CN2236652Y

CN2236652Y - X ray diffractometer

Info

Publication number: CN2236652Y
Application number: CN 96203534
Authority: CN
Inventors: 颜一鸣; 赫业军
Original assignee: CHINA AEROPACE INDUSTRY CORP; Beijing Normal University
Current assignee: CHINA AEROPACE INDUSTRY CORP; Beijing Normal University
Priority date: 1996-02-17
Filing date: 1996-02-17
Publication date: 1996-10-02
Anticipated expiration: 2006-02-17

Abstract

The utility model relates to an X ray diffractometer which is used for analyzing the structure of substance and comprises an X light source, a test sample, a seeker, a high-voltage power supply, an amplifier, a pulse analyzer, a scaler, a rate meter, a computer, the controlled system of the X light source and an angle rotatable device. The X ray diffractometer is characterized in that an integral preparing parallel beam X light lens is respectively between the X light source and the test sample and between the test sample and the seeker. The lens is a single multihole glass solid without any support part. The inner part of the lens is provided with a plurality of X light guide holes which penetrate through the solid from one end to the other end. The walls of the X light guide holes are fused into the glass solid. The incoming light and the diffraction light source of the utility model has high measuring accuracy and high measuring sensitivity.

Description

A kind of X-ray diffractometer

The utility model relates to a kind of X-ray diffractometer that the structure of matter is analyzed that is used for.

X-ray diffractometer is widely used in many fields such as physics, chemistry, chemical industry, weaving, metallurgy, life science, medical science, geoscience, material science, engineering and agricultural as the instrument of structure of matter analysis.Conventional X-ray diffractometer comprises that the rope between X source, sample, X source and the sample draws the rope between slit, detector, sample and the detector to draw slit, high-voltage power supply, amplifier, pulse analyzer, scaler and computing machine etc., and the one group of slit that respectively adds at X-ray light source one end and detector one end guarantees the depth of parallelism of X-ray on the one dimension direction.The incident X-ray and the diffraction X-ray utilization factor of this X-ray diffractometer are lower.

The purpose of this utility model is to provide a kind of utilization factor that can improve incident X-ray and diffraction X-ray, reduces spuious X-ray background, improves angular resolution, and highly sensitive X-ray diffractometer.

The purpose of this utility model can realize by following measure: this instrument comprises X source, sample, detector, high-voltage power supply, amplifier, pulse analyzer, scaler, counting rate meter, computing machine, X source control system and gyrator etc., and its characteristics are: respectively be added with a whole quasi parallel beams x-ray lens between X source and the sample and between sample and the detector.X ray from the X source emission, collect and be converted into quasi-parallel X-ray bundle by first whole quasi parallel beams x-ray lens, get on the sample then, produce the diffraction X-ray, this diffraction X-ray is collected and converge in the detector by second whole quasi parallel beams x-ray lens (being the inverted versions of first whole quasi parallel beams x-ray lens) again, the signal that detector produces is sent into computing machine and is handled through amplifier, pulse analyzer.

Whole accurate flat bundle x-ray lens is a single and fritted glass solid that do not have support component, in a plurality of X-ray guide holes that penetrate into the other end from described one end of solid are arranged, and this glass solid is formed by above-mentioned X-ray guide hole wall self fusion, profile bus and the combination that is approximately space quafric curve section and straight-line segment of the axis of the bus of X-ray guide hole profile and X-ray guide hole along its length of these lens, the radial variations of the bus of lens and X-ray guide hole bus is symmetrical for imaginary lens X-ray axis.X-ray can be by total reflection on the inwall of described a plurality of X-ray guide holes and from an end of described glass solid propagate to the other end, utilize the difformity and the size of described glass solid and a plurality of X-ray guide holes to change the direction that X-ray is propagated, in very wide wavelength coverage, regulate and control X-ray, X-ray is changed into the quasi parallel beams X-ray, form whole quasi parallel beams x-ray lens.

The utility model compared with prior art has following advantage:

1. owing to used whole quasi parallel beams x-ray lens at X source one end, these lens change into the quasi parallel beams X-ray with the X-ray of dispersing in the big solid angle scope, strengthened the incident intensity of diffractometer greatly, improved the service efficiency of X source, thereby diffraction intensity also greatly improves.

