CN206886203U - Carrier with constant temperature suction nozzle - Google Patents
Carrier with constant temperature suction nozzle Download PDFInfo
- Publication number
- CN206886203U CN206886203U CN201720371207.9U CN201720371207U CN206886203U CN 206886203 U CN206886203 U CN 206886203U CN 201720371207 U CN201720371207 U CN 201720371207U CN 206886203 U CN206886203 U CN 206886203U
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- China
- Prior art keywords
- suction nozzle
- carrier
- cooling
- suction
- pipeline
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model provides a kind of carrier with constant temperature suction nozzle, it is provided with an at least suction nozzle on tooth fork is carried, being sticked in suction nozzle bottom has a cooling carrier, cooling carrier is embedded with a cooling chip in bottom surface, quickly suction nozzle can be made to cool, when in the heating technique of suction cold heat glass handling disengaging oven, coordinate the air cooling effect for being located at the air-flow guide unit carried in tooth fork, extract the hot gas in it out, cooling chip is maintained good cooling efficiency, and suction nozzle is remain perseverance（Often）Temperature, the lathe work without leaving absorption on glass because of suction nozzle overheat（mura）, can solve heat removal issue of multiple suction nozzles in tooth fork closed conduct is carried, avoid influenceing cooling efficiency, and then effectively lifting process production capacity and qualification rate.
Description
Technical field
A kind of carrier is the utility model is related to, refers in particular to set the load with constant temperature suction nozzle of constant temperature suction nozzle on tooth fork is carried
Tool.
Background technology
The carrying tooth fork that mechanical arm drives, carrying on tooth fork has suction nozzle, and suction nozzle vacuumizes when in use, and confirms to adsorb
After glass, carrying action is proceeded by.It is to be pitched to carry by the carrying tooth of mechanical arm to perform and carry disengaging oven heating, carries tooth
With suction glass on fork, after glass is drawn out from oven, the temperature of suction nozzle greatly improves, and causes to be coated with special change
The glass for learning medicament easily leaves lathe work on the glass surface of absorption（mura）, many defective products are caused, cause great damage
Lose.
In view of this, still suffer from shortcoming for prior art and do not attain perfect place, this case is progressed greatly by the present inventor
Research improvement, eventually and create the utility model, and following examples explanation, openly, understand this case the characteristics of.
Utility model content
Main purpose of the present utility model is to provide a kind of carrier with constant temperature suction nozzle, and suction nozzle, which is installed in, carries tooth fork
On, when absorption hot/cold glass disengaging oven heating technique in, quickly suction nozzle can be made to cool, will not because suction nozzle overheat and
The lathe work of absorption is left on glass（mura）, and then effectively lifting process production capacity and qualification rate.
What another object of the present utility model cool in it can pitch closed conduct in carrying tooth in the multiple above suction nozzles of solution
Efficiency.
A further object of the present utility model is that the utility model is installed on mechanical arm, for carrying cold heat glass
Glass, its working environment applied can be general job environment, or dust free room operating environment.
In order to achieve the above object, the utility model provides a kind of carrier with constant temperature suction nozzle, and the carrier has one to hold
Load portion, the upper square shaft of the supporting part are connected to the spindle end of mechanical arm, and the supporting part is provided with the carrying tooth of at least more than one
Fork, carrying tooth fork is strip heat-conducting metal, is pipeline in it；Carrying tooth fork is provided with an at least suction nozzle, the suction nozzle above
Pull of vacuum is produced on suction nozzle face, so as to adsorbing cold heat glass, the suction nozzle bottom, which is sticked, a cooling carrier, for absorbing
The heat of the hot glass transition of the suction, the cooling carrier are contained in the pipeline of carrying tooth fork, and its bottom surface is embedded with a pair
The suction nozzle has the cooling chip that cooling down acts on, and the cooling chip another side is attached on the lower shoe below the pipeline,
The cooling chip is electrically connected with a temperature controller, and the temperature controller is electrically connected with a temp.-sensing wire, and the temp.-sensing wire one end is located at cooling load
Over or around, to know the temperature of the cooling carrier, the temperature controller is supplied to the cooling chip operating voltage to tool, the cooling core
Piece one side quickly absorbs the heat of the hot glass transition of the suction, and another side is conducted heat to outside air by the lower shoe；This
Outside, the heat that the cooling carrier will be remained in the pipeline space, using the insufflation unit for being located at the pipeline front end and it is located at this
One pumping cells of rear end of pipeline and discharge, by the insufflation unit be sent into cool exterior air, from the pumping cells extract out in the pipe
Hot gas in road, so as to maintaining the good cooling efficiency of the cooling chip, the temperature of the suction nozzle is set to remain constant.
