CN210155422U

CN210155422U - Multi-facet scanner comprising photodetector

Info

Publication number: CN210155422U
Application number: CN201921228346.1U
Authority: CN
Inventors: 不公告发明人
Original assignee: Suzhou Yibolun Photoelectric Instrument Co Ltd
Current assignee: Suzhou Yibolun Photoelectric Instrument Co Ltd
Priority date: 2019-03-19
Filing date: 2019-07-31
Publication date: 2020-03-17
Anticipated expiration: 2029-07-31
Also published as: CN111722407A; CN210155429U; CN210155428U; CN210155423U; CN210155427U; CN210166579U; CN210166580U; CN111722406A; CN210573035U; CN210155424U; CN210155425U; CN111722405A; CN210243982U; CN210155426U; CN210166581U

Abstract

The utility model relates to a photoelectric detection and optical imaging technical field specifically disclose a multiaspect scanner containing photoelectric detector, including the driver, the driver is fixed with a plurality of scanning subassemblies along circumference, and the scanning subassembly includes fixed connection's photoelectric detector, ultrathin slice, light filtering film and top layer film in proper order, and photoelectric detector fixes on the driver, and top layer film is polarization beam splitting film or dichroic mirror film. The multi-surface scanner in the scheme can reduce the volume of each element so as to reduce the volume of the system.

Description

Multi-facet scanner comprising photodetector

Technical Field

The utility model relates to a photoelectric detection and optical imaging technical field especially relate to a multiaspect scanner that contains photoelectric detector.

Background

In the field of laser scanning and photoelectric detection, such as bar code readers, laser scanning microscopes, laser radars (LIDAR) and the like, a scanner is often required to rapidly change the direction of a light beam and project the light beam onto an observed object, and after reflected light or backscattered light or excited emission light of the observed object is collected through a lens, a photoelectric detector completes photoelectric conversion and finally realizes detection. Commonly used scanners are galvanometer mirrors, resonant scanners (e.g., Products of Cambridge Technology and Electro-Optical Products corp. inc.), polyhedral (Polygon) scanners, Micro Electro Mechanical Systems (MEMS) scanners based on various driving principles, and the like.

Commonly used photodetectors include photodiodes, phototriodes, phototubes, solid-state photodetectors, and the like. The system structure based on the light source-scanner-lens (optional) -observed object-lens-scanner (optional) -photoelectric detector scheme is too complex and large for some applications with very high requirements on equipment volume, such as micro laser radar modules, micro scanning microscopes (including ultra-compact table scanning microscopes, handheld scanning microscopes, experimental animal head-mounted scanning microscopes, endoscopes and the like), and the like, and the system cannot be reduced in volume by reducing all elements, and is unchanged in use, movement and installation.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a reduce each component volume thereby reduce multiaspect scanner that contains photoelectric detector of system's volume.

In order to achieve the above purpose, the technical scheme of the utility model is that: the utility model provides a multiaspect scanner that contains photoelectric detector, includes the driver, and the driver is fixed with a plurality of scanning subassemblies along circumference, and scanning subassembly is including photoelectric detector, ultrathin slice, filtering film and the top layer film of fixed connection in proper order, and photoelectric detector fixes on the driver, and the top layer film is polarization beam splitting film or dichroic mirror film.

The beneficial effect of this scheme does:

1. when the mirror surface in the scheme is used for reflecting light, when the reflected light and the incident light of a scanner used for a micro laser radar module and other objects to be observed have the same wavelength, the polarization light splitting film is used as a surface film and is used for reflecting the incident S linearly polarized light, the polarization direction of the S linearly polarized light after reflection passes through the external wave plate rotates again, the S linearly polarized light and the P linearly polarized light (mainly P linearly polarized light) are formed after the S linearly polarized light and the P linearly polarized light rotate again after the S linearly polarized light pass through the external wave plate after reflection by the object to be observed, and only the P linearly polarized light in the mixed light can pass through the polarization light splitting film and is filtered by the filter film to irradiate on the photoelectric detector to realize photoelectric conversion.

The scanner in the scheme can realize four functions of separating excitation light and emitted light, changing the reflection angle of the excitation light to realize scanning, filtering the excitation light and carrying out photoelectric conversion, does not need four independent devices to realize the four functions respectively, can reduce the number of the devices in the miniature imaging probe, and reduces the volume and the weight of the miniature imaging probe.

2. When the scanner in the scheme is used for the micro scanning microscope and other objects to be observed, excitation light and emission light have different wavelengths, the dichroic mirror film is used as a surface film, the dichroic mirror film is used for reflecting the excitation light to the objects to be observed, the emission light excited by the objects to be observed penetrates through the dichroic mirror film, the filter film is used for filtering out residual excitation light, and the photoelectric detector receives the emission light of the filter film penetrating through the filter film to realize photoelectric conversion.

