CN208043248U - A kind of vacuum drying oven infrared temperature measurement apparatus - Google Patents

A kind of vacuum drying oven infrared temperature measurement apparatus Download PDF

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Publication number
CN208043248U
CN208043248U CN201820330677.5U CN201820330677U CN208043248U CN 208043248 U CN208043248 U CN 208043248U CN 201820330677 U CN201820330677 U CN 201820330677U CN 208043248 U CN208043248 U CN 208043248U
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China
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infrared
radiation thermometer
drying oven
vacuum drying
infrared radiation
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CN201820330677.5U
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Chinese (zh)
Inventor
程革
张晓宇
杜占玉
孔德惠
吴冰
张天龙
于洪斌
李超
韩凤
牛孝强
刘鹏程
李天华
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Shenyang Shenzhen Vacuum Technology Co Ltd
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Shenyang Shenzhen Vacuum Technology Co Ltd
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Abstract

The utility model belongs to vacuum drying oven equipment technical field, more particularly to a kind of vacuum drying oven infrared temperature measurement apparatus.Including graphite-pipe, metal protecting tube, counter flange, observation base, infrared radiation thermometer bearing, infrared radiation thermometer, gland and infrared glass, wherein observation base is fixed on by counter flange in vacuum furnace body connecting tube, infrared glass is fixed on one end of observation base by gland, the other end of observation base is connected by one end of metal protecting tube and graphite-pipe, and graphite-pipe is through vacuum drying oven heating room side wall and is placed in the indoor one end of vacuum stove heat equipped with thermometric window;Infrared radiation thermometer is connect by infrared radiation thermometer bearing with counter flange.The utility model is simple in structure, easy for installation, simple operation, and temperature-measuring results are accurate.

