CN212095934U - Polishing white pad tiling clamp plate equipment - Google Patents
Polishing white pad tiling clamp plate equipment Download PDFInfo
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- CN212095934U CN212095934U CN202020858624.8U CN202020858624U CN212095934U CN 212095934 U CN212095934 U CN 212095934U CN 202020858624 U CN202020858624 U CN 202020858624U CN 212095934 U CN212095934 U CN 212095934U
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Abstract
The utility model discloses a polishing white pad tiling clamp plate device, which comprises an extrusion platen, wherein support columns are arranged at four corners below the extrusion platen, mounting holes are arranged above the extrusion platen, and a tiling extrusion device is arranged on the extrusion platen through the mounting holes; the flat-laying extrusion device comprises a positioning rod, a flat-laying plate, a supporting plate and a flattening device, the bottom end of the positioning rod is fixed on the flat-laying plate, the upper end of the positioning rod is fixed on the supporting plate, and the flattening device is arranged on the supporting plate. The utility model relates to a white pad tiling clamp plate equipment of polishing, extrusion spring extrusion clamp plate four corners department makes whole clamp plate pressure even, guarantees that the polishing pad atress is even, improves the roughness after the polishing pad extrudees, increases tiling efficiency, and the friction pad improves frictional force, makes the polishing pad can not shift when the extrusion, satisfies not unidimensional polishing pad and extrudees the tiling, improve equipment's versatility, increases the productivity effect.
Description
Technical Field
The utility model relates to a white pad tiling technical field of polishing specifically is a white pad tiling clamp plate equipment of polishing.
Background
In many chemical mechanical planarization processes, a polishing composition is contacted with a semiconductor wafer surface. The polishing composition chemically modifies the wafer surface to make the surface easier to clean. Fixed grinding polishing pad and the pad of taking the granule thick liquid that chemical mechanical planarization process used can get rid of the modification layer and the abandonment polishing composition of wafer for surface modification, the clearance process can repeat, until obtaining required final wafer surface property, current polishing pad needs surfacing, just can polish the material and polish, need the surface to put down after polishing pad production, current putting down, mostly be a atress, pressure is inhomogeneous, lead to polishing pad to press the unevenness, a equipment only can press a size, low in use efficiency.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a white pad tiling clamp plate equipment of polishing, extrusion spring extrusion clamp plate four corners department makes whole clamp plate pressure even, guarantees that the polishing pad atress is even, improves the roughness after the polishing pad extrusion, increases tiling efficiency, and the friction pad improves frictional force, makes the polishing pad can not shift when the extrusion, satisfies not unidimensional polishing pad and extrudees the tiling, improve equipment's versatility, increase the productivity effect, has solved the problem among the prior art.
In order to achieve the above object, the utility model provides a following technical scheme: a flat-laying pressing plate device for a polishing white pad comprises an extrusion platen, wherein supporting columns are arranged at four corners below the extrusion platen, mounting holes are formed in the upper part of the extrusion platen, and a flat-laying extrusion device is arranged on the extrusion platen through the mounting holes;
the flat-laying extrusion device comprises a positioning rod, a flat-laying plate, a supporting plate and a flattening device, wherein the bottom end of the positioning rod is fixed on the flat-laying plate, the upper end of the positioning rod is fixed on the supporting plate, and the flattening device is arranged on the supporting plate;
flattening device includes clamp plate, telescopic cylinder, telescopic link and fixed plate, and the telescopic link is connected to the clamp plate top, and the top and the output of telescopic cylinder of telescopic link are connected, and the telescopic cylinder side is installed on the fixed plate, and the screw is installed in the backup pad in the fixed plate bottom, flattening device's clamp plate below sets up the polishing pad, and the polishing pad is placed on the flat bed board.
Preferably, four groups of mounting holes are arranged, four mounting holes are arranged in each group, the four mounting holes are distributed on the extrusion bedplate in a quadrangle shape, and the area of the quadrangle among the four groups of mounting holes is sequentially increased.
Preferably, the number of the positioning rods is four, and the bottom ends of the four positioning rods penetrate through a group of mounting holes and are fixed below the extrusion bedplate through fastening nuts.
