CN214795505U - Optical phased array antenna - Google Patents
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Abstract
The utility model discloses an optics phased array antenna, include: the coupling beam splitting module comprises a slab waveguide or an array waveguide and is used for coupling and splitting the input laser and outputting the split laser; the phase modulation module is used for respectively carrying out phase modulation on each beam of light output by the coupling beam splitting module; and the output coupling module is used for performing coherent coupling output on each beam of light after phase modulation. Through implementing the utility model discloses, through the joint adjustment of three module to the input laser, can export wave front power distribution adjustable light beam to this optics phased array antenna's output beam's sidelobe suppression ratio has been improved. Meanwhile, the optical phased-array antenna is provided with the slab waveguide or the array waveguide in the coupling beam splitting module, and the wide waveguide structure or the array waveguide can be efficiently coupled with the slow axis of the input laser, so that the utilization rate of the output power and the input laser is improved, and the coupling efficiency of the optical phased-array antenna is improved.
Description
Technical Field
The utility model relates to an optical communication technical field, concretely relates to optics phased array antenna.
Background
Laser radar LiDAR (Laser detection and ranging) transmits scanning Laser beams, receives reflected echoes to realize detection of distance or morphology, and is widely applied to the fields of unmanned aerial vehicles, automatic driving, environment monitoring and the like. Common schemes for laser radar to achieve beam scanning include Mechanical rotation, Micro Electro Mechanical Systems (MEMS), and Optical Phased Array (OPA).
The optical phased array technology is characterized in that a specific phase difference is generated between array waveguides through a modulation mode, rotation of a light beam angle is achieved, and compared with mechanical rotation and MEMS light beam scanning schemes, the optical phased array radar does not contain rotating elements and has the advantages of being high in scanning speed, large in scanning range, high in integration level, high in reliability, low in cost and the like.
The phase modulation principle in the optical phased array comprises electro-optic effect, thermo-optic effect and the like. The electro-optic effect can be realized by adopting materials such as liquid crystal, cool lead lanthanum titanate ceramic, lithium niobate and the like; the thermo-optic effect can be realized by adopting a silicon-based integrated optical chip and the like. The silicon-based integrated optical chip is compatible with a semiconductor CMOS (complementary metal oxide semiconductor) process, so that the integration on the light source detector chip can be realized, the structure is compact, and the cost is low. Therefore, the phased array laser radar based on the silicon-based integrated optical chip has a great market prospect.
The key indexes of the output light beam of the optical phased array chip comprise an emergent light beam divergence angle, a side lobe suppression ratio, a signal-to-noise ratio and a scanning angle. In order to achieve the purposes that only a main lobe is reserved in a far field and a grating lobe is suppressed, the output array period needs to reach the wavelength level, and meanwhile, enough side lobe suppression is required to achieve enough clear and distinguishable beam pointing. Therefore, how to improve the sidelobe suppression ratio of the optical phased array chip becomes a problem to be solved urgently in the phased array technology.
SUMMERY OF THE UTILITY MODEL
In view of this, the embodiment of the present invention provides an optical phased array antenna to solve the technical problem that the sidelobe suppression ratio cannot reach higher in the prior art.
An embodiment of the utility model provides an optical phased array antenna, include: the coupling beam splitting module comprises a slab waveguide or an array waveguide and is used for coupling and splitting input laser and outputting the coupled laser; the phase modulation module is used for respectively carrying out phase modulation on each beam of light output by the coupling beam splitting module; and the output coupling module is used for performing coherent coupling output on each beam of light after phase modulation.
Optionally, the slab waveguide is a single-input multi-output structure, and the output splitting ratio of the slab waveguide is distributed in an arbitrary function.
Optionally, the arrayed waveguide comprises a plurality of waveguides arranged at equal intervals or at unequal intervals, and the widths of the plurality of waveguides are the same or different.
Optionally, the coupling splitting module further comprises: and the beam splitting unit is connected with the slab waveguide or the array waveguide, and the beam splitting ratio of the beam splitting unit is adjustable.
Optionally, the beam splitting unit comprises: a plurality of dynamically tunable beam splitting units cascaded, the dynamically tunable beam splitting units comprising MZI interferometers or ring resonators.
