CN211436852U - Spin coater - Google Patents
Spin coater Download PDFInfo
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- CN211436852U CN211436852U CN201922278649.0U CN201922278649U CN211436852U CN 211436852 U CN211436852 U CN 211436852U CN 201922278649 U CN201922278649 U CN 201922278649U CN 211436852 U CN211436852 U CN 211436852U
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Abstract
The utility model provides a glue homogenizing machine, which comprises a machine body, wherein the machine body is provided with a motor, a glue dripping mechanism, a sucker and a vacuum pump, the sucker comprises a cylinder body, a top plate and a bottom plate, the bottom plate is fixedly arranged at the lower port of the cylinder body, the top plate is horizontally fixed at the upper port of the cylinder body, the top plate is provided with a plurality of air holes communicated with an air storage chamber, and the center of the bottom plate is provided with an exhaust pipe; the vacuum pumping pump is connected with a gas pipe, the upper end of the gas pipe penetrates through the exhaust pipe and extends into the gas storage chamber, a transmission cylinder is sleeved outside the gas pipe, a sealing mechanism is arranged between the transmission cylinder and the gas pipe, the transmission cylinder is in transmission connection with the motor, and the upper end of the transmission cylinder is in threaded connection with the exhaust pipe; the lower end of the exhaust tube is provided with a sealing cylinder, the sealing cylinder is provided with a truncated cone-shaped inner hole, the large end of the inner hole faces downwards, and a truncated cone-shaped elastic plug is arranged between the sealing cylinder and the transmission cylinder body. The utility model discloses can conveniently change the sucking disc fast, and do not influence the leakproofness of sucking disc, guarantee to adsorb the wafer steadily.
Description
Technical Field
The utility model belongs to the technical field of the equipment is paintd to the photoresist and specifically relates to a spin coater.
Background
The spin coater is a device which drips various glue solutions on a wafer rotating at a high speed, and the glue solutions dripped on the wafer are uniformly coated on the wafer by utilizing centrifugal force, and the thickness of a film depends on the rotating speed of the spin coater and the viscosity of the glue solution. The spin coater can be used for uniformly coating the photoresist.
The spin coater mainly comprises a sucker, a spindle motor, a vacuum pump and a glue dripping system, wherein the sucker is connected with the spindle motor and can rotate at a high speed under the driving of the spindle motor, the vacuum pump is connected with the sucker and is used for vacuumizing the sucker, a wafer can be stably fixed on the sucker under the action of suction force, and the glue dripping system is used for dripping photoresist on the wafer. The size of a sucker of the existing spin coater is fixed, the sucker can only be used for gluing wafers within a certain size range, the installation precision of the sucker is high in order to guarantee the sealing performance, and the suckers with different sizes cannot be conveniently replaced so as to be suitable for wafers of various sizes.
SUMMERY OF THE UTILITY MODEL
The utility model aims to solve the technical problem that a be convenient for change not unidimensional sucking disc is provided, and can guarantee the spin coater of leakproofness.
The utility model provides a technical scheme that its technical problem adopted is: the glue homogenizing machine comprises a machine body, wherein a motor, a glue dripping mechanism, a sucking disc and a vacuum pumping pump are arranged on the machine body,
the sucker comprises a cylinder, a top plate and a bottom plate, the cylinder is vertically arranged, the bottom plate is fixedly arranged at the lower port of the cylinder, the top plate is horizontally fixed at the upper port of the cylinder, the top plate and the bottom plate enclose an air storage chamber, a boss is arranged on the upper surface of the top plate, a plurality of air holes communicated with the air storage chamber are formed in the boss, and an exhaust pipe communicated with the air storage chamber is arranged in the center of the bottom plate;
the vacuum pumping pump is connected with a vertical gas pipe, the upper end of the gas pipe penetrates through the exhaust pipe and extends into the gas storage chamber, a transmission cylinder is sleeved outside the gas pipe, a sealing mechanism is arranged between the transmission cylinder and the gas pipe, the transmission cylinder is arranged on the machine body through a bearing and is in transmission connection with the motor, and the upper end of the transmission cylinder is inserted into the lower part of the exhaust pipe and is in threaded connection with the exhaust pipe;
the lower extreme of exhaust tube is provided with the sealed section of thick bamboo, the sealed section of thick bamboo has the hole of round platform shape, and the main aspects of hole are down, be provided with the elastic plug of round platform shape between sealed section of thick bamboo and the transmission barrel.
Further, the sealing cylinder and the exhaust tube are integrally formed.
Further, the elastic plug is a rubber plug.
