CN219577339U - Static eliminating device and camera equipment production line - Google Patents

Abstract

The utility model discloses a static electricity eliminating device and a production line of camera equipment, wherein the static electricity eliminating device comprises a platform, an ion wind generating component and a detecting component, and the platform is used for placing products; the ion wind generating component is provided with an air inlet, a discharge needle and an air outlet, the air inlet is communicated with the air outlet, the discharge needle is used for ionizing air from the air inlet and forming ion wind, and the air outlet is used for guiding the ion wind to the platform; the detection component comprises a collecting pipe and a detector which are connected with each other, the collecting pipe is arranged above the air outlet, and the detector is used for detecting ion wind in the collecting pipe. The utility model can effectively monitor whether the ion wind blown out by the ion wind generating component is polluted by particles, reduces the possibility that the ion wind polluted by the particles is blown to the product to influence the quality of the product, not only can improve the production yield and the automatic production efficiency, but also can reduce the economic loss caused by the damage of the product.

Description

Static eliminating device and camera equipment production line

Technical Field

The utility model relates to the technical field of particle detection, in particular to a static electricity eliminating device and an imaging equipment production line.

Background

With the rapid development of the chip industry, the demand for the capacity of chips in the market is increasing, wherein the demand for high yield is increasing, and the demand for high quality is also increasing. In the prior art, the chip is often required to be subjected to static electricity elimination through ion wind in the processing process. However, the air duct of the ion wind is easily oxidized and generates contaminating particles after a long period of use. In addition, incomplete cleaning of the interior of the ion wind generating assembly can also result in particle contamination, thereby causing the ion wind to also carry particles. When static electricity is eliminated, the ion wind carrying particles is blown to the chip to enable the chip to be attached with particles directly, so that the production quality of the chip is affected, and even the chip is damaged.

Disclosure of Invention

The present utility model aims to solve at least one of the technical problems existing in the prior art. Therefore, the utility model provides the static electricity eliminating device capable of monitoring whether particle pollution occurs to the ion wind and the production line of the camera equipment.

According to a first aspect of the present utility model, there is provided an electrostatic discharge device comprising a platform for placing a product, an ion wind generating assembly and a detection assembly; the ion wind generation assembly is provided with an air inlet, a discharge needle and an air outlet, the air inlet is communicated with the air outlet, the discharge needle is used for ionizing air from the air inlet and forming ion wind, and the air outlet is used for guiding the ion wind to the platform; the detection assembly comprises a collecting pipe and a detector which are connected with each other, the collecting pipe is arranged above the air outlet, and the detector is used for detecting ion wind in the collecting pipe.

The static electricity eliminating device provided by the embodiment of the utility model has at least the following beneficial effects:

according to the embodiment of the utility model, the detection assembly is arranged, the collecting pipe is arranged above the air outlet of the ion wind generation assembly, the ion wind blown out from the air outlet is collected, and the collected ion wind is detected through the detector, so that whether particle pollution occurs to the ion wind blown out from the ion wind generation assembly or not can be effectively monitored, the possibility that the product quality is influenced due to the fact that the ion wind polluted by the particles is blown to the product is reduced, the production yield and the automatic production efficiency can be improved, and the economic loss caused by product damage can be reduced.

According to some embodiments of the utility model, the ion wind generating component is arranged above the platform, the ion wind generating component comprises a body and an air outlet pipe which are connected with each other, the discharge needle is connected with the body, the air inlet is arranged on the body, the air outlet is arranged on the air outlet pipe, and the air outlet pipe is bent towards the platform so that the air outlet faces towards the platform.

According to some embodiments of the utility model, the static eliminator comprises a base plate extending in a height direction of the platform, the detector assembly comprises a fixing member, the detector is connected to the fixing member, and one end of the base plate is connected to the body, and the other end of the base plate is connected to the fixing member.

According to some embodiments of the utility model, one end of the collecting pipe is connected to the lower end face of the detector, the other end extends towards the platform, and the collecting pipe and the air outlet are arranged at intervals in the horizontal direction.