Description

A kind of vacuum drying oven infrared temperature measurement apparatus
Technical field
The utility model belongs to vacuum drying oven equipment technical field, more particularly to a kind of vacuum drying oven infrared temperature measurement apparatus.
Background technology
It is one of temperature measurement of vacuum furnace major way using infrared survey the temperature in vacuum furnace, it being capable of fast and accurate measurement vacuum Temperature when heating in stove stove.But influence infrared measurement of temperature result factor also have very much, as thermometric environment, thermometric window material, Water mist etc..
If granule foreign is more in infrared temperature measurement apparatus local environment, just it is easy to block due to the presence of granule foreign By the infrared energy of vacuum drying oven from inside to outside, so that infrared radiation thermometer is received, radiation energy is fewer than reality to cause temperature-measuring results inaccurate Really.Equally, if the material of thermometric window is different, the transmitance of infrared energy is also different, is shown on infrared radiation thermometer Temperature-measuring results it is also different, so the material of thermometric window should be more biased towards in the choice it is higher in infrared energy transmitance Material, the temperature measured so also can be closer to true temperature.Meanwhile if there is the case where water mist in watch window, As situation that can be more with granule foreign in environment, influences infrared radiation thermometer and receive the infrared energy of vacuum drying oven from inside to outside Amount causes the measurement result on infrared radiation thermometer inaccurate.Therefore, above requirement is also proposed to infrared temperature measurement apparatus, it is red Can the accuracy rate of outer temperature measuring equipment temperature-measuring results be directly related to vacuum drying oven and touch the mark the working performance of requirement and stove.It is existing If having, industry is infrared using on vacuum drying oven, the appearance above problem that all can be more or less, causes temperature-measuring results inaccurate.
Utility model content
In view of the above-mentioned problems, the purpose of this utility model is to provide a kind of vacuum drying oven infrared temperature measurement apparatus, the device knot Structure is simple, is conveniently replaceable part, reduces maintenance cost, and improve the convenience and accuracy of infrared measurement of temperature.
To achieve the goals above, the utility model uses following technical scheme:
A kind of vacuum drying oven infrared temperature measurement apparatus, including graphite-pipe, metal protecting tube, counter flange, observation base, infrared radiation thermometer Bearing, infrared radiation thermometer, gland and infrared glass, wherein observation base are fixed on vacuum furnace body connecting tube by counter flange On, the infrared glass is fixed on one end of the observation base by gland, and the other end of the observation base passes through metal protecting tube It is connect with one end of the graphite-pipe, the graphite-pipe is through vacuum drying oven heating room side wall and is placed in vacuum stove heat room One end be equipped with thermometric window;The infrared radiation thermometer is connect by infrared radiation thermometer bearing with counter flange.
The axis collinear of the infrared radiation thermometer, observation base, metal protecting tube and graphite-pipe.
The both ends of the graphite-pipe are added by graphite nut axial limiting, the outboard end of the graphite-pipe with the vacuum drying oven Ceramic pillar is equipped between the side wall of hot cell.
The thermometric window is to be blocked using made of boron nitride material.
The infrared glass is pressed between the gland and observation base and can push and pull.
It is respectively equipped with gasket and sealing ring between the both sides of the infrared glass and the gland and observation base.
The both ends of the metal protecting tube respectively with the graphite-pipe and observation base grafting.
One end of the infrared radiation thermometer bearing is connect with the counter flange, and the infrared radiation thermometer is set to described red It is fixed on outer temperature measurer bearing and by fixing device.
The fixing device includes square nut, fixed frame and puller bolt, and wherein square nut is threaded in described The head of infrared radiation thermometer, the fixed frame are sheathed on the outside of the square nut and bottom and the infrared radiation thermometer branch Seat connects, circumferentially arranged with four puller bolts for holding out against the square nut on the fixed frame.
The backing plate for adjusting height is equipped between the infrared radiation thermometer and the infrared radiation thermometer bearing.This
The advantages of utility model and advantageous effect are:
1. the utility model can not only ensure the working environment of infrared temperature measurement apparatus, property easy to use is improved, reduces dimension Accomplish this, it is most important that the accuracy that infrared measurement of temperature is taken over can be obviously improved.
2. the utility model is simple in structure, easy for installation, simple operation, temperature-measuring results are accurate.
Description of the drawings
Fig. 1 is the structural schematic diagram of the utility model;
Fig. 2 is enlarged drawing at A in Fig. 1;
Fig. 3 is C direction views in Fig. 1;
Fig. 4 is B-B sectional views in Fig. 1.
In figure:1 is graphite-pipe, and 2 be metal protecting tube, and 3 be counter flange, and 4 be observation base, and 5 be infrared radiation thermometer bearing, 6 It is gland for infrared radiation thermometer, 7,8 be infrared glass, and 9 be graphite nut, and 10 be ceramic pillar, and 11 be thermometric window, and 12 be close Packing, 13 be sealing ring, and 14 be connection bolt, and 15 be square nut, and 16 be puller bolt, and 17 be fixed frame, and 20 be vacuum drying oven Heating room side wall, 21 be vacuum furnace body connecting tube, and 22 be backing plate.
Specific implementation mode
