CN210564953U

CN210564953U - Installation box structure of cryogenic pump

Info

Publication number: CN210564953U
Application number: CN201921213821.8U
Authority: CN
Inventors: 李伟; 韦鹤兴; 韦达; 谢巍
Original assignee: Zhejiang Tailian Low Temperature Technology Co Ltd
Current assignee: Zhejiang Tailian Low Temperature Technology Co Ltd
Priority date: 2019-07-30
Filing date: 2019-07-30
Publication date: 2020-05-19
Anticipated expiration: 2029-07-30

Abstract

The utility model discloses an installation box structure of a cryopump, which comprises an installation box body, the cryopump and a heat dissipation mechanism, the bottom end in the installation box body is provided with a shock absorption seat, a cavity is arranged between the shock absorption seat and the installation box body, a plurality of rubber columns are arranged at intervals in the cavity, the two ends of the rubber columns are respectively fixedly connected with the shock absorption seat and the installation box body, the outer parts of the rubber columns are sleeved with a shock absorption spring, an installation shell of the cryopump is arranged on the top surface of the shock absorption seat through a fixing bolt, the heat dissipation mechanism comprises a motor, an output shaft of the motor is connected with a driving wheel, the driving wheel is connected with a driven wheel through a synchronous belt, the driving wheel and the driven wheel are respectively sleeved with a first rotating shaft and a second rotating shaft, the outer part of the first rotating shaft is sleeved with a plurality of fixing seats, the fixing seats are connected with blades, the second rotating shaft, the shock attenuation is effectual, reduces the damage of equipment.

Description

Installation box structure of cryogenic pump

Technical Field

The utility model relates to an installation box technical field specifically is a cryopump's installation box structure.

Background

Cryopumps are vacuum pumps that condense gases using cryogenic surfaces, also known as condensate pumps. The cryopump can obtain clean vacuum with the maximum pumping speed and the minimum limiting pressure, and is widely applied to the research and production of semiconductors and integrated circuits, the research and production of molecular beams, vacuum coating equipment, vacuum surface analysis instruments, ion implanters, space simulation devices and the like.

At present, the cryopump can use the installing support to install usually, perhaps directly install the cryopump inside the box, common installation box structure majority on the market all is single setting up the radiating hole and dispels the heat to the inside heat of installation box, such radiating efficiency is low, and the cryopump is installed inside the installation box, in the in-service use process, the refrigerator or the drive arrangement of cryopump produce vibration sense easily when using, influence the holistic use of equipment and installation steadiness easily, in order to solve above-mentioned problem, consequently, design the installation box structure of a cryopump.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide an installation box structure of cryopump to solve the problem that proposes among the above-mentioned background art.

In order to achieve the above object, the utility model provides a following technical scheme: a mounting box body structure of a cryogenic pump comprises a mounting box body, the cryogenic pump and a heat dissipation mechanism, wherein four corners of the bottom outside the mounting box body are fixedly connected with supporting legs, the bottom inside the mounting box body is provided with a shock absorption seat, a cavity is arranged between the shock absorption seat and the mounting box body, a plurality of rubber columns are arranged at intervals inside the cavity, two ends of each rubber column are respectively and fixedly connected with the shock absorption seat and the mounting box body, the outer part of each rubber column is sleeved with a shock absorption spring, a mounting shell of the cryogenic pump is mounted on the top surface of the shock absorption seat through a fixing bolt, the heat dissipation mechanism comprises a motor, an output shaft of the motor is connected with a driving wheel, the driving wheel is connected with a driven wheel through a synchronous belt, the driving wheel and the driven wheel are respectively sleeved with a first rotating shaft and a second, the top end of the second rotating shaft is connected with the fan blades.

Further, the installation box top surface is equipped with a plurality of bleeder vents, just the bleeder vent externally mounted of installation box has mesh formula protection casing, the protection casing top is equipped with rainshelter, rainshelter passes through a plurality of support frames and installs in installation box top, just rainshelter bottom both sides limit is equipped with the baffle.

Furthermore, the supporting legs are of L-shaped structures and are mounted on the ground through fixing bolts.

Furthermore, the two ends of the shock absorption seat are installed on the bottom surface of the installation box body through fixing bolts.

