CN208672208U - Force snesor - Google Patents
Force snesor Download PDFInfo
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- CN208672208U CN208672208U CN201821292217.4U CN201821292217U CN208672208U CN 208672208 U CN208672208 U CN 208672208U CN 201821292217 U CN201821292217 U CN 201821292217U CN 208672208 U CN208672208 U CN 208672208U
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Abstract
The utility model provides a kind of force snesor.Offer can be improved the productivity of force snesor and can be improved the technology of reliability.Force snesor (10) has: the response body (20) with surface (20a) and the inside (20b)；And it is arranged at surface (20a) and multiple strain gauges (30) of the inside (20b).Response body (20) is configured to: the forced section (21) of endurance；The fixed part (22) fixed relative to forced section；By the arm (23) of forced section and fixed part connection；And the bending section (24) for extending along the direction that the extending direction with arm intersects and linking with fixed part.Multiple strain gauges (30) are set to arm (23), include the bending strain meter detected to the bending of arm (23) and the shear strain meter detected to the shearing of arm (23).Strain gauge constitutes bridge circuit.
Description
Technical field
The utility model relates to force snesor (also referred to as component meter), more particularly to for be suitable for detection x-axis direction,
Y-axis direction, z-axis direction force component and around the moment components of each axis add up to 6 axial force sensors of 6 components for it is effective
Technology.
Background technique
Japanese Unexamined Patent Application 57-169643 bulletin (hereinafter referred to as " patent document 1 ".) record relate to use strain gauge
Multi dimension component meter technology.The component meter be to connection base portion and framework overlook view be in criss-cross arm shape
Shape is studied, and is based only upon bending strain to measure the composition of external force (specification third page upper left section referring to patent document 1
12-16 row).Therefore, in order to utilize bending strain to detect the external force of all directions, in 4 faces of the axis of the arm around quadrangular
(surface, the inside, two sides) have bonded the strain gauge (i.e. bending strain meter) of detection bending strain (referring to patent document respectively
1 specification third page upper right section 19 rows-lower-left the 3rd row of section).
Patent document 1: Japanese Unexamined Patent Application 57-169643 bulletin
It is the shape for specially grinding arm, according to arm in existing component meter as technology described in Patent Document 1
Bending strain measure the composition of external force, so as to the shear strain for inhibiting arm to generate and utilize bending strain progress
It captures.This is because consider component meter be detection, detect the small variation (output) based on external force component, to detection,
It is effective for the bending strain of the detection generation variation bigger than shear strain.
However, in technology described in Patent Document 1, though on the surface of the arm of quadrangular and the inside (by 4 arms portions
It is configured to overlook view in criss-cross face) to paste (bonding) strain gauge be easy, but in 2 sides of arm (in upper and lower
The orthogonal face in surface) paste strain gauge be difficult.This is because the space of the side of arm, i.e. by base portion, framework and
The space that arm impales relatively narrower (having barrier) when pasting strain gauge.Therefore, if strain gauge to be pasted onto 2 sides of arm
(medial surface), then the number of working processes increases.In addition, the wiring arrangement of the strain gauge also becomes difficult, it is easy to produce because broken string etc. is led
The movement of cause is bad.
Utility model content
The purpose of this utility model is to provide a kind of productivities that can be improved force snesor, and can be improved reliable
The technology of property.The above-mentioned and other purpose and new feature of the utility model will pass through the description of this specification and attached drawing
It becomes apparent.
In order to solve the above problems, the force snesor as a solution mechanism of the utility model has: response body, tool
There are surface and the inside；And multiple strain gauges, they are set to above-mentioned surface and above-mentioned the inside, and above-mentioned response body includes:
The forced section of endurance；The fixed part fixed relative to above-mentioned forced section；By the arm of above-mentioned forced section and fixation portions connection
Portion；And the bending section for extending along the direction that the extending direction with above-mentioned arm intersects and linking with fixation portions, it is above-mentioned more
A strain gauge includes the bending strain meter of the specified quantity detected to the bending of above-mentioned arm and to the shearing of the arm
The shear strain meter of the specified quantity detected, above-mentioned strain gauge constitute bridge circuit.
Thereby, it is possible to provide that strain gauge is not arranged in the side of arm (face orthogonal with surface and the inside), and only exist
The force snesor of the surface of the arm of response body and the inside setting strain gauge.Therefore, it can be improved the productivity of force snesor.
In addition, there is no because of the unfavorable condition caused by stickup strain gauge of the side of arm, so can be improved force snesor can
By property.
In the force snesor of an above-mentioned solution, more preferable above-mentioned bending strain meter is by the detection of the bending strain meter
Direction is set as the extending direction of above-mentioned arm, and above-mentioned shear strain meter sets opposite for the detection direction of the shear strain meter
In the extending direction of above-mentioned arm direction at 45 °.