According to some embodiments of the utility model, the ion wind generating assembly includes a filter element disposed between the body and the outlet duct.

According to some embodiments of the utility model, the static electricity eliminator comprises a vacuum pump connected to the ion wind generating assembly to draw air into the air inlet.

According to some embodiments of the utility model, the body is provided with a switch assembly for starting and stopping the ion wind generating assembly and a power supply assembly for supplying power to the ion wind generating assembly.

According to some embodiments of the utility model, the switch assembly includes a display light that is capable of being turned on when the ion wind generating assembly is activated.

According to some embodiments of the utility model, the detection assembly comprises a display for displaying the detection result, the display being provided on a peripheral wall of the detector.

According to a second aspect of the present utility model, there is provided an image pickup apparatus production line including the static electricity eliminating device disclosed in the first aspect of the present utility model.

Additional aspects and advantages of the utility model will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the utility model.

Drawings

The utility model is further described with reference to the accompanying drawings and examples, in which:

FIG. 1 is a schematic diagram of an embodiment of a static elimination apparatus according to the present utility model;

FIG. 2 is a front view of an embodiment of a static elimination apparatus according to the utility model;

FIG. 3 is a front view of an ion wind generating assembly in an embodiment of a static electricity eliminator according to the present utility model;

fig. 4 is a front view of a detection assembly in an embodiment of a static eliminator according to the present utility model.

Reference numerals:

a static electricity eliminating device 1000;

a platform 100; a product 110;

an ion wind generating assembly 200; an air inlet 210; a discharge needle 220; an air outlet 230; a body 240; an outlet tube 250;

a filter element 260;

a detection assembly 300; a collection tube 310; an opening 311; a detector 320; a fixing member 330; a display 340;

a substrate 400;

a switch assembly 500; a light 510 is displayed.

Detailed Description

Embodiments of the present utility model are described in detail below, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to like or similar elements or elements having like or similar functions throughout. The embodiments described below by referring to the drawings are illustrative only and are not to be construed as limiting the utility model.

In the description of the present utility model, it should be understood that references to orientation, such as the orientation or positional relationship indicated above, below, inside, outside, etc., are based on the orientation or positional relationship shown in the drawings, are merely for convenience in describing the present utility model and simplifying the description, and do not indicate or imply that the apparatus or element in question must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as limiting the present utility model.

In the description of the present utility model, the description of the first and second is only for the purpose of distinguishing technical features, and should not be construed as indicating or implying relative importance or implying the number of technical features indicated or the precedence of the technical features indicated.

In the description of the present utility model, unless explicitly defined otherwise, terms such as arrangement, installation, connection, etc. should be construed broadly and the specific meaning of the terms in the present utility model can be reasonably determined by a person skilled in the art in combination with the specific contents of the technical scheme.

In the prior art, when the chip is sucked from the wafer, the ion wind is required to remove static electricity so as to avoid the electrical damage of the chip caused by static electricity release. The ion wind pipe is easy to oxidize after long-term use, particle pollution can be generated due to incomplete cleaning of the inside of the ion wind generating device, if an air source is not clean, the ion wind can also carry particles, at the moment, the ion wind carrying the particles is blown towards the chip, so that particles are easy to be attached to the chip, the defect of pixels is poor, and the chip is damaged, so that economic loss is caused.

At present, an external particle detection device is usually used for detecting particles of ion wind in a chip, the method can only detect the particles before production begins, the particles cannot be effectively monitored in the production process, if pollution particles exist in the ion wind in the production process, the production can be continued, and the like, a large number of defects are caused when the ion wind is found later, and the external detection device is influenced by environment, equipment calibration state and the like, so that a certain influence on particle measurement results exists.

To this end, some embodiments of the present utility model provide an electrostatic discharge device 1000, particularly with reference to fig. 1-4 of the drawings.