In order to keep the purpose of this utility model, technical solution and advantage clearer, below in conjunction with the accompanying drawings and it is embodied The utility model is described in detail in example.
As shown in Figure 1, a kind of vacuum drying oven infrared temperature measurement apparatus provided by the utility model, including graphite-pipe 1, metal protecting tube 2, counter flange 3, observation base 4, infrared radiation thermometer bearing 5, infrared radiation thermometer 6, gland 7 and infrared glass 8, wherein observation base 4 It is fixed in vacuum furnace body connecting tube 21 by counter flange 3, infrared glass 8 is fixed on the one of observation base 4 by gland 7 End, the other end of observation base 4 connect by metal protecting tube 2 with one end of graphite-pipe 1, and graphite-pipe 1 is through vacuum furnace heating chamber Side wall 20 and be placed in the indoor one end of vacuum stove heat be equipped with thermometric window 11;Infrared radiation thermometer 6 passes through infrared radiation thermometer bearing 5 connect with counter flange 3.The axis collinear of infrared radiation thermometer 6, observation base 4, metal protecting tube 2 and graphite-pipe 1.
Further, the both ends of graphite-pipe 1 are added by 9 axial limiting of graphite nut, outboard end and the vacuum drying oven of graphite-pipe 1 Ceramic pillar 10 is equipped between hot cell side wall 20.
Counter flange 3 is secured by bolts on vacuum furnace body take over 21, counter flange 3 and vacuum furnace body take over 21 Between be equipped with O-ring seal.Observation base 4 is bolted on counter flange 3, is equipped between observation base 4 and counter flange 3 O-ring seal.
One end of metal protecting tube 2 is plugged in one end that graphite-pipe 1 is in vacuum stove heat outside, and the other end is placed in observation In the endoporus that seat 4 is equipped with.
As Figure 2-3, gland 7 and observation base 4 are connected by connecting bolt 14, and infrared glass 8 is pressed on gland 7 and sees It examines between seat 4 and can push and pull, gasket 12 and sealing are respectively equipped between the both sides and gland 7 and observation base 4 of infrared glass 8 Circle 13.Gasket 12 is polytetrafluoro pressure pad, and sealing ring 13 is O-ring seal.
The water mist occurred on infrared glass 8 when to solve the problems, such as thermometric influences temperature-measuring results, and the fixed of infrared glass 8 is protected Stay the degree of freedom of the lateral pull between gland 7 and observation base 4 of infrared glass 8;When there is water mist on infrared glass 8, can lead to It crosses pull infrared glass 8 and removes water mist on infrared glass 8 using the friction of 0 type sealing ring.
One end of infrared radiation thermometer bearing 5 is connect with counter flange 3, and infrared radiation thermometer 6 is set to infrared radiation thermometer bearing 5 Above and by fixing device fix.The backing plate for adjusting height is equipped between infrared radiation thermometer 6 and infrared radiation thermometer bearing 5 22, it can ensure infrared radiation thermometer by adjusting the quantity of position and increase and decrease backing plate 22 of the infrared bearing 5 on counter flange 3 6 center and the endoporus center of the endoporus of observation base 4, metal protecting tube 2 and graphite-pipe 1 are all in same straight line.
As shown in figure 4, the fixing device includes square nut 15, fixed frame 17 and puller bolt 16, wherein rectangular spiral shell The head that mother 15 is threaded in infrared radiation thermometer 6, fixed frame 17 are sheathed on the outside of square nut 15 and bottom and infrared survey Warm instrument bearing 5 connects, circumferentially arranged with four puller bolts 16 for holding out against square nut 15 on fixed frame 17.
One end that thermometric window 11 is in vacuum stove heat indoor by screw thread with graphite-pipe 1 is connect, thermometric window 11 To be blocked using made of boron nitride material.
To solve, granule foreign in infrared temperature measurement apparatus local environment is more, material of thermometric window 11 influences infrared energy The problem of measuring transmitance, so in selection, this material needs to have following characteristic:1. coefficient of expansion when high temperature is low, subtract It is few to make to occur gap between thermometric window 11 and graphite-pipe 1 because of high temperature deformation vacuum drying oven endoparticle impurity is made to enter graphite-pipe In 1, to influence temperature-measuring results;2. the transmitance of infrared energy wants high.Based on above 2 points, by many experiments and money The inquiry of material is found, since the material characteristic of boron nitride has high far infrared penetrance and the lower coefficient of expansion, is accorded with completely The demand of the utility model aim is closed, therefore the material of thermometric window 11 is selected as boron nitride (BN).
The operation principle of the utility model is:
When work, by adjusting the concentricity at infrared radiation thermometer 6 center and graphite-pipe 1, due to the effect of thermometric window 11, Unfavorable factor when thermometric is greatly reduced, whether only should be noted on infrared glass 8 has water mist appearance;When there is water mist When manual lateral pull infrared glass 8 can remove the water mist on infrared glass, then observe the number shown on infrared radiation thermometer 6 Word as currently waits for testing temperature.
The utility model can not only ensure the working environment of infrared temperature measurement apparatus, improve property easy to use, reduce repair Cost, it is most important that the accuracy that infrared measurement of temperature is taken over can be obviously improved.Therefore, the utility model is simple in structure, peace Dress is convenient, simple operation, and temperature-measuring results are accurate.
The foregoing is merely the embodiments of the utility model, are not intended to limit the scope of protection of the utility model.It is all Any modification, equivalent substitution and improvements made within spirit of the present utility model and principle, extension etc., are all contained in this reality With in novel protection domain.

