CN219328981U

CN219328981U - Tensioning device for double-sided reel-to-reel laser direct writing exposure machine

Info

Publication number: CN219328981U
Application number: CN202320017952.9U
Authority: CN
Inventors: 叶飞
Original assignee: Hefei Xinqi Microelectronics Equipment Co ltd
Current assignee: Hefei Xinqi Microelectronics Equipment Co ltd
Priority date: 2023-01-04
Filing date: 2023-01-04
Publication date: 2023-07-11
Anticipated expiration: 2033-01-04

Abstract

The utility model provides a tensioning device for a double-sided reel-to-reel laser direct writing exposure machine, which comprises a frame with a horizontal guide rail, wherein the middle part of the frame is provided with a supporting mechanism for supporting the suspended middle part of a base material, and the supporting mechanism can move along the horizontal guide rail; the end clamping mechanisms are arranged at two ends of the machine frame in the length direction and respectively clamp the discharging end and the receiving end of the base material; and the tensioning mechanism is arranged on the frame at the inner side of the end clamping mechanism and used for compressing the base material. According to the utility model, the supporting mechanism is arranged at the suspended middle part of the substrate, and the end clamping mechanisms and the tensioning mechanisms are arranged at the two ends of the substrate, so that the substrate is always clamped in the exposure process, and the substrate is always attached to the surface of the supporting mechanism, so that vibration and displacement of the coiled substrate due to the movement of the precision motion platform in the exposure process are avoided, and the exposure precision is affected.

Description

Tensioning device for double-sided reel-to-reel laser direct writing exposure machine

Technical Field

The utility model relates to the technical field of laser direct writing exposure, in particular to a tensioning device for a double-sided reel-to-reel laser direct writing exposure machine.

Background

The traditional double-sided exposure machine middle part is exposure equipment from top to bottom, and both sides are the receive and release mechanism that is used for the coiled material of substrate to carry, can take up the coiled material of substrate and straighten to reach unsettled state, avoided using dust and the dirty that brings when glass supports. However, the substrate is a soft material, and if the middle suspension part is too long, sagging deformation is generated at the suspension center position under the action of self gravity, thereby affecting the exposure precision. In addition, vibration is inevitably generated in the moving process of the platform, the substrate coil material does not adopt any fixing measure in the exposing process, and vibration caused by the moving of the platform and tiny vibration of the substrate can influence the exposing precision.

Disclosure of Invention

The utility model provides a tensioning device capable of reducing vibration and displacement of a coiled substrate in an exposure process.

In order to solve the technical problems, the utility model adopts the following technical scheme:

a tensioning device for a double-sided roll-to-roll laser direct write exposure machine, comprising:

the device comprises a frame with a horizontal guide rail, wherein a supporting mechanism for supporting the suspended middle part of a substrate is arranged in the middle of the frame, and the supporting mechanism can move along the horizontal guide rail;

the end clamping mechanisms are arranged at two ends of the machine frame in the length direction and respectively clamp the discharging end and the receiving end of the base material; and

and the tensioning mechanism is arranged on the frame at the inner side of the end clamping mechanism and used for compressing the base material.

Further, the support mechanism includes:

a plurality of support rods which are horizontally arranged are fixed between the pair of side beams, and one end of each side beam is provided with a mounting cross beam; and

and the telescopic end of the driving mechanism is fixedly connected with the mounting cross beam, and the driving mechanism can drive the side beam to move along the horizontal guide rail.

Further, the device also comprises an electric sliding table arranged at two ends of the frame, and the electric sliding table can drive the supporting mechanism to move in the vertical direction.

According to the technical scheme, the supporting mechanism is arranged at the suspended middle part of the substrate, and the end clamping mechanisms and the tensioning mechanisms are arranged at the two ends of the substrate, so that the substrate is always clamped in the exposure process, the substrate is always attached to the surface of the supporting mechanism, vibration and displacement of the coiled substrate due to the movement of the precise movement platform in the exposure process are avoided, and exposure precision is further affected.

Drawings

FIG. 1 is a schematic view of a tensioning device according to the present utility model;

fig. 2 is a schematic structural view of an end clamping mechanism according to the present utility model.

Detailed Description

A preferred embodiment of the present utility model will be described in detail with reference to the accompanying drawings.

The tensioning device is used for the double-sided roll-to-roll laser direct writing exposure machine to straighten and clamp the base material, so that the base material is prevented from moving slightly in the exposure process. The tensioning device supports the middle suspension part of the base material, clamps the end part of the base material and presses down and straightens the end part of the base material, so that the tensioning effect during exposure is achieved.

As shown in fig. 1, the tensioning device 10 includes a frame 11, a supporting mechanism 20 is disposed in the middle of the frame, and end clamping mechanisms 30 and tensioning mechanisms 40 are disposed at two ends of the frame 11.