It is stepped around the above-mentioned cooling carrier both sides.
The above-mentioned insufflation unit is elongate body, including a gas outlet, an air inlet, and the air inlet is outer with pipeline access
Portion's cold air, the gas outlet are linear outlet, and the gas outlet is in face of the average blows cold air of the cooling carrier.
The above-mentioned pumping cells have a bleeding point, bleeding point connecting line a to air extractor, to extract the pipe out
Hot gas in road.
Above-mentioned carrying tooth fork is provided with a upper cover plate above the pipeline, and the upper cover plate is provided with an opening and a sensing
Hole, the suction nozzle are exposed in the opening, and the suction nozzle is used to adsorb and bearing glass, are provided with a sensor below the sensing hole, are used
The glass is carried in detecting whether to have on the suction nozzle.
The above-mentioned suction nozzle surface has a suction inlet, and the cooling carrier surface has a recess, and it is recessed that the suction inlet is placed in this
Intraoral, the cooling carrier is provided with a suction mouth, and the suction inlet and the recess are respectively equipped with a pumping in communication with the suction mouth
Mouthful, the suction mouth with take over connection one offer the suction nozzle pull of vacuum vacuum be drawn device.
Above-mentioned vacuum is drawn device and is connected to a vacuum controller on the mechanical arm with pipe, on the vacuum controller
With multigroup Y-shaped pipeline and vacuum electromagnetic valve group, the supporting part, which is provided with least more than one, has the difference block of more butt joints,
Multigroup Y-shaped pipeline on the vacuum controller is connected to more butt joints on the difference block with adapter respectively, on the difference block
Per butt joint to take over the single individual suction nozzle of connection, the vacuum electromagnetic valve group switchs as the pull of vacuum of every group of Y-shaped pipeline, relatively
Action vacuum suction is answered in each suction nozzle.
Above-mentioned suction nozzle is flake, for the engineering plastics with low thermal conduction characteristic.
Above-mentioned temp.-sensing wire is located at the cooling carrier over or around.
Above-mentioned temperature controller is set with temperature threshold value, when the temperature of cooling carrier heating exceedes the temperature threshold value,
The temperature controller is supplied to the cooling chip operating voltage, the cooling chip is produced low temperature in the one side of suction nozzle, reduces the suction nozzle
Temperature, the cooling chip with respect to another side produce heat, radiated by the lower shoe into air, until the temp.-sensing wire knows this
The temperature of cooling carrier falls in the range of the temperature threshold value of setting, represents the suction nozzle in the range of certain constant temperature.
It can be fixed voltage or the work with amplitude variations that above-mentioned temperature controller, which is supplied to the operating voltage of the cooling chip,
Make voltage.
The cooling carrier below above-mentioned suction nozzle can open up multiple air-flow adjustment holes before the pipeline on the biside plate on side,
So as to introducing extraneous air.
The beneficial effects of the utility model are：Avoid influenceing cooling efficiency, and then effectively lifting process production capacity and qualification rate.
Brief description of the drawings
Fig. 1：The decomposing schematic representation of the present utility model for carrying tooth fork；
Fig. 2：The schematic internal view of the present utility model carried tooth fork combination and be installed on mechanical arm；
Fig. 3：Carrying tooth fork of the present utility model is installed in mechanical arm and the schematic diagram of other attachment means；
Fig. 4：The schematic diagram of suction nozzle connection vacuum controller of the present utility model；
Fig. 5：The schematic diagram of suction nozzle carrier connection temp.-sensing wire and temperature controller of the present utility model；
Fig. 6：The schematic diagram of the present utility model for carrying the interior air-flow guiding of tooth breeches pipe road and pumping cells.
