CN207516298U - A kind of capacitance type sensor - Google Patents
A kind of capacitance type sensor Download PDFInfo
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- CN207516298U CN207516298U CN201721169304.6U CN201721169304U CN207516298U CN 207516298 U CN207516298 U CN 207516298U CN 201721169304 U CN201721169304 U CN 201721169304U CN 207516298 U CN207516298 U CN 207516298U
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Abstract
The utility model discloses a kind of capacitance type sensors, including substrate, further include the difference positive and negative electrode pair of setting on the substrate, the difference positive and negative electrode is to including the first positive and negative electrode pair and the second positive and negative electrode pair, first positive and negative electrode is to being above provided with functional material layer, temperature compensating layer is provided between the substrate and difference positive and negative electrode pair, the temperature compensating layer includes heating electrode and the first insulating layer, the heating electrode is arranged on substrate, first insulating layer is covered on heating electrode, the heating electrode is annular electrode, the capacitance type sensor further includes the second insulating layer being covered on the first positive and negative electrode pair.The utility model is by setting difference positive and negative electrode pair, difference positive and negative electrode is to including the first positive and negative electrode pair and the second positive and negative electrode pair, and difference measurement is realized, and then improve accuracy and the sensitivity of capacitance type sensor to one functional material layer of upper setting in the first positive and negative electrode.
Description
Technical field
The utility model is related to sensor field, especially a kind of capacitance type sensor.
Background technology
One of the three big technology foundation stones of sensor as modern information technologies occupy extremely heavy in the development of the national economy
The status wanted.In recent years, with the high speed development of intelligent terminal, the wearable electronics such as smart mobile phone, smartwatch
Pair can the Multifunction Sensor of integrated form propose higher demand.
Capacitance type sensor is using various types of capacitors as sensing element, and measurand or mechanical quantity are converted
As a kind of conversion equipment of electric capacitance change, actually one capacitor with variable element.For example, environmental gas
Sensor can be detected and test content to the portion gas in environment, show that greatly application is latent in field of environment protection
Power.Component environment gas sensor is to be based on flexible base board, but cannot eliminate capacitance noise of the flexible base board to sensor
Influence, cause measured sensor data deviation larger.
Utility model content
In order to solve the above-mentioned technical problem, the purpose of this utility model is to provide a kind of capacitance type sensor with high accuracy.
Technical solution is used by the utility model：A kind of capacitance type sensor including substrate, further includes and is arranged on institute
The difference positive and negative electrode pair on substrate is stated, the difference positive and negative electrode is to including the first positive and negative electrode pair and the second positive and negative electrode
Right, first positive and negative electrode is to being above provided with functional material layer.
Further, it is provided with temperature compensating layer between the substrate and difference positive and negative electrode pair.
Further, the temperature compensating layer includes heating electrode and the first insulating layer, and the heating electrode is arranged on base
On plate, first insulating layer is covered on heating electrode.
Further, the heating electrode is annular electrode.
Further, the capacitance type sensor further includes the second insulating layer being covered on the first positive and negative electrode pair.
Further, the thickness of the second insulating layer is 0.5 μm -1.5 μm.
Further, first positive and negative electrode pair and the second positive and negative electrode are to being that finger-like intersects positive and negative electrode pair.
Further, the functional material layer is the functional material layer to humidity sensitive, the function to ammonia sensitivity
Property material layer or the functional material layer to carbon monoxide sensitivity.
Further, the thickness of the functional material layer is 1 μm -3 μm.
Further, the thickness of first insulating layer is 14 μm -50 μm.
The beneficial effects of the utility model are：
The utility model is by setting difference positive and negative electrode pair, and difference positive and negative electrode is to including the first positive and negative electrode pair and
Two positive and negative electrodes pair, and difference measurement is realized, and then improve capacitance to one functional material layer of upper setting in the first positive and negative electrode
The accuracy of formula sensor and sensitivity.
Description of the drawings
Specific embodiment of the present utility model is described further below in conjunction with the accompanying drawings：
Fig. 1 is an a kind of specific embodiment vertical view of capacitance type sensor of the utility model；
Fig. 2 is an a kind of specific embodiment left view of capacitance type sensor of the utility model；
Fig. 3 is an a kind of specific embodiment schematic diagram of the heating electrode of capacitance type sensor of the utility model；
Fig. 4 is an a kind of specific embodiment schematic diagram of the difference positive and negative electrode pair of capacitance type sensor of the utility model；
Fig. 5 is a kind of preparation flow figure of capacitance type sensor of the utility model.
