CN2639915Y - MEMS scanning microlens - Google Patents
MEMS scanning microlens Download PDFInfo
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- CN2639915Y CN2639915Y CN 03209483 CN03209483U CN2639915Y CN 2639915 Y CN2639915 Y CN 2639915Y CN 03209483 CN03209483 CN 03209483 CN 03209483 U CN03209483 U CN 03209483U CN 2639915 Y CN2639915 Y CN 2639915Y
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- actuating arm
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Abstract
The utility model discloses a scanning micro-mirror of MEMS, which belongs to a field of an optical-mechanical-electronic instrument and comprises two groups of multilevel folded cascade piezoelectric compound elastic suspended film actuating arm and plane reflecting micro-mirror. The plane reflecting micro-mirror is driven by a multilevel folded cascade elastic piezoelectric suspended structure, and a piezoelectric film and the upper and the lower poles of the piezoelectric film are arranged on the suspended actuating arm. The deflection angle of the suspended actuating arm increases step by step by applying the opposing voltage to the upper and the lower poles of the piezoelectric film of the neighboring actuating arm. Under the different voltages, different deflection angles of the plane micro-mirror can be achieved by making different piezoelectric films and elastic arms with different thicknesses and lengths. The utility model can achieve greater deflection angles of the micro-mirror and has greater driving force, steady performance and steady operating frequency. The utility model has the advantages of simple structure, high element reliability, simple technique, higher rate of finished products and is easy to process and suitable for mass production.
Description
Technical field
The utility model belongs to ray machine electric installation field, particularly a kind of MEMS scanning micro-mirror.
Background technology
One of extensive application of optical MEMS is aspect optical scanner and optical imagery at present, and TexasInstruments, Inc have made a kind of family that is used for, the digital mirror device of the image projector of office and arenas (Digital Mirror Device
TM).DMD
TMBe used at present commercial projector.But the principles such as static, electromagnetism, heat, piezoelectricity that adopt this class MEMS device great majority realize driving.Utilize existing little execution architecture of these principles to have big driver size mostly, take more chip area, and drive displacement and the amount of deflection realized are limited, complex manufacturing technology, reliability are not high, and power consumption is big, and the life-span is short.In being subjected to the MEMS piezoelectric membrane type of drive of broad research, adopt the single cantilever beam structure mostly, because the elongation of piezoelectric membrane is limited, therefore the structural maximum deflection displacement of single cantilever beam is very limited, this feature limits the widespread use of Piezoelectric Driving mode in the MEMS field, the ripe MEMS commercialized device that causes present little employing piezoelectric membrane to drive occurs.This single-cantilever drives structure is if will realize big displacement or deflection, then require the lengthening beam length and increase driving voltage, so just one side has increased semi-girder static deflection amount, when causing not making alive, cantilever promptly has big yaw displacement, seriously limits its general the enclosing of application.The single cantilever beam drives structure of this length significantly reduces the physical strength of driver on the other hand, is easy to generate jitter phenomenon in the work, and very easily is hit and fractures.In addition, the single-cantilever drives structure of this length has increased the inertia effects of cantilever itself, makes the frequency of operation of driver reduce the application scenario that the many frequency of operation of incompatibility are higher.Simultaneously, big driving voltage very easily causes piezoelectric membrane to puncture, and brings many additive effects to piezoelectric membrane, and has increased the complicacy of corresponding electronic circuit.At manufacture view, long beam length and the static deflection characteristics of itself seriously reduce the yield rate of micromachined, significantly increase the complicacy of making; Big driving voltage proposes higher requirement to the quality of piezoelectric membrane, increases the technology difficulty of piezoelectric membrane deposit.Big driver volume also makes it be difficult to adapt in some high density the application in micro structural component or the device array.These have all seriously limited the application of single-cantilever piezoelectric actuator in microelectronic mechanical devices and system.
Summary of the invention
The purpose of this utility model provides a kind of MEMS scanning micro-mirror, described scanning micro-mirror adopts two folding shape multi-stage rotary piezoelectricity composite elastic suspending film actuating arms to drive plane reflection micro mirror formation, it is characterized in that: described scanning micro-mirror is to deposit the piezoelectricity composite film to form folding actuating arm 2 on substrate 1, and plane reflection micro mirror 3 constitutes single MEMS scanning micro-mirror.
