner of micro-cantilever is regulated, and promptly is fulcrum with the support, and stepper rotates seasonal worm gear pair and drives the support corner displacement, and horizontal radial, vertical direction all adopt the screw thread pair mode to regulate.
Z can be referring to Fig. 4 to inclined-plane motorized adjustment mechanism:
Vertically form by motor (33), worm gear pair (32), screw thread pair (30), inclined plane slide block (29), spherical guide (28) to inclined-plane motorized adjustment mechanism (14), the driven by motor worm gear pair, worm gear pair drives screw thread pair, promotes inclined plane slide block is made vertical direction along spherical guide displacement.
The ratio of the end on inclined-plane with height is 9: 1, and it is stable adopting the advantage of inclined-plane propulsion mode, accurately, between two inclined plane slide blocks, between lower inclined plane slider bottom and the base, spherical guide is arranged all between ramp slide block both sides and the wooden partition, purpose is to make the governor motion action sensitiveer, more accurate.
Claims (4)
1, a kind of mirror body of high precision atomic force microscope, comprise micro-cantilever, sample stage, scanning tunnel microscope mirror body, stepper, speed change system, it is characterized in that between the chaining pin (4) and sample stage (16) of scanning tunnel microscope mirror body, horizontal suspended one micro-cantilever (7), the one end is fixed on the insulated column (8), insulated column and support (9) sleeve (23) is slidingly matched, on the tinsel of its other end (7), horizontal fixed one area is the sheet metal (3) of 1.5 * 1.5 mm sqs, have under the sheet metal and the rectangular probe of micro-cantilever (7) (2), probe points to sample surfaces (1); Support is fixed on the low bottom-disc of mirror body, and micro-cantilever governor motion (21,22,24,25) is arranged on it, position that can the three-dimensional regulation micro-cantilever; Between electric platforms (13), lower piezoelectric pottery (15) is installed successively, at sample stage (16) and X vertically to inclined-plane motorized adjustment mechanism (14).
2, the mirror body of a kind of high precision atomic force microscope as claimed in claim 1, it is characterized in that the micro-cantilever governor motion has three-dimensional regulating device (21,22,24,25), vertical direction adopts the screw thread pair mode to regulate, can coarse adjustment (21) and fine setting (24), horizontal radial also adopts the screw thread pair mode to regulate (25), promote the insulated column inner nut by bolt, insulated column is slided along sleeve, the adjusting of corner direction is finished by worm gear pair (22), the type of drive of mechanism can be manual, also can be electronic.
3, the mirror body of a kind of high precision atomic force microscope as claimed in claim 1 is characterized in that the used tinsel of micro-cantilever (7) must be high temperature resistant, and its power elastic constant is low, mechanics resonant frequency height.
4, the mirror body of a kind of high precision atomic force microscope as claimed in claim 1, it is characterized in that vertically forming by motor (33), worm gear pair (32), screw thread pair (30), inclined plane slide block (29), spherical guide (28) to inclined-plane motorized adjustment mechanism (14), the driven by motor worm gear pair, worm gear pair drives screw thread pair, promotes inclined plane slide block is made vertical direction along spherical guide displacement.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2004200604408U CN2804851Y (en) | 2004-07-23 | 2004-07-23 | High precision atomic force microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2004200604408U CN2804851Y (en) | 2004-07-23 | 2004-07-23 | High precision atomic force microscope |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2804851Y true CN2804851Y (en) | 2006-08-09 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU2004200604408U Expired - Fee Related CN2804851Y (en) | 2004-07-23 | 2004-07-23 | High precision atomic force microscope |
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| CN (1) | CN2804851Y (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103941044A (en) * | 2014-04-06 | 2014-07-23 | 南开大学 | Cross-scale high-precision sample feeding mechanism of atomic force microscope |
| CN104880578A (en) * | 2015-06-17 | 2015-09-02 | 扬州大学 | Device for measuring micro-nano metal fiber surface topography, and use method thereof, and method for measuring driver moving distance in device |
| CN104930981A (en) * | 2015-06-03 | 2015-09-23 | 华中科技大学 | Atomic force probe posture adjusting apparatus |
| CN108089029A (en) * | 2016-11-22 | 2018-05-29 | 安东帕有限责任公司 | The gap between the sample and probe of scanning probe microscopy is imaged with the side view of basic horizontal |
-
2004
- 2004-07-23 CN CNU2004200604408U patent/CN2804851Y/en not_active Expired - Fee Related
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103941044A (en) * | 2014-04-06 | 2014-07-23 | 南开大学 | Cross-scale high-precision sample feeding mechanism of atomic force microscope |
| CN103941044B (en) * | 2014-04-06 | 2016-05-18 | 南开大学 | AFM is across yardstick high accuracy sample introduction mechanism |
| CN104930981A (en) * | 2015-06-03 | 2015-09-23 | 华中科技大学 | Atomic force probe posture adjusting apparatus |
| CN104930981B (en) * | 2015-06-03 | 2016-05-25 | 华中科技大学 | A kind of atomic force probe pose adjusting device |
| CN104880578A (en) * | 2015-06-17 | 2015-09-02 | 扬州大学 | Device for measuring micro-nano metal fiber surface topography, and use method thereof, and method for measuring driver moving distance in device |
| CN104880578B (en) * | 2015-06-17 | 2017-06-16 | 扬州大学 | The measuring method of driver move distance in a kind of device and its application method and the device for measuring micro-nano metallic fiber surface topography |
| CN108089029A (en) * | 2016-11-22 | 2018-05-29 | 安东帕有限责任公司 | The gap between the sample and probe of scanning probe microscopy is imaged with the side view of basic horizontal |
| CN108089029B (en) * | 2016-11-22 | 2022-08-09 | 安东帕有限责任公司 | Imaging a gap between a sample and a probe of a scanning probe microscope in a substantially horizontal side view |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20060809 |