Optionally, the beam splitting unit comprises: the single static beam splitting unit comprises a slab waveguide, and the cascaded static beam splitting unit comprises any one or a combination of a plurality of Y-branch, a multimode interference coupler, a directional coupler, a star coupler or a slab waveguide.
Optionally, the beam splitting unit comprises: the adjustable attenuator is connected with the output end of the static beam splitting unit.
Optionally, the adjustable attenuator comprises any one of an MZI-based optical switch, a ring resonator-based optical switch, or an absorptive attenuator.
Optionally, the output light beam of the coupling beam splitting module is a uniformly distributed light beam, and the uniformity of the output light beam is less than 0.1 dB.
Optionally, the output beam of the coupling beam splitting module is a non-uniformly distributed beam, and the output beam is gaussian distributed, bezier distributed or triangular distributed.
The utility model discloses technical scheme has following advantage:
the embodiment of the utility model provides an optics phased array antenna, through setting up coupling beam splitting module, phase modulation module and output coupling module, through the joint adjustment of three module to the input laser, can output wave front power distribution adjustable light beam to this optics phased array antenna's output beam's side lobe suppression ratio has been improved. Meanwhile, the optical phased array antenna is provided with the slab waveguide in the coupling beam splitting module, and a wide waveguide structure can be efficiently coupled with a slow axis of input laser, so that the output power of the optical phased array antenna and the utilization rate of the input laser are improved, and the coupling efficiency of the optical phased array antenna is improved.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the embodiments or the technical solutions in the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.
Fig. 1 is a block diagram of an optical phased array antenna according to an embodiment of the present invention;
fig. 2 is a schematic structural diagram of an optical phased array antenna according to an embodiment of the present invention;
fig. 3 is a schematic structural diagram of an optical phased array antenna according to another embodiment of the present invention;
fig. 4 is a schematic structural diagram of an optical phased array antenna according to another embodiment of the present invention;
fig. 5 is a schematic structural diagram of an optical phased array antenna according to another embodiment of the present invention;
fig. 6 is a schematic structural diagram of an embodiment of the present invention, based on a dynamically adjustable beam splitting unit, of an optical phased array antenna;
fig. 7 is a schematic structural diagram of an optical phased array antenna according to an embodiment of the present invention, based on a statically adjustable beam splitting unit;
fig. 8 is a schematic structural diagram of an optical phased array antenna according to an embodiment of the present invention, based on a static adjustable beam splitting unit and an adjustable attenuator;
fig. 9 is a schematic diagram of far field intensity distribution under the condition of uniform power distribution of the wave surface of the optical phased array antenna in the embodiment of the present invention;
fig. 10 is a schematic diagram of far field intensity distribution under the condition of optical phased array antenna wave surface power gaussian distribution according to an embodiment of the present invention.
Detailed Description
The technical solution of the present invention will be described clearly and completely with reference to the accompanying drawings, and obviously, the described embodiments are some, but not all embodiments of the present invention. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; the two elements may be directly connected or indirectly connected through an intermediate medium, or may be communicated with each other inside the two elements, or may be wirelessly connected or wired connected. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.
Furthermore, the technical features mentioned in the different embodiments of the invention described below can be combined with each other as long as they do not conflict with each other.
Example 1
An embodiment of the utility model provides an optical phased array antenna, include: the coupling beam splitting module 10, the coupling beam splitting module 10 includes a slab waveguide or an array waveguide, and the coupling beam splitting module 10 is configured to couple and split the input laser beam and output the split laser beam; the phase modulation module 20 is configured to perform phase modulation on each beam of light output by the coupling beam splitting module 10; and the output coupling module 30 is configured to perform coherent coupling output on each beam of light after phase modulation.
In an embodiment, the optical phased array antenna may be provided as a chip structure. Thus, a laser can be directly provided on the chip as a light source to output a laser beam. I.e. the input laser light may be output by an on-chip integrated laser. Furthermore, the input laser light may also be input by an external laser, i.e. the input laser light is output by an off-chip coupled laser. Wherein the external or on-chip integrated laser is a high power laser.