Mea layers 5, upper film electrode layer 7, bottom electrode lead-in wire 9, top electrode go between 10 to described folding shape actuating arm under the complex superposition, piezoelectric thin film layer 6 and insulating medium layer 8 between two mea layers form by elastic substrate 1 and above the cushioned material layer 4 on substrate 1.
The number of the folding actuating arm of described piezoelectricity on plane reflection micro mirror 3 both sides equates, can be 2～20; Can have multiple folding shape folded form, the stiff end of both sides actuating arm can be the symmetry also can be asymmetric.
The folding actuating arm of described plane reflection micro mirror and piezoelectricity is 2 parallel, put at grade; Cover the layer of metal film reflection horizon on substrate 1 or above the cushioned material layer 4.
Described scanning micro-mirror can be put display by 1～1000 on same planar substrate 1, form the MEMS scanning micro-mirror of array structure.
The beneficial effects of the utility model are to adopt two groups of multistage Origami cascaded piezoelectricity composite elastic suspension structures to realize the big deflection driven of flat micromirror, make micro mirror have bigger sweep limit.Shortened the length of driver simultaneously, reduce driver and taken area of chip, reduce driving voltage, improved the frequency of operation of driver, had good device drive performance, it is simple in structure simultaneously, has very high device reliability, lower process complexity, higher fabrication yield, easily processing is fit to produce in batches.Optical scanning micro mirror and scanning micro-mirror array, volume is little, driveability good, work is accurate, low-power consumption, frequency of operation height, cost are low, is easy to extensive manufacturing, is the important directions of scanning micro-mirror development.
Description of drawings
Fig. 1 is a kind of 4 wheel driven swing arm axle center symmetry driven sweep micro-mirror structure.
Fig. 2 is another kind of 4 wheel driven swing arm rotational symmetry driven sweep micro-mirror structure.
Fig. 3 is a Piezoelectric Driving arm configuration synoptic diagram.
Fig. 4 is a kind of two-dimensional scan micro mirror array structural representation.
Fig. 5 is another kind of two-dimensional scan micro mirror array structural representation.
Embodiment
The utility model is a kind of MEMS scanning micro-mirror, and described scanning micro-mirror adopts two groups of multistage Origami cascaded piezoelectricity composite elastic suspending film actuating arms to drive plane reflection micro mirror formation (as shown in Figure 1 and Figure 2).Described scanning micro-mirror is that deposition piezoelectricity composite film forms multistage Origami cascaded actuating arm 2 on elastic substrate 1, and plane reflection micro mirror 3 constitutes single MEMS scanning micro-mirror.This actuating arm 2 by mea layers 5, upper film electrode layer 7, bottom electrode lead-in wire 9, top electrode under the complex superposition above elastic substrate and the cushioned material layer 4 on substrate 1 go between 10, piezoelectric thin film layer 6 and insulating medium layer 8 between two mea layers form (as shown in Figure 3).Piezoelectric Driving arm 2 equates at the number on plane reflection micro mirror 3 both sides, can be 2～20; Can have multiple folded form, the stiff end of both sides actuating arm can be the symmetry also can be asymmetric.Above-mentioned plane reflection micro mirror 3 and Piezoelectric Driving arm be 2 parallel, put at grade; Be coated with the layer of metal film reflection horizon on elastic substrate 1 or above the cushioned material layer 4.
Adopt micromachining technology on resilient material, to form continuous foldable structure and also can cover corresponding cushion, on each parallel arms of elastic material structure, form mutual unconnected piezoelectric membrane figure and membrane electrode up and down thereof respectively.Like this, on every section piezoelectric elasticity material compound arm, formed the actuating arm that utilizes piezoelectric effect.The one or both sides of drives structure link to each other with substrate, are stiff end.Piezoelectric membrane upper/lower electrode on the contiguous parallel different driving arm is applied the opposite polarity driving voltage.Be close to piezoelectric membrane on the actuating arm like this owing to piezoelectric effect elongates or shortens, but resilient material can only be accompanied by the elongation of piezoelectric membrane and bend, thereby cause the bending of each actuating arm, because adjacent driven arm institute making alive is opposite, so the deflection round about of adjacent driven arm.Produce maximum displacement in the end of each actuating arm, and drive displacement and deflection angle superpose step by step to the direction away from stiff end, thereby under lower applied voltage, can obtain bigger micro mirror deflection angle.