In the force snesor of an above-mentioned solution, more preferably with the above-mentioned surface that is pasted on above-mentioned arm and above-mentioned
The mode of the inside is collected the above-mentioned bending strain meter of specified quantity and the above-mentioned shear strain meter of specified quantity and is constituted.Thus
It can be improved productivity compared with singly pasting strain gauge.
In the force snesor of an above-mentioned solution, the more preferably is constituted using the above-mentioned bending strain meter of specified quantity
One bridge circuit constitutes the second bridge circuit using the above-mentioned shear strain meter of specified quantity.Though it is curved to generate arm by power
Bent (flexure), shearing, torsion, but using the configuration of the strain gauge of specified quantity, be connected to arm composition bridge circuit, thus example
So that the bending (flexure), the torsion that generate in arm is disappeared, is able to detect the stress based on shearing.
In the force snesor of an above-mentioned solution, preferably above-mentioned forced section and fixation portions are configured to same heart shaped, and 3
The above-mentioned arm of root is equally spaced matched in such a way that overlook view is in Y-shaped in the circumferential direction of above-mentioned forced section and fixation portions
It sets.In the case where arm is that 3 such radicals are few, the overall quantity for being arranged at the strain gauge of response body tails off to paste
The process numbers such as strain gauge also tail off, and can be improved productivity, in addition, production cost can be reduced.
Or more preferably above-mentioned forced section and fixation portions are configured to same heart shaped, 4 above-mentioned arms are with overlook view
In criss-cross mode, equally spaced configured in the circumferential direction of above-mentioned forced section and fixation portions.It is configured to bow in 3 arms portions
Depending on observing in 6 axial force sensors in Y-shaped, in order to detect x-axis direction, y-axis direction, the force component in z-axis direction and around each axis
Moment components add up to 6 components, need the output to the strain gauge for being arranged at each arm carry out matrix operation.About this
It is each in being just able to detect in criss-cross 6 axial force sensor without matrix operation to be configured to overlook view in 4 arms portions for point
Component.
In the force snesor of an above-mentioned solution, preferably to above-mentioned first bridge circuit and above-mentioned second bridge circuit
Apply the voltage of 1~10V.Apply the voltage of 1~10V, to the bridge circuit for being formed in arm so as to be easy to correctly examine
Survey the stress based on shearing.
According to the utility model, the productivity of force snesor can be improved, and can be improved reliability.
Detailed description of the invention
Fig. 1 is the schematic plan of the main portions of the force snesor of the embodiments of the present invention 1.
Fig. 2 is the schematic plan of the inside of the main portions of force snesor shown in FIG. 1.
Fig. 3 is the schematic perspective view of the main portions of force snesor shown in FIG. 1.
Fig. 4 is the structure chart for the signal processing part that force snesor shown in FIG. 1 has.
Fig. 5 is the figure for illustrating bridge circuit that force snesor shown in FIG. 1 has.
Fig. 6 is the detection table for the bridge circuit that force snesor shown in FIG. 1 has.
Fig. 7 is the schematic plan of the main portions of the force snesor of the embodiments of the present invention 2.
Fig. 8 is the schematic plan of the inside of the main portions of force snesor shown in Fig. 7.
Fig. 9 is the schematic plan of the main portions of the force snesor of the embodiments of the present invention 3.
Figure 10 is the schematic plan of the inside of the main portions of force snesor shown in Fig. 9.
Figure 11 is the detection table for the bridge circuit that force snesor shown in Fig. 9 has.
Description of symbols
10,10A, 10B ... force snesor；20 ... response bodies；The surface 20a ...；The inside 20b ...；20c ... lateral surface；
20d ... medial surface；21 ... central portions (forced section)；22 ... frame portions (fixed part)；23,23A, 23B, 23C, 23D ... arm；
24 ... elastic portions；30 ... strain gauges；31,31A, 31B, 31C, 31D, 31E, 31F ... bridge circuit；32 ... integrated measuring instruments；
40 ... signal processing parts.
Specific embodiment
In following the embodiments of the present invention, it is illustrated though being divided into multiple portions etc. if necessary, principle
It is upper they be not it is independent of each other, some or all variations of a side and another party have relationship in detail etc..Cause
This, in whole attached drawings, marks identical appended drawing reference to component with the same function, and omit its repeat description.In addition,
Quantity (comprising number, numerical value, amount, range etc.) about constituent element in addition to particularly expressing in the case where, it is clear in principle
The case where being limited to specific quantity to Chu is inferior, this does not limit specific quantity, and can also be specific quantity or more can also
It is below it.In addition, when mentioning the shapes such as constituent element, the case where in addition to particularly expressing and it is considered in principle obvious
Situation that no etc. includes content etc. actually approximate or similar with its shape etc..
