CN215909811U - Probe card fixing jig and detection table - Google Patents
Probe card fixing jig and detection table Download PDFInfo
- Publication number
- CN215909811U CN215909811U CN202121012838.4U CN202121012838U CN215909811U CN 215909811 U CN215909811 U CN 215909811U CN 202121012838 U CN202121012838 U CN 202121012838U CN 215909811 U CN215909811 U CN 215909811U
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- probe card
- driver
- base
- probe
- fixing jig
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- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
The application provides a fixed tool of probe card and test table, the fixed tool of probe card includes: a base; the two supporting seats are arranged on the base; the positioning substrate is fixed at the top end of the supporting seat, and the bottom of the positioning substrate is provided with a horizontal surface facing the base; the driver is movably arranged on the supporting seat, and the top end of the driver is used for placing a probe card; the driver is used for driving the probe card to move towards the horizontal surface direction. The probe card fixing jig solves the problem that the existing probe card fixing jig has errors in the length of a probe measured after the probe card is fixed, and the calibration precision of a probe card can be reduced.
Description
Technical Field
The present disclosure relates to probe card fixing devices, and particularly to a probe card fixing device and a probe card detecting table.
Background
The probe card is a component for realizing the electrical connection between the tester and the wafer, and probes on the probe card are directly contacted with tin pads or bumps on the wafer to lead out electrical signals, and then the electrical signals are matched with the tester to carry out measurement. The number of probes on a probe card varies from a few to hundreds, with larger numbers being more expensive. The service life of the probe card is generally more than 1000 ten thousand times, so that a new probe card needs to be maintained for many times in the process from putting into use to scrapping, the probe card needs to be tested before being used to ensure the precision of the probe card, and the probe card needs to be fixed by using a fixing jig in the test process.
The existing probe card fixing tool is to place a probe card on a horizontal surface, make the bottom surface of the probe card contact the horizontal surface, so that the probe card and the horizontal surface align to be horizontally arranged, then utilize a cover plate to press on the top surface of the probe card to fix the probe card.
SUMMERY OF THE UTILITY MODEL
The embodiment of the application provides a probe card fixing jig and a detection table, and solves the problem that the calibration precision of a probe card is reduced due to the fact that the length of a probe measured after the probe card is fixed by an existing probe card fixing jig has an error.
The present invention is achieved as described above, and a fixture for fixing a probe card includes:
a base;
the two supporting seats are arranged on the base;
the positioning substrate is fixed at the top end of the supporting seat, and the bottom of the positioning substrate is provided with a horizontal surface facing the base;
the driver is movably arranged on the supporting seat, and the top end of the driver is used for placing a probe card;
the driver is used for driving the probe card to move towards the horizontal surface direction.
According to the probe card fixing jig provided by the embodiment of the application, the driver is adjusted to drive the probe card to move towards the horizontal surface of the positioning substrate, the probe card can be fixed between the driver and the horizontal surface, the top surface of the probe card with the probe is attached to the horizontal surface of the positioning substrate, and the probe card is fixed in a horizontal shape, so that errors caused by bending of a PCB (printed circuit board) of the probe card can be eliminated when the length of the probe is measured, the accuracy of measuring the length of the probe is improved, and the calibration precision of the probe card is further improved.
In one embodiment, the driver comprises a slider and an adjustment knob;
the sliding block is movably arranged on the supporting seat, and the adjusting knob is rotatably arranged at the bottom of the sliding block and used for driving the sliding block to move relative to the supporting seat.
In one embodiment, the adjusting knob is provided with an auxiliary groove on the outer surface.
In one embodiment, the top end of the driver is provided with a clamping groove for placing a probe card.
In one embodiment, the surface of the clamping groove is provided with an anti-slip gasket.
In one embodiment, the base is provided with a hollow groove.
In one embodiment, at least three anti-skid cushion blocks are uniformly distributed on the bottom surface of the base.