Specific embodiment
It should be noted that in the absence of conflict, the feature in embodiment and embodiment in the application can phase
Mutually combination.
With reference to figure 1, Fig. 2, Fig. 3 and Fig. 4, Fig. 1 is that an a kind of specific embodiment of capacitance type sensor of the utility model is bowed
View；Fig. 2 is an a kind of specific embodiment left view of capacitance type sensor of the utility model；Fig. 3 is the utility model one kind
One specific embodiment schematic diagram of the heating electrode of capacitance type sensor；Fig. 4 is a kind of capacitance type sensor of the utility model
One specific embodiment schematic diagram of difference positive and negative electrode pair；A kind of capacitance type sensor, including substrate 1, heating electrode 2, first
Insulating layer 3, difference positive and negative electrode are positive and negative to including first to, functional material layer and second insulating layer 10, difference positive and negative electrode
Electrode pair and the second positive and negative electrode pair, in the present embodiment, including 3 groups of difference positive and negative electrodes pair, wherein, the first positive and negative electrode is to such as
4,5 and 6 in Fig. 4, corresponding second positive and negative electrode is to 11,12 and 13 in such as Fig. 4；Heat 3 groups of 2 and first insulating layer of electrode
Into temperature compensating layer, be successively set on as shown in Figure 2 above substrate 1, difference positive and negative electrode to be arranged on the first insulating layer 3 it
On, difference positive and negative electrode pair the first positive and negative electrode to being above provided with functional material layer, as shown in Fig. 2, with three groups of difference
Positive and negative electrode to correspondence, functional material layer be arranged on the first positive and negative electrode to (4,5 and 6 in such as Fig. 2) on, have at three
(7,8 and 9 in such as Fig. 2)；Second insulating layer 10 is arranged on the first positive and negative electrode to upper.Functional material layer is not only needed to electricity
The physical quantity that capacity sensor is detected has the change in the reaction time, bigger dielectric constant of very little, it is necessary to have
Very high restoring degree.
The utility model is prepared for a temperature compensating layer on substrate, can realize to capacitance type sensor into trip temperature
Compensation so that capacitance type sensor can be tested in stationary temperature, and can be worked at low temperature.The capacitance of the utility model
Formula sensor integration has first positive and negative electrode pair of setting functional material layer and is not provided with the second of functional material layer just
Negative electrode generates functional material layer so as to eliminate substrate, heating electrode, first insulating layer etc. to carrying out differential sense measurement
Reaction, so as to improve the accuracy of capacitance type sensor.In addition, the preparation process of capacitance type sensor is simple, operating environment
Of less demanding, rate in blocks is high, can be prepared on a large scale, save a large amount of human and material resources and financial resources.
As being further improved for technical solution, with reference to figure 1 and Fig. 2, in the present embodiment, substrate is flexible transparent substrate,
The thickness of flexible and transparent substrate is 50 μm -125 μm.With reference to figure 3, heating electrode 2 is annular electrode, and the thickness of annular electrode is 5 μ
M-15 μm, annular spacing is 30 μm -50 μm.The capacitance type sensor of the utility model carries out plating metal protection to annular electrode
Layer is handled, and the surface of the annular electrode after electro-cladding is not only more smooth, smooth, but also can protect annular electrode
It is not corroded, annular electrode structure increases the length of electrode, so as to increase in effective area by sinuate construction
The resistance of electrode is added, has increased the calorific value of resistance in this way, realized and give the sensor of the first insulating layer (i.e. functional material
The bed of material) provide heat function.First insulating layer 3 is transparent insulation layer film, and good heat conductivity, thermal conductivity factor is more than 2W/
MK, and dielectric constant is high, does not have very big reaction to functional material layer, and thickness is 14 μm -50 μm, the first insulating layer
3 be Parylene families of coatings materials.And second insulating layer 10 is also transparent insulation layer film, as the exhausted of capacitance type sensor
Edge protective layer, second insulating layer 10 must be high-ks, the film of permeable watertight, and will not to functional material layer
There is very big reaction.Transparent insulation layer film can completely cut off the macromoleculars such as dust, the water droplet in atmospheric environment, and can cause gas
Body analyte can penetrate second insulating layer film entered function material layer (when capacitance type sensor is gas sensor).And
And capacitance type sensor is may be such that when light physical damage is subjected to, surface layer transparent insulation layer film can be protected below
Structure it is injury-free.The thickness of second insulating layer 10 must be moderate, too thick to reduce analysis gas entered function material layer
Amount, it is too thin well to play the role of as insulating protective layer so as to reduce the sensitivity of capacitance type sensor；Cause
This, in the present embodiment, the thickness of second insulating layer 10 is 0.5 μm -1.5 μm.AF or Cytop series can be selected in second insulating layer 10
Coating material.