(embodiment 1)
In the embodiments of the present invention 1, illustrate be suitable for detect the power that (measurement) object is subject to size or
The force snesor of the component of at least one party in direction is (if the sensor of detection inertia force is then also referred to as acceleration sensing
The motion sensors such as device, angular-rate sensor.).Specifically, explanation is suitable for detecting the orthogonal seat of three-dimensional space simultaneously
6 axis for adding up to 6 components of the force component of 3 axis directions of mark system (x-axis, y-axis, z-axis) and the moment components around 3 axis direction
Force snesor.
Referring to Fig.1~Fig. 6 is illustrated the force snesor 10 of present embodiment.Fig. 1 and Fig. 2 is force snesor 10
Main portions schematic plan, Fig. 3 is its schematic perspective view.As shown in FIG. 1 to 3, force snesor 10 has logical
Exertin is applied and generates the response body 20 of strain and detect multiple strain gauges 30 of the strain of response body 20.Fig. 4 is that power passes
The structure chart for the signal processing part 40 that sensor 10 has.The signal processing part 40 is for example arranged at installation response body 20
In basket (not shown), the output from multiple strain gauges 30 is handled.Fig. 5 is the bridge-type having for illustrating force snesor 10
The figure of circuit 31.Fig. 6 is the detection table of the bridge circuit 31 of force snesor 10.The bridge circuit 31 uses the strain of specified quantity
It counts 30 and constitutes, output signal is processed by signal processing part 40.
As shown in FIG. 1 to 3, response body 20 has surface 20a (the first face), the inside 20b (opposite with the first face
Second face of side) that is, lateral surface 20c (outer peripheral surface) circular plate body.Moreover, the response body 20 includes to have strain
The central portion 21 of the center O of body 20, around central portion 21 in the frame portion 22 of same heart shaped and connection central portion 21 and frame portion
22 multiple arms 23 (also referred to as beam) and constitute.For the more specific shape in each portion of response body 20, central portion 21
Be it is disk-shaped, frame portion 22 be it is cyclic annular, arm 23 is quadrangular shape.
In the present embodiment, arm 23 is in a manner of being in Y-shaped by 3 overlook view, in central portion 21 and frame
The circumferential direction in portion 22 is configured with (every 120 ° of the circumferential direction of O at center) at equal intervals.That is 3 arms portions 23 (23A, 23B, 23C) are from center O
Extended between central portion 21 and frame portion 22 with radial.Moreover, with will when central portion 21 and frame portion 22 are considered as rigid body
Arm 23 is considered as the mode of elastomer, and response body 20 has the (bending of elastic portion 24 being installed between frame portion 22 and arm 23
Portion).The elastic portion 24 is intersected with linking simultaneously overlook view mode in T shape with arm 23 to the extending direction with arm 23
Direction extend.
Such response body 20 is for example by using NC (Numerical Control: numerical control) processing machine in aluminium alloy, conjunction
There is the material of spring performance to form through hole etc. and obtain for Jin Gang, stainless steel etc..It is used to form as a result, in the formation of response body 20
Central portion 21, frame portion 22, arm 23 space (through portion), be used to form elastic portion 24 space (overlook view be in narrow slit shape
Through portion).By forming these spaces, thus response body 20 also has medial surface 20d (with table other than lateral surface 20c
Face 20a and the inside 20b orthogonal face, the inner wall of through portion).
In the force snesor 10 of present embodiment, in response body 20, as endurance forced section and use central portion
21, frame portion 22 is used as the fixed part for being fixed in forced section, uses arm 23 as the part for generating strain.Answer
Variant 20 is configured to that arm 23 is made to generate bending (flexure), shearing, torsion by power.It is generated in the extending direction of arm 23 curved
Bent (flexure), the extending direction relative to arm 23 generates shearing in 45 ° of directions, and generates torsion in the circumferential of arm 23.
In addition, be able to use central portion 21 as fixed part for the forced section and fixed part as response body 20, as by
Power portion is able to use frame portion 22.
Specifically, in the forced section to response body 20 that is, in the case that central portion 21 is applied with the power Fx of x-axis direction,
Arm 23B, 23C active force are deformed, in arm 23A, the elastic portion 24 flexure, so not generating strain.In addition,
In the case where the power Fy for being applied with y-axis direction, active force is distinguished to arm 23A, 23B, 23C and is deformed.In addition, being applied with z
In the case where the power Fz of axis direction, arm 23A, 23B, 23C are equably bent.In addition, the torque Mx's for being applied with x-axis direction
In the case of, torsion is only generated in arm 23A and is not bent, and arm 23B, 23C opplied moment are bent.In addition, being applied with y
In the case where the torque My of axis direction, opplied moment is distinguished to arm 23A, 23B, 23C and is bent.In addition, being applied with z axis
In the case where the torque Mz in direction, arm 23A, 23B, 23C are equably bent.