Referring to fig. 1 and 2, in an embodiment of the present utility model, a static electricity eliminating apparatus 1000 includes a stage 100, an ion wind generating assembly 200, and a detecting assembly 300, the stage 100 being for placing a product 110; the ion wind generating assembly 200 is provided with an air inlet 210, a discharge needle 220 and an air outlet 230, wherein the air inlet 210 is communicated with the air outlet 230, the discharge needle 220 is used for ionizing air from the air inlet 210 and forming ion wind, and the air outlet 230 is used for guiding the ion wind to the platform 100; the detection assembly 300 includes a collection tube 310 and a detector 320 connected to each other, the collection tube 310 being disposed above the air outlet 230, the detector 320 being configured to detect the ion wind in the collection tube 310.

In the embodiment of the present utility model, the product 110 may be a chip, or may be other electronic components that need to be cleaned by ion wind. Referring to fig. 2, in this embodiment, the platform 100 may be horizontally disposed, the product 110 may be disposed on an upper end surface of the platform 100, and the ion wind generating assembly 200 and the detecting assembly 300 may be disposed above the platform 100, respectively, and keep a certain interval with the platform 100, so as to prevent the product 110 from being scratched due to direct contact with the product 110.

Referring to fig. 3, in the embodiment of the present utility model, the air inlet 210 and the air outlet 230 are communicated with each other, wherein the discharge needle 220 may be disposed therebetween. Based on this, the tip of the discharge needle 220 may ionize air from the air inlet 210 into a large number of positive and negative ions with a high voltage corona discharge. It will be appreciated that air may be introduced into the air inlet 210, and thus, the positively and negatively charged ion wind may be blown out of the air outlet 230 and toward the product 110 under the air flow, thereby achieving the static electricity removal.

Referring to fig. 1 and 2, in an embodiment of the present utility model, the detection assembly 300 may be disposed above the platform 100 and spaced apart from the ion wind generating assembly 200, wherein the collection pipe 310 is provided with an opening 311 toward one end of the platform 100. The ion wind blown out of the air outlet 230 is blown toward the product 110, and the ion wind can enter the collecting pipe 310 from the opening 311 through the rebound of the platform 100. The detector 320 may be in communication with the collection tube 310, and the detector 320 may detect the ion wind collected by the collection tube 310.

The detector 320 may be an apparatus for counting dust particles by using the scattering principle of light, in which the intensity of scattered light of particles increases with the increase of the surface area of the particles, a certain flow of dust-containing gas passes through a strong light beam to make the particles emit scattered light, the scattered light is projected onto a photomultiplier tube through a condenser lens, light pulses are converted into electric pulses, the number of particles is obtained from the number of pulses, and the particle diameter is obtained from the function relation between the intensity of scattered light of particles and the particle diameter. In this embodiment, the particle detection assembly 300 is installed near the air outlet 230, the detection assembly 300 monitors the ionized ion wind particle number in real time, and collects the ion wind particle information, and the detector 320 can calculate the particle size and the particle number. The embodiment can set a control range for the device in advance, and can give an alarm back to the device if the device exceeds the specification, so that a worker is prompted to stop checking, and the purpose of monitoring the particle and foreign particle number of the ion wind in real time is achieved.

According to the embodiment of the utility model, the detection assembly 300 is arranged, the collecting pipe 310 is arranged above the air outlet 230 of the ion air generation assembly 200, the ion air blown out from the air outlet 230 is collected, and the collected ion air is detected by the detector 320, so that whether particle pollution occurs to the ion air blown out from the ion air generation assembly 200 or not can be effectively monitored, the possibility that the quality of the product 110 is influenced due to the fact that the ion air polluted by the particles is blown to the product 110 is reduced, the production yield and the automatic production efficiency can be improved, and the economic loss caused by damage to the product 110 can be reduced.

Referring to fig. 1, in the embodiment of the present utility model, the ion wind generating assembly 200 is disposed above the platform 100, referring to fig. 3, the ion wind generating assembly 200 includes a body 240 and an outlet pipe 250 connected to each other, the discharge needle 220 is connected to the body 240, the air inlet 210 is disposed on the body 240, referring to fig. 2, the air outlet 230 is disposed on the outlet pipe 250, and the outlet pipe 250 is bent toward the platform 100 such that the air outlet 230 faces the platform 100.