Preferably, the four corners of the pressing plate are provided with guide holes, the pressing plate penetrates through the guide holes through the positioning rods and is arranged on the positioning rods, and the bottom end of the pressing plate is provided with a layer of friction pad.
Preferably, four positioning rods between the pressing plate and the supporting plate are respectively sleeved with an extrusion spring.
Preferably, the area of four corners formed by positioning rods on a flat plate, a supporting plate and a pressing plate in the flat extrusion device is matched with the area of four corners between the second group of mounting holes.
Preferably, the area of four corners formed by positioning rods on the flat-laying plate, the supporting plate and the pressing plate in the flat-laying extrusion device is matched with the area of four corners between the mounting holes in the fourth group.
Compared with the prior art, the beneficial effects of the utility model are as follows:
1. the utility model relates to a polishing white pad tiling clamp plate equipment, the locating lever sets up four, the bottom of four locating levers passes a set of mounting hole, fix below the extrusion platen through fastening nut, the guide hole is seted up at the four corners of clamp plate, the clamp plate passes the guide hole through the locating lever and sets up on the locating lever, and the clamp plate bottom sets up a layer of friction pad, cup joint the extrusion spring on four locating levers between clamp plate and the backup pad respectively, after the polishing pad is placed on the tiling board, the telescopic cylinder operates, drive the clamp plate to push down, the clamp plate slides at the locating lever through the guide hole, extrude the polishing pad, the telescopic cylinder passes through the telescopic lever to act on the middle of the clamp plate, when pushing down, the four corners of clamp plate are extruded by the extrusion spring, make the pressure of the whole clamp plate even, guarantee that the stress of the polishing pad is even, improve the roughness after the polishing pad extrudes, increase, so that the polishing pad is not displaced when pressed.
2. And the quadrangle area grow in proper order between four group's mounting holes, in the tiling extrusion device, the quadrangle area phase-match between four corners area and the fourth group's mounting hole that the locating lever formed on backup pad and the clamp plate, when the tiling board, the area of backup pad and clamp plate becomes the biggest back, applicable large-size polishing pad extrudes the tiling, through installing not unidimensional tiling extrusion device in not unidimensional mounting hole, satisfy not unidimensional polishing pad and extrude the tiling, improve equipment's versatility, increase productivity effect.
Drawings
Fig. 1 is a schematic view of the overall structure of the present invention;
FIG. 2 is a schematic diagram of the structure of the extrusion platen of the present invention;
FIG. 3 is a schematic structural view of the flat spreading extrusion device of the present invention;
fig. 4 is a schematic view of a pressing structure of the flat spreading extrusion device of the present invention;
FIG. 5 is a schematic structural view of the pressing device of the present invention;
FIG. 6 is a schematic view of the overall structure of the second embodiment of the present invention;
fig. 7 is a schematic diagram of the three overall structures of the embodiment of the present invention.
In the figure: 1. extruding the platen; 11. a support pillar; 12. mounting holes; 2. spreading and extruding devices; 21. positioning a rod; 211. a compression spring; 22. flatly paving a plate; 23. a support plate; 24. a flattening device; 241. pressing a plate; 2411. a guide hole; 2412. a friction pad; 242. a telescopic cylinder; 243. a telescopic rod; 244. a fixing plate; 3. a polishing pad.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
The first embodiment is as follows:
referring to fig. 1-5, a polishing white pad flat pressing plate device comprises an extrusion platen 1, supporting columns 11 are installed at four corners below the extrusion platen 1, a mounting hole 12 is formed above the extrusion platen 1, a flat pressing device 2 is installed on the extrusion platen 1 through the mounting hole 12, the flat pressing device 2 comprises a positioning rod 21, a flat pressing plate 22, a supporting plate 23 and a flattening device 24, the bottom end of the positioning rod 21 is fixed on the flat pressing plate 22, the upper end of the positioning rod 21 is fixed on the supporting plate 23, the flattening device 24 is arranged on the supporting plate 23, the flattening device 24 comprises a pressing plate 241, a telescopic cylinder 242, a telescopic rod 243 and a fixing plate 244, the upper end of the pressing plate 241 is connected with the telescopic rod 243, the top end of the telescopic cylinder 243 is connected with the output end of the telescopic cylinder 242, the side end of the telescopic cylinder 242 is installed on the fixing plate 244, the bottom end of the, the polishing pad 3 is placed on a flat laying plate 22, four positioning rods 21 are arranged, the bottom ends of the four positioning rods 21 penetrate through a group of mounting holes 12 and are fixed below an extrusion platen 1 through fastening nuts, guide holes 2411 are formed at four corners of the pressing plate 241, the pressing plate 241 penetrates through the guide holes 2411 through the positioning rods 21 and is arranged on the positioning rods 21, a layer of friction pad 2412 is arranged at the bottom end of the pressing plate 241, extrusion springs 211 are respectively sleeved on the four positioning rods 21 between the pressing plate 241 and a supporting plate 23, when the polishing pad 3 is placed on the flat laying plate 22, a telescopic cylinder 242 operates to drive the pressing plate 241 to press downwards, the pressing plate 241 slides on the positioning rods 21 through the guide holes 2411 to extrude the polishing pad 3, the telescopic cylinder 242 exerts force on the middle of the pressing plate 241 through a telescopic rod 243, when the pressing is pressed downwards, the four corners of the pressing plate 241 are extruded by the extrusion springs 211, so that, the flatness of the extruded polishing pad 3 is improved, the tiling efficiency is increased, and the friction pad 2412 improves the friction force, so that the polishing pad 3 cannot shift during extrusion.