In such response body 20, multiple strain gauges 30 are arranged at the surface 20a and the inside 20b of response body 20.
It is for example able to use as strain gauge 30 and is closed by flexible polyimides, epoxy resin film covering Cu (copper)-Ni (nickel) system
Gold, Ni-Cr (chromium) are component obtained by the wiring pattern of the metallic film (metal foil etc.) of alloy.Such strain gauge 30 makes
It is secured at arm 23 with adhesive, resistance variations when can be deformed according to metallic film by the strain of arm 23 are examined
Know, detect strain.Semiconductive thin film has been used rather than the semiconductor of metallic film in addition, can also utilize as strain gauge 30
Strain gauge.In addition, the method for loading for being not based on bonding as strain gauge 30 can also strained by vacuum evaporation, sputtering mode
The surface 20a and the inside 20b of body 20 directly form metallic film measuring instrument.
In the present embodiment, strain gauge 30 is become with its detection direction (induction direction) and (is scratched with being bent in arm 23
It is bent) the identical mode in generation direction for generating direction, shearing, be arranged at arm 23.In Fig. 1, Fig. 2, shown with arrow
The detection direction of the strain gauge 30 of each position (induction direction).Specifically, as shown in Figure 1 and Figure 2, in the position of response body 20
Set Aa, Ab, Ac, Ad, Ba, Bb, Bc, Bd, Ca, Cb, Cc, Cd it is each in, with detection direction become arm 23 extending direction
Mode, configuration detection arm 23 bending (flexure) strain gauge 30 (referred to as bending strain meter).In addition, in response body 20
Position Da, Db, Dc, Dd, Ea, Eb, Ec, Ed, Fa, Fb, Fc, Fd it is each in, the extension with detection direction relative to arm 23
Direction becomes the mode of 45 ° of directions (or 135 ° of directions), and the strain gauge 30 of the shearing of configuration detection arm 23 (referred to as answer by shearing
Become meter).It can also be wrapped even with identical strain gauge 30 by the configuration of its detection direction in this way in multiple strain gauges 30
Meter containing bending strain and shear strain meter.
Position Ba in the arm 23A that the direction parallel with Fig. 1, x-axis direction shown in Fig. 2 extends, in 21 side of central portion
~Bd singly configures the strain gauge 30 (bending strain meter) of specified quantity (four), position Ea~Ed in 22 side of frame portion
The strain gauge 30 (shear strain meter) for singly configuring specified quantity (four) adds up to 8 strain gauges 30 of setting.Wherein,
The strain gauge 30 of position Ba, Bc, Ea, Eb are located at the surface 20a (referring to Fig.1) of response body 20 (arm 23A), in overlook view
In, the center line of the extending direction relative to arm 23A, position Ba and position Bc have symmetric relation, position Ea and position Eb
With symmetric relation.Therefore, the detection direction of the strain gauge 30 of the detection direction and position Bc of the strain gauge 30 of position Ba is flat
The detection direction of capable relationship, the strain gauge 30 of the detection direction and position Eb of the strain gauge 30 of position Ea becomes in arm 23A
Center line on the relationship intersected.In addition, to be located at response body 20 (arm 23A) inner for the strain gauge 30 of position Bb, Bd, Ec, Ed
Face 20b (referring to Fig. 2), in overlook view, the center line of the extending direction relative to arm 23A, position Bb and position Bd
With symmetric relation, position Ec and position Ed have symmetric relation.Therefore, the detection direction of the strain gauge 30 of position Bb and position
The detection direction of the strain gauge 30 of Bd is parallel relationship, the detection direction of the strain gauge 30 of position Ec and the strain gauge of position Ed
30 detection direction becomes the relationship intersected on the center line of arm 23A.In addition, in other 2 arms portion 23B, 23C, also together
Sample ground configuration strain meter 30.
Moreover, in the present embodiment, such as use the strain for the specified quantity (four) for being arranged at position Aa~Ad
It counts 30 (bending strain meters) and constitutes a bridge circuit 31 (being recorded as bridge circuit 31A in the table of Fig. 6) shown in fig. 5.In addition,
Such as the strain gauge 30 (shear strain meter) of the specified quantity by being arranged at position Da~Dd (four) constitutes Fig. 5 institute
The bridge circuit 31 (being recorded as bridge circuit 31D in the table of fig. 6) shown.Bridge circuit 31 shown in fig. 5 position a,
B, c, d configuration strain meter 30, and it is electrically connected (wiring).