The embodiment of the present application further provides a detection table, including:
the detection table comprises a detection table body, wherein a projector is arranged on the detection table body;
the probe card fixing jig according to any one of the above embodiments is disposed on the inspection table body and above the projector;
the detection lens is arranged on the detection body and is positioned above the probe card fixing jig.
According to the technical scheme, the embodiment of the utility model has the following beneficial effects: the probe card is placed at the top end of the driver, the driver can drive the probe card to move towards the horizontal surface, the probe card is fixed between the driver and the positioning substrate, and the top surface of the probe card is abutted against the horizontal surface, so that the probe card can be ensured to be horizontal, the length of the measuring probe is measured by taking the top surface of the probe card as a reference surface, errors caused by bending of a PCB (printed circuit board) of the probe card are well eliminated, the measuring accuracy of the length of the probe is improved, and the calibration accuracy of the probe card is further improved.
Drawings
Fig. 1 is a schematic structural diagram of a probe card fixing jig provided in an embodiment of the present application.
Fig. 2 is a front view of a probe card fixing jig provided in an embodiment of the present application.
Fig. 3 is a side view of a probe card fixing jig according to an embodiment of the present application.
Fig. 4 is a top view of a probe card fixing jig provided in the embodiment of the present application.
Reference numerals: 10. a base; 20. a supporting seat; 30. positioning the substrate; 31. a horizontal surface; 40. a driver; 41. a slider; 42. adjusting a knob; 420. an auxiliary groove; 410. a card slot; 50. and (6) hollowing out the groove.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the utility model and are not intended to limit the utility model.
The embodiment of the application provides a probe card fixing jig and a detection table, and solves the problem that the calibration precision of a probe card is reduced due to the fact that the length of a probe measured after the probe card is fixed by an existing probe card fixing jig has an error.
Fig. 1 is a schematic structural diagram of a probe card fixing jig according to a preferred embodiment of the present invention, and for convenience of description, only the parts related to the embodiment are shown, which are detailed as follows:
referring to fig. 1, the probe card fixing jig provided in the embodiment of the present application includes a base 10, two supporting bases 20, a positioning substrate 30, and a driver 40; the two supporting seats 20 are arranged on the base 10; the positioning substrate 30 is fixed on the top of the supporting base 20, and the bottom of the positioning substrate 30 has a horizontal surface 31 facing the base 10; the driver 40 is movably arranged on the supporting base 20, and the top end of the driver 40 is used for placing a probe card; the driver 40 is used to drive the probe card to move toward the horizontal surface 31.
According to the probe card fixing jig provided by the embodiment of the application, the driver 40 is adjusted to drive the probe card to move towards the horizontal surface 31 of the positioning substrate 30, so that the probe card can be fixed between the driver 40 and the horizontal surface 31, the top surface of the probe card with the probe can be attached to the horizontal surface 31 of the positioning substrate 30, and the probe card is fixed in a horizontal state, so that errors caused by bending of a PCB (printed circuit board) of the probe card can be eliminated when the length of the probe is measured, the accuracy of measuring the length of the probe is improved, and the calibration precision of the probe card is further improved.
Optionally, because the PCB of the probe card is generally square, the two supporting seats 20 can be arranged on the base 10 in parallel, so that the two drivers 40 are parallel to each other, and it can be ensured that the top surfaces of the drivers 40 are completely attached to the bottom surface of the probe card when the probe card is placed on the top end of the driver 40, the probe card is placed more stably, in order to make the appearance of the whole probe card fixing jig more neat and beautiful, the two supporting seats 20 can be symmetrically arranged on the base 10, so that the size of the base 10 can meet the requirement of the arrangement positions of the two supporting seats 20 during design, not only the appearance of the probe card fixing jig is neat and beautiful, but also the manufacturing materials of the base 10 can be saved, and the cost is saved.
In one of the embodiments, referring to fig. 1, the driver 40 includes a slider 41 and an adjustment knob 42; the slider 41 is movably disposed on the support base 20, and the adjusting knob 42 is rotatably disposed at the bottom of the slider 41 for driving the slider 41 to move relative to the support base 20.