As being further improved for technical solution, with reference to figure 4, the first positive and negative electrode is to (4,5 and 6 in Fig. 4) and second
Positive and negative electrode is that finger-like intersects positive and negative electrode pair to (11,12 and 13 in Fig. 4).Finger-like intersect positive and negative electrode pair thickness be
5 μm -10 μm, distance (between positive and negative electrode) is 40 μm -100 μm the electrode that finger-like intersects positive and negative electrode between.It is designed to refer to
Shape intersects positive and negative electrode to being advantageous in that：
1st, the preparation very simple for enabling to functional material layer (as dielectric layer) is convenient.
2nd, functional material layer is enabled to be sufficiently exposed in test environment (contact surface is big, and sensing is more accurate).
3rd, functional material layer can make multilayered structure as needed, and the thickness of functional material layer is adjusted.
As being further improved for technical solution, in the present embodiment, functional material layer is the functionality to humidity sensitive
Material layer, the functional material layer to ammonia sensitivity or the functional material layer to carbon monoxide sensitivity.Functional material layer
Thickness is 1 μm -3 μm.In the utility model, select above-mentioned three kinds of functional material layers that gas sensor is made, then this practicality is new
The capacitance type sensor of type can detect the rh value in environment, the content and variation of ammonia and carbon monoxide.This practicality
The novel capacitance type sensor by multiple induced environment gases is integrated in flexible transparent substrate so that capacitance type sensor can
Compatible wearable electronic.
Further, above-mentioned gas sensor is all based on capacitance detecting, and finger-like intersects the positive and negative electrode of positive and negative electrode pair
Respectively as the positive and negative electrode of capacitance.Due to three kinds of different functional material layers respectively in atmospheric environment humidity, ammonia,
Carbon monoxide generates physics or chemical reaction, when in atmospheric environment humidity (steam is gas), ammonia, carbon monoxide
When content changes, the dielectric constant and volume that can cause functional material layer change, so as to cause condenser type
The capacitance of sensor changes, and difference positive and negative electrode is connected to to acquire in different content by weak capacitive analog input card
The corresponding capacitance of functional material layer in the environment of analyte.It can be learnt relatively by collected capacitance values in turn
Humidity, ammonia, carbon monoxide in the atmospheric environment answered contain value.In fact, substrate, heating electrode, first insulating layer etc. its
Its factor will generate capacitance equivalent capacitance noise effect, and therefore, the utility model will be provided with functional material layer
First positive and negative electrode subtracts in the second positive and negative electrode for being not provided with functional material layer to adopting collected capacitance variations numerical value
The capacitance variations numerical value collected has subtracted the capacitance that the other factors such as substrate, heating electrode, the first insulating layer generate capacitance and has made an uproar
Sound influences, and then improves the sensing accuracy of gas sensor.
As being further improved for technical solution, the functional material layer to humidity sensitive is acetylbutyrylcellulose and second
Acetoacetic ester is according to 1:11 mass ratio carries out proportioning and is made.Be polyaniline to the functional material layer of ammonia sensitivity, polythiophene or
The solution that the nanometer particle materials such as polypyrrole are formed.The functional material layer of carbon monoxide sensitivity is received for carbon nanotube or carbon
Obtained by mitron and the material of other mixed with polymers.
With reference to figure 5, Fig. 5 is a kind of preparation flow figure of capacitance type sensor of the utility model, above-mentioned capacitance type sensor
Preparation flow it is as follows：
The processing of substrate：Substrate selects flexible transparent substrate, flexible transparent substrate is cleaned with clear water, then with alcohol again
Secondary cleaning blows off surface with nitrogen, then flexible transparent substrate is put into impregnated several minutes in acetone after take out, and blown off with nitrogen
Free from admixture and dust on to substrate, by by it is above-mentioned it is processed after flexible transparent substrate carry out plasma etching with by flexible base
Plate surface is roughened；And heated baking is carried out, in the present embodiment, heating temperature selects 150 degrees Celsius.
