CN217805954U

CN217805954U - Semiconductor wafer transfer storage device

Info

Publication number: CN217805954U
Application number: CN202221477962.2U
Authority: CN
Inventors: 沙伟中
Original assignee: Suzhou I Stock Intelligent Technology Co ltd
Current assignee: Suzhou I Stock Intelligent Technology Co ltd
Priority date: 2022-06-14
Filing date: 2022-06-14
Publication date: 2022-11-15
Anticipated expiration: 2032-06-14

Abstract

The utility model provides a pair of storage device is transported to semiconductor wafer, its beneficial effect lies in, the utility model discloses a storage support body and a transfer device, the storage support body is used for depositing a plurality of wafer box. The wafer boxes are all provided with RFID electronic tags, and data information of the wafers stored in the wafer boxes is stored in the RFID electronic tags. The storage rack body is provided with a RFID electronic tag reading device and can display data information on a display screen on the storage rack body. Therefore, the wafer boxes stored in the storage can be placed on the storage rack body for transfer storage, and users can read the stored data information in each wafer box through the screen arranged on the storage rack body. Furthermore, when the using equipment needs wafers in the corresponding wafer boxes, the using personnel carries the corresponding wafer boxes on the storage rack body to the transfer device according to the data information displayed on the screen on the rack body. The user need not transport the wafer box from the storage many times, has promoted the security of wafer transportation process.

Description

Semiconductor wafer transfer storage device

Technical Field

The utility model relates to a semiconductor wafer storage technology field, concretely relates to be used for transporting storage device to semiconductor wafer.

Background

A semiconductor wafer is a base material from which chips are fabricated. The silicon dioxide is purified, melted and distilled to produce silicon crystal rods, and the silicon crystal rods are ground, polished and sliced by a wafer factory to form wafers. Because a wafer is of very high value, it needs to be stable during storage and transport without vibration, and to ensure cleanliness during transport. It is common in the art to store wafers in a special cassette. And a plurality of wafer boxes are placed in a large warehouse for storage. However, the wafer cassettes stored in the stocker need to be transferred to an apparatus that actually uses the wafers.

However, wafers with a plurality of specifications exist in the wafer box, and the wafer box is taken out from the storage and then taken out from the wafer box to be transferred to equipment manually according to information recorded in the wafer box in the system. Obviously, the wafer cassette is moved for many times in this way, and the moving distance is long, which easily causes the wafers stored in the wafer cassette to vibrate and damage. Meanwhile, the transfer efficiency is low, and the production efficiency is influenced.

SUMMERY OF THE UTILITY MODEL

In order to solve the technical problem, the utility model provides a storage device is transported to semiconductor wafer, its purpose provides a storage transfer device, can place a plurality of wafer box on a transfer device and read the data information of wafer box, and the person of facilitating the use distinguishes the wafer box to transport to the user equipment through a transfer device, promote the safety and the production efficiency that the wafer box transported.

A semiconductor wafer transfer and storage device for storing semiconductor wafers and transferring them by a transfer device,

comprises a plurality of wafer boxes for storing semiconductor wafer bodies, a storage rack body, a plurality of wafer boxes placed on the rack body and a transfer device,

the storage rack body is provided with a plurality of fixed seats which are contacted with the bottom of the wafer box, the wafer box body is provided with an electronic data information tag which can emit signals, and the fixed seats are provided with recognition devices which can read the electronic data information tag, so that when the bottom of the wafer box is contacted with the fixed seats; the frame body is provided with a display screen which can display the data information read by the identification device;

the transfer device comprises a plurality of layers of frame bodies capable of placing wafer boxes, wherein the frame bodies are provided with a plurality of fixing seats which are the same as those on the storage frame bodies and used for placing the wafer boxes, and the frame bodies are provided with display screens capable of displaying data information of the wafer boxes placed on the fixing seats; and the transfer device is also provided with a communication terminal.

Preferably, a plurality of grooves are arranged in the wafer box and used for placing the flaky wafers.