Example two:
referring to fig. 6, four sets of mounting holes 12 are provided, each set of mounting holes 12 is four, and the four sets of mounting holes 12 are distributed on the pressing platen 1 in a quadrangle shape, and the area of the quadrangle between the four sets of mounting holes 12 is sequentially increased, the area of the quadrangle formed by the positioning rods 21 on the flat laying plate 22, the supporting plate 23 and the pressing plate 241 in the flat laying pressing device 2 is matched with the area of the quadrangle between the second set of mounting holes 12, and when the areas of the flat laying plate 22, the supporting plate 23 and the pressing plate 241 are increased, the flat laying pressing device is suitable for pressing and laying.
Example three:
referring to fig. 7, four sets of mounting holes 12 are provided, each set of mounting hole 12 is four, and the four sets of mounting holes 12 are distributed on the extrusion platen 1 in a quadrangle shape, and the area of the quadrangle between the four sets of mounting holes 12 is sequentially increased, the area of the four corners formed by the positioning rods 21 on the flat laying extrusion device 2, the supporting plate 23 and the pressing plate 241 is matched with the area of the quadrangle between the fourth set of mounting holes 12, when the areas of the flat laying plate 22, the supporting plate 23 and the pressing plate 241 are maximized, the large-sized polishing pad 3 can be extruded and laid flat, and the polishing pads 3 with different sizes can be extruded and laid flat by installing the flat laying extrusion devices 2 with different sizes in the mounting holes 12 with different sizes, so that the versatility of the device is improved, and the production.
In summary, the following steps: the utility model discloses a white pad tiling clamp plate equipment of polishing, locating lever 21 sets up four, the bottom of four locating levers 21 passes a set of mounting hole 12, fix in extrusion platen 1 below through fastening nut, clamp plate 241 four corners department sets up guiding hole 2411, clamp plate 241 passes guiding hole 2411 through locating lever 21 and sets up on locating lever 21, and clamp plate 241 bottom sets up a layer friction pad 2412, cup joint extrusion spring 211 respectively on four locating levers 21 between clamp plate 241 and the backup pad 23, after polishing pad 3 is placed on tiling board 22, telescopic cylinder 242 operates, drive clamp plate 241 pushes down, clamp plate 241 slides at locating lever 21 through guiding hole 2411, extrude polishing pad 3, telescopic cylinder 242 does power through telescopic link 243 to the middle of clamp plate 241, when pushing down, extrusion spring 211 extrudees clamp plate 241 four corners department, make whole clamp plate 241 pressure even, guarantee that polishing pad 3 atress is even, improve the roughness behind the 3 extrudees of polishing pad, increase tiling efficiency, friction pad 2412 improves frictional force, make polishing pad 3 can not shift when the extrusion, and the quadrangle area grow in proper order between four groups of mounting holes 12, tiling board 22 among the tiling extrusion device 2, the quadrangle area phase-match between the four corners area that locating lever 21 formed and the fourth group of mounting holes 12 on backup pad 23 and the clamp plate 241, when tiling board 22, the area of backup pad 23 and clamp plate 241 becomes the biggest back, applicable large-size polishing pad 3 extrudes the tiling, through installing not unidimensional tiling extrusion device 2 in not unidimensional mounting hole 12, satisfy not unidimensional polishing pad 3 and extrude the tiling, improve equipment's versatility, increase productivity effect.
