CN217594937U - Spin coating equipment - Google Patents

Abstract

The embodiment of the utility model provides a spin coating device, including base, actuating mechanism, spin coating track and the workstation that is used for adsorbing the piece of waiting to spin coating, the spin coating track is the ring form, and the spin coating track rotationally sets up on the base, and the workstation is fixed in on the orbital internal surface of spin coating; the driving mechanism is connected with the spin-coating track and used for driving the spin-coating track to rotate so as to coat a film on the piece to be spin-coated. The spin coating track sets up along vertical direction, and when the spin coating track was rotatory, under the effect of centrifugal force, the spin coating solution of treating on the spin coating piece flows into pyramid bottom very easily to, the thickness of the rete of spin coating is even, has avoided perovskite solar cell to have the risk of short circuit, has improved perovskite solar cell performance.

Description

Spin coating equipment

Technical Field

The utility model relates to a solar cell technical field, concretely relates to spin coating equipment.

Background

With the development of science and technology, perovskite solar cells are produced in order to improve the photoelectric conversion efficiency of the solar cells.

For perovskite solar cells, the bottom cell of the perovskite solar cell generally adopts a textured cell structure similar to a pyramid shape so as to improve the light absorption rate and further improve the conversion efficiency of the solar cell. However, this structure has great difficulty in preparing film layers such as a hole transport layer, a perovskite absorption layer, and an electron transport layer of a top cell (perovskite cell) by a solution spin coating method.

When the film layer is spin-coated on the bottom cell by the existing spin-coating equipment, the spin-coating solution on the bottom cell hardly flows into the bottom of the pyramid, so that the thickness of the spin-coated film layer is uneven, and the perovskite solar cell has the risk of short circuit due to the thin area of the film layer.

SUMMERY OF THE UTILITY MODEL

The embodiment of the utility model provides a spin coating equipment to when solving current spin coating equipment spin coating rete on end battery, spin coating solution on the end battery hardly flows into the bottom of "pyramid", makes the inhomogeneous and technical problem who leads to titanium ore deposit solar cell to have the risk of short circuit of thickness of the rete of spin coating.

In order to solve the technical problem, the utility model discloses a realize like this:

the embodiment of the utility model provides a spin coating equipment, include: the method comprises the following steps: the spin-coating device comprises a base, a driving mechanism, a spin-coating track and a workbench for adsorbing a piece to be spin-coated;

the spin-coating rail is circular, can be rotatably arranged on the base and is arranged along the vertical direction, and the workbench is fixed on the inner surface of the spin-coating rail;

the driving mechanism is connected with the spin-coating track and used for driving the spin-coating track to rotate.

Furthermore, a supporting piece used for supporting the spin coating rail is further arranged on the base, and the spin coating rail is rotatably arranged on the supporting piece.

Further, the spin-on track includes: an inner rail and an outer rail;

the outer track is sleeved on the inner track and fixedly arranged on the supporting piece, and the inner track can rotate relative to the outer track;

the workbench is fixed on the inner surface of the inner rail, and the driving mechanism is connected with the inner rail and used for driving the inner rail to rotate.

Further, the driving mechanism comprises a driving piece and a transmission assembly;

the base is provided with an accommodating cavity, the driving piece is arranged in the accommodating cavity and connected with the transmission assembly, and the transmission assembly is connected with the spin-coating track;

the driving piece is used for driving the transmission assembly to drive the spin-coating track to rotate.

Further, the transmission assembly includes: the driving piece is a motor;

the motor passes through the hold-in range with gear connection, the gear with spin-coating orbital joint, the motor is used for the drive the hold-in range drives the gear is rotatory, in order to drive the spin-coating orbital rotation.

Further, the gear is arranged on one side of the spin coating track;

the spin coating apparatus further includes a plurality of spokes for coupling the gear and an inner surface of the spin coating track.

Further, the axis of the gear is coincident with the axis of the spin-coating track;

the spokes are uniformly distributed along the circumferential direction of the spin-coating track.

Further, the spin coating apparatus further includes: vacuumizing equipment;

the surface of the workbench, which is close to the piece to be spin-coated, is provided with a vacuum adsorption hole, and the vacuumizing device is connected with the vacuum adsorption hole and used for pumping out gas in the vacuum adsorption hole so as to enable the piece to be spin-coated to be adsorbed on the workbench.