In the above setting, the specific implementation manner of the adjusting knob 42 driving the slider 41 to move is as follows: adjusting nuts are arranged inside the sliding block 41, the adjusting knob 42 comprises an adjusting screw rod and a knob connected to one end of the screw rod, the screw rod is inserted into the sliding block 41 from the bottom of the sliding block 41 and is in threaded connection with the adjusting nuts, the screw rod can be driven to rotate by screwing the knob, the adjusting nuts can be driven to move relative to the knob, namely the sliding block 41 moves relative to the knob, and the sliding block 41 is lifted on the supporting seat 20.
As an alternative embodiment, the driver 40 may include a cylinder having a driving shaft tip connected to a driving plate, which is located below the positioning base plate 30, and the driving board is used for placing a probe card, the probe card is placed on the driving board, the top surface of the probe card faces to the positioning substrate 30, the air cylinder is controlled to move to drive the driving board to move upwards, namely the driving board and the positioning substrate 30 are closer and closer until the probe card is fixed between the driving board and the positioning substrate 30, the top surface of the probe card is abutted against the horizontal surface 31 of the positioning substrate 30, the top surface of the probe card is horizontal, the length of the measuring probe is the top surface of the probe card as the horizontal reference surface, the length of the probe measured in this way is not affected by the bending of the PCB of the probe card, the accuracy of the length measurement of the probe is higher, and the calibration precision of the probe card is further improved.
In one embodiment, referring to FIG. 1, the adjustment knob 42 is provided with an auxiliary groove 420 on an outer surface thereof. Through the arrangement, the auxiliary groove 420 is formed in the outer surface of the adjusting knob 42, so that a user can not easily slip when the adjusting knob 42 is manually rotated, and the auxiliary groove 420 increases the friction force between the hand and the adjusting knob 42, thereby being more beneficial to the accurate movement distance of the adjusting slider 41.
In one embodiment, referring to fig. 1, the top of the driver 40 is provided with a card slot 410, and the card slot 410 is used for placing a probe card. In the above arrangement, the clamping groove 410 is a step, the two supporting seats 20 are both provided with the drivers 40, the two steps are opposite to each other, and the distance between the side surfaces of the two steps is consistent with the width of the probe card, so that the probe card can be fixed by applying pressure to the probe card from the upper direction and the lower direction as well as the left direction and the right direction of the probe card together, and the fixing effect is better. It should be noted that the depth of the card slot 410 is required to be less than or equal to the thickness of the PCB of the probe card itself, so that the top surface of the probe card can abut against the horizontal surface 31 of the positioning substrate 30.
Optionally, the surface of the slot 410 is provided with an anti-slip gasket. In order to prevent the probe card from shifting to affect the horizontal fixation of the probe card in the process of driving the probe card to move by the driver 40 after the probe card is placed on the card slot 410, the anti-slip gasket is arranged on the surface of the card slot 410, so that the probe card cannot easily shift, the probe card cannot be damaged due to excessive pressure when the probe card is fixed between the card slot 410 and the horizontal surface 31, and the probe card cannot be fixed insecurely due to insufficient pressure.
In one embodiment, referring to fig. 1, a hollow-out slot 50 is formed on the base 10. In practical application, after the probe card is fixed, the projector is opened from the lower part of the probe card so that the probe on the probe card can be easily distinguished and measured, and therefore the light of the projector can conveniently penetrate through the probe card due to the arrangement of the hollow groove 50, and a good effect is achieved on accurate measurement of the probe.
Optionally, at least three anti-slip pads are uniformly distributed on the bottom surface of the base 10. Through the arrangement, the base 10 can be square or round, and when the base 10 is square, the bottom surface of the base 10 can be respectively provided with an anti-skid cushion block at four corners; when the base 10 is circular, three anti-skid pads with triangular connecting lines or four anti-skid pads with square connecting lines can be uniformly arranged on the bottom surface of the base 10, so that the arrangement of the fixture for fixing the probe card in the embodiment of the application is more stable, the fixture for fixing the probe card cannot shake in the process of measuring the probe, and the horizontal state of the top surface of the probe card cannot be influenced.