3. When scanning and imaging, in order to ensure that a two-dimensional image can be formed, multi-point scanning is needed in unit time, so that a scanning assembly needs to deflect continuously to complete scanning for a plurality of times; however, the scanner in the scheme comprises a plurality of scanning assemblies, during scanning, the scanning assemblies only need to rotate by a small angle to enable the next scanning assembly to scan a point to be scanned, the rotating speed of the scanning assemblies can be slightly slow, and therefore the requirement on the driving part is lower than that of a scanner only provided with one scanning assembly.

Further, the driver is prismatic and the cross section of the driver in the radial direction is an equilateral polygon.

The beneficial effect of this scheme does: the plurality of mirror surfaces can be uniformly arranged on the side wall of the driver, and because the size of each side wall of the driver is equal, the size of the plurality of mirror surfaces can also be set to be equal, so that the processing and the use are convenient.

Further, the section of the driver along the radial direction is an equilateral hexagon.

The beneficial effect of this scheme does: the driver in the scheme comprises six side walls, six scanning assemblies can be arranged, and the processing difficulty of the driver is lower than that of the driver provided with more scanning assemblies when enough scanning assemblies are used for detection.

Furthermore, a rotating shaft is coaxially fixed at the end part of the driver.

The beneficial effect of this scheme does: the driver needs to rotate in the use process, the rotating shaft is fixed on the driver, the driver does not need to be fixed with an external rotating part in the installation process, and the installation is more convenient.

Furthermore, the number of the rotating shafts is two, and the rotating shafts are respectively positioned at two ends of the driver.

The beneficial effect of this scheme does: the two rotating shafts are respectively positioned at the two ends of the driver, and can be stressed, and the two ends of the driver are stressed uniformly and cannot be inclined.

Further, the ultrathin sheet is axially symmetric in shape.

The beneficial effect of this scheme does: the ultrathin slice in the scheme is more convenient to process.

Further, the ultrathin sheet is rectangular.

The beneficial effect of this scheme does: the lateral wall of driver is the rectangle, compares with the ultrathin slice that has arc edge such as circular, oval, and the ultrathin slice in this scheme is the same for the lateral wall shape of rectangle and driver, and under the same condition of lateral wall size of driver, the lateral wall of the better cover driver of ultrathin slice ability in this scheme avoids appearing not having the space of ultrathin slice.

Further, the filter film is axially symmetric.

The beneficial effect of this scheme does: the processing of the filtering film is more convenient.

Further, the filter film is rectangular.

The beneficial effect of this scheme does: the filter film can better cover the side wall of the driver, and a gap without the filter film is avoided.

Furthermore, one side of the ultrathin sheet, which is far away from the photoelectric detector, is provided with an annular groove, the groove is positioned at the edge of the ultrathin sheet, and the filtering film and the surface film are positioned on the inner side of the groove.

The beneficial effect of this scheme does: in the processing process, due to the existence of the groove, the fact that the filtering film and the polarization splitting film are fixed to the periphery of the ultrathin sheet can be avoided, and the processing difficulty is reduced.

Drawings

Fig. 1 is a schematic perspective view of embodiment 1 of the present invention;

FIG. 2 is a schematic diagram of a scanner application of the present invention;

FIG. 3 is a schematic diagram of the operation of the scanner of the present invention;

fig. 4 is a schematic perspective view of embodiment 2 of the present invention;

fig. 5 is a schematic diagram of the operation of the scanner in embodiment 2 of the present invention;

fig. 6 is a schematic perspective view of embodiment 3 of the present invention.

Detailed Description

The following is further detailed by way of specific embodiments:

reference numerals in the drawings of the specification include: the device comprises a photoelectric detector 1, a polarization splitting film 2.1a, a dichroic mirror film 2.1b, an ultrathin sheet 2.2, a light filtering film 2.3, a groove 2.4, a driver 3 and a rotating shaft 4.

Example 1

A multi-facet scanner including a photodetector, as shown in fig. 1, includes a driver 3, the driver 3 in this embodiment is a Micro Electro-Mechanical System (MEMS), specifically, a surface Micro-machining process soi MEMS of memcap company is adopted, the driver 3 in this embodiment is hexagonal prism, the cross section of the driver 3 in the radial direction is an equilateral hexagon, and the upper and lower ends of the driver 3 are coaxially bonded and fixed with a rotating shaft 4. Six lateral walls of driver 3 all are equipped with scanning assembly, and scanning assembly is including the photoelectric detector 1, ultrathin piece 2.2, light filtering film 2.3 and the polarization beam splitting film 2.1a that set gradually, and wherein photoelectric detector 1 is fixed with the bonding of driver 3, and photoelectric detector 1 passes through the electric wire and is connected with external computer.

The photodetector 1 may be a photodiode, a phototriode, a photomultiplier, a charge coupled device, or a metal-semiconductor oxide device, and specifically, the photodetector 1 in this embodiment is a photodiode. The ultrathin sheet 2.2 and the filter film 2.3 are both in an axisymmetric shape, specifically, the ultrathin sheet 2.2 and the filter film 2.3 in this embodiment are both rectangular, and the ultrathin sheet 2.2 is bonded and fixed with the photodetector 1.