Specifically, the strain gauge 30 of the series connection of the strain gauge 30 of the series connection of position a, d and position b, c is opposite
It is connected in parallel in input signal Vi.In addition, the series connection of the strain gauge 30 of the series connection of position a, b and position c, d
Strain gauge 30 is connected in parallel relative to output signal Vo.Moreover, for example in the input signal Vi for the voltage for being applied with 1~10V
Bridge circuit 31 in, output signal Vo becomes when becoming nonequilibrium condition because of the variation of the resistance value of strain gauge 30
Change.Though generating bending (flexure), shearing, torsion in arm 23 due to power, in the present embodiment, strain gauge 30 is constituted
Bridge circuit 31 has and removes interference function, temperature assurance function, such as when detecting the stress based on shearing, eliminates bending
(flexure), torsion.By the application of the voltage of 1~10V, the stress based on shearing can be correctly detected.
In the present embodiment, the position a of bridge circuit 31 and the position Aa of response body 20 are corresponding, same location b and position
It is corresponding to set Ab, position c is corresponding with position Ac, and position d is corresponding with position Ad.In this way, making bridge circuit for clear corresponding relationship
31 position symbol a, b, c, d (letter of small letter), each 2nd (small letter with position symbol Aa, Ab, Ac, Ad of response body 20
Letter) respectively correspond.Moreover, the bridge circuit 31 being made of the strain gauge 30 for the position Aa~Ad for being arranged at response body 20
It is corresponding with the detection table of bridge circuit 31A shown in fig. 6.In this way, making the bridge circuit 31A in Fig. 6 for clear corresponding relationship
Symbol (letter of capitalization), corresponding with the 1st (letter of capitalization) of position symbol Aa, Ab, Ac, Ad of response body 20.With
Position Ba~Bd, Ca~Cd, Da~Dd, Ea~Ed, Fa~Fd corresponding other bridge circuit 31B, 31C, 31D, 31E, 31F
Equally.
Fig. 6 is the power Fx, Fy, Fz, torque Mx, My, Mz for indicating to be applied with the response body 20 of force snesor 10 all directions
When bridge circuit 31A~31F testing result detection table.In detection table shown in Fig. 6, in the position Aa of response body 20
~Ad (bridge circuit 31A), Ba~Bd (bridge circuit 31B), Ca~Cd (bridge circuit 31C), Da~Dd (bridge circuit
31D), it is set as when the resistance value of the strain gauge 30 in Ea~Ed (bridge circuit 31E), Fa~Fd (bridge circuit 31F) increases
"+" is set as "-" when reducing, and is set as " 0 " when not changing.In addition, the output signal Vo of bridge circuit 31A~F exists
It is set as " 1 " when generating the non-equilibrium output of bridge, " 0 " is set as when not generating non-equilibrium output.
Here, referring to Fig. 4 to calculated according to the output signal Vo of bridge circuit 31A~31F act on forced section (center
Portion 21) the signal processing part 40 of power be illustrated.Bridge circuit 31A~31F and signal processing part 40 are electrically connected by wiring
It connects.In signal processing part 40, the signal (analog signal) from bridge circuit 31A~31F (CH1~CH6) is by each amplifier
After 41 (AMP1~AMP6) amplification, which is converted to digital signal by A/D converter 42, and sends to CPU43.This
Sample can be detected exporting weaker shear strain by using amplifier 41.
In CPU43, from memory 44 referring to calibration matrix (correction matrix), calculating acts on forced section (central portion 21)
Power 6 components (Fx, Fy, Fz, Mx, My, Mz).The result of signal processing part 40 can from CPU43 as digital signal and
Output, and be able to use D/A converter 45 and exported as analog signal.
Signal processing part 40 has the school being modified referring to the output signal Vo from bridge circuit 31A~31F in this way
Quasi- function.As following formula, the power F for acting on forced section (central portion 21) can will calibrate Matrix C and make from bridge-type electricity
Value V obtained from after the detected value progress A/D conversion of road 31A~31F is multiplied and finds out.
[formula 1]
F=C × V ... (1)
[formula 2]
F=[FX FY FZ MX MY MZ]T…(2)
[formula 3]
[formula 4]
V=[V1 V2 V3 V4 V5 V6]T…(4)
Calibration matrix C is pre-calculated as each intrinsic matrix of force snesor 10.Specifically, being capable of basis
Apply the testing result of condition and the deflection of response body 20 at this time of the nominal load of 6 components to force snesor 10 to count
Calculate calibration matrix C.Due to using such calibration matrix C, thus can accurately measure act on force snesor 10 by
The power in power portion (central portion 21).