Referring to fig. 2, in an embodiment of the present utility model, the ion wind generating assembly 200 may be horizontally disposed above the platform 100, wherein the ion wind generating assembly 200 includes a body 240 and an outlet duct 250 connected to each other, one end of the body 240 near the platform 100 may be connected to the outlet duct 250, one end facing away from the platform 100 may be provided with an air inlet 210, air may enter the body 240 from the air inlet 210, and the discharge needle 220 may ionize the air in the body 240. The ionized ion wind may flow to the air outlet 230 through the air outlet pipe 250 and be blown out toward the product 110 placed on the stage 100.

Referring to fig. 1 and 2, in an embodiment of the present utility model, the static electricity eliminating apparatus 1000 includes a base 400 extending in a height direction of the stage 100, the detecting assembly 300 includes a fixing member 330, the detector 320 is connected to the fixing member 330, and one end of the base 400 is connected to the body 240, and the other end is connected to the fixing member 330.

Referring to fig. 2, in an embodiment of the present utility model, a substrate 400 may be disposed above a platform 100, and a detection assembly 300 and an ion wind generation assembly 200 may be respectively fixed on the substrate 400, for example, the detection assembly 300 may be bolted to the substrate 400, and the ion wind generation assembly may be bolted to the substrate 400, thereby improving the stability of the detection assembly 300 and the ion wind generation assembly 200.

Referring to fig. 1 and 2, in the embodiment of the present utility model, a collecting pipe 310 is connected to a lower end surface of a detector 320 at one end, and extends toward a platform 100 at the other end, and the collecting pipe 310 is spaced apart from an air outlet 230 in a horizontal direction.

Referring to fig. 1, in the embodiment of the present utility model, when the collecting pipe 310 is disposed at a horizontal interval from the air outlet 230, a certain horizontal distance may be maintained between the outer peripheral wall of the collecting pipe 310 and the outer wall of the air outlet 230, and a person skilled in the art may set the horizontal distance between the two according to the actual situation, which is not limited in this embodiment. For example, the collecting pipe 310 may be disposed at any position of a circular area centered on the air outlet 230, and the specific disposition position may be determined according to the shape and placement position of the product 110, which is not limited in this embodiment.

Referring to fig. 4, in an embodiment of the present utility model, the collection tube 310 may have one end connected to the detector 320 and the other end extending downward, and the opening 311 may be provided at an end of the collection tube 310 near the platform 100.

Referring to fig. 2, in an embodiment of the present utility model, the ion wind generating assembly 200 includes a filter 260, and the filter 260 is disposed between the body 240 and the outlet duct 250.

Referring to fig. 3, it can be understood that in the embodiment of the present utility model, the air from the air inlet 210 is ionized by the discharge needle 220 to form an ion wind, however, the air entering the body 240 from the air inlet 210 may be mixed with impurity particles, and based on this, the filter element 260 is disposed between the body 240 and the air outlet pipe 250, and the filter element 260 can filter out the impurity particles in the ion wind, thereby purifying the ion wind, improving the dryness of the ion wind, and reducing the possibility of the product 110 being polluted by the ion wind particles.

In an embodiment of the present utility model, the static electricity eliminator 1000 includes a vacuum pump connected to the ion wind generating assembly 200 to draw air into the air inlet 210.

In the embodiment of the present utility model, the ion wind generating assembly 200 may be connected to a vacuum pump, and the vacuum pump may generate negative pressure in the body 240, so that external air may continuously enter the body 240 from the air inlet 210, and further, the air outlet 230 may continuously blow out ion wind, thereby ensuring that the ion wind generating assembly 200 may continuously blow out ion wind to the product 110, and the product 110 may be sufficiently cleaned by static electricity.

Referring to fig. 2, in an embodiment of the present utility model, the body 240 is provided with a switching assembly 500 for starting and stopping the ion wind generating assembly 200 and a power supply assembly for supplying power to the ion wind generating assembly 200.