It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (7)
1. The utility model provides a white pad of polishing tiling clamp plate equipment, includes extrusion platen (1), its characterized in that: supporting columns (11) are installed at four corners below the extrusion bedplate (1), mounting holes (12) are formed above the extrusion bedplate (1), and a flat-laying extrusion device (2) is installed on the extrusion bedplate (1) through the mounting holes (12);
the flat laying extrusion device (2) comprises a positioning rod (21), a flat laying plate (22), a supporting plate (23) and a flattening device (24), the bottom end of the positioning rod (21) is fixed on the flat laying plate (22), the upper end of the positioning rod (21) is fixed on the supporting plate (23), and the flattening device (24) is arranged on the supporting plate (23);
flattening device (24) are including clamp plate (241), telescopic cylinder (242), telescopic link (243) and fixed plate (244), and telescopic link (243) are connected to clamp plate (241) top, and the top of telescopic link (243) is connected with the output of telescopic cylinder (242), and telescopic cylinder (242) side is installed on fixed plate (244), and screw installation is passed through on backup pad (23) in fixed plate (244) bottom, clamp plate (241) below of flattening device (24) sets up polishing pad (3), and polishing pad (3) are placed on flat board (22).
2. The polishing white pad flat platen apparatus of claim 1, wherein: four groups of mounting holes (12) are arranged, four mounting holes (12) are arranged in each group, the four mounting holes are distributed on the extrusion bedplate (1) in a quadrangular mode, and the area of the quadrangle between the four mounting holes (12) is enlarged in sequence.
3. The polishing white pad flat platen apparatus of claim 1, wherein: the four positioning rods (21) are arranged, and the bottom ends of the four positioning rods (21) penetrate through a group of mounting holes (12) and are fixed below the extrusion bedplate (1) through fastening nuts.
4. The polishing white pad flat platen apparatus of claim 1, wherein: guide holes (2411) are formed in four corners of the pressing plate (241), the pressing plate (241) penetrates through the guide holes (2411) through the positioning rod (21) and is arranged on the positioning rod (21), and a layer of friction pad (2412) is arranged at the bottom end of the pressing plate (241).
5. The polishing white pad flat platen apparatus of claim 1, wherein: four positioning rods (21) between the pressing plate (241) and the supporting plate (23) are respectively sleeved with an extrusion spring (211).
6. The polishing white pad flat platen apparatus of claim 1, wherein: the area of four corners formed by positioning rods (21) on a flat laying plate (22), a supporting plate (23) and a pressing plate (241) in the flat laying extrusion device (2) is matched with the area of four corners between the second group of mounting holes (12).
7. The polishing white pad flat platen apparatus of claim 1, wherein: the area of four corners formed by positioning rods (21) on a flat laying plate (22), a supporting plate (23) and a pressing plate (241) in the flat laying extrusion device (2) is matched with the area of four corners between the mounting holes (12) in the fourth group.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020858624.8U CN212095934U (en) | 2020-05-19 | 2020-05-19 | Polishing white pad tiling clamp plate equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020858624.8U CN212095934U (en) | 2020-05-19 | 2020-05-19 | Polishing white pad tiling clamp plate equipment |
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| Publication Number | Publication Date |
|---|---|
| CN212095934U true CN212095934U (en) | 2020-12-08 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202020858624.8U Active CN212095934U (en) | 2020-05-19 | 2020-05-19 | Polishing white pad tiling clamp plate equipment |
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| CN (1) | CN212095934U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113478336A (en) * | 2021-06-29 | 2021-10-08 | 中国科学院长春光学精密机械与物理研究所 | Device and method for manufacturing asphalt polishing pad |
-
2020
- 2020-05-19 CN CN202020858624.8U patent/CN212095934U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113478336A (en) * | 2021-06-29 | 2021-10-08 | 中国科学院长春光学精密机械与物理研究所 | Device and method for manufacturing asphalt polishing pad |
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