In particular, the optical phased array is an important component of a laser radar device, and long-distance detection is realized by emitting scanning laser beams, so that the output beam power is also an important parameter influencing the performance of the laser radar device. The output power is affected by the transmission loss and the coupling input optical power, the transmission loss of the device is often determined by the processing technology, and the coupling input power is affected by the output power and the coupling efficiency of the laser. Currently, single mode lasers capable of on-chip integration or off-chip fiber coupling have low output power. The higher the output power of the high-power laser, the wider the corresponding output surface and the poorer the beam quality, meanwhile, the asymmetry in the fast axis and slow axis directions causes the imbalance of the beam quality, and the slow axis direction is always accompanied with the occurrence of multiple longitudinal modes, which leads to the reduction of the coupling efficiency.
Therefore, the optical phased-array antenna is provided with the slab waveguide in the coupling beam splitting module, and the wide waveguide structure of the slab waveguide can be efficiently coupled with the slow axis of the input laser, so that the output power of the optical phased-array antenna and the utilization rate of the input laser are improved. Namely, the wide waveguide structure of the slab waveguide is beneficial to matching with the poor light beam quality of the wide emitting surface of the slow axis of the laser, and the coupling efficiency is improved. Meanwhile, the slab waveguide is set to 1x2NThe single input multiple output architecture of (1). In this case, the slab waveguide can realize not only input coupling but also a beam splitting function.
In addition, an array waveguide can be arranged in the coupling beam splitting module to realize the input coupling function. Specifically, the array waveguide and the slow axis of the light source laser are adopted to realize input coupling. The array waveguide is arranged to match with the spot mode field of the wide emitting surface of the laser. Thus, as shown in fig. 2 or fig. 3, the arrayed waveguide may include a plurality of waveguides arranged at equal intervals or at unequal intervals, the plurality of waveguides may have the same or different widths, the arrayed waveguide in fig. 2 may have the same width, and the arrayed waveguide in fig. 3 may have different widths. In one embodiment, both the arrayed waveguide and the slab waveguide can be formed in an on-chip integrated manner.
In one embodiment, the key indicators of the output beam of the optical phased array antenna include the divergence angle of the emergent beam, the side lobe suppression ratio, the signal-to-noise ratio and the scanning angle. The side lobe suppression ratio is determined by the power distribution and the phase distribution of the output beam. But in the actual preparation process, the process deviation or the non-uniformity is causedThe non-uniform power distribution of the wave surface may cause deterioration of the far-field side lobe suppression ratio. In addition, for output wave surface equipower distribution, the Fraunhofer far field intensity follows sinc (theta) along with angle change2＝sin(θ)2/θ2The function distribution and the theoretical value of the sidelobe suppression ratio are 13.3 dB. However, the sidelobe suppression ratio of the output beam of the optical phased array antenna is difficult to reach the theoretical value due to the above-mentioned manufacturing error or other reasons. Therefore, the embodiment of the utility model provides a set up coupling beam splitting module, phase modulation module and output coupling module in through optics phased array antenna, can improve the sidelobe suppression ratio.
The embodiment of the utility model provides an optics phased array antenna, through setting up coupling beam splitting module, phase modulation module and output coupling module, through the joint adjustment of three module to input laser beam, can output wave front power distribution adjustable light beam to this optics phased array antenna's output beam's sidelobe suppression ratio has been improved. Meanwhile, the optical phased array antenna is provided with the slab waveguide or the array waveguide in the coupling beam splitting module, and a wide waveguide structure can be efficiently coupled with the slow axis of the input laser, so that the output power of the optical phased array antenna and the utilization rate of the input laser are improved, and the coupling efficiency of the optical phased array antenna is improved.
As an optional implementation manner of the embodiment of the present invention, as shown in fig. 4, the slab waveguide is 1 × 2NIn the single-input multi-output structure, the output splitting ratio of the slab waveguide can be distributed in the functional forms of a Gaussian function, a trigonometric function, a Bessel function and the like. Specifically, when the slab waveguide is of a single-input multi-output structure, the slab waveguide can couple input laser light and can split the coupled laser light. When output light beams with uniform distribution (equal power distribution) are required, the beam splitting ratio of the slab waveguide can be adjusted through the arrangement of the slab waveguide structure, so that the power distribution uniformity of the output light beams of the optical phased array antenna is high, for example, the far-field sidelobe suppression ratio of the output light beams is close to the theoretical value of 13.3 dB. When the light beam with non-equal power distribution is required to be output, the light beam with non-equal power distribution can be outputThe beam splitting ratio of the flat waveguide is adjusted, so that the output light beam follows any distribution function forms such as Gaussian distribution, triangular distribution and Bessel distribution, and the output light beam with the far-field sidelobe suppression ratio superior to 20dB is obtained. In addition, when the arrayed waveguide is employed in the coupling splitting module, the arrayed waveguide can also realize 2N*2NNon-uniform coupling splitting. I.e. the functions of input coupling and splitting can also be realized by the arrayed waveguide.