Further, the workbench is of a hollow structure so as to form a first inner cavity, and the vacuum adsorption hole is communicated with the first inner cavity;

the spin coating track is of a hollow structure so as to form a second inner cavity, an interface used for being connected with the vacuum pumping equipment is further arranged on the spin coating track, the interface is communicated with the second inner cavity, and the second inner cavity is communicated with the first inner cavity.

Further, the spin coating apparatus further includes: a protective shell;

the protective shell is arranged outside the spin coating track and abutted against the surface, close to the spin coating equipment, of the base.

The embodiment of the utility model provides a spin coating equipment includes following advantage:

in the embodiment of the utility model, the spin coating equipment comprises a base, a driving mechanism, a spin coating track and a workbench for adsorbing a piece to be spin coated, wherein the spin coating track is in a circular ring shape, the spin coating track is rotatably arranged on the base, and the workbench is fixed on the inner surface of the spin coating track; the driving mechanism is connected with the spin-coating track and used for driving the spin-coating track to rotate so as to coat a film on the piece to be spin-coated. The spin coating track sets up along vertical direction, and when the spin coating track was rotatory, under the effect of centrifugal force, treat the spin coating solution on the spin coating piece very easily just can flow into pyramid bottom to, the thickness of the rete of spin coating is even, has avoided perovskite solar cell to have the risk of short circuit, has improved perovskite solar cell performance.

Drawings

Fig. 1 is a schematic view of a spin coating apparatus according to an embodiment of the present invention at a first viewing angle;

fig. 2 is a schematic view of a spin coating apparatus according to an embodiment of the present invention at a second viewing angle.

Reference numerals:

10: a base; 11: a control screen; 20: spin coating a track; 30: a work table; 40: a support member; 60: a transmission assembly; 61: a gear; 62: a synchronous belt; 70: spokes; 80: a protective shell.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, not all, of the embodiments of the present invention. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

It should be appreciated that reference throughout this specification to "one embodiment" or "an embodiment" means that a particular feature, structure or characteristic described in connection with the embodiment is included in at least one embodiment of the present invention. Thus, the appearances of the phrases "in one embodiment" or "in an embodiment" in various places throughout this specification are not necessarily all referring to the same embodiment. Furthermore, the particular features, structures, or characteristics may be combined in any suitable manner in one or more embodiments.

The embodiment of the utility model provides a spin coating device, referring to fig. 1 and fig. 2, a base 10, a driving mechanism, a spin coating track 20 and a workbench 30 for adsorbing a piece to be spin coated; the spin-coating rail 20 is annular, the spin-coating rail 20 is rotatably disposed on the base 10 and is disposed along a vertical direction, and the worktable 30 is fixed on an inner surface of the spin-coating rail 20; the driving mechanism is connected with the spin-coating rail 20 and is used for driving the spin-coating rail 20 to rotate so as to coat a film on the piece to be spin-coated. Because the spin-coating track 20 is along vertical direction setting, when spin-coating track 20 was rotatory, under the effect of centrifugal force, treat that the spin-coating solution on the spin-coating piece (for example perovskite solar cell's end battery) just can flow into pyramid bottom very easily to, the thickness of the rete of spin-coating is even, has avoided perovskite solar cell to have the risk of short circuit, has improved perovskite solar cell's performance.

Specifically, as shown in fig. 1, the spin-coating rail 20 has a circular ring shape, that is, an inner surface of the spin-coating rail 20 forms a receiving space. The stage 30 is placed in the accommodating space, and referring to the non-operating state (rest state) of the spin-coating rail 20, as shown in fig. 1, the bottom of the stage 30 may be fixed to the bottom of the inner surface of the spin-coating rail 20 by a fixed connection manner such as welding, fastening, and the like. In the X-axis direction, the center line of the stage 30 shown in fig. 1 coincides with the center line of the spin-coating rail 20, and when the spin-coating rail 20 is in the non-operating state, the stage 30 is located directly above the base 10, and the member to be spin-coated is located directly above the stage 30, so that the member to be spin-coated can be more easily and stably placed on the upper surface of the stage 30.

