CN209985914U

CN209985914U - Plasma cleaning equipment

Info

Publication number: CN209985914U
Application number: CN201920649662.XU
Authority: CN
Inventors: 詹登星; 韦水金
Original assignee: DONGGUAN ANDA AUTOMATIC EQUIPMENT Co Ltd
Current assignee: Guangdong Anda Intelligent Equipment Co Ltd
Priority date: 2019-05-08
Filing date: 2019-05-08
Publication date: 2020-01-24
Anticipated expiration: 2029-05-08

Abstract

The utility model discloses a plasma cleaning device, which comprises a frame and a conveying channel arranged on the frame and used for conveying workpieces, wherein a plasma gun head and a first moving mechanism for driving the plasma gun head to move are arranged above the conveying channel; the workpiece cleaning table is arranged in the middle of the conveying channel on the rack, a lifting cylinder for controlling the workpiece cleaning table to move up and down is arranged below the workpiece cleaning table, the lifting cylinder is fixed on a rotating part, and a rotating motor drives the rotating part, the lifting cylinder and the workpiece cleaning table to rotate. The utility model can automatically clean the workpiece, and is suitable for production line production, thereby improving the efficiency and increasing the profit; the utility model is provided with a rotary motor which can drive the workpiece to rotate, so that the plasma gun head can carry out multilateral cleaning on the workpiece; the plasma gun head has the advantage that the workpiece can be cleaned at multiple angles through the angle adjusting mechanism, so that the workpiece can be cleaned more comprehensively.

Description

Plasma cleaning equipment

Technical Field

The utility model relates to a plasma processing technology field, concretely relates to plasma cleaning equipment.

Background

Plasma treatment has become an important process for surface treatment. Plasma cleaning differs from conventional cleaning (e.g., mechanical cleaning, water cleaning, solvent cleaning, etc.) in that, after cleaning, the surface of the substrate is usually still a few nanometers thick residue. As the requirements of integrated circuit precision processing become more and more stringent, these residues often have a negative impact on the process and product reliability. The main sources of contaminants on the surface of the material are two kinds, namely foreign molecules adsorbed on the surface by physical or chemical means and a surface natural oxide layer, the physically adsorbed foreign molecules can be adsorbed by heating, the chemically adsorbed foreign molecules can be desorbed and separated from the surface of the material by a relatively high-energy chemical reaction process, and the surface natural oxide layer is generally produced on the surface of the metal and can influence the weldability of the metal and the bonding performance of other materials. The plasma surface cleaning treatment technology can effectively treat the two types of surface pollutants, and improves the bonding operation efficiency and the operation stability.

Although the plasma processing technology has various advantages, the existing technology can not be automated, can not carry out production line type cleaning on workpieces, has low efficiency and can not adapt to the development of the modern society.

SUMMERY OF THE UTILITY MODEL

To the defect of above-mentioned prior art, the utility model provides a plasma cleaning equipment to realize automated production.

In order to achieve the above object, the utility model adopts the following technical scheme: a plasma cleaning device comprises a rack and a conveying channel arranged on the rack and used for conveying workpieces, wherein a plasma gun head and a first moving mechanism for driving the plasma gun head to move are arranged above the conveying channel;

the workpiece cleaning table is arranged in the middle of the conveying channel on the rack, a lifting cylinder for controlling the workpiece cleaning table to move up and down is arranged below the workpiece cleaning table, the lifting cylinder is fixed on a rotating part, and a rotating motor drives the rotating part, the lifting cylinder and the workpiece cleaning table to rotate.

In the above description, it is preferable that the rotary member has an external gear at a lower end thereof, the rotary motor has a driving gear, and a transmission belt is provided between the driving gear and the external gear.

In the above description, as preferred, be equipped with guiding mechanism on the rotating member, guiding mechanism includes that the interval sets up the clean bench mounting panel on the rotating member, the work piece clean bench is equipped with the deflector that stretches out downwards, be equipped with the guide rail of vertical setting on the clean bench mounting panel, be equipped with the slider on the guide rail, the deflector passes through one side of slider and guide rail sliding connection clean bench mounting panel.

In the above description, preferably, the workpiece cleaning table is provided with a positioning pin for positioning the workpiece and a positioning pin fixing block for fixing the positioning pin.

In the above description, preferably, the first moving mechanism includes an X-axis moving mechanism mounted on the frame, and the X-axis moving mechanism drives a Y-axis moving mechanism to move along the X-axis.

In the above description, as an optimization, the Y-axis moving mechanism drives an angle adjusting mechanism to move along the Y axis, the angle adjusting mechanism includes a fixed plate, a rotating plate and a bolt, the fixed plate is mounted on the Y-axis moving mechanism, the rotating plate is rotatably mounted on the fixed plate through a pivot shaft, adjusting plates disposed toward the fixed plate are symmetrically disposed on left and right sides of the rotating plate, an arc-shaped groove is dug on the adjusting plate, mounting holes corresponding to the arc-shaped groove are disposed on two sides of the lower end of the fixed plate, the bolt passes through the arc-shaped groove and is screwed into the mounting holes, and the plasma gun head is mounted on the rotating plate.