Further, sealing mechanism includes the circular shape closing plate, the closing plate cover on the gas-supply pipe and with gas-supply pipe fixed connection, the fixed sealing ring that is provided with in edge of closing plate, the lower terminal surface of transmission barrel is provided with the annular seal groove of circle, and the lateral wall of seal groove is provided with annular sealed recess, the outer wall of sealing ring upper end is provided with annular elastic sealing boss, the upper end of sealing ring is located the seal groove, and elastic sealing boss is located sealed recess.
Further, the outer wall of the upper end of the sealing ring is provided with an annular positioning groove, and the elastic sealing boss is arranged in the positioning groove.
Furthermore, the elastic sealing boss is a rubber ring with a circular section.
Further, the sealing plate is connected with the gas pipe in a welding mode.
Further, the motor is connected with the transmission cylinder through a belt.
Further, the edge of the top plate is provided with a positioning ring.
The utility model has the advantages that: the exhaust tube of the sucker is in threaded connection with the transmission barrel, so that the sucker can be disassembled and assembled conveniently, and the suckers with different sizes can be replaced quickly, and the sucker can be applied to gluing wafers with different sizes. Threaded connection has certain leakproofness, and owing to set up the elasticity stopper of round platform shape, during the use, the evacuation pump takes out the inside air of exhaust tube, transmission barrel, and under the effect of external atmospheric pressure, the elasticity stopper can be more and more tight, seals completely between exhaust tube and the transmission barrel to can guarantee good sealed effect, avoid appearing leaking gas the phenomenon.
Drawings
Fig. 1 is a schematic overall sectional view of the present invention;
FIG. 2 is an enlarged view of portion A of FIG. 1;
reference numerals: 1-body; 2, a motor; 21-a transmission cylinder; 3-glue dripping mechanism; 4, a sucker; 41-cylinder body; 42-top plate; 43-a base plate; 44-an air reservoir; 45-air holes; 46-an extraction pipe; 47-sealing cylinder; 48-elastic plug; 49-a positioning ring; 410-a boss; 5, vacuumizing pump; 51-a gas pipe; 52-a sealing plate; 53-sealing ring; 54-elastic sealing boss.
Detailed Description
The present invention will be further explained with reference to the drawings and examples.
The utility model discloses a spin coater, as shown in fig. 1 and fig. 2, including organism 1, be provided with motor 2, glue dripping mechanism 3, sucking disc 4 and evacuation pump 5 on the organism 1. The machine body 1 is used for supporting other components, and the other components are arranged on the machine body 1 to form a whole. The sucking disc 4 is used for sucking the wafer to keep stable; the motor 2 is used for driving the sucker 4 to rotate, so that the wafer on the sucker 4 rotates at a high speed, and the photoresist has a larger centrifugal force when dropping on the sucker 4, and is uniformly dispersed on the surface of the whole wafer. The glue dripping mechanism 3 is used for dripping photoresist on the wafer, and the vacuum pump 5 is used for pumping air in the sucker 4 to form negative pressure so as to provide power for fixing the wafer. The motor 2, the glue dripping mechanism 3 and the vacuum pumping pump 5 are all realized by adopting the prior art.
The sucking disc 4 comprises a cylinder 41, a top plate 42 and a bottom plate 43, the cylinder 41 is vertically arranged, the bottom plate 43 is fixedly arranged at the lower end opening of the cylinder 41, the top plate 42 is horizontally fixed at the upper end opening of the cylinder 41, the top plate 42 and the bottom plate 43 enclose an air storage chamber 44, a boss 410 is arranged on the upper surface of the top plate 42, a plurality of air holes 45 communicated with the air storage chamber 44 are formed in the boss 410, and an air exhaust pipe 46 communicated with the air storage chamber 44 is arranged at the center of the bottom plate 43. The cylinder 41, the top plate 42, the bottom plate 43 and the exhaust pipe 46 can be fixedly connected by welding or integrally formed by casting with a mold, so as to ensure air tightness.
The vacuum pumping pump 5 is connected with a vertical air pipe 51, the upper end of the air pipe 51 penetrates through the air pumping pipe 46 and extends into the air storage chamber 44, the vacuum pumping pump 5 can pump air out of the air storage chamber 44 through the air pipe 51 to enable negative pressure to be formed in the air storage chamber 44, the wafer is placed on the upper surface of the top plate 42, and the wafer can be fixed on the top plate 42 under the action of outside air pressure.
The boss 410 is arranged on the upper surface of the top plate 42, the boss 410 is used for placing and adsorbing a wafer, when glue is dripped, part of glue solution can fly out of the wafer under the action of centrifugal force, and the upper surface of the boss 410 is higher than the upper surface of the top plate 42, so that the flying glue solution is prevented from being adhered to an adsorption surface for adsorbing the wafer.