At present, the existing spin coating apparatus includes a rotating platform, a to-be-spin-coated member is fixed on the rotating platform, wherein the to-be-spin-coated member is a bottom cell (called a bottom cell for short), the direction of fig. 1 is taken as a reference, the rotating platform and the working platform 30 of this embodiment are disposed at the same position, that is, the rotating platform is parallel to the XY plane, the rotating platform rotates around its axis, the axis is parallel to the Z axis, and the spin coating solution dropped on the bottom cell is coated on the bottom cell by using centrifugal force.

Specifically, as shown in fig. 1, the spin coating apparatus is disposed in a vertical direction (i.e., a Z-axis direction in fig. 1), and the driving mechanism may drive the spin coating rail 20 to rotate. When the spin-coating track 20 rotates, the spin-coating track 20 rotates around the axis (the axis is parallel to the Y axis) of the spin-coating track, so that the bottom battery is driven to rotate along the Y axis direction, a spin-coating solution on the bottom battery can easily flow into the bottom of the pyramid under the action of centrifugal force, the thickness of a film layer formed by spin coating is uniform, the risk of short circuit of the perovskite solar battery is avoided, and the performance of the perovskite solar battery is improved. It should be noted that the spin-coating track 20 rotates at a high speed during spin-coating, for example, 8000r/min, and the specific rotation speed can be set according to actual requirements, so that the film formed by spin-coating can be more uniform at a high speed.

In the embodiment of the present invention, as shown in fig. 1 and fig. 2, a supporting member 40 for supporting the spin-coating rail 20 is further disposed on the base 10, and the spin-coating rail 20 is rotatably disposed on the supporting member 40.

Specifically, as shown in fig. 1, a support 40 is further fixed on the upper surface of the base 10, the support 40 is used for supporting the spin-coating rail 20, the spin-coating rail 20 is placed on the support 40, and the spin-coating rail 20 can rotate relative to the support 40 to coat the spin-coating object.

In the embodiment of the present application, the spin-coating track 20 includes: an inner rail and an outer rail; the outer rail is sleeved on the inner rail and is fixedly arranged on the supporting piece 40, and the inner rail can rotate relative to the outer rail; the table 30 is fixed on the inner surface of the inner rail, and the driving mechanism is connected with the inner rail for driving the inner rail to rotate.

Specifically, the spin-coating track 20 may include an inner track and an outer track, the outer track is sleeved on the inner track, and the outer track and the inner track may be connected through balls, gears, etc. so that the inner track can rotate relative to the outer track. The lower region of the outer track may be secured to the upper surface of the support member 40 by welding, fastener attachment, or the like. The region where the support member 40 is connected to the outer rail has an arc shape, which is a concave arc shape, that is, is matched with the lower region of the outer rail, so that the outer rail can be more stably fixed to the support member 40.

Specifically, the inner rail has a receiving space therein, and referring to a non-operating state (stationary state) of the spin coating apparatus, as shown in fig. 1, the bottom of the table 30 may be fixed to the bottom of the inner surface of the inner rail by welding, fastening, or the like. In the X-axis direction, the center line of the table 30 shown in fig. 1 coincides with the center line of the inner rail.

Specifically, the driving mechanism is connected to the inner rail, and the driving mechanism can drive the inner rail of the spin-coating rail 20 to rotate along the Y-axis direction, so as to coat the film on the workpiece to be spin-coated.

In the present embodiment, the drive mechanism includes a drive member and a transmission assembly 60; the base 10 has a containing cavity, the driving member is disposed in the containing cavity, the driving member is connected to the transmission assembly 60, and the transmission assembly 60 is connected to the spin-coating track 20; the driving member is used for driving the transmission assembly 60 to rotate the spin-coating track 20.

Specifically, the base 10 has a receiving cavity in which the driving member can be mounted. The driving member is connected to the transmission member 60, and the transmission member 60 is connected to the inner rail of the spin-coating rail 20, so that, as shown in fig. 1, the driving member can drive the transmission member 60 to drive the inner rail to rotate along the Y-axis direction, so as to drive the worktable 30 to rotate along the Y-axis direction, thereby driving the piece to be spin-coated to rotate along the Y-axis direction, so that the spin-coating solution on the piece to be spin-coated can be uniformly coated on the piece to be spin-coated, and the coating can be completed.