The embodiment of the application also provides a detection table, which comprises a detection table body, wherein a projector is arranged on the detection table body; as for the probe card fixing jig in any of the above embodiments, the probe card fixing jig is disposed on the inspection table body and above the projector; and the detection lens is arranged on the detection body and is positioned above the probe card fixing jig.
According to the detection table provided by the embodiment of the application, the projector is positioned below the probe card and can polish the probe card to enable the probe card to transmit light, the probe can be seen more clearly, the detection lens is positioned above the probe card and can accurately measure the length of the probe, the probe card is fixed by adopting the probe card fixing jig, the probe card can be kept in a horizontal state, the top surface of the probe card is used as a reference when the length of the probe is measured, and the top surface of the probe card is kept in a horizontal state, so that the accuracy of the measured length of the probe is higher, and the improvement of the calibration accuracy of the probe card is facilitated.
The above description is only for the specific embodiments of the present application, but the scope of the present application is not limited thereto, and any person skilled in the art can easily conceive of the changes or substitutions within the technical scope of the present application, and shall be covered by the scope of the present application. Therefore, the protection scope of the present application shall be subject to the protection scope of the claims.
Claims (8)
1. A fixture for fixing a probe card, comprising:
a base (10);
the two supporting seats (20), the two supporting seats (20) are arranged on the base (10);
a positioning substrate (30), wherein the positioning substrate (30) is fixed at the top end of the supporting seat (20), and the bottom of the positioning substrate (30) is provided with a horizontal surface (31) facing the base (10);
the driver (40), the driver (40) can be movably arranged on the supporting base (20), and the top end of the driver (40) is used for placing a probe card;
the driver (40) is used for driving the probe card to move towards the horizontal surface (31).
2. The probe card fixing jig according to claim 1, wherein the driver (40) includes a slider (41) and an adjustment knob (42);
the sliding block (41) is movably arranged on the supporting seat (20), and the adjusting knob (42) is rotatably arranged at the bottom of the sliding block (41) and used for driving the sliding block (41) to move relative to the supporting seat (20).
3. The fixture for fixing a probe card according to claim 2, wherein the adjusting knob (42) is provided with an auxiliary groove (420) on an outer surface thereof.
4. The fixture for fixing the probe card according to any one of claims 1 to 3, wherein a card slot (410) is formed at a top end of the driver (40), and the card slot (410) is used for placing the probe card.
5. The fixture for fixing a probe card according to claim 4, wherein the surface of the card slot (410) is provided with an anti-slip gasket.
6. The fixture for fixing a probe card according to claim 4, wherein the base (10) is formed with a hollow groove (50).
7. The fixture for fixing the probe card according to claim 6, wherein at least three anti-slip pads are uniformly distributed on the bottom surface of the base (10).
8. An inspection station, comprising:
the detection table comprises a detection table body, wherein a projector is arranged on the detection table body;
the probe card fixing jig according to any one of claims 1 to 7, wherein the probe card fixing jig is disposed on the inspection table body and above the projector;
the detection lens is arranged on the detection body and is positioned above the probe card fixing jig.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121012838.4U CN215909811U (en) | 2021-05-12 | 2021-05-12 | Probe card fixing jig and detection table |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121012838.4U CN215909811U (en) | 2021-05-12 | 2021-05-12 | Probe card fixing jig and detection table |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN215909811U true CN215909811U (en) | 2022-02-25 |
Family
ID=80286919
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202121012838.4U Active CN215909811U (en) | 2021-05-12 | 2021-05-12 | Probe card fixing jig and detection table |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN215909811U (en) |
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2021
- 2021-05-12 CN CN202121012838.4U patent/CN215909811U/en active Active
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