As an optional implementation manner of the embodiment of the present invention, the slab waveguide is a 1 × M single input multiple output structure. Specifically, when the slab waveguide is a 1 × M single-input multi-output structure, the slab waveguide can also realize the functions of coupling with input laser and splitting a light beam in a first-order arbitrary ratio. As shown in fig. 5, in order to implement a further splitting function of the coupling splitting module, a splitting unit may be provided in the coupling splitting module. The beam splitting unit is connected with the slab waveguide, and the beam splitting ratio of the beam splitting unit is adjustable. The single-input multi-output planar waveguide realizes high-efficiency coupling with a high-power laser and primary beam splitting of energy; the beam splitting unit realizes secondary beam splitting of the light beam. Meanwhile, the array waveguide and the beam splitting unit can be cascaded, the array waveguide carries out input coupling and primary beam splitting, and the beam splitting unit carries out secondary beam splitting.
In one embodiment, as shown in fig. 6, the beam splitting unit includes: a plurality of dynamically tunable beam splitting units in cascade, the dynamically tunable beam splitting units comprising MZI interferometers or ring resonators. Specifically, the beam splitting unit may be cascaded by N-stage 1 × 2 dynamically adjustable beam splitting units. Thus, the beam splitting unit can realize 1x2NThe output beam of each output channel.
In one embodiment, as shown in fig. 7, the beam splitting unit includes: the single or cascaded static beam splitting units (the single static beam splitting unit is not shown in the figure) can output beams with the splitting ratio being equal power or unequal power distribution, the single static beam splitting unit comprises a slab waveguide, and the cascaded static beam splitting unit comprises any one of a Y-branch, a multimode interference coupler, a directional coupler, a star coupler or a slab waveguide.
In particular, the amount of the solvent to be used,when the beam splitting unit is a single static beam splitting unit, the static adjustable beam splitting unit may be in a 1 × N structure, and at this time, the coupling beam splitting module includes a slab waveguide 1 × N single-input multi-output structure. Alternatively, the coupling beam splitting module may comprise a slab waveguide as the static beam splitting unit. That is, the coupling beam splitting module only comprises one slab waveguide, and the slab waveguide is 1x2NThe single-input multi-output structure or the single-input multi-output structure only comprises one arrayed waveguide, and the slab waveguide or the arrayed waveguide plays the roles of coupling and splitting.
In particular, when the beam splitting unit is a cascaded static beam splitting unit, the cascaded structure may be a multi-stage 1 × 2 or 1 × 2MThe static beam splitting unit of (1).
In one embodiment, as shown in fig. 8, the beam splitting unit includes: the adjustable attenuator is connected with the output end of the static beam splitting unit. The adjustable attenuator comprises any one of an optical switch based on MZI, an optical switch based on a ring resonator, or an absorptive attenuator. The static beam splitting unit comprises any one of a Y-branch, a multi-mode interference coupler, a directional coupler, a star coupler or a slab waveguide.
In particular, when the beam splitting unit comprises a plurality of static beam splitting units cascaded, the plurality of static beam splitting units cascaded may be multi-stage 1 × 2 or 1 × 2MThe static beam splitting unit of (1). The adjustable attenuator is connected after the plurality of output ends of the last stage of static beam splitting unit. Therefore, on the basis of beam splitting adjustment of the static beam splitting unit, beam adjustment of each output channel of the coupling beam splitting module can be realized by the adjustable attenuator.