In the embodiment of the present invention, as shown in fig. 1 and 2, the transmission assembly 60 includes a gear 61 and a synchronous belt 62, and the driving member is a motor; the motor passes through hold-in range 62 and is connected with gear 61, and gear 61 is connected with spin-coating track 20, and the motor is used for driving hold-in range 62 and drives gear 61 rotatory to it is rotatory to drive spin-coating track 20.

Specifically, hold-in range 62 is the annular, and one pot head of hold-in range 62 is located on the output shaft of motor, perhaps overlaps on the output shaft of motor and establishes a hold-in range 62 wheel that matches with hold-in range 62, and hold-in range 62 one pot head is located on the hold-in range 62 wheel, and the other pot head of hold-in range 62 is located on gear 61 to be connected with gear 61 meshing, gear 61 and spin coating track 20's interior track fixed connection. Like this, the motor can drive hold-in range 62 and take turns rotatoryly, and hold-in range 62 takes turns rotatory drive hold-in range 62 transmission, and hold-in range 62's drive gear 61 is rotatory, and the rotation of gear 61 drives interior track rotation to it is rotatory to treat spin coating piece on driving workstation 30, in order to treat to carry out the coating film on spin coating piece.

In the embodiment of the present application, the gear 61 is disposed on one side of the spin-coating rail 20; the spin coating apparatus further includes a plurality of spokes 70 for connecting the gear 61 and the inner surface of the spin coating track 20.

Specifically, as shown in fig. 2, the gear 61 is disposed at one side of the spin-coating rail 20, a plurality of spokes 70 are disposed between an outer surface of the gear 61 and an inner surface of the spin-coating rail 20, and the spokes 70 connect the gear 61 and the inner surface of the inner rail of the spin-coating rail 20 together. Both ends of the spoke 70 are respectively fixedly connected with the gear 61 and the inner surface of the inner rail, and the fixed connection can be realized by welding, integral molding and the like, which is not limited in this embodiment and can be specifically set according to actual conditions.

In the embodiment of the present invention, the axis of the gear 61 coincides with the axis of the spin-coating track 20; the plurality of spokes 70 are evenly distributed along the circumferential direction of the spin-coating track 20.

Specifically, as shown in fig. 1, the axis of the gear 61 coincides with the axis of the inner rail of the spin-coating rail 20, so that the gear 61 can drive the spin-coating rail 20 to rotate uniformly, thereby making the thickness of the film layer plated on the piece to be spin-coated more uniform. Furthermore, a plurality of spokes 70 (5 spokes are shown in fig. 1) are uniformly arranged along the circumferential direction of the spin-coating track 20, so that not only the connection between the gear 61 and the inner track is firmer, but also the connection force between the gear 61 and the inner track is balanced, thereby ensuring that the spin-coating track 20 rotates around the Y-axis direction, and further ensuring that the thickness of the film layer plated on the piece to be spin-coated is more uniform.

In the embodiment of the utility model, the spin coating equipment further comprises a vacuum pumping equipment; the surface of the workbench 30 close to the piece to be coated is provided with a vacuum adsorption hole; the vacuum pumping device is connected with the vacuum adsorption hole and used for pumping out gas in the vacuum adsorption hole so that the piece to be spin-coated is adsorbed on the workbench 30.

Specifically, before coating the film on the to-be-spin-coated member, the to-be-spin-coated member needs to be fixed on the upper surface of the worktable 30, so that the to-be-spin-coated member does not displace relative to the worktable 30. This embodiment adopts vacuum adsorption's mode to realize, consequently, can be equipped with the vacuum adsorption hole on the upper surface of workstation 30, like this, evacuation equipment's connecting pipe can be connected with the vacuum adsorption hole to take out the downthehole gas of vacuum adsorption, the vacuum adsorption hole is negative pressure state, so that treat that the spin coating piece can firmly adsorb on the upper surface of workstation 30. It should be noted that the vacuum suction holes are blind holes, and the specific depth of the vacuum suction holes may not be limited to this, and needs to be set according to the structure of the actual workbench 30 and the actual requirements.

Specifically, in order to make the piece to be spin-coated firmly adhere to the upper surface of the table 30, a plurality of vacuum suction holes are provided on the upper surface of the table 30, for example, one vacuum suction hole is provided at each of four corner regions of the upper surface of the table 30, and one vacuum suction hole is provided at the center of the upper surface, or a circle of vacuum suction holes is provided around the center of the upper surface, and the specific number and the specific arrangement position of the vacuum suction holes are not limited in this embodiment.