In the above description, a shield is preferably provided outside the drive gear, the conveyor belt, and the rotary member.

In the above description, preferably, the rack is provided with parallel conveying frames arranged at intervals, the conveying frames are provided with conveying belts, driving wheels, driven wheels and servo motors, the conveying belts are used for driving the workpieces to move, and conveying channels are formed among the conveying frames.

In the above description, preferably, the pitch of the carriage is adjustable.

The utility model discloses produced beneficial effect is: the utility model can automatically clean the workpiece, and is suitable for production line production, thereby improving the efficiency and increasing the profit; the utility model is provided with a rotary motor which can drive the workpiece to rotate, so that the plasma gun head can carry out multilateral cleaning on the workpiece; the plasma gun head has the advantage of cleaning the workpiece at multiple angles through the angle adjusting mechanism, so that the workpiece can be cleaned more comprehensively; the utility model discloses an adjustable setting of interval of carriage can make the carriage carry the work piece of different width, makes the utility model discloses can wash the work piece of equidimension not.

To more clearly illustrate the structural features and technical means of the present invention and the specific objects and functions achieved thereby, the present invention will be described in further detail with reference to the accompanying drawings and specific embodiments:

drawings

FIG. 1: is a schematic structural diagram of an embodiment of the present invention;

FIG. 2: is a schematic view of a plasma gun head mounting structure of an embodiment of the utility model;

FIG. 3: the structure diagram of the installation of the workpiece cleaning table of the embodiment of the utility model is shown;

FIG. 4: is an exploded view of the installation structure of the workpiece cleaning table of the embodiment of the utility model.

The attached drawings indicate the following: 1-a rack, 2-a conveying channel, 3-a first moving mechanism, 41-a rotating part, 42-a rotating motor, 43-a driving gear, 44-a transmission belt, 45-a shield, 51-a workpiece cleaning table, 52-a lifting cylinder, 6-a guide mechanism, 61-a cleaning table mounting plate, 62-a guide plate, 63-a slide block, 64-a guide rail, 511-a positioning pin, 512-a positioning pin fixing block, 31-an X-axis moving mechanism, 32-a Y-axis moving mechanism, 7-an angle adjusting mechanism, 71-a fixing plate, 72-a rotating plate, 73-an adjusting plate, 74-an arc groove, 21-a conveying frame and 8-a plasma gun head.

Detailed Description

As shown in fig. 1-4, a plasma cleaning apparatus includes a frame 1, a conveying channel 2 disposed on the frame 1 for conveying a workpiece, a plasma torch head 8 and a first moving mechanism 3 for driving the plasma torch head 8 to move are disposed above the conveying channel 2;

be equipped with the carriage 21 of parallel and interval setting in frame 1, be equipped with the drive on carriage 21 the conveyor belt (not shown in the figure) of work piece displacement, locate the action wheel (not shown in the figure) and the follow driving wheel (not shown in the figure) at conveyor belt both ends drive the rotatory servo motor of action wheel (not shown in the figure), form transfer passage 2 between carriage 21. It will be appreciated that in operation the workpiece rests on the carriage 21 and the conveyor belt displaces the workpiece.

The distance between the conveying frames 21 is adjustable. It should be appreciated that the adjustable spacing of the carriages 21 may enable the carriages 21 to convey workpieces of different widths, enabling the apparatus to clean workpieces of different sizes.

A workpiece cleaning table 51 is arranged in the middle of the conveying channel 2 on the rack 1, a lifting cylinder 52 for controlling the workpiece cleaning table 51 to move up and down is arranged below the workpiece cleaning table 51, the lifting cylinder 52 is fixed on a rotating part 41, and a rotating motor 42 drives the rotating part 41, the lifting cylinder 52 and the workpiece cleaning table 51 to rotate. It should be understood that when the apparatus is in operation, a workpiece is placed on the conveying passage 2, and when the workpiece is transported above the workpiece cleaning table 51, the lifting cylinder 52 drives the workpiece cleaning table 51 to lift and lift the workpiece for cleaning, and the workpiece is rotated by the rotation motor 42 in cooperation with the workpiece cleaning process to perform multilateral cleaning.

An external gear (not marked in the figure) is arranged at the lower end of the rotating member 41, a driving gear 43 is arranged on the rotating motor 42, and a transmission belt 44 is arranged between the driving gear 43 and the external gear.

A guard 45 is disposed outside the drive gear 43, the conveyor belt and the rotating member 41. It will be appreciated that the function of the shield 45 is to avoid gear ingress leading to a reduction in service life.