Heat the making of electrode：Heating electrode is annular electrode, will on treated flexible transparent substrate is passed through
Conductive material (i.e. electrode material) produces electrode structure and the progress of annular by inkjet printing, silk-screen printing or slot coated
It toasts, in the present embodiment, heating temperature selects 120 degrees Celsius.Under electrode material of the same race, heat the annular spacing of electrode with it is whole
The temperature-compensating performance of a capacitance type sensor is closely bound up, if annular spacing is too big, the resistance of equal area arrangement
Length is inadequate, cannot compensate corresponding temperature.In the present embodiment, the thickness of annular electrode is 5 μm -15 μm, and spacing is 30 μ
M-50 μm,
Electro-cladding：The annular electrode of above-mentioned preparation electroplating surface metal protective layer and dried again
Roasting, in the present embodiment, heating temperature selects 120 degrees Celsius.Annular electrode surface after electro-cladding is not only more flat
It is whole, smooth, and annular electrode can be protected not to be corroded, annular electrode increases electrode by sinuate construction
Length so as to increase the resistance of electrode in effective area, increases the calorific value of resistance, realizes to heat conductivility in this way
The sensor (i.e. functional material layer) of the first good insulating layer provides the function of heat.
It is coated with the first insulating layer：Pass through silk-screen printing, slit in the upper area of the annular electrode of electro-cladding
The techniques such as coating or inkjet printing prepare the first insulating layer (the first insulating layer is the transparent insulation layer film of good heat conductivity) simultaneously
It is heating and curing, heating is to play the role of the first insulating layer of curing and planarizing.In the present embodiment, heating temperature is selected
110 degrees Celsius, the thickness of the first insulating layer is 14 μm -50 μm.The effect of the transparent insulation layer film of good heat conductivity is by ring
The even heat that shape electrode generates is dispersed on functional material layer, and the transparent insulation layer film of good heat conductivity cannot
Having a great impact to the sensing capabilities of capacitance type sensor, (dielectric constant of the first insulating layer is high, physics and chemical characteristic
It will not change and change, and thermal conductivity factor is more than 2W/mK with the amount of humidity in atmospheric environment, ammonia, carbon monoxide).
Make difference positive and negative electrode pair：Pass through inkjet printing, silk-screen printing above the first insulating layer of good heat conductivity
Or slot coated goes out finger-like and intersects positive and negative electrode to (i.e. difference positive and negative electrode to), and toasted, in the present embodiment, heating is warm
Degree selects 110 degrees Celsius, and thickness of electrode is 5 μm -10 μm, and interelectrode distance is 40 μm -100 μm.Due to needing to visit in environment
The content for surveying gas is different, so the sensitivity for detecting different gas sensors is also just different, it, can for such case
To change the sensitivity of capacitance type sensor by adjusting interelectrode spacing and thickness of electrode.It is also, positive and negative for difference
Electrode pair needs the first positive and negative electrode pair and the second positive and negative electrode to identical parameter, i.e., two positive and negative electrodes are to complete
It is identical.
Coating function material layer：Functional material layer is only coated with an electrode pair of difference positive and negative electrode centering, this reality
In novel, selection the first positive and negative electrode pair of coating.Using techniques such as silk-screen printing, inkjet printing or slot coateds, first
Positive and negative electrode to upper coating thickness between 1 μm -3 μm, film in homogeneous thickness, and be heating and curing to obtain functional material
Layer；Functional material layer is included to the functional material layer of humidity sensitive, to the functional material layer of ammonia sensitivity or to an oxygen
Change the functional material layer of carbon sensitivity.In the utility model, while select above-mentioned three kinds of functional material layers.
It is roughened the surface of functional material layer：The surface of functional material layer is subjected to plasma etch processes with coarse
Change the surface of functional material layer, plasma etching parameter is determined according to functional material layer and second insulating layer, to work(
Energy property material layer carries out surface modification, increases the roughness of functional material layer surface so that functional material after modification
Layer surface is more prone to be coated with other materials, i.e., convenient for follow-up coating second insulating layer.
It is coated with second insulating layer：Silk-screen printing, slot coated are being crossed by roughened functional material layer upper area
Or the techniques such as inkjet printing prepare transparent insulation layer film (i.e. second insulating layer), and are heating and curing, and in the present embodiment, add
Hot temperature selects 120 degrees Celsius, and the thickness of second insulating layer is 0.5-1.5 μm.Cured purpose one is to allow functional material
The bed of material is more smooth, smooth, second is that in order to allow the stable structure of second insulating layer.The effect of second insulating layer is prevented in air
Other gases affect capacitance type sensors performance and defencive function material layer be not destroyed.