Furthermore, first pivot and second pivot set up inside the installation box, first pivot sets up in the cryopump top, the flabellum that the second pivot is connected is close to in cryo-pump's refrigerator drive arrangement one side.

Compared with the prior art, the beneficial effects of the utility model are that:

1. the utility model discloses a set up damping spring, rubber column, shock attenuation seat in the installation box and be convenient for bear the weight of the installation cryopump, effectively cushion the vibration sense that the cryopump produced when using when guaranteeing that the cryopump is installed firm, the shock attenuation is effectual, reduces the damage of equipment, and effectively increase the mounting height of installation box through the supporting legs that sets up L type at the installation box, reduces the rainwater and infiltrates the installation box inside;

2. the utility model has the advantages that through the arrangement of the heat dissipation mechanism, the blades on the first rotating shaft and the blades of the second rotating shaft are utilized to simultaneously and rapidly dissipate heat of a plurality of angles of the cryopump, so that the heat dissipation efficiency is high, and the heat dissipation effect is better; the mesh type protective cover is arranged to ensure that dust and impurities are reduced to enter the installation box body while heat is dissipated, and the installation box body placed outdoors is further protected by the arrangement of the rain shelter.

Drawings

Fig. 1 is a schematic structural view of the present invention;

FIG. 2 is a schematic view of the structure of the shock absorbing seat of the present invention;

fig. 3 is a schematic structural view of the heat dissipation mechanism of the present invention.

In the figure: 1. supporting legs; 2. installing a box body; 3. a cavity; 4. a damping spring; 5. a rubber column; 6. a shock absorbing seat; 7. a cryopump; 8. a baffle plate; 9. a heat dissipation mechanism; 10. a support frame; 11. a rain shelter; 12. a mesh-type protective cover; 13. a motor; 14. a driving wheel; 15. a first rotating shaft; 16. a blade; 17. a fixed seat; 18. a fan blade; 19. a second rotating shaft; 20. a synchronous belt; 21. a driven wheel.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

In the description of the present invention, it should be noted that the terms "vertical", "upper", "lower", "horizontal", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the device or element referred to must have a specific orientation, be constructed in a specific orientation, and be operated, and thus should not be construed as limiting the present invention.

In the description of the present invention, it should also be noted that, unless otherwise explicitly specified or limited, the terms "disposed," "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood according to specific situations by those skilled in the art.

Referring to fig. 1-3, the present invention provides a technical solution: an installation box body structure of a cryogenic pump comprises an installation box body 2, a cryogenic pump 7 and a heat dissipation mechanism 9, wherein four corners of the bottom end outside the installation box body 2 are fixedly connected with supporting legs 1, the bottom end inside the installation box body 2 is provided with a damping seat 6, a cavity 3 is arranged between the damping seat 6 and the installation box body 2, a plurality of rubber columns 5 are arranged inside the cavity 3 at intervals, two ends of each rubber column 5 are respectively and fixedly connected with the damping seat 6 and the installation box body 2, a damping spring 4 is sleeved outside each rubber column 5, an installation shell of the cryogenic pump 7 is installed on the top surface of the damping seat 6 through a fixing bolt, the heat dissipation mechanism 9 comprises a motor 13, an output shaft of the motor 13 is connected with a driving wheel 14, the driving wheel 14 is connected with a driven wheel 21 through a synchronous belt 20, the driving wheel 14 and the driven wheel 21 are respectively sleeved, a plurality of fixing seats 17 are sleeved outside the first rotating shaft 15 at intervals, the fixing seats 17 are fixedly connected with the blades 16, and the top end of the second rotating shaft 19 is connected with the blades 18.

Further, 2 top surfaces of installation box are equipped with a plurality of bleeder vents, just the bleeder vent externally mounted of installation box 2 has mesh formula protection casing 12, protection casing 12 top is equipped with rainshelter 11, rainshelter 11 is installed in 2 tops of installation box through a plurality of support frames 10, just 11 bottom both sides limit of rainshelter is equipped with baffle 8.

Furthermore, the supporting legs 1 are of an L-shaped structure, and the supporting legs 1 are mounted on the ground through fixing bolts.

Further, two ends of the shock absorbing seat 6 are mounted on the bottom surface of the mounting box 2 through fixing bolts.