Be equipped with guiding mechanism 6 on the rotating member 41, guiding mechanism 6 including the interval set up in wash platform mounting panel 61 on the rotating member 41, work piece wash platform 51 is equipped with the deflector 62 that stretches out downwards, be equipped with the guide rail 64 of vertical setting on the wash mounting panel 61, be equipped with slider 63 on the guide rail 64, deflector 62 passes through one side of slider 63 and guide rail 64 sliding connection wash platform mounting panel 61. It should be understood that the guiding mechanism 6 has an upward guiding function for the workpiece cleaning table 51 when the lifting cylinder 52 operates, and since an output shaft (not shown) of the lifting cylinder 52 is cylindrical, when the rotating member 41 drives the workpiece cleaning table 51 to rotate, the workpiece cleaning table will slip, thereby affecting the normal operation, and since the sliding block 63 is slidably connected to the guide rail 64, and has an axial limiting function, the guiding mechanism 6 also has a function of preventing the workpiece cleaning table 51 from slipping on the lifting cylinder 52.

The workpiece cleaning table 51 is provided with a positioning pin 511 for positioning a workpiece and a positioning pin fixing block 512 for fixing the positioning pin 511.

The first moving mechanism 3 comprises an X-axis moving mechanism 31 mounted on the frame 1, and the X-axis moving mechanism 31 drives a Y-axis moving mechanism 32 to move along the X-axis.

The Y-axis moving mechanism 32 drives an angle adjusting mechanism 7 to move along the Y-axis, the angle adjusting mechanism 7 includes a fixed plate 71, a rotating plate 72 and a bolt (not shown), the fixed plate 71 is mounted on the Y-axis moving mechanism 32, the rotating plate 72 is rotatably mounted on the fixed plate 71 through a pivot shaft, adjusting plates 73 disposed toward the fixed plate 71 are symmetrically disposed on the left and right sides of the rotating plate 72, an arc-shaped groove 74 is dug on the adjusting plate 73, mounting holes (not marked in the figure) corresponding to the arc-shaped groove 74 are disposed on two sides of the lower end of the fixed plate 71, the bolt passes through the arc-shaped groove 74 and is screwed into the mounting holes, and the plasma torch head 8 is mounted on the rotating plate 72. It should be understood that the angle adjusting mechanism 7 can be used for cleaning the plasma gun head 8 towards a workpiece in multiple directions, and the cleaning effect is better.

The above description is only a preferred embodiment of the present invention, and is not intended to limit the present invention, so any modifications, equivalent replacements, improvements, etc. made to the above embodiments by the technology of the present invention are all within the scope of the technical solution of the present invention.

Claims

1. A plasma cleaning apparatus characterized in that: the plasma gun head conveying device comprises a rack and a conveying channel arranged on the rack and used for conveying workpieces, wherein a plasma gun head and a first moving mechanism for driving the plasma gun head to move are arranged above the conveying channel;

2. A plasma cleaning apparatus according to claim 1, characterized in that: the lower extreme of rotating member is equipped with the external gear, be equipped with the driving gear on the rotary motor, be equipped with driving belt between driving gear and the external gear.

3. A plasma cleaning apparatus according to claim 1, characterized in that: be equipped with guiding mechanism on the rotating member, guiding mechanism includes that the interval sets up the clean bench mounting panel on the rotating member, the work piece clean bench is equipped with the deflector that stretches out downwards, be equipped with the guide rail of vertical setting on the clean bench mounting panel, be equipped with the slider on the guide rail, the deflector passes through one side of slider and guide rail sliding connection clean bench mounting panel.

4. A plasma cleaning apparatus according to claim 1, characterized in that: and the workpiece cleaning table is provided with a positioning pin for positioning the workpiece and a positioning pin fixing block for fixing the positioning pin.

5. A plasma cleaning apparatus according to claim 1, characterized in that: the first moving mechanism comprises an X-axis moving mechanism arranged on the rack, and the X-axis moving mechanism drives a Y-axis moving mechanism to move along the X axis.

6. The plasma cleaning apparatus according to claim 5, wherein: the plasma torch head comprises a Y-axis moving mechanism, an angle adjusting mechanism, a fixing plate, a rotating plate and a bolt, wherein the Y-axis moving mechanism drives the angle adjusting mechanism to move along the Y axis, the fixing plate is installed on the Y-axis moving mechanism and is installed on the fixing plate in a rotating mode through a pin joint shaft, the left side and the right side of the rotating plate are symmetrically provided with adjusting plates arranged towards the fixing plate, arc-shaped grooves are formed in the adjusting plates in an excavating mode, mounting holes corresponding to the arc-shaped grooves are formed in two sides of the lower end of the fixing plate, the bolt penetrates through the arc-shaped grooves and is screwed into the mounting holes.

7. A plasma cleaning apparatus according to claim 2, characterized in that: a guard shield is located outside the drive gear, the conveyor belt and the rotating member.

8. A plasma cleaning apparatus according to claim 1, characterized in that: the automatic feeding device is characterized in that conveying frames which are parallel and arranged at intervals are arranged on the rack, conveying belts for driving workpieces to move, driving wheels, driven wheels and servo motors are arranged on the conveying frames, and conveying channels are formed among the conveying frames.

9. The plasma cleaning apparatus according to claim 8, wherein: the distance between the conveying frames is adjustable.