The transmission cylinder 21 is sleeved outside the air pipe 51, and a sealing mechanism is arranged between the transmission cylinder 21 and the air pipe 51 to prevent outside air from entering the transmission cylinder 21 through the lower end of the transmission cylinder 21 to affect the sealing performance. The transmission cylinder 21 is mounted on the machine body 1 through a bearing and is in transmission connection with the motor 2, and the upper end of the transmission cylinder 21 is inserted into the lower part of the exhaust pipe 46 and is in threaded connection with the exhaust pipe 46. When the motor 2 rotates, the driving cylinder 21 is driven to rotate, and the driving cylinder 21 drives the whole sucking disc 4 to rotate through the exhaust tube 46, so as to drive the wafer on the surface of the sucking disc 4 to rotate. The transmission cylinder 21 is in threaded connection with the exhaust tube 46, so that the assembly and disassembly are very convenient, and the suckers 4 with different sizes can be quickly replaced. In addition, the threaded connection has certain tightness, and air leakage at the connection part is prevented.
In order to further prevent air leakage at the joint of the transmission cylinder 21 and the exhaust tube 46, a sealing cylinder 47 is arranged at the lower end of the exhaust tube 46, the sealing cylinder 47 is provided with a truncated cone-shaped inner hole, the large end of the inner hole faces downwards, and a truncated cone-shaped elastic plug 48 is arranged between the sealing cylinder 47 and the transmission cylinder 21. The elastic plug 48 is made of a material with certain elasticity, such as a cork plug, a rubber plug, etc., and is sleeved outside the transmission cylinder 21 and is in sliding fit with the transmission cylinder 21, and fills a space between the transmission cylinder 21 and the sealing cylinder 47. During the installation, with the elasticity stopper 48 slide to in the sealed cylinder 47 can, the elasticity stopper 48 leakproofness is relatively poor this moment, when the connecting thread of transmission barrel 21 and exhaust tube 46 leaks gas, elasticity stopper 48 then can be automatic upwards slip under the effect of external atmospheric pressure, until will seal the space between a sealed cylinder 47 and the transmission barrel 21 completely sealed, can guarantee sealed effect.
The sealing cylinder 47 is integrally formed with the suction pipe 46 to ensure the connection strength.
The sealing mechanism can adopt various existing sealing structures for sealing the rotating shaft, such as flexible sealing rings and the like, and as a preferred technical scheme, the sealing mechanism comprises a circular sealing plate 52, the sealing plate 52 is sleeved on the air conveying pipe 51 and is fixedly connected with the air conveying pipe 51, and the specific sealing plate 52 can be welded with the air conveying pipe 51. The edge of the sealing plate 52 is fixedly provided with a sealing ring 53, and the sealing ring 53 can be integrally formed with the sealing plate 52. The lower terminal surface of transmission barrel 21 is provided with annular seal groove, and the inside wall of seal groove is provided with annular sealed recess, the outer wall of sealing ring 53 upper end is provided with annular elastic seal boss 54, the upper end of sealing ring 53 is located the seal groove, and elastic seal boss 54 is located sealed recess. The sealing ring 53 and the sealing groove form a first seal, and the sealing ring 53 and the sealing groove form a second seal, so that a good sealing effect is ensured.
The elastic sealing boss 54 may be made of plastic or elastic metal, and preferably, the elastic sealing boss 54 is a rubber ring with a circular cross section. In order to stably position the rubber ring, the outer wall of the upper end of the sealing ring 53 is provided with an annular positioning groove in which the elastic sealing boss 54 is disposed.
The motor 2 is connected with the transmission cylinder 21 through a belt, and connecting pieces such as gears and the like can be adopted to connect the main shaft of the motor 2 with the transmission cylinder 21.
The edge of the top plate 42 is provided with a positioning ring 49, so that when the wafer-positioning device is used, the wafer is positioned in the positioning ring 49, and a certain positioning effect is achieved, so that the wafer is prevented from flying out due to poor adsorption.
When the suction cup 4 needs to be replaced, the driving cylinder 21 is held by one hand to prevent the driving cylinder 21 from rotating, the suction tube 46 is rotated by one hand to separate the suction tube 46 from the driving cylinder 21, the elastic plug 48 is slid downwards, then a new suction cup 4 is installed, and the elastic plug 48 is slid upwards into the sealing cylinder 47.
To sum up, the utility model discloses can conveniently change sucking disc 4 fast to be applicable to the glue dripping of the wafer of multiple size, and do not influence sucking disc 4's leakproofness, guarantee to adsorb the wafer steadily.