More than, according to the present embodiment, strain gauge 30 is not set in the medial surface 20d of arm 23, and can only not have
Strain gauge 30 is arranged in surface 20a, 20b of the response body 20 (arm 23) of barrier.It therefore, there is no need to by central portion 21, frame
The narrow space setting strain gauge 30 that portion 22, arm 23 impale, so can be improved the productivity of force snesor 10.In addition,
Without because of the unfavorable condition (such as broken string etc.) caused by the medial surface 20d of arm 23 pastes strain gauge 30, so can mention
The reliability of high-force sensor 10.
In addition, being also able to use 4 arms portions 23 as aftermentioned in embodiment 3 and constituting response body 20.However,
In the case that the such radical of present embodiment being made of relative to 43 arms portions 23 is few, it is arranged at answering for response body 20
The process number that the overall quantity of change meter 30 tails off and pastes strain gauge 30 etc. also tails off, and can be improved the production of force snesor 10
Rate.In addition, can also reduce the production cost of force snesor 10.
(embodiment 2)
In above embodiment 1, the case where being arranged to strain gauge 30 is pasted on arm 23 respectively, is illustrated.
In the embodiments of the present invention 2, surveyed referring to Fig. 7, Fig. 8 one constituted to the strain gauge 30 that will collect specified quantity
The case where amount instrument 32 is pasted on arm 23 is illustrated.Fig. 7 and Fig. 8 is schematically bowing for the main portions of force snesor 10A
View.
The force snesor 10A of present embodiment is to be pasted on the surface 20a of each arm 23 (23A, 23B, 23C) (referring to figure
7) and the mode of the inside 20b (referring to Fig. 8), the integrated of sheet for having the strain gauge 30 for summarizing specified quantity and constituting are surveyed
Instrument 32 is measured, that is, collects the strain gauge 30 of specified quantity and configures on the same face of the substrate of sheet.Such as it is secured at arm
The integrated measuring instrument 32 of the surface 20a of 23A has the strain gauge 30 (bending strain meter) of position Ba, Bc and answering for position Ea, Eb
Become 30 (shear strain meters) of meter and adds up to four stress gauges 30.In addition, being secured at the integrated measuring instrument of the inside 20b of arm 23A
32 have the strain gauge 30 (bending strain meter) of position Bb, Bd and position Ec, Ed strain gauge 30 (shear strain meter) it is total
Four stress gauges 30.Integrated measuring instrument 32 is similarly pasted in other 2 arms portion 23B, 23C.
By using such integrated measuring instrument 32, production can be improved compared with singly pasting strain gauge 30
Rate.In addition, after having pasted integrated measuring instrument 32 to each arm 23, to constitute each bridge circuit 31A~31F (referring to Fig. 5, figure
6) mode is electrically connected each strain gauge 30.
(embodiment 3)
In above embodiment 1, overlook view is configured to 3 arms portions 23 and is illustrated in the case where Y-shaped.?
In the embodiments of the present invention 3, overlook view is configured in cross (cross to 4 arms portions 23 referring to Fig. 9~Figure 11
Shape) the case where be illustrated.Fig. 9 and Figure 10 is the schematic plan of the main portions of force snesor 10B, and Figure 11 is that power passes
The detection table of the bridge circuit 31 of sensor 10B.
For the force snesor 10B (response body 20) of present embodiment, the central portion 21 of forced section that is, round
With fixed part that is, cricoid frame portion 22 is configured to the arm 23 of same heart shaped and 4 quadrangular shapes to become overlook view in ten
The mode of font is configured in central portion 21 and the circumferential of frame portion 22 with (every 90 ° of the circumferential direction of center O) at equal intervals.I.e. 4
Arm 23 (23A, 23B, 23C, 23D) is extended between central portion 21 and frame portion 22 from center O with radial.Moreover, to incite somebody to action
Arm 23 is considered as to the mode of elastomer, response body 20, which has, clamps frame portion 22 when central portion 21 and frame portion 22 are considered as rigid body
Elastic portion 24 (bending section) between arm 23.Elastic portion 24 actually absorbs the axis direction strain of arm 23.The elastic portion
24 with overlook view mode in T shape, the direction extension intersected to the extending direction with arm 23 with the connection of arm 23.I.e.
The response body 20 of force snesor 10B is configured to that arm 23 is made to generate bending (flexure), shearing, torsion by power.