In the embodiment of the present invention, the worktable 30 has a hollow structure to form a first inner cavity, and the vacuum absorption hole is communicated with the first inner cavity; spin coating track 20 is hollow structure to form the second inner chamber, still be equipped with on the spin coating track 20 and be used for the interface of being connected with evacuation equipment, interface and second inner chamber intercommunication, second inner chamber and first inner chamber intercommunication.

Specifically, the worktable 30 has a hollow structure, so that the worktable 30 forms a first inner cavity, the inner rail of the spin-coating rail 20 may also have a hollow structure, so that the inner rail forms a second inner cavity, and an interface for connecting with a connecting pipe of a vacuum pumping device is further disposed on the inner rail, and the interface is communicated with the second inner cavity. In practice, the lower surface of the table 30 may be provided with a plurality of communication holes, which may communicate the second inner chamber with the first inner chamber. In this case, the vacuum suction hole is a through hole to communicate with the first inner chamber. Thus, the vacuum pumping device can sequentially pump out air among the second inner cavity, the first inner cavity and the vacuum adsorption hole, so that the piece to be spin-coated is more firmly adsorbed on the upper surface of the workbench 30.

It should be noted that, if the inner rail is not a hollow structure, the interface for connecting with the connection pipe of the vacuum pumping device is disposed on the worktable 30, so that the vacuum pumping device can sequentially pump out the air between the first inner cavity and the vacuum adsorption hole, so that the piece to be spin-coated is more firmly adsorbed on the upper surface of the worktable 30.

In practice, an annular boss may be disposed on the circumferential surface of the connecting pipe, an annular sealing member is installed between the boss and the outer wall at the interface of the inner rail (or the workbench 30) to connect the connecting pipe and the interface in a sealing manner, and in the case that the inner rail of the spin-coating rail 20 rotates relative to the outer rail, the annular sealing member also rotates along with the inner rail to prevent the connecting pipe from affecting the rotation of the inner rail.

The vacuum-pumping device may be a vacuum pump or other devices capable of performing vacuum-pumping, which may be specifically selected according to actual requirements, and this embodiment may not be limited to this.

In the embodiment of the present invention, as shown in fig. 1 and fig. 2, the spin coating apparatus further includes a protective shell; the protective housing is disposed outside the spin-coating track 20 and abuts against the surface of the base 10 close to the spin-coating apparatus.

Specifically, to protect the safety of the operator, a protective enclosure is provided outside the spin-coating rail 20. The protective housing can be a box structure and a box without a cover, or an opening is formed in one side of the box. Thus, the protective shell is downwardly sleeved from the opening or uncovered position, the spin coating rail 20, the gear 61, the timing belt 62 and the support 40 are sleeved therein, and the lower end surface of the protective shell abuts on the upper surface of the base 10. In addition, in order to enable the protective shell to be placed on the upper surface of the base 10 more stably, a clamping groove matched with the side wall of the protective shell may be arranged on the upper surface of the base 10, and the side wall of the protective shell is clamped in the clamping groove.

Specifically, the base 10 is further provided with a control screen 11, and the control screen 11 can set a motor rotation speed parameter and rotation time, and can also control the start and stop of the spin coating device. In actual operation, the parameters are set, the protective shell is covered, and then the protective shell is started to coat the piece to be spin-coated. The embodiment of the utility model provides a spin coating equipment includes following advantage:

in the embodiment of the utility model, the spin coating equipment comprises a base, a driving mechanism, a spin coating track and a workbench for adsorbing a piece to be spin coated, wherein the spin coating track is in a circular ring shape, the spin coating track is rotatably arranged on the base, and the workbench is fixed on the inner surface of the spin coating track; the driving mechanism is connected with the spin-coating track and used for driving the spin-coating track to rotate so as to coat a film on the piece to be spin-coated. The spin coating track sets up when the spin coating track is rotatory along vertical direction, under the effect of centrifugal force, treats the bottom that spin coating solution on the spin coating piece just can flow into the pyramid very easily to, the thickness of the rete of spin coating is even, has avoided perovskite solar cell to have the risk of short circuit, has improved perovskite solar cell performance.