Further, in the utility model, the functional material layer to humidity sensitive is by acetylbutyrylcellulose and second
Acetoacetic ester is according to 1:11 mass ratio is matched to obtain.
Preparation to the functional material layer of ammonia sensitivity：By the distillation aniline of 0.6ml, the detergent alkylate sulphur of 3.4g
Acid, the ammonium persulfate of 0.36g are added in the deionized water of 40ml, stir 2.5h, until forming a kind of viscosity solution, then
It can be coated on a sensor by printing technology.In short, it is exactly that the solution formed with Nano particles of polyaniline passes through printer
Skill is coated on a sensor.Nano particles of polyaniline can be replaced with nanometer particle materials such as polythiophene, polypyrroles.
Preparation to the functional material layer of carbon monoxide sensitivity：The carbon nano tube dispersion liquid of 1ml is added in into the ultrapure of 9ml
In water, then with ultrasonic cleaning device ultrasonic disperse 30 minutes, then the platinum powder of 10mg is added in into the sample after ultrasound, continued
With ultrasonic cleaning device ultrasonic disperse 30 minutes, then can be coated on a sensor by printing technology.Carbon nanotube is also
It can be replaced with the material of carbon nanotube and other mixed with polymers.
The utility model can be used for other capacitance type sensors, such as capacitance level transducer.
It is that the preferable of the utility model is implemented to be illustrated, but the invention is not limited to the reality above
Example is applied, those skilled in the art can also make various equivalent variations without departing from the spirit of the present invention
Or replace, these equivalent deformations or replacement are all contained in the application claim limited range.
Claims (10)
1. a kind of capacitance type sensor, including substrate, which is characterized in that further include the positive negative electricity of difference of setting on the substrate
Extremely right, the difference positive and negative electrode is to including the first positive and negative electrode pair and the second positive and negative electrode pair, first positive and negative electrode pair
On be provided with functional material layer.
2. a kind of capacitance type sensor according to claim 1, which is characterized in that the substrate and difference positive and negative electrode pair
Between be provided with temperature compensating layer.
3. a kind of capacitance type sensor according to claim 2, which is characterized in that the temperature compensating layer includes heating electricity
Pole and the first insulating layer, the heating electrode are arranged on substrate, and first insulating layer is covered on heating electrode.
4. a kind of capacitance type sensor according to claim 3, which is characterized in that the heating electrode is annular electrode.
5. a kind of capacitance type sensor according to claim 1, which is characterized in that the capacitance type sensor, which further includes, to be covered
Cover the second insulating layer on the first positive and negative electrode pair.
6. a kind of capacitance type sensor according to claim 5, which is characterized in that the thickness of the second insulating layer is
0.5μm-1.5μm。
A kind of 7. capacitance type sensor according to any one of claims 1 to 6, which is characterized in that the first positive negative electricity
Extremely pair and the second positive and negative electrode is to being that finger-like intersects positive and negative electrode pair.
A kind of 8. capacitance type sensor according to any one of claims 1 to 6, which is characterized in that the functional material
Layer is the functional material layer, the functional material layer to ammonia sensitivity or the functionality to carbon monoxide sensitivity to humidity sensitive
Material layer.
A kind of 9. capacitance type sensor according to any one of claims 1 to 6, which is characterized in that the functional material
The thickness of layer is 1 μm -3 μm.
A kind of 10. capacitance type sensor according to claim 3 or 4, which is characterized in that the thickness of first insulating layer
It is 14 μm -50 μm.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721169304.6U CN207516298U (en) | 2017-09-12 | 2017-09-12 | A kind of capacitance type sensor |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201721169304.6U CN207516298U (en) | 2017-09-12 | 2017-09-12 | A kind of capacitance type sensor |
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| CN207516298U true CN207516298U (en) | 2018-06-19 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113289135A (en) * | 2021-06-10 | 2021-08-24 | 深圳英瑞生物科技有限公司 | Uniform-heating transfusion and blood transfusion equipment and system and application method thereof |
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2017
- 2017-09-12 CN CN201721169304.6U patent/CN207516298U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113289135A (en) * | 2021-06-10 | 2021-08-24 | 深圳英瑞生物科技有限公司 | Uniform-heating transfusion and blood transfusion equipment and system and application method thereof |
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