In the present embodiment, strain gauge 30 is become with its detection direction (induction direction) and (is scratched with being bent in arm 23
It is bent) generation direction, shearing the identical mode in generation direction be arranged at arm 23.In Fig. 9, Tu10Zhong, shown with arrow
The detection direction of the strain gauge 30 of each position (induction direction).Specifically, as shown in Figure 9, Figure 10, the position of response body 20
Ca1, Ca2, Cb1, Cb2, Cc1, Cc2, Cd1, Cd2, Da, Db, Dc, Dd, Ea, Eb, Ec, Ed it is each in, with detection direction at
For the mode of the extending direction of arm 23,30 (the referred to as bending strain of strain gauge of the bending (flexure) of configuration detection arm 23
Meter).In addition, position Aa, Ab of response body 20, Ac, Ad, Ba, Bb, Bc, Bd, Fa1, Fa2, Fb1, Fb2, Fc1, Fc2,
Fd1, Fd2 it is each in, with detection direction relative to arm 23 extending direction become 45 ° of directions (or 135 ° of directions) side
Formula, the strain gauge 30 (referred to as shear strain meter) of the shearing of configuration detection arm 23.
In Fig. 9, arm 23A shown in Fig. 10, in position, singly configuration strain meter 30 is (curved by Cb2, Cc2, Ea, Eb
Curved strain meter), Bb, Bd, Fb2, Fd2 singly configuration strain meter 30 (shear strain meter) in position add up to setting 8.
The strain gauge 30 of position Cc2, Ea, Fb2, Fd2 are located at the surface 20a (referring to Fig. 9) of arm 23A, and position Cc2 and position Ea have
There is the relationship in overlook view on the center line of the extending direction of arm 23A, position Fb2 and position Fd2 are relative to this
Center line has symmetrical positional relationship.In addition, the strain gauge 30 of position Bb, Bd, Cb2, Eb are located at the inside 20b of arm 23A
(referring to Fig.1 0), position Cb2 and position Eb have in overlook view on the center line of the extending direction of arm 23A
Relationship, position Bb and position Bd have symmetrical positional relationship relative to the center line.In addition, other 3 arms portion 23B,
Similarly configuration strain meter 30 in 23C, 23D.
In the present embodiment, also strain gauge 30 can not be set in the medial surface 20d of arm 23, and only in no obstacle
Strain gauge 30 is arranged in surface 20a, 20b of the response body 20 (arm 23) of object.Therefore, it can be improved the production of force snesor 10B
Rate.In addition, not because of the unfavorable condition caused by medial surface 20d of arm 23 pastes strain gauge 30, so can be improved power
The reliability of sensor 10B.
Moreover, in the present embodiment, for example, using be arranged at position Ca1, Ca2, Cb1, Cb2, Cc1, Cc2, Cd1,
The strain gauge 30 (bending strain meter) of the specified quantity (8) of Cd2 constitutes a bridge circuit 31 shown in fig. 5 (Figure 11's
Bridge circuit 31C is recorded as in table).Here, the strain gauge 30 of position Ca1 is connected in series with the strain gauge 30 of position Ca2,
It is corresponding with the position a of bridge circuit 31 shown in fig. 5.Other positions Cb1, Cb2, Cc1, Cc2, Cd1, Cd2 are also the same.In addition,
Such as the strain gauge 30 using the specified quantity (8) for being arranged at position Fa1, Fa2, Fb1, Fb2, Fc1, Fc2, Fd1, Fd2
(shear strain meter) constitutes a bridge circuit 31 (being recorded as bridge circuit 31F in the table of Figure 11) shown in fig. 5.Here,
The strain gauge 30 of position Fa1 is connected in series with the strain gauge 30 of position Fa2, a pairs of the position with bridge circuit 31 shown in fig. 5
It answers.Other positions Fb1, Fb2, Fc1, Fc2, Fd1, Fd2 are also the same.
As shown in figure 11, in the force snesor 10B of present embodiment, power Fx is being applied with to forced section (central portion 21)
In the case where, only non-equilibrium output is generated in bridge circuit 31A.In addition, being applied with power Fy's to forced section (central portion 21)
In the case of, only non-equilibrium output is generated in bridge circuit 31B.In addition, in the feelings for being applied with power Fz to forced section (central portion 21)
Under condition, non-equilibrium output only is generated in bridge circuit 31C.In addition, in the feelings for being applied with torque Mx to forced section (central portion 21)
Under condition, non-equilibrium output only is generated in bridge circuit 31D.In addition, in the feelings for being applied with torque My to forced section (central portion 21)
Under condition, non-equilibrium output only is generated in bridge circuit 31E.In addition, in the feelings for being applied with torque Mz to forced section (central portion 21)
Under condition, non-equilibrium output only is generated in bridge circuit 31F.It, can be as above embodiment 1 i.e. according to force snesor 10B
Each component can be detected without matrix operation.
More than, though the utility model is specifically illustrated based on embodiment, the utility model is not limited
In above embodiment, as described below, various changes are able to carry out in range without departing from the spirit certainly.
In above embodiment 1, it is illustrated to the case where being suitable for 6 axial force sensor.However, it is not limited to this,
Such as it can also apply to the force snesor (component for the axial force component and the moment components around the axis for only detecting arm
Meter).