Claims (10)

1. a kind of vacuum drying oven infrared temperature measurement apparatus, which is characterized in that including graphite-pipe (1), metal protecting tube (2), counter flange (3), observation base (4), infrared radiation thermometer bearing (5), infrared radiation thermometer (6), gland (7) and infrared glass (8), wherein observation base (4) it is fixed in vacuum furnace body connecting tube (21) by counter flange (3), the infrared glass (8) is fixed by gland (7) The other end of one end in the observation base (4), the observation base (4) passes through metal protecting tube (2) and the one of the graphite-pipe (1) End connection, the graphite-pipe (1) is through vacuum drying oven heating room side wall (20) and is placed in the indoor one end of vacuum stove heat and is equipped with Thermometric window (11);The infrared radiation thermometer (6) is connect by infrared radiation thermometer bearing (5) with counter flange (3).
2. vacuum drying oven infrared temperature measurement apparatus according to claim 1, which is characterized in that the infrared radiation thermometer (6), observation The axis collinear of seat (4), metal protecting tube (2) and graphite-pipe (1).
3. vacuum drying oven infrared temperature measurement apparatus according to claim 1, which is characterized in that the both ends of the graphite-pipe (1) are logical Graphite nut (9) axial limiting is crossed, is equipped between the outboard end and the vacuum drying oven heating room side wall (20) of the graphite-pipe (1) Ceramic pillar (10).
4. vacuum drying oven infrared temperature measurement apparatus according to claim 1, which is characterized in that the thermometric window (11) is to use It is blocked made of boron nitride material.
5. vacuum drying oven infrared temperature measurement apparatus according to claim 1, which is characterized in that the infrared glass (8) is pressed on Between the gland (7) and observation base (4) and it can push and pull.
6. vacuum drying oven infrared temperature measurement apparatus according to claim 5, which is characterized in that the both sides of the infrared glass (8) Gasket (12) and sealing ring (13) are respectively equipped between the gland (7) and observation base (4).
7. vacuum drying oven infrared temperature measurement apparatus according to claim 1, which is characterized in that the both ends of the metal protecting tube (2) Respectively with the graphite-pipe (1) and observation base (4) grafting.
8. vacuum drying oven infrared temperature measurement apparatus according to claim 1, which is characterized in that the infrared radiation thermometer bearing (5) One end connect with the counter flange (3), the infrared radiation thermometer (6) be set on the infrared radiation thermometer bearing (5) and It is fixed by fixing device.
9. vacuum drying oven infrared temperature measurement apparatus according to claim 8, which is characterized in that the fixing device includes rectangular spiral shell Female (15), fixed frame (17) and puller bolt (16), wherein square nut (15) are threaded in the infrared radiation thermometer (6) Head, the fixed frame (17) are sheathed on the outside of the square nut (15) and bottom and the infrared radiation thermometer bearing (5) It connects, circumferentially arranged with four puller bolts (16) for holding out against the square nut (15) on the fixed frame (17).
10. vacuum drying oven infrared temperature measurement apparatus according to claim 9, which is characterized in that the infrared radiation thermometer (6) and institute State the backing plate (22) being equipped between infrared radiation thermometer bearing (5) for adjusting height.
CN201820330677.5U 2018-03-09 2018-03-09 A kind of vacuum drying oven infrared temperature measurement apparatus Active CN208043248U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201820330677.5U CN208043248U (en) 2018-03-09 2018-03-09 A kind of vacuum drying oven infrared temperature measurement apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201820330677.5U CN208043248U (en) 2018-03-09 2018-03-09 A kind of vacuum drying oven infrared temperature measurement apparatus

Publications (1)

Publication Number Publication Date
CN208043248U true CN208043248U (en) 2018-11-02

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110057464A (en) * 2019-04-30 2019-07-26 西安航空制动科技有限公司 A kind of temperature measuring equipment of vacuum drying oven
CN110285885A (en) * 2019-07-29 2019-09-27 湖南博云新材料股份有限公司 A kind of high temperature heat treatment furnace infrared temperature measurement system
CN111312632A (en) * 2020-03-19 2020-06-19 北京北方华创微电子装备有限公司 High temperature annealing equipment

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110057464A (en) * 2019-04-30 2019-07-26 西安航空制动科技有限公司 A kind of temperature measuring equipment of vacuum drying oven
CN110285885A (en) * 2019-07-29 2019-09-27 湖南博云新材料股份有限公司 A kind of high temperature heat treatment furnace infrared temperature measurement system
CN111312632A (en) * 2020-03-19 2020-06-19 北京北方华创微电子装备有限公司 High temperature annealing equipment

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