Preferably, the storage rack body is provided with a support arm, and the support arm is connected with a display screen through a hinge and used for displaying data information of the wafer box placed on the rack body.

Preferably, the wafer storage rack further comprises a mounting seat, the mounting seat comprises a plate body arranged on the storage rack body, a storage area for placing the wafer box is arranged on the plate body, and an RFID electronic tag reading device is arranged at the front end of the storage area.

Preferably, the storage area is provided with a positioning pin, the positioning pin is in adaptive connection with a positioning hole at the bottom of the semiconductor wafer box, and the semiconductor wafer box is provided with an RFID electronic tag.

Preferably, the bottom of the frame body of the transfer device is provided with universal wheels.

Preferably, the mounting seat on the frame body on the transfer device comprises a plate body arranged on the frame body, a storage area for placing the wafer box is arranged on the plate body, and an RFID electronic tag reading device is arranged at the front end of the storage area.

The utility model provides a pair of storage device is transported to semiconductor wafer, its beneficial effect lies in, the utility model discloses a storage support body and a transfer device, the storage support body is used for depositing a plurality of wafer box. The wafer boxes are all provided with RFID electronic tags, and data information of the wafers stored in the wafer boxes is stored in the RFID electronic tags. The storage rack body is provided with a RFID electronic tag reading device and can display data information on a display screen on the storage rack body. Therefore, wafer boxes stored in the storage can be placed on the storage rack body to be transferred and stored, and users can read data information stored in each wafer box through a screen arranged on the storage rack body. Further, when the user equipment needs the wafer in the corresponding wafer box, the user personnel carries the corresponding wafer box on the storage rack body to the transfer device according to the data information displayed on the screen on the rack body. The RFID electronic tag reading device is also arranged on the frame body of the transfer device, when the wafer box is placed on the frame body of the transfer device for transfer, a user can obtain related information according to a screen on the frame body arranged on the transfer device, and the correct wafer box is placed on the using equipment. Through the utility model discloses a storage transfer device, the user of service can once only transport a plurality of wafer boxes to a plurality of service equipment through transfer device and promoted efficiency. The user does not need to punch the wafer box for carrying in the warehouse for many times, and the safety of the wafer transfer process is improved.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below.

Fig. 1 is a schematic structural view of a storage rack body of the present invention;

fig. 2 is a schematic structural view of the transfer device of the present invention;

FIG. 3 is a schematic structural view of a fixing seat on a storage rack body;

FIG. 4 is a schematic structural diagram of a wafer cassette;

FIG. 5 is a schematic structural view of a wafer cassette;

FIG. 6 is a schematic structural view of the bottom of the wafer box.

Detailed Description

The technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention.

A semiconductor wafer transfer and storage device is composed of a storage rack body in figure 1 and a transfer device in figure 2. Wherein, the storage rack body 1 is provided with a plurality of layers, and each layer is provided with a plurality of fixing seats 3 for storing the wafer boxes 2. The wafer cassette 2 is used for storing wafers, and is shown in fig. 4 as an appearance schematic diagram of a wafer cassette, and fig. 5 as an internal structure schematic diagram of a wafer cassette.

Typically, the wafer is placed in a pocket 22 provided in the cassette, and a clamp 21 is provided on the top of the cassette. The manipulator is transferred to the storage for storage through a clamping part 21 for clamping the top of the wafer box 2. When the wafer box is used, the wafer box is moved out of the storage by the mechanical arm.