2. because the X-ray that whole quasi parallel beams x-ray lens penetrates is a bidimensional quasi-parallel X-ray bundle, do not draw slit only on the one dimension direction, to guarantee the depth of parallelism of X-ray and do not resemble rope, the diffusing angle of the X-ray that therefore this lens penetrate reaches below 0.1 °, improved the depth of parallelism of X-ray bundle, realized the total focus of X-ray, improve the angular resolution of diffractometer, improved the spectrum shape of diffracted ray, improved measuring accuracy.

3. owing to be added with a whole quasi parallel beams x-ray lens at detector one end, these lens are only collected the X-ray of assigned direction, thereby reduce the spuious X-ray background of sample object generation on every side, have therefore improved the signal background ratio, measure sensitivity thereby improve, improved the quality of diffraction spectra.

Below in conjunction with drawings and Examples the utility model is further specified.

Fig. 1 is a theory diagram of the present utility model;

Fig. 2 is the structural representation of whole accurate flat bundle x-ray lens in the utility model;

Fig. 3 is the axial section synoptic diagram of whole quasi parallel beams x-ray lens in the utility model;

Fig. 4 is a C portion partial sectional view among Fig. 3;

Fig. 5 is an A-A section regular hexagonal section synoptic diagram among Fig. 2;

Fig. 6 is an A-A section round section synoptic diagram among Fig. 2;

Fig. 7 is an A-A section square-section synoptic diagram among Fig. 2;

Referring to accompanying drawing 1, the utility model is by X source 1, whole quasi parallel beams x-ray lens 2 and 2 ', sample 13, detector 7, prime amplifier 15, main amplifier 16, pulse analyzer 21, scaler 22, counting rate meter 18, gyrator 23, X source control system 24, the high-voltage power supply 25 of X source, computing machine 26, power supply 20, high-voltage power supply 19 compositions such as grade of detector, from the X ray 5 of X source 1 emission is that whole quasi parallel beams x-ray lens 2 is collected, forming quasi-parallel light 6 gets on the sample 13, the quasi-parallel diffraction light 27 that sample 13 produces inject whole quasi parallel beams x-ray lens 2 ', be converged to the X-ray beam in detector 7, the signal of detector 7 outputs is through prime amplifier 15, main amplifier 16 two-stages are sent into pulse analyzer 21 after amplifying, the signal one tunnel of pulse analyzer 21 outputs is sent into scaler 22, be 18 records of counting rate meter, another road is sent into computing machine 26 and is handled, gyrator 23, X source control system 24 is controlled by computing machine 26.

Accompanying drawing 2,3,4, provided the structural principle of whole quasi parallel beams x-ray lens, the size of this whole x-ray lens entrance point is less than the size of endpiece, lens 2 profile 40 and the combination that is approximately quafric curve section and straight-line segment of the axis 41 of the bus 42 of X-ray guide hole 9 profiles and X-ray guide hole along its length, the radial variations of the bus 40 of the profile of lens 2 and X-ray guide hole profile bus 42 is symmetrical for imaginary lens X-ray axis 3, and the imaginary X-ray axis of the bus 40 of exit portion lens-shape and lens 3 is parallel.Accompanying drawing 5,6,7 has provided three kinds of forms of the A-A section of lens 2, i.e. regular hexagon, circle and rectangle.In above each figure, 1 is the X-ray guide hole for the X-ray, 9 from the lens outgoing for the X-ray that incides lens, 6 for imaginary lens X-ray axis, 5 for whole accurate flat bundle x-ray lens, 3 for X source, 2, in order to improve lens inner structure defective, improve the optical property of lens, increase physical strength, lens 2 and 2 ' the outside add a layer entity driving fit bound edge 8.X source 1 is a focal distance f to the distance of lens 2 entrance points ₁10mm-200mm, length of lens 1 is 10mm-250mm, lens entrance point dimension D in is that (for round lens is diameter dimension to 1mm-35mm, for regular polygon is the opposite side size, for rectangle is the opposite side size), lens endpiece dimension D out is 2mm-50mm, and the lens entrance point is 10mm-150mm to the minor increment at lens full-size place, and dutycycle is greater than 10%.