Further, the first rotating shaft 15 and the second rotating shaft 19 are arranged inside the installation box body 2, the first rotating shaft 15 is arranged at the top of the cryogenic pump 7, and the fan blade 18 connected with the second rotating shaft 19 is close to one side of the refrigerator driving device of the cryogenic pump 7.

The working principle is as follows: in the actual use process, the supporting legs 1 of the installation box body 2 are installed on the ground through fixing bolts, the L-shaped supporting legs 1 effectively increase the installation height of the installation box body 2, and rainwater is prevented from permeating into the installation box body 2; the cryogenic pump 7 is arranged on the shock absorption seat 6 of the installation box body 2, when the cryogenic pump 7 runs, the vibration generated by the work of the cryogenic pump 7 is effectively buffered through the shock absorption spring 4 and the rubber column 5 which are arranged in the cavity 3 between the shock absorption seat 6 and the installation box body 2, the shock absorption effect is good, the damage of equipment is reduced, and the cryogenic pump 7 is stably installed; when the low-temperature pump 7 runs for a long time to generate large heat, the motor 13 of the heat dissipation mechanism 9 is started to drive the blades 16 on the first rotating shaft 15 and the blades 18 of the second rotating shaft 19 to simultaneously carry out multi-angle rapid heat dissipation treatment on the low-temperature pump 7, the heat dissipation efficiency is high, the heat dissipation effect is better, the heat inside the installation box body 2 is accelerated to be discharged outwards from the air holes in the top surface of the installation box body 2, and the arrangement of the mesh type protective cover 12 effectively ensures that dust and impurities are reduced to enter the installation box body 2 while heat is dissipated; when outdoor use is arranged in to installation box 2, effectively keep off the rain to installation box 2 sunshade through setting up of rainshelter 11 and baffle 8, strengthen the protection to installation box 2, the utility model discloses compact structure, reasonable in design is fit for using widely.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims

1. The mounting box body structure of the cryogenic pump comprises a mounting box body (2), the cryogenic pump (7) and a heat dissipation mechanism (9), and is characterized in that four corners of the outer bottom end of the mounting box body (2) are fixedly connected with supporting legs (1), the inner bottom end of the mounting box body (2) is provided with a shock absorption seat (6), a cavity (3) is arranged between the shock absorption seat (6) and the mounting box body (2), a plurality of rubber columns (5) are arranged in the cavity (3) at intervals, two ends of each rubber column (5) are respectively and fixedly connected with the shock absorption seat (6) and the mounting box body (2), a shock absorption spring (4) is sleeved outside each rubber column (5), a mounting shell of the cryogenic pump (7) is mounted on the top surface of the shock absorption seat (6) through a fixing bolt, the heat dissipation mechanism (9) comprises a motor (13), and an output shaft of the motor (13) is, the driving wheel (14) is connected with a driven wheel (21) through a synchronous belt (20), the driving wheel (14) and the driven wheel (21) are respectively sleeved with a first rotating shaft (15) and a second rotating shaft (19), a plurality of fixing seats (17) are sleeved at the outer interval of the first rotating shaft (15), the fixing seats (17) are fixedly connected with blades (16), and the top ends of the second rotating shafts (19) are connected with fan blades (18).

2. A mounting box structure of a cryopump as claimed in claim 1, wherein: install box (2) top surface and be equipped with a plurality of bleeder vents, just the bleeder vent externally mounted of installation box (2) has mesh formula protection casing (12), protection casing (12) top is equipped with rainshelter (11), rainshelter (11) are installed in installation box (2) top through a plurality of support frames (10), just rainshelter (11) bottom both sides limit is equipped with baffle (8).

3. A mounting box structure of a cryopump as claimed in claim 1, wherein: the supporting legs (1) are of L-shaped structures, and the supporting legs (1) are installed on the ground through fixing bolts.

4. A mounting box structure of a cryopump as claimed in claim 1, wherein: and two ends of the shock absorption seat (6) are installed on the bottom surface of the installation box body (2) through fixing bolts.

5. A mounting box structure of a cryopump as claimed in claim 1, wherein: first pivot (15) and second pivot (19) set up inside installation box (2), first pivot (15) set up in cryogenic pump (7) top, flabellum (18) that second pivot (19) are connected are close to in cryogenic pump (7) refrigerator drive arrangement one side.