CN218412794U - Wafer test probe station test box - Google Patents
Wafer test probe station test box Download PDFInfo
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- CN218412794U CN218412794U CN202222799455.7U CN202222799455U CN218412794U CN 218412794 U CN218412794 U CN 218412794U CN 202222799455 U CN202222799455 U CN 202222799455U CN 218412794 U CN218412794 U CN 218412794U
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Abstract
The utility model relates to a wafer probe station technical field, and in particular to wafer test probe station test box, including the main tank body, the side-mounting of main tank body has seted up the vice box of feed inlet. The test box of the wafer test probe station can be divided into two relatively independent vacuum cavities through the auxiliary box body and the closed assembly, when a wafer is detected in the main box body, the closed plate on the side face of the auxiliary box body can be opened, the linear guide rail pair matched with the rotating mechanism and the wafer bearing plate can replace the wafer which is detected completely, then the wafer to be detected is placed on the vacant wafer bearing plate, the closed plate is closed, the auxiliary box body is vacuumized, the closed assembly can be opened under the action of the linear guide rail pair matched with the pressure transmission mechanism, the wafer bearing plate is conveyed into the main box body, the positions of the wafer to be detected and the position of the wafer which is detected completely are exchanged, the wafer test probe station can continuously work, and therefore the detection interval of the wafer is shortened.
Description
Technical Field
The utility model relates to a wafer probe station field, concretely relates to wafer test probe station test box.
Background
The main equipment for wafer probe test includes a probe test board, a probe tester and a probe test card, all of which are used by an application test program of a test system to perform test, and a test box is an external component of the probe test board and mainly functions to provide protection for internal mechanisms of the test board and the probe tester.
The conventional universal probe test board cannot provide a vacuum environment meeting test requirements for wafers, in order to meet the environmental requirements of vacuum test, part of manufacturers of the probe test board design the vacuum test board, namely, a sealed high-strength shell is arranged outside the conventional probe test board, during test, only a pump is needed to pump out air in the shell, so that the interior of the shell is in the vacuum environment, and the wafers can be tested.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a can shorten adjacent vacuum test box who waits to detect wafer detection interval.
The utility model provides a technical scheme that above-mentioned problem adopted is: the utility model provides a crystal element test probe station test box, includes the main tank body, the side-mounting of main tank body has seted up the auxiliary tank body of feed inlet, the feed inlet department of auxiliary tank body is provided with closed plate, the top of auxiliary tank body is provided with the driving piece that is used for driving closed plate and removes, the intercommunication groove has been seted up to one side that the main tank body is connected with the auxiliary tank body, the side of main tank body is provided with the airtight subassembly that is used for cutting off the intercommunication groove, the inside of auxiliary tank body is provided with linear guide pair and is used for driving airtight subassembly pivoted pressure transmission assembly, airtight subassembly is including installing the fixed axle in the main tank body side, the fixed axle is connected with the closing plate through the elastic component, the closing plate is connected with pressure transmission assembly.
As a crystal element test probe station test box preferred scheme, wherein: the linear guide rail pair comprises a guide rail arranged on the inner bottom wall of the auxiliary box body and a driving motor connected with the input end of a guide rail driving shaft, a sliding block connected in a sliding mode is arranged on the guide rail, a pressure rod arranged on the side face of the sliding block and an outer tube arranged inside the auxiliary box body are wrapped by a pressure transmission assembly, a push rod is arranged at one end, away from the pressure rod, of the outer tube, a guide piece is arranged on the side face of the sealing plate, a slide way is arranged on the side face of the guide piece, and a slide rod connected with the slide way is arranged at one end, away from the outer tube, of the push rod.
As a preferred scheme of a wafer test probe station test box, wherein: the top of the sliding block passes through a slewing mechanism, and the output end of the slewing mechanism is connected with a wafer bearing plate through a lifting assembly.
As a crystal element test probe station test box preferred scheme, wherein: and the top of the wafer bearing plate is provided with an embedded groove matched with the size of the wafer.
As a crystal element test probe station test box preferred scheme, wherein: closed plate is including the closing plate that is used for sealing the auxiliary box feed inlet and set up in the locating part that the auxiliary box inner wall is used for restricting the closing plate moving direction, the expansion end of driving piece runs through the top of auxiliary box and extends to the inside of auxiliary box, and the driving piece expansion end is located the inside one end of auxiliary box and is connected with the closing plate.