The far-field beam distribution of the optical phased array antenna is a diffraction light field of an emergent wave surface beam in a Fraunhofer area, so that the Fourier transform relation is satisfied between the far-field beam amplitude distribution and the emergent wave surface amplitude. When the output wave surface has equal power distribution, the far field intensity changes with the angle theta and follows sinc (A theta)2＝sin(Aθ)2/A2θ2Function distribution, wherein A is a constant related to the size of a wave surface, and the theoretical value of the sidelobe suppression ratio is 13.3 dB; but due to various error factors,leading to the side lobe suppression ratio not reaching the theoretical value. In this embodiment, the optical phased-array antenna can realize uniform distribution of output power by arranging the coupling beam splitting module, the phase modulation module and the output coupling module and adjusting the beam splitting ratio of the coupling beam splitting module, that is, 2 output by the coupling beam splitting moduleNThe power distribution with extremely high uniformity is realized in the channel, so that the far-field sidelobe suppression ratio of the output light beam is close to the theoretical value of 13.3 dB. In addition, through adjusting the splitting ratio of the coupling splitting module, non-uniform distribution of output power, such as gaussian distribution, triangular distribution or other distribution function forms, can be realized. When the output wave surface is in Gaussian distribution or is close to the Gaussian distribution, the light intensity of high spatial frequency (namely large diffraction angle) corresponding to the abrupt change of the edge light power of the output wave surface is reduced, so that the sidelobe amplitude is reduced, and the sidelobe suppression ratio can be further improved. That is, through adjusting the splitting ratio of the coupling splitting module, 2 which can be output from the coupling splitting moduleNThe channel power follows a gaussian distribution, or is close to a gaussian distribution, so that the far-field side lobe suppression ratio of the output beam is better than 20 dB.
As an optional implementation manner of the embodiment of the present invention, the optical phased array antenna includes a coupling beam splitting module, a phase modulation module, and an output coupling module. As shown in fig. 2 and 5, the coupling beam splitting module adopts a 1 × M slab waveguide or an M × M array waveguide to implement a coupling function, and then is cascaded with the beam splitting unit to finally implement a coupling beam splitting function. Or, as shown in fig. 3 and fig. 4, the coupling beam splitting module adopts a slab waveguide of 1x 2^ N or an array waveguide of 2^ N x 2^ N to realize the coupling beam splitting function, and then is connected with the phase modulation module to perform phase modulation. Therefore, when the coupling beam splitting module is determined, coupling beam splitting can be realized only by adopting the slab waveguide or the arrayed waveguide, or a mode of combining the slab waveguide (or the arrayed waveguide) and the beam splitting unit can be adopted, and the coupling beam splitting module can be determined according to the actual structure of the slab waveguide or the arrayed waveguide. Specifically, for the beam splitting unit, a plurality of dynamically adjustable beam splitting units may be adopted in cascade; single or cascaded static beam splitting units can also be adopted; the beam splitting can also be realized by adopting a mode of cascading static beam splitting units and adjustable attenuators.
As an optional implementation manner of the embodiment of the present invention, the optical phased array antenna includes a coupling beam splitting module, a phase modulation module, and an output coupling module. The coupling beam splitting module can couple and input off-chip light beams or on-chip laser, and simultaneously divide the coupled and input laser into 2 from 1 beamNAnd each beam of split light is connected to one channel of the phase modulation module, and is output to the output coupling module after being subjected to electro-optic modulation or thermo-optic modulation of the phase modulation module. The output coupling module is used for transmitting the multi-path light beams after phase modulation, so that radiation patterns are formed in a far field. The output coupling module includes an optical waveguide array or grating. The pitches of the optical waveguide arrays may be equal or unequal. The distance of the optical waveguide array can be set based on actual needs, so that grating lobes of far-field radiation patterns after being emitted by the optical waveguide array do not generate coherent superposition, only all main lobes are coherently superposed, and the far-field beam scanning range is limited by diffraction angles and reduced.
Example 2
An embodiment of the utility model provides an optics phased array antenna, this optics phased array antenna are the chip structure. In one embodiment, the chip structure comprises a substrate, a lower cladding layer, a core layer and an upper cladding layer. Wherein, the substrate is 600um thick monocrystalline silicon substrate, and the undercladding is the thick silica undercladding of 15um, and the sandwich layer is the thick silicon nitride core layer of 0.4um, and the overcladding is the thick silica overcladding of 2 um. Specifically, the coupling beam splitting module, the phase modulation module and the output coupling module in the optical phased-array antenna can be formed by processing the surface of the chip structure. The coupling beam splitting module may include a slab waveguide and a beam splitting unit. The beam splitting unit is a 1x16 path beam splitter and is formed by cascading 15 1x2 tunable optical switches, and each tunable optical switch is of an MZI structure. The phase modulation module is composed of a 16-path thermo-optic modulator. The output coupling module comprises an optical waveguide array, the width of the waveguide is 0.8um, the distance is 2um, the horizontal end face outputs, and the working wavelength is 1550 nm.