Homogeneity for the X-ray visual field of improving the outgoing of whole quasi parallel beams x-ray lens, the size of X-ray guide hole 9 with the perpendicular cross section of lens X-ray axis 3 on the different parts place different sizes is arranged, for example the size near the X-ray guide hole 9 of X-ray axis 3 is big, and is little away from the size of the X-ray guide hole 9 of X-ray axis 3; And lens entrance point X-ray guide hole has different focal lengths, and for example: X source is positioned on the focus of edge guide hole, and not on the focus of center section X-ray guide hole.

Provide the example of a whole quasi parallel beams x-ray lens below, these lens are formed by once-combined drawing, have 5677 X-ray guide holes, these lens profile is along its length combined by straight-line segment, rotary paraboloid line segment, circular arc line segment and straight-line segment, length of lens 1 is 44.5mm, and the lens cross section is a regular hexagon, and the porch is to length of side Din=3.2mm, the exit is to length of side Dout=4.2mm, focal distance f ₁=124mm, X-ray collection angle ω=23mRAD.Utilize an isotropic diameter to send the X-ray of 7.31keV for the some bundle spot X source of 0.2mm, record transfer efficiency η=26.2% of lens, the maximum angle of divergence θ of the quasi parallel beams max=0.5mRAD of lens output, 100mm place, lens exit is 4.3mm according to wild diameter.(maximum angular of above-mentioned quasi parallel beams lens is loose θ max for shining the maximum subtended angle of outgoing quasi-parallel X-ray bundle in wild interior each passage, and the wild diameter of the photograph of quasi parallel beams lens is for exporting the X-ray bundle exports X-ray bundle spot on the given distance cross section vertical with the lens light axis at the distance lens size after the lens transmission.)

Claims

1. an X-ray diffractometer comprises X source, sample, detector, high-voltage power supply, amplifier, pulse analyzer, scaler, counting rate meter, computing machine, X source control system and gyrator etc., it is characterized in that: the same whole quasi parallel beams x-ray lens that respectively is added with that reaches sample and detector between X source and sample.

2. X-ray diffractometer according to claim 1, it is characterized in that: whole accurate flat bundle x-ray lens is a fritted glass solid single, that do not have support component, in a plurality of X-ray guide holes that penetrate into the other end from described one end of solid are arranged, and this glass solid is formed by above-mentioned X-ray guide hole wall self fusion, profile bus and the combination that is approximately space quafric curve section and straight-line segment of the axis of the bus of X-ray guide hole profile and X-ray guide hole along its length of these lens, the bus of lens and X-ray guide hole bus radially to become for imaginary lens X-ray axis be symmetrical.

3. X-ray diffractometer according to claim 2 is characterized in that: the size of lens entrance point is less than the size of endpiece, the imaginary X-ray parallel axes of exit portion lens bus and lens; Or the size of the endpiece of lens is greater than the size of entrance point, the imaginary X-ray parallel axes of inlet part lens bus and lens.

4. X-ray diffractometer according to claim 3, it is characterized in that: the entrance point cross section of said lens and X-ray guide hole with said lens optical axis vertical direction on the cross section be regular polygon or circle or rectangle, the endpiece cross section is identical with the entrance point cross sectional shape.

5. X-ray diffractometer according to claim 3 is characterized in that: there is different sizes at the different parts place on the perpendicular cross section of above-mentioned X-ray guide hole size and lens X-ray axis.

6. X-ray diffractometer according to claim 3 is characterized in that: each X-ray guide hole of said lens has different focal lengths.

7. X-ray diffractometer according to claim 3 is characterized in that: said lens has entity driving fit bound edge.

8. according to the described X-ray diffractometer of claim 3, it is characterized in that: X source is 10mm-200mm to the distance of lens entrance point, the lens entrance point is 10mm-150mm to the minor increment at lens full-size place, length of lens is 10mm-250mm, the lens inlet end is of a size of 1mm-35mm, the lens endpiece is of a size of 2mm-50mm, and dutycycle is greater than 10%.