Compared with the prior art, the utility model, have following advantage and effect:
the test box of the wafer test probe station can be divided into two relatively independent vacuum cavities through the auxiliary box body and the closed assembly, when a wafer is detected in the main box body, the closed plate on the side face of the auxiliary box body can be opened, the linear guide rail pair matched with the rotating mechanism and the wafer bearing plate can replace the wafer which is detected completely, then the wafer to be detected is placed on the vacant wafer bearing plate, the closed plate is closed, the auxiliary box body is vacuumized, the closed assembly can be opened under the action of the linear guide rail pair matched with the pressure transmission mechanism, the wafer bearing plate is conveyed into the main box body, the positions of the wafer to be detected and the position of the wafer which is detected completely are exchanged, the wafer test probe station can continuously work, and therefore the detection interval of the wafer is shortened.
Drawings
Fig. 1 is a schematic structural diagram of an embodiment of the present invention.
Fig. 2 is a front sectional view of an embodiment of the present invention.
Fig. 3 is an enlarged view of a portion a in fig. 2 according to the present invention.
Fig. 4 is an enlarged view of the present invention at B in fig. 2.
Fig. 5 is a first cross-sectional view of the auxiliary box body according to the embodiment of the present invention.
Fig. 6 is a second sectional view of the auxiliary box according to the embodiment of the present invention.
Fig. 7 is a top sectional view of an embodiment of the present invention.
Wherein: 1. a main box body; 2. an auxiliary box body; 3. a valve body; 4. a communicating groove; 5. a sealing assembly; 501. a fixed shaft; 502. a sealing plate; 6. a drive member; 7. closing the panel; 701. a closing plate; 702. a limiting member; 8. a linear guide rail pair; 801. a guide rail; 802. a slider; 803. a drive motor; 9. a swing mechanism; 10. a lifting assembly; 11. a wafer carrier plate; 12. a pressure transmission assembly; 1201. an outer tube; 1202. a pressure lever; 1203. a push rod; 1204. a slide bar; 1205. a guide member.
Detailed Description
The present invention will be described in further detail by way of examples with reference to the accompanying drawings, which are illustrative of the present invention and are not intended to limit the present invention.
Referring to fig. 1-7, the embodiment provides a test box for a wafer test probe station, which includes a main box body 1, an auxiliary box body 2 provided with a feed inlet is installed on the side surface of the main box body 1, air inlet pipes and air exhaust pipes are arranged on the side surfaces of the main box body 1 and the auxiliary box body 2, valve bodies 3 are installed on the end surfaces of all the air inlet pipes and the air exhaust pipes, the valve bodies 3 include, but are not limited to, a vacuum ball valve and a vacuum butterfly valve, the valve bodies 3 on the end surfaces of the air exhaust pipes are all connected with a vacuum air exhaust pump through pipelines, a probe test board, a probe test machine, a probe test card, a mechanical arm and other parts arranged inside the main box body 1 are all drawn, and the mechanical arm is a double-station vacuum chuck at a material taking end.
A closing plate 7 is arranged at the feeding port of the auxiliary box body 2.
The closing plate 7 comprises a closing plate 701 for closing a feed inlet of the auxiliary box body 2 and two limiting pieces 702 arranged on the inner wall of the auxiliary box body 2 and used for limiting the moving direction of the closing plate 701, the two limiting pieces 702 are respectively positioned on two sides of the closing plate 701, and linear caulking grooves are formed in two side faces of a joint of the two side faces and the closing plate 701 so as to limit the moving direction of the closing plate 701 and enable the closing plate 701 to only do lifting movement.
The top of the secondary box 2 is provided with a drive 6 for driving the movement of a closure plate 7.
Wherein, driving piece 6 includes but not limited to telescopic cylinder, and driving piece 6 is installed in the top of auxiliary box 2, and the expansion end of driving piece 6 runs through the top of auxiliary box 2 and extends to the inside of auxiliary box 2, and the one end that driving piece 6 expansion end is located auxiliary box 2 inside is connected with closing plate 701 to the lift of control closing plate 701.
A communicating groove 4 is formed in one side, connected with the auxiliary box body 2, of the main box body 1, and a sealing assembly 5 for isolating the communicating groove 4 is arranged on the side face of the main box body 1.
The sealing assembly 5 includes a fixing shaft 501 installed on the side surface of the main box body 1, the fixing shaft 501 is connected with a sealing plate 502 through an elastic member, the elastic member includes but is not limited to a torsion spring, and the sealing plate 502 abuts against the side surface of the main box body 1 and the opposite side surfaces of the sealing plate 502 and the side surface of the main box body 1 under the action of the torsion spring.