The storage rack body 1 provided in this embodiment is provided with a plurality of storage tiers 11, and each storage tier is provided with a plurality of fixing bases 12. The holder 12 is usually made of sheet metal, and a storage area 13 is further provided on the holder 12. The typical storage region 13 is slightly larger than the bottom area of the wafer cassette 2, so that the wafer cassette 2 can be stably and snugly seated in the storage region 13. To further prevent any play and positioning, 3 positioning pins 14 are provided on the storage area 13 as shown in fig. 3. The positioning pins 14 slightly protrude from the storage region 13, and as shown in fig. 6, three positioning holes 23 are further formed at the bottom of the wafer cassette 2. The wafer cassette 2 is conveyed to the storage area 13 by manual conveyance, and the positioning pins 14 are inserted into the positioning holes of the wafer cassette 2. The wafer box 2 is provided with an RFID data information tag, relevant data such as specifications of wafers stored in the wafer box 2 are stored in the storage period, the storage area 13 is provided with a device 15 capable of reading the RFID data information tag, and after the wafer box 2 is placed in the storage area 13, the device 15 reads the RFID data information tag and displays the relevant information on a small screen 16 arranged on the cylinder. The user can easily identify the stored information of the wafers in the cassette 2 from the information on the small screen 16. And a larger display screen 17 is arranged on one side of the storage rack body 1 to display the storage information of the whole wafer box 2 on the storage rack body.

The transfer device 3 provided in this embodiment is a mobile transfer device that can recognize the wafer information stored in the wafer cassette 2. It includes a frame body 31, a structure which is arranged on the frame body 31 and is completely consistent with the fixed seat 12 of the storage frame body 1, and an information screen 32 arranged on the frame body 31. The universal wheels 33 are provided at the lower part of the frame body 31. A user may place a number of cassettes in a storage area on the transfer device 3 and display the data information in the corresponding cassettes 2 on an information screen 32 on the transfer device 3.

Through the structural combination of the storage rack body 1, the transfer device 3 and the wafer box 2 in the embodiment, a transfer system is independently arranged outside the warehouse. The user can use RFID data information label and reading device according to the last screen of storage rack body 1 and transfer device 3, shows the data information in the wafer box 2. The user can master whether the wafer to be used is stored on the storage rack body 1 and in the specific storage area at any time, and meanwhile, the wafer can be transferred to the equipment to be used along with the transfer device 3, so that the use efficiency is improved.

The above-mentioned embodiments only represent several embodiments of the present invention, and the description thereof is specific and detailed, but not to be construed as limiting the scope of the invention. It should be noted that, for those skilled in the art, without departing from the concept of the present invention, several variations and modifications can be made, which all fall within the scope of the present invention. Therefore, the protection scope of the present invention should be subject to the appended claims.

Claims

1. A semiconductor wafer transfer and storage device for storing semiconductor wafers and transferring them by a transfer device,

comprises a plurality of wafer boxes for storing semiconductor wafer bodies, a storage rack body, a plurality of wafer boxes arranged on the rack body and a transfer device,

2. The semiconductor wafer transfer and storage device of claim 1, wherein the wafer cassette has a plurality of slots for receiving wafer wafers.

3. The semiconductor wafer transfer and storage device according to claim 1 or 2, wherein a support arm is disposed on the storage rack body, and the support arm is connected to a display screen through a hinge for displaying data information of the wafer cassette placed on the storage rack body.

4. The semiconductor wafer transferring and storing device as claimed in claim 1 or 2, further comprising a mounting base, wherein the mounting base comprises a plate body disposed on the storage rack body, a storage area for placing the wafer cassette is disposed on the plate body, and an RFID tag reading device is disposed at a front end of the storage area.

5. The semiconductor wafer transferring and storing device as claimed in claim 4, wherein a positioning pin is disposed on the storage area, the positioning pin is adapted to be connected to a positioning hole at the bottom of the semiconductor wafer box, and an RFID tag is disposed on the semiconductor wafer box.

6. The semiconductor wafer transfer and storage device of claim 5, wherein the bottom of the frame body of the transfer device is provided with universal wheels.

7. The semiconductor wafer transferring and storing device as claimed in claim 5, wherein the mounting seat on the frame body of the transferring device comprises a plate body arranged on the frame body, a storage area for placing the wafer cassette is arranged on the plate body, and an RFID tag reading device is arranged at the front end of the storage area.