Described scanning micro-mirror can be put display by 1～10000 on same planar substrate 1, form the MEMS scanning micro-mirror (as Fig. 4, shown in Figure 5) of array structure
Claims (5)
1. MEMS scanning micro-mirror, described scanning micro-mirror adopts two groups of multistage Origami cascaded piezoelectricity composite elastic suspending film actuating arms to drive plane reflection micro mirror formation, it is characterized in that: described scanning micro-mirror is that deposition piezoelectricity composite film forms multistage Origami cascaded actuating arm 2 on elastic substrate 1, and plane reflection micro mirror 3 constitutes single MEMS scanning micro-mirror.
2. according to the described MEMS scanning micro-mirror of claim 1, it is characterized in that: mea layers 5, upper film electrode layer 7, bottom electrode lead-in wire 9, top electrode go between 10 to described actuating arm 2 under the complex superposition, piezoelectric thin film layer 6 and insulating medium layer 8 between two mea layers form by elastic substrate 1 and above the cushioned material layer 4 on elastic substrate 1.
3. according to the described MEMS scanning micro-mirror of claim 1, it is characterized in that: described Piezoelectric Driving arm 2 equates at the number on plane reflection micro mirror 3 both sides, can be 2～20; Can have multiple folded form, the stiff end of both sides actuating arm can be the symmetry also can be asymmetric.
4. according to the described MEMS scanning micro-mirror of claim 1, it is characterized in that: described plane reflection micro mirror and Piezoelectric Driving arm be 2 parallel, put at grade; Be coated with the layer of metal film reflection horizon on elastic substrate 1 or above the cushioned material layer 4.
5. according to the described MEMS scanning micro-mirror of claim 1, it is characterized in that: described scanning micro-mirror can be put display by 1～10000 on same planar substrate 1, forms the MEMS scanning micro-mirror of array structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 03209483 CN2639915Y (en) | 2003-09-12 | 2003-09-12 | MEMS scanning microlens |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 03209483 CN2639915Y (en) | 2003-09-12 | 2003-09-12 | MEMS scanning microlens |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2639915Y true CN2639915Y (en) | 2004-09-08 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 03209483 Expired - Fee Related CN2639915Y (en) | 2003-09-12 | 2003-09-12 | MEMS scanning microlens |
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Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100354687C (en) * | 2005-07-08 | 2007-12-12 | 北京航空航天大学 | Two dimensional piezoelectric optical scanner |
| CN100395580C (en) * | 2005-06-22 | 2008-06-18 | 精工爱普生株式会社 | Actuator |
| CN101968568B (en) * | 2006-10-19 | 2013-03-27 | 精工爱普生株式会社 | Actuator, optical scanner and image forming apparatus |
| CN103180772A (en) * | 2010-11-24 | 2013-06-26 | 日本电气株式会社 | Optical scanning device |
| CN103246059A (en) * | 2012-02-14 | 2013-08-14 | 富士胶片株式会社 | Mirror driving device and method of controlling the device |
| CN105137597A (en) * | 2010-12-22 | 2015-12-09 | 三美电机株式会社 | Optical scanner |
| CN104932098B (en) * | 2015-07-17 | 2017-04-05 | 京东方科技集团股份有限公司 | Micro mirror array and the backlight module and display device using which |
| CN107203037A (en) * | 2016-03-17 | 2017-09-26 | 株式会社理光 | Control device, light deflection system, image projection device and control method |