The inside of the auxiliary box body 2 is provided with a linear guide rail pair 8 and a pressure transmission assembly 12 for driving the sealing assembly 5 to rotate.
The linear guide rail pair 8 comprises a guide rail 801 arranged on the inner bottom wall of the auxiliary box body 2 and a driving motor 803 connected with the driving shaft input end of the guide rail 801, a sliding block 802 connected in a sliding way is arranged on the guide rail 801, and the sliding block 802 can move along the axis of the guide rail 801 under the action of the driving motor 803.
The pressure transmission assembly 12 comprises a pressure rod 1202 arranged on the side surface of the sliding block 802 and an outer tube 1201 arranged inside the auxiliary box body 2, and a push rod 1203 is arranged at one end of the outer tube 1201 far away from the pressure rod 1202.
The diameter of the pressure lever 1202 is the same as that of the push rod 1203, the diameter of the pressure lever 1202 is the same as that of the inner diameter of the outer tube 1201, the pressure lever 1202 and the push rod 1203 cannot be separated from the outer tube 1201, the side surface of the pressure lever 1202 and the side surface of the push rod 1203 are tightly attached to the inner wall of the outer tube 1201, no ventilation gap exists between the side surfaces, and sealing rings can be arranged on the side surfaces of the pressure lever 1202 and the push rod 1203 to enhance the sealing performance between the side surfaces and the outer tube 1201.
The side of sealing plate 502 is provided with guide 1205, guide 1205 is L type spare, the slide has been seted up to the side of guide 1205, the one end that outer tube 1201 was kept away from to push rod 1203 is provided with the slide 1204 who is connected with the slide, slide 1204 and the outer articulated state of push rod 1203, slide 1204 residual push rod 1203 can only take place relative rotation, both can not separate, the one end that push rod 1203 was kept away from to slide 1204 is located the inside of slide, when push rod 1203 promoted slide 1204 and moves, the one end of slide 1204 can move in the slide, and then force guide 1205 to drive sealing plate 502 to remove, and the form of slide suits with the removal orbit of slide 1204 terminal surface.
The top of the sliding block 802 passes through a swing mechanism 9, the swing mechanism 9 is a small-sized swing table, the output end of the swing mechanism 9 is connected with a wafer bearing plate 11 through a lifting assembly 10, and the lifting assembly 10 includes but is not limited to a telescopic cylinder.
When the wafer test probe table provided with the test box is used, the closing plate 701 is driven to move upwards through the driving part 6, a feed inlet of the auxiliary box body 2 is opened, then the sliding block 802 is controlled to move towards one side far away from the main box body 1, the pressing rod 1202 is drawn out of the outer tube 1201 when the sliding block 802 moves, the push rod 1203 is passively pressed into the outer tube 1201 under the action of air pressure, the sealing plate 502 is tightly attached to the side surface of the main box body 1 under the action of the pressure transmission assembly 12, the communication groove 4 is closed by the auxiliary sealing plate 502, the main box body 1 and the auxiliary box body 2 are divided into two relatively independent cavities, then when the sliding block 802 moves to the farthest position, the wafer bearing plate 11 is driven to rotate through the swing mechanism 9, the wafer bearing plate 11 is positioned outside the auxiliary box body 2, and an operator or a mechanical arm can place a wafer to be detected into the caulking groove of the wafer bearing plate 11, then the swing mechanism 9 drives the wafer bearing plate 11 to move back, then the driving part 6 controls the closing plate 701 to move down, the discharge port of the auxiliary box body 2 is closed, then the vacuum pump is used for vacuumizing the auxiliary box body 2, until the vacuum degree of the auxiliary box body 2 is close to the vacuum degree of the main box body 1, the sliding block 802 is controlled to move towards the main box body 1, in the moving process of the sliding block 802, the pressing rod 1202 is inserted into the outer tube 1201, so that the pushing rod 1203 is forced to move outwards, the sealing plate 502 is forced to open under the combined action of the guiding part 1205, the sliding rod 1204 and the pushing rod 1203, then the swing mechanism 9 drives the wafer bearing plate 11 loaded with the wafer to rotate, the wafer to be detected is moved into the main box body 1, then the double-station vacuum chuck on the mechanical arm in the main box body 1 can suck the wafer to be detected and the wafer to be detected, and the positions of the wafer to be detected can be switched, and the wafer to be moved onto the wafer bearing plate 11, and finally, the sliding block 802 is controlled to move towards one side far away from the main box body 1, the sealing plate 502 closes the communicating groove 4 under the action of the pressure transmission assembly 12, the detected wafer is moved to the discharge port of the auxiliary box body 2, finally, the valve body 3 at the end part of the air inlet pipe on the auxiliary box body 2 is opened, and the auxiliary box body 2 is subjected to vacuum removal operation, so that the detected wafer can be taken out.