In one embodiment, 16-channel equal power output can be achieved by tuning the splitting ratioThen, the far field distribution is as shown in fig. 9, the main lobe divergence angle is 2.1 degrees, and the side lobe suppression ratio is 13.3 dB. If the power distribution of the 16 output channels is adjusted by the beam splitting ratio, the power distribution of the 16 output channels is subject to 1/e2A gaussian distribution with a width of 32um and a far-field distribution as shown in fig. 10, a main lobe divergence angle of 2.54 degrees, and a side lobe suppression ratio of 22 dB. Therefore, by adjusting the splitting ratio of the splitting unit, the wave surface unequal power distribution of the optical phased array antenna can be realized, and the far-field side lobe suppression ratio is improved.
Although the present invention has been described in detail with respect to the exemplary embodiments and the advantages thereof, those skilled in the art will appreciate that various changes, substitutions and alterations can be made to the embodiments without departing from the spirit of the invention and the scope of the invention as defined by the appended claims. For other examples, one of ordinary skill in the art will readily appreciate that the order of the process steps may be varied while maintaining the scope of the present invention.
Moreover, the scope of the present application is not intended to be limited to the particular embodiments of the process, machine, manufacture, composition of matter, means, methods and steps described in the specification. As one of ordinary skill in the art will readily appreciate from the disclosure of the present invention, processes, machines, manufacture, compositions of matter, means, methods, or steps, presently existing or later to be developed, that perform substantially the same function or achieve substantially the same result as the corresponding embodiments described herein may be utilized according to the present invention. Accordingly, the appended claims are intended to include within their scope such processes, machines, manufacture, compositions of matter, means, methods, or steps.
Claims (10)
1. An optical phased array antenna, comprising:
the coupling beam splitting module comprises a slab waveguide or an array waveguide and is used for coupling and splitting input laser and outputting the coupled laser;
the phase modulation module is used for respectively carrying out phase modulation on each beam of light output by the coupling beam splitting module;
and the output coupling module is used for performing coherent coupling output on each beam of light after phase modulation.
2. The optical phased array antenna of claim 1, wherein the slab waveguide is a single input multiple output structure, and wherein the output splitting ratios of the slab waveguide are distributed as an arbitrary function.
3. The optical phased array antenna as claimed in claim 1, wherein said arrayed waveguide comprises a plurality of waveguides arranged at equal or unequal intervals, the plurality of waveguides having the same or different widths.
4. The optical phased array antenna of claim 2 or 3, wherein the coupling splitting module further comprises: and the beam splitting unit is connected with the slab waveguide or the array waveguide, and the beam splitting ratio of the beam splitting unit is adjustable.
5. The optical phased array antenna of claim 4, wherein the beam splitting unit comprises: a plurality of dynamically tunable beam splitting units cascaded, the dynamically tunable beam splitting units comprising MZI interferometers or ring resonators.
6. The optical phased array antenna of claim 4, wherein the beam splitting unit comprises: the single static beam splitting unit comprises a slab waveguide, and the cascaded static beam splitting unit comprises any one or a combination of several of a Y branch, a multimode interference coupler, a directional coupler, a star coupler or a slab waveguide.
7. The optical phased array antenna of claim 4, wherein the beam splitting unit comprises: the adjustable attenuator is connected with the output end of the static beam splitting unit.
8. The optical phased array antenna of claim 7, wherein the tunable attenuator comprises any of an MZI-based optical switch, a ring resonator-based optical switch, or an absorptive attenuator.
9. The optical phased array antenna of claim 1, wherein the output beams of the coupling splitting module are uniformly distributed beams, and wherein the uniformity of the output beams is less than 0.1 dB.
10. The optical phased array antenna of claim 1, wherein the output beam of the coupling splitting module is a non-uniformly distributed beam, the output beam being a power arbitrary distribution function.
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