The ultrathin sheet 2.2 is made of a material having a transmittance of 50% or more for light with a wavelength of 390nm to 1720nm, specifically, the ultrathin sheet 2.2 is made of one or a mixture of optical glass, a high molecular polymer or a semiconductor material, and the ultrathin sheet 2.2 in this embodiment is made of an optical glass material. Wherein the filter film 2.3 and the polarization light splitting film 2.1a are optical films which are sequentially plated on the ultrathin sheet 2.2.

The specific working process of the scanner in this embodiment is as follows:

as shown in fig. 1, fig. 2 and fig. 3, the utility model is used for reflection light and the incident light of observed object such as miniature laser radar module have the same wavelength, the S line polarization that external light source sent is through the external lens collimation after, reflect by polarization beam splitting film 2.1a, change the polarization direction of line polarization by external wave plate again, it makes the polarization direction of most reverberation be the P direction to pass external wave plate again after being detected the object reflection, polarization beam splitting film 2.1a reflects S line polarization and sees through P line polarization, final P line polarization passes ultra-thin slice 2.2 and the light filter is signal output to external computer by photoelectric detector 1 conversion, handle by the computer.

Example 2

Compared with the embodiment 1, as shown in fig. 4, the multi-facet scanner comprising the photodetector in the embodiment is not provided with the polarization beam splitter film 2.1a, the side of the filter film 2.3 far away from the ultrathin sheet 2.2 is provided with the dichroic mirror film 2.1b, and the dichroic mirror film 2.1b in the embodiment is an optical film plated on the side of the polarization beam splitter film 2.1a far away from the ultrathin sheet 2.2.

As shown in fig. 4 and 5, the utility model is used for excitation light and emission light of objects observed such as micro scanning microscope have different wavelengths, the excitation light that external light source sent is focused into linear focus on top film 6 by outside lenticular lens after the external lens collimation, through specular reflection, and be scanned by photoelectric detector 1, one-dimensional scanning beam is focused by outside high dispersion objective and is formed the scanning line in being detected the object, the emission light (like single photon fluorescence or non-linear optical signal) of arousing in being detected the object is collected the back by outside high dispersion objective, surface film 6, ultra-thin slice 2.2 and the filter film 2.3 that pass the polyhedron scanning mirror, and the focus converts the signal of telecommunication on photoelectric detector 1, send to outside amplifier circuit and computer at last and handle.

Example 3

Based on embodiment 1, as shown in fig. 6, an annular groove 2.4 is formed on a sidewall of the ultrathin sheet 2.2 away from the photodetector 1 in this embodiment, the groove 2.4 is located at an outer edge of the ultrathin sheet 2.2, and the groove 2.4 is formed by etching. The filter film 2.3 and the polarization splitting film 2.1a are both positioned inside the annular groove 2.4.

When processing filtering film 2.3, because the existence of recess 2.4, can avoid filtering film 2.3 and polarization beam splitting film 2.1a to be processed to the perimeter of ultrathin slice 2.2, reduce the processing degree of difficulty.

The foregoing is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, without departing from the concept of the present invention, several modifications and improvements can be made, which should also be regarded as the protection scope of the present invention, and these will not affect the effect of the present invention and the practicability of the patent. The technology, shape and construction parts which are not described in the present invention are all known technology.

Claims

1. A multisurface scanner comprising a photodetector, comprising: the device comprises a driver, the driver is fixed with a plurality of scanning subassemblies along circumference, the scanning subassembly is including photoelectric detector, ultrathin piece, filtering film and the top layer film of fixed connection in proper order, photoelectric detector fixes on the driver, the top layer film is polarization beam splitting film or dichroic mirror film.

2. The multifaceted scanner including a photodetector as claimed in claim 1, characterized in that: the driver is prismatic and the radial section of the driver is an equilateral polygon.

3. The multisurface scanner comprising photodetectors according to claim 2, wherein: the section of the driver along the radial direction is an equilateral hexagon.

4. The multifaceted scanner including a photodetector as claimed in claim 1, characterized in that: and a rotating shaft is coaxially fixed at the end part of the driver.

5. The multifaceted scanner including a photodetector as claimed in claim 4, characterized in that: the number of the rotating shafts is two, and the rotating shafts are respectively positioned at two ends of the driver.

6. The multifaceted scanner including a photodetector as claimed in claim 1, characterized in that: the ultrathin sheet is in an axisymmetric shape.

7. The multifaceted scanner including a photodetector as claimed in claim 5, characterized in that: the ultrathin sheet is rectangular.

8. The multifaceted scanner including a photodetector as claimed in claim 1, characterized in that: the filtering film is in an axisymmetric shape.

9. The multifaceted scanner including a photodetector as claimed in claim 8, characterized in that: the filtering film is rectangular.

10. The multifaceted scanner including a photodetector as claimed in claim 1, characterized in that: one side of the ultrathin sheet, which is far away from the photoelectric detector, is provided with an annular groove, the groove is positioned at the edge of the ultrathin sheet, and the filtering film and the surface layer film are positioned at the inner side of the groove.