The above description of the present invention is intended to be illustrative. Various modifications, additions and substitutions may be made by those skilled in the art without departing from the scope of the invention as defined in the accompanying claims.
Claims (5)
1. The utility model provides a wafer test probe station test box, includes main box body (1), its characterized in that: an auxiliary box body (2) provided with a feeding hole is installed on the side face of the main box body (1), a closed plate (7) is arranged at the feeding hole of the auxiliary box body (2), a driving piece (6) used for driving the closed plate (7) to move is arranged at the top of the auxiliary box body (2), a communicating groove (4) is formed in one side, connected with the auxiliary box body (2), of the main box body (1), a sealing assembly (5) used for isolating the communicating groove (4) is arranged on the side face of the main box body (1), and a linear guide rail pair (8) and a pressure transmission assembly (12) used for driving the sealing assembly (5) to rotate are arranged in the auxiliary box body (2);
the closed assembly (5) comprises a fixed shaft (501) arranged on the side face of the main box body (1), the fixed shaft (501) is connected with a sealing plate (502) through an elastic piece, and the sealing plate (502) is connected with the pressure transmission assembly (12).
2. The wafer test probe station test box of claim 1, wherein: the linear guide rail pair (8) comprises a guide rail (801) arranged on the inner bottom wall of the auxiliary box body (2) and a driving motor (803) connected with the driving shaft input end of the guide rail (801), a sliding block (802) connected in a sliding mode is arranged on the guide rail (801), the pressure transmission assembly (12) comprises a pressure lever (1202) arranged on the side face of the sliding block (802) and an outer pipe (1201) arranged inside the auxiliary box body (2), a push rod (1203) is arranged at one end, far away from the pressure lever (1202), of the outer pipe (1201), a guide piece (1205) is arranged on the side face of the sealing plate (502), a slide way is formed in the side face of the guide piece (1205), and a slide rod (1204) connected with the slide way is arranged at one end, far away from the outer pipe (1201), of the push rod (1203).
3. The wafer test probe station test box of claim 2, wherein: the top of the sliding block (802) passes through a swing mechanism (9), and the output end of the swing mechanism (9) is connected with a wafer bearing plate (11) through a lifting assembly (10).
4. The wafer test probe station test box of claim 3, wherein: the top of the wafer bearing plate (11) is provided with an embedding groove which is adaptive to the size of the wafer.
5. The wafer test probe station test box of claim 4, wherein: closed plate (7) including be used for sealing closing plate (701) of vice box (2) feed inlet and set up in locating part (702) that vice box (2) inner wall is used for restricting closed plate (701) moving direction, the expansion end of driving piece (6) runs through the top of vice box (2) and extends to the inside of vice box (2), and driving piece (6) expansion end is located the inside one end of vice box (2) and is connected with closed plate (701).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222799455.7U CN218412794U (en) | 2022-10-24 | 2022-10-24 | Wafer test probe station test box |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222799455.7U CN218412794U (en) | 2022-10-24 | 2022-10-24 | Wafer test probe station test box |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN218412794U true CN218412794U (en) | 2023-01-31 |
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ID=85004710
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202222799455.7U Active CN218412794U (en) | 2022-10-24 | 2022-10-24 | Wafer test probe station test box |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN218412794U (en) |
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2022
- 2022-10-24 CN CN202222799455.7U patent/CN218412794U/en active Active
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20230427 Address after: Room 115, Comprehensive Building, Wujiang Science and Technology Entrepreneurship Park, No. 2358 Chang'an Road, Jiangling Street, Wujiang District, Suzhou City, Jiangsu Province, 215538 Patentee after: Jiangsu Hongjingrui Semiconductor Technology Co.,Ltd. Address before: 245000 Phase II of She County Economic Development Zone, Huangshan City, Anhui Province (Xiangning Science and Technology Innovation Service Center, She County Intelligent Manufacturing Industrial Park) Patentee before: Anhui Jingyuan Technology Co.,Ltd. |
|
| TR01 | Transfer of patent right |