It should be noted that, in the present specification, the embodiments are all described in a progressive manner, each embodiment focuses on differences from other embodiments, and the same and similar parts among the embodiments may be referred to each other.

While alternative embodiments of the present invention have been described, additional variations and modifications of these embodiments may occur to those skilled in the art once they learn of the basic inventive concepts. It is therefore intended that the following claims be interpreted as including alternative embodiments and all such alterations and modifications as fall within the true scope of the embodiments of the invention.

Finally, it should also be noted that, in this document, relational terms such as first and second, and the like may be used solely to distinguish one entity from another entity without necessarily requiring or implying any actual such relationship or order between such entities. Furthermore, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that an article or terminal that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such article or terminal. Without further limitation, an element defined by the phrase "comprising one … …" does not exclude the presence of additional like elements in an article or terminal equipment comprising the element. In addition, "and/or" in the specification and claims means at least one of connected objects, a character "/" generally means that a preceding and succeeding related objects are in an "or" relationship.

It is right above to the technical scheme that the utility model provides a detailed introduction has been carried out, and it is right to have used specific individual example herein the utility model discloses a principle and implementation mode have been elucidated, simultaneously, to the general technical staff in this field, according to the utility model discloses a principle and implementation mode all have the change part on concrete implementation mode and application scope, to sum up, this description content should not be understood as the restriction of the utility model.

Claims (10)

1. A spin coating apparatus, comprising: the spin-coating device comprises a base, a driving mechanism, a spin-coating track and a workbench for adsorbing a piece to be spin-coated;

the spin-coating rail is annular, can be rotatably arranged on the base and is arranged along the vertical direction, and the workbench is fixed on the inner surface of the spin-coating rail;

the driving mechanism is connected with the spin-coating track and used for driving the spin-coating track to rotate.

2. The spin-coating apparatus of claim 1, wherein the base further comprises a support member for supporting the spin-coating rail, and the spin-coating rail is rotatably disposed on the support member.

3. The spin-coating apparatus of claim 2, wherein the spin-coating track comprises: an inner rail and an outer rail;

the outer track is sleeved on the inner track and fixedly arranged on the supporting piece, and the inner track can rotate relative to the outer track;

the workbench is fixed on the inner surface of the inner rail, and the driving mechanism is connected with the inner rail and used for driving the inner rail to rotate.

4. The spin-coating apparatus of claim 1, wherein the drive mechanism comprises a drive member and a transmission assembly;

the base is provided with an accommodating cavity, the driving piece is arranged in the accommodating cavity and connected with the transmission assembly, and the transmission assembly is connected with the spin-coating track;

the driving piece is used for driving the transmission assembly to drive the spin-coating track to rotate.

5. The spin-coating apparatus of claim 4, wherein the drive assembly comprises: the driving piece is a motor;

the motor passes through the hold-in range with gear connection, the gear with spin-coating orbital joint, the motor is used for the drive the hold-in range drives the gear is rotatory, in order to drive the spin-coating orbital rotation.

6. The spin-coating apparatus of claim 5, wherein the gear is disposed at one side of the spin-coating track;

the spin coating apparatus further includes a plurality of spokes for connecting the gear and an inner surface of the spin coating track.

7. The spin-coating apparatus of claim 6, wherein the axis of the gear coincides with the axis of the spin-coating track;

the spokes are uniformly distributed along the circumferential direction of the spin-coating track.

8. The spin-coating apparatus of claim 1, further comprising: vacuumizing equipment;

the surface of the workbench, which is close to the piece to be spin-coated, is provided with a vacuum adsorption hole, and the vacuumizing device is connected with the vacuum adsorption hole and used for pumping out gas in the vacuum adsorption hole so as to enable the piece to be spin-coated to be adsorbed on the workbench.

9. The spin coating apparatus according to claim 8, wherein the stage is a hollow structure to form a first inner chamber, and the vacuum suction hole communicates with the first inner chamber;

the spin coating track is of a hollow structure so as to form a second inner cavity, an interface used for being connected with the vacuum pumping equipment is further arranged on the spin coating track, the interface is communicated with the second inner cavity, and the second inner cavity is communicated with the first inner cavity.

10. The spin-coating apparatus of claim 1, further comprising: a protective shell;

the protective shell is arranged outside the spin coating track and abutted against the surface, close to the spin coating equipment, of the base.

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