Claims (9)
1. Spin coater, including organism (1), be provided with motor (2), glue dripping mechanism (3), sucking disc (4) and evacuation pump (5) on organism (1), its characterized in that:
the sucker (4) comprises a cylinder body (41), a top plate (42) and a bottom plate (43), the cylinder body (41) is vertically arranged, the bottom plate (43) is fixedly arranged at the lower port of the cylinder body (41), the top plate (42) is horizontally fixed at the upper port of the cylinder body (41), the top plate (42) and the bottom plate (43) enclose an air storage chamber (44), a boss (410) is arranged on the upper surface of the top plate (42), a plurality of air holes (45) communicated with the air storage chamber (44) are formed in the boss (410), and an air exhaust pipe (46) communicated with the air storage chamber (44) is arranged at the center of the bottom plate (43);
the vacuum pump (5) is connected with a vertical air conveying pipe (51), the upper end of the air conveying pipe (51) penetrates through the air exhaust pipe (46) and extends into the air storage chamber (44), a transmission cylinder body (21) is sleeved outside the air conveying pipe (51), a sealing mechanism is arranged between the transmission cylinder body (21) and the air conveying pipe (51), the transmission cylinder body (21) is installed on the machine body (1) through a bearing and is in transmission connection with the motor (2), and the upper end of the transmission cylinder body (21) is inserted into the lower part of the air exhaust pipe (46) and is in threaded connection with the air exhaust pipe (46);
the lower extreme of exhaust tube (46) is provided with sealed section of thick bamboo (47), sealed section of thick bamboo (47) have the hole of round platform shape, and the main aspects of hole are down, be provided with round platform shape elastic plug (48) between sealed section of thick bamboo (47) and transmission barrel (21).
2. The spin coater of claim 1, wherein: the sealing cylinder (47) and the exhaust pipe (46) are integrally formed.
3. The spin coater of claim 1, wherein: the elastic plug (48) is a rubber plug.
4. The spin coater of claim 1, wherein: sealing mechanism includes circular shape closing plate (52), closing plate (52) cover on gas-supply pipe (51) and with gas-supply pipe (51) fixed connection, the fixed sealing ring (53) that is provided with in edge of closing plate (52), the lower terminal surface of transmission barrel (21) is provided with the annular seal groove of circle, and the lateral wall of seal groove is provided with annular sealed recess, the outer wall of sealing ring (53) upper end is provided with annular elastic sealing boss (54), the upper end of sealing ring (53) is located the seal groove, and elastic sealing boss (54) are located sealed recess.
5. The spin coater of claim 4 wherein: the elastic sealing boss (54) is a rubber ring with a circular section.
6. The spin coater of claim 5, wherein: the outer wall of the upper end of the sealing ring (53) is provided with an annular positioning groove, and the elastic sealing boss (54) is arranged in the positioning groove.
7. The spin coater of claim 4 wherein: the sealing plate (52) is connected with the air pipe (51) in a welding way.
8. The spin coater of claim 1, wherein: the motor (2) is connected with the transmission cylinder (21) through a belt.
9. The spin coater of claim 1, wherein: and a positioning ring (49) is arranged at the edge of the top plate (42).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922278649.0U CN211436852U (en) | 2019-12-17 | 2019-12-17 | Spin coater |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922278649.0U CN211436852U (en) | 2019-12-17 | 2019-12-17 | Spin coater |
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| Publication Number | Publication Date |
|---|---|
| CN211436852U true CN211436852U (en) | 2020-09-08 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201922278649.0U Active CN211436852U (en) | 2019-12-17 | 2019-12-17 | Spin coater |
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| CN (1) | CN211436852U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112151419A (en) * | 2020-09-15 | 2020-12-29 | 南京博纺瑞电子商务有限公司 | Environmental protection equipment capable of automatically adjusting glue homogenizing amount according to chip size |
| CN113399837A (en) * | 2021-07-09 | 2021-09-17 | 北京航空航天大学 | Diaphragm type compressor diaphragm laser four-axis finishing equipment |
| CN116078625A (en) * | 2023-04-13 | 2023-05-09 | 三河建华高科有限责任公司 | Ultra-thin substrate adsorption structure and even machine of gluing |
-
2019
- 2019-12-17 CN CN201922278649.0U patent/CN211436852U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112151419A (en) * | 2020-09-15 | 2020-12-29 | 南京博纺瑞电子商务有限公司 | Environmental protection equipment capable of automatically adjusting glue homogenizing amount according to chip size |
| CN112151419B (en) * | 2020-09-15 | 2021-05-18 | 简胜坚 | Environmental protection equipment capable of automatically adjusting glue homogenizing amount according to chip size |
| CN113399837A (en) * | 2021-07-09 | 2021-09-17 | 北京航空航天大学 | Diaphragm type compressor diaphragm laser four-axis finishing equipment |
| CN116078625A (en) * | 2023-04-13 | 2023-05-09 | 三河建华高科有限责任公司 | Ultra-thin substrate adsorption structure and even machine of gluing |
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