The supporting mechanism 20 comprises a pair of side beams 21 arranged along the length direction of the substrate, a plurality of supporting rods 22 horizontally arranged are fixed between the pair of side beams, and the supporting rods are provided with contact surfaces contacting with the bottom of the substrate and can support the suspended middle part of the substrate.

In order not to block the lower light path, the plurality of support rods 22 need to move horizontally in the exposure process, so that the upper and lower exposure mechanisms can expose complete patterns, specifically, the support rods 22 move downwards firstly and then move horizontally, and then move upwards for homing after moving in place, so that the support rods 22 need to move vertically and horizontally, and the utility model respectively completes the movement in the horizontal direction and the vertical direction through the driving mechanism 50 and the electric sliding table 60 arranged on the frame 11.

In order to realize the movement of the support bar 22 in the horizontal direction, it is necessary to provide the horizontal guide rail 12 on the inner side of the frame 11 in the longitudinal direction of the substrate, and the pair of side rails 21 of the support mechanism 20 can move along the horizontal guide rail 12. One end of the side beam 21 is further provided with an installation cross beam 23, the telescopic end of the driving mechanism 50 is fixedly connected with the installation cross beam 23, and the driving mechanism 50 can drive the side beam 21 to move along the horizontal guide rail 12. The driving mechanism 50 can be driven by an air cylinder or a motor (not limited thereto), and in this embodiment, the driving mechanism is driven by a motor, so that the moving process is smooth and stable, and no excessive vibration and impact are generated, thereby avoiding the influence on the stability of the substrate.

As shown in fig. 2, the end clamping mechanism 30 includes an upper roller 31 and a lower roller 32 which are arranged up and down, and clamping cylinders for driving the upper roller and the lower roller to clamp, the discharging end and the receiving end of the substrate are clamped by combining the upper roller and the lower roller, the clamping cylinders specifically used in the utility model include a first clamping cylinder 33 and a second clamping cylinder 34 for driving the upper roller to move, and a third clamping cylinder 35 and a fourth clamping cylinder 36 for driving the lower roller to move, wherein both ends of the upper roller and the lower roller are respectively provided with a first mounting plate 37 and a second mounting plate 38, the first clamping cylinder 33 and the third clamping cylinder 35 are respectively arranged at both sides of the first mounting plate 37, and the second clamping cylinder 34 and the fourth clamping cylinder 36 are respectively arranged at both sides of the second mounting plate 38.

In order to enable the substrate to be always attached to the plurality of support rods 22 during exposure operation, the utility model is provided with a tensioning mechanism 40 in a non-exposure area, wherein the tensioning mechanism comprises tensioning wheels 41 which are arranged perpendicular to the length direction of the substrate, and fifth clamping air cylinders 42 which are arranged at two ends of the tensioning wheels and are used for driving the tensioning wheels to press down, and the fifth clamping air cylinders 42 drive the tensioning wheels 41 to press down the substrate, so that the substrate and the support surfaces of the plurality of support rods 22 are positioned on the same horizontal plane, and the flatness of the substrate during exposure is ensured. In this embodiment, two tensioning mechanisms 40 are respectively installed on the inner frame of the end clamping mechanism 30.

The tensioning device 10 further includes a lift assembly 70 for adjusting the height of the plurality of support rods 22 to bring the substrate height to the focal plane of the upper and lower exposure assemblies.

The above-described embodiments are merely illustrative of the preferred embodiments of the present utility model and are not intended to limit the scope of the present utility model, and various modifications and improvements made by those skilled in the art to the technical solution of the present utility model should fall within the scope of protection defined by the claims of the present utility model without departing from the spirit of the present utility model.

Claims

1. A tensioning device for a double-sided roll-to-roll laser direct write exposure machine, comprising:

2. The tensioning device according to claim 1, wherein the end clamping mechanism comprises an upper roller and a lower roller which are arranged up and down, and a clamping cylinder for driving the upper roller and the lower roller to clamp.

3. The tensioning device according to claim 2, wherein the clamping cylinder comprises a first clamping cylinder and a second clamping cylinder for driving the upper roller to move, and a third clamping cylinder and a fourth clamping cylinder for driving the lower roller to move, wherein the two ends of the upper roller and the lower roller are respectively provided with a first mounting plate and a second mounting plate, the first clamping cylinder and the third clamping cylinder are respectively arranged on two sides of the first mounting plate, and the second clamping cylinder and the fourth clamping cylinder are respectively arranged on two sides of the second mounting plate.

4. The tensioning device of claim 1, wherein the support mechanism comprises:

5. The tensioner as in claim 1, further comprising an electric slipway disposed at both ends of the housing, the electric slipway being capable of moving the support mechanism in a vertical direction.

6. The tensioning device according to claim 1, wherein the tensioning mechanism comprises a tensioning wheel arranged perpendicular to the length direction of the base material, and fifth clamping cylinders arranged at two ends of the tensioning wheel and used for driving the tensioning wheel to press down.