Claims (8)
1. a kind of force snesor, which is characterized in that have:
Response body, with surface and the inside；And
Multiple strain gauges, they are set to above-mentioned surface and above-mentioned the inside,
Above-mentioned response body includes: the forced section of endurance；The fixed part fixed relative to above-mentioned forced section；By above-mentioned forced section with
The arm of fixation portions connection；And extends along the direction that the extending direction with above-mentioned arm intersects and connect with fixation portions
The bending section of knot,
Above-mentioned multiple strain gauges include the bending strain meter of the specified quantity detected to the bending of above-mentioned arm and to this
The shear strain meter for the specified quantity that the shearing of arm is detected,
Above-mentioned strain gauge constitutes bridge circuit.
2. force snesor according to claim 1, wherein
Above-mentioned bending strain meter sets the detection direction of the bending strain meter to the extending direction of above-mentioned arm,
The extending direction that the detection direction of the shear strain meter is arranged with respect to above-mentioned arm by above-mentioned shear strain meter is at 45 °
Direction.
3. force snesor according to claim 1, wherein
In a manner of the above-mentioned surface and above-mentioned the inside that are pasted on above-mentioned arm, collect the above-mentioned bending strain meter of specified quantity
It is constituted with the above-mentioned shear strain meter of specified quantity.
4. force snesor according to claim 2, wherein
In a manner of the above-mentioned surface and above-mentioned the inside that are pasted on above-mentioned arm, collect the above-mentioned bending strain meter of specified quantity
It is constituted with the above-mentioned shear strain meter of specified quantity.
5. force snesor according to any one of claims 1 to 4, wherein
The first bridge circuit is constituted using the above-mentioned bending strain meter of specified quantity,
The second bridge circuit is constituted using the above-mentioned shear strain meter of specified quantity.
6. force snesor according to any one of claims 1 to 4, wherein
Above-mentioned forced section and fixation portions are configured to same heart shaped,
3 above-mentioned arms by overlook view in a manner of Y-shaped, the circumferential direction of above-mentioned forced section and fixation portions at equal intervals
Ground configuration.
7. force snesor according to any one of claims 1 to 4, wherein
Above-mentioned forced section and fixation portions are configured to same heart shaped,
4 above-mentioned arms by overlook view in a manner of criss-cross, above-mentioned forced section and fixation portions it is circumferential etc. between
It is configured every ground.
8. force snesor according to claim 5, wherein
Apply the voltage of 1~10V to above-mentioned first bridge circuit and above-mentioned second bridge circuit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821292217.4U CN208672208U (en) | 2018-08-10 | 2018-08-10 | Force snesor |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821292217.4U CN208672208U (en) | 2018-08-10 | 2018-08-10 | Force snesor |
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| Publication Number | Publication Date |
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| CN208672208U true CN208672208U (en) | 2019-03-29 |
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ID=65836935
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| CN201821292217.4U Active CN208672208U (en) | 2018-08-10 | 2018-08-10 | Force snesor |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110044418A (en) * | 2019-04-28 | 2019-07-23 | 深圳市力准传感技术有限公司 | Combined type is displaced dynamometer |
| CN110857896A (en) * | 2018-08-10 | 2020-03-03 | 新东工业株式会社 | Force sensor |
| CN114370968A (en) * | 2022-01-04 | 2022-04-19 | 松诺盟科技有限公司 | Multidimensional force and torque sensor arm structure and multidimensional force and torque sensor |
| US20220161666A1 (en) * | 2019-04-17 | 2022-05-26 | Mavic Sas | Force measurement sensor |
| CN114761774A (en) * | 2019-12-13 | 2022-07-15 | 长野计器株式会社 | Torque sensor |
-
2018
- 2018-08-10 CN CN201821292217.4U patent/CN208672208U/en active Active
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110857896A (en) * | 2018-08-10 | 2020-03-03 | 新东工业株式会社 | Force sensor |
| US20220161666A1 (en) * | 2019-04-17 | 2022-05-26 | Mavic Sas | Force measurement sensor |
| CN110044418A (en) * | 2019-04-28 | 2019-07-23 | 深圳市力准传感技术有限公司 | Combined type is displaced dynamometer |
| CN114761774A (en) * | 2019-12-13 | 2022-07-15 | 长野计器株式会社 | Torque sensor |
| CN114761774B (en) * | 2019-12-13 | 2024-03-29 | 长野计器株式会社 | Torque sensor |
| CN114370968A (en) * | 2022-01-04 | 2022-04-19 | 松诺盟科技有限公司 | Multidimensional force and torque sensor arm structure and multidimensional force and torque sensor |
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