In the embodiment of the present utility model, the switch assembly 500 may include a button for starting and stopping the ion wind generating assembly 200 to blow out the ion wind, the power assembly may be directly connected to the body 240, and the power assembly may be a storage battery, a dry battery, or the like, which may be selected and set by a person skilled in the art according to the actual situation, and the embodiment is not limited thereto.

In an embodiment of the present utility model, the switch assembly 500 includes a display light 510, the display light 510 being capable of being turned on when the ion wind generating assembly 200 is activated. For example, when the switch assembly 500 activates the ion wind generating assembly 200, the power assembly is in communication, and the display lamp 510 may be activated to show that the ion wind generating assembly 200 is in an operating state.

Referring to fig. 4, in an embodiment of the present utility model, the detecting assembly 300 includes a display 340 for displaying the detection result, and the display 340 is provided on the peripheral wall of the detector 320.

In the embodiment of the present utility model, the detection result may be the number of particles in the ion wind, or may be the particle size of the particles, which is not limited in this embodiment. The worker can know whether the particle contamination is occurring in the current ion wind according to the detection result displayed on the display 340.

An embodiment of the present utility model also proposes an image pickup apparatus production line including the static electricity eliminating device 1000 of the above embodiment.

For example, the image capturing apparatus production line may be applied to the production of components in the mobile phone image capturing module, or may be a camera component, which is not limited in this embodiment.

The embodiments of the present utility model have been described in detail with reference to the accompanying drawings, and finally, it should be described that: the above embodiments are only for illustrating the technical solution of the present utility model, and not for limiting the same; although the utility model has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some or all of the technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit of the corresponding technical solutions from the scope of the technical solutions of the embodiments of the present utility model.

Claims (10)

1. An electrostatic charge eliminating device, comprising:

the platform is used for placing products;

the ion wind generation assembly is provided with an air inlet, a discharge needle and an air outlet, the air inlet is communicated with the air outlet, the discharge needle is used for ionizing air from the air inlet and forming ion wind, and the air outlet is used for guiding the ion wind to the platform;

the detection assembly comprises a collecting pipe and a detector which are connected with each other, wherein the collecting pipe is arranged above the air outlet, and the detector is used for detecting ion wind in the collecting pipe.

2. The static elimination device according to claim 1 wherein said ion wind generating assembly is disposed above said platform, said ion wind generating assembly comprises a body and an air outlet tube connected to each other, said discharge needle is connected to said body, said air inlet is disposed on said body, said air outlet is disposed on said air outlet tube, and said air outlet tube is curved toward said platform so that said air outlet is oriented toward said platform.

3. The static elimination device according to claim 2, wherein said static elimination device comprises a base plate extending in a height direction of said platform, said detection assembly comprises a fixing member, said detector is connected to said fixing member, and one end of said base plate is connected to said body, and the other end is connected to said fixing member.

4. The static eliminator according to claim 1, wherein the collector tube has one end connected to a lower end surface of the detector and the other end extending toward the stage, the collector tube being disposed at a horizontal interval from the air outlet.

5. The static elimination device according to claim 2, wherein said ion wind generating assembly includes a filter element, said filter element being disposed between said body and said outlet duct.

6. The static elimination device according to claim 2, wherein said static elimination device comprises a vacuum pump connected to said ion wind generating assembly to draw air to said air intake.

7. The static elimination device according to claim 2, wherein said body is provided with a switching assembly for starting and stopping said ion wind generating assembly and a power supply assembly for supplying power to said ion wind generating assembly.

8. The static elimination device according to claim 7, wherein said switch assembly includes a display light capable of being turned on when said ion wind generating assembly is activated.

9. The static elimination device according to claim 1, wherein said detection assembly includes a display for displaying a detection result, said display being provided on a peripheral wall of said detector.

10. An image pickup apparatus production line, characterized by comprising the static electricity eliminating device according to any one of claims 1 to 9.