| CN108428786A (en) * | 2018-03-26 | 2018-08-21 | 郭玉华 | A kind of preparation method of micro-angle driving apparatus |
| CN108494284A (en) * | 2018-03-26 | 2018-09-04 | 郭玉华 | A kind of preparation method of micro-angle driving apparatus |
| CN110426843A (en) * | 2019-09-02 | 2019-11-08 | 无锡微视传感科技有限公司 | Two-dimensional scanning micro mirror |
| CN110462485A (en) * | 2017-03-30 | 2019-11-15 | 三菱电机株式会社 | Light scanning apparatus and its manufacturing method |
| CN110967824A (en) * | 2019-12-20 | 2020-04-07 | 中北大学 | Light beam deflection fine aiming driving component micromirror |
| CN111830701A (en) * | 2019-04-19 | 2020-10-27 | 华为技术有限公司 | Electromagnetic micromirror and laser device |
-
2003
- 2003-09-12 CN CN 03209483 patent/CN2639915Y/en not_active Expired - Fee Related
Cited By (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100395580C (en) * | 2005-06-22 | 2008-06-18 | 精工爱普生株式会社 | Actuator |
| CN100354687C (en) * | 2005-07-08 | 2007-12-12 | 北京航空航天大学 | Two dimensional piezoelectric optical scanner |
| CN101968568B (en) * | 2006-10-19 | 2013-03-27 | 精工爱普生株式会社 | Actuator, optical scanner and image forming apparatus |
| US9122059B2 (en) | 2010-11-24 | 2015-09-01 | Nec Corporation | Optical scanning device |
| CN103180772A (en) * | 2010-11-24 | 2013-06-26 | 日本电气株式会社 | Optical scanning device |
| CN105137597B (en) * | 2010-12-22 | 2018-01-02 | 三美电机株式会社 | Optical scanner |
| CN105137597A (en) * | 2010-12-22 | 2015-12-09 | 三美电机株式会社 | Optical scanner |
| CN103246059B (en) * | 2012-02-14 | 2016-08-10 | 富士胶片株式会社 | Mirror drives equipment and the method controlling this equipment |
| CN103246059A (en) * | 2012-02-14 | 2013-08-14 | 富士胶片株式会社 | Mirror driving device and method of controlling the device |
| CN104932098B (en) * | 2015-07-17 | 2017-04-05 | 京东方科技集团股份有限公司 | Micro mirror array and the backlight module and display device using which |
| US10571684B2 (en) | 2015-07-17 | 2020-02-25 | Boe Technology Group Co., Ltd. | Micro-mirror array having pillars which form portions of electrical paths between mirror electrodes and mirrors |
| CN107203037A (en) * | 2016-03-17 | 2017-09-26 | 株式会社理光 | Control device, light deflection system, image projection device and control method |
| CN110462485A (en) * | 2017-03-30 | 2019-11-15 | 三菱电机株式会社 | Light scanning apparatus and its manufacturing method |
| CN110462485B (en) * | 2017-03-30 | 2021-07-20 | 三菱电机株式会社 | Optical scanning device and method for manufacturing the same |
| CN108494284A (en) * | 2018-03-26 | 2018-09-04 | 郭玉华 | A kind of preparation method of micro-angle driving apparatus |
| CN108428786A (en) * | 2018-03-26 | 2018-08-21 | 郭玉华 | A kind of preparation method of micro-angle driving apparatus |
| CN108494284B (en) * | 2018-03-26 | 2020-09-18 | 徐明秀 | Preparation method of micro-angle driving device |
| CN108428786B (en) * | 2018-03-26 | 2020-10-02 | 浙江宝纺印染有限公司 | Preparation method of micro-angle driving device |
| CN111830701A (en) * | 2019-04-19 | 2020-10-27 | 华为技术有限公司 | Electromagnetic micromirror and laser device |
| CN110426843A (en) * | 2019-09-02 | 2019-11-08 | 无锡微视传感科技有限公司 | Two-dimensional scanning micro mirror |
| CN110967824A (en) * | 2019-12-20 | 2020-04-07 | 中北大学 | Light beam deflection fine aiming driving component micromirror |
| CN110967824B (en) * | 2019-12-20 | 2022-03-04 | 中北大学 | Light beam deflection fine aiming driving component micromirror |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20040908 Termination date: 20100912 |