Description of reference numerals
1 carrier
10 supporting parts
100 difference blocks
101 joints
102 amplifiers
103 big joints
11 carry tooth fork
110 pipelines
111 bottom plates
112 upper cover plates
113 openings
114 sensing holes
115 side plates
116 air-flow adjustment holes
12 suction nozzles
120 suction inlets
121 bleeding points
13 cooling carriers
130 recesses
131 suction mouths
132 bleeding points
14 cooling chips
15 temperature controllers
150 temp.-sensing wires
16 insufflation units
160 gas outlets
161 air inlets
17 pumping cells
170 bleeding points
18 air extractors
19 sensors
2 mechanical arms
20 spindle ends
3 glass
4 vacuum are drawn device
5 vacuum controllers
50 Y-piece roads
51 vacuum electromagnetic valve groups
6 program-controlled devices.
Embodiment
Refer to shown in Fig. 1~Fig. 6, the utility model discloses a kind of carrier with constant temperature suction nozzle, and the carrier 1 has one
Supporting part 10, the profile of supporting part 10 are rectangle framework, and square shaft is connected to the spindle end 20 of mechanical arm 2, the supporting part thereon
10 provided with the fork of the carrying teeth of at least more than one 11, and it 11 is strip heat-conducting metal that the carrying tooth, which is pitched, is pipeline 110 in it；
Carrying tooth fork 11 is provided with an at least suction nozzle 12 above, and the suction nozzle 12 is flake, and it is the engineering plastic with low thermal conduction characteristic
Material, the suction nozzle 12 produce pull of vacuum on suction nozzle face, and so as to adsorbing cold heat glass 3, the bottom of suction nozzle 12 is sticked and has a cooling
Carrier 13, for absorbing the heat of the heat of adsorption glass 3 of suction nozzle 12 conduction, the suction nozzle 12 touches the temperature of one side with the cooling carrier 13 patch
Spend same or like, be stepped around the both sides of cooling carrier 13, be contained in the pipeline 110 of carrying tooth fork 11, the drop
The bottom surface of warm carrier 13 is embedded with the cooling chip 14 that there is a pair of suction nozzles 12 cooling down to act on, and the cooling chip 14 is another
Face is attached on the lower shoe 111 of the lower section of pipeline 110, and electric connection as described below is represented by dotted lines in the accompanying drawings, the cooling
Chip 14 is electrically connected with a temperature controller 15, and the temperature controller 15 is electrically connected with a temp.-sensing wire 150, and the one end of temp.-sensing wire 150 is located at this
Carrier 13 cool over or around, to know the temperature of the cooling carrier 13, the temperature controller 15 is supplied to the work of cooling chip 14
Make voltage；In addition, in the pipeline 110 of carrying tooth fork 11, being located at the front end of pipeline 110 has an insufflation unit 16 and is located at the pipe
There are a pumping cells 17 rear end of road 110, and the insufflation unit 16 is elongate body, including a gas outlet 160, an air inlet 161, with
Under the pipeline be represented by dotted lines in the accompanying drawings, the air inlet 161 with pipeline access cool exterior air, the gas outlet 160 is line
Shape exports, and in face of the blows cold air of cooling carrier 13, the pumping cells 17 have a bleeding point 170, and the bleeding point 170 connects
Pipeline is to an air extractor 18, to extract the hot gas in the pipeline 110 out；Carrying tooth fork 11 is provided with one above the pipeline 110
Upper cover plate 112, the upper cover plate 112 are provided with an opening 113 and a sensing hole 114, and the suction nozzle 12 is exposed in the opening 113, should
Suction nozzle 12 is used to adsorb and bearing glass 3, and the lower section of sensing hole 114 is provided with a sensor 19, is on the suction nozzle 12 for detecting
It is no to have the carrying glass 3, when being heated using the moving glass 3 of mechanical arm 2 disengaging oven, the confirmation absorption glass of sensor 19 can be used
After glass 3, just start the action carried.
It please coordinate shown in Fig. 4, the above-mentioned surface of suction nozzle 12 has a suction inlet 120, and the surface of cooling carrier 13 has one
Recess 130, the suction inlet 120 are placed in the recess 130, and the cooling carrier 13 is provided with a suction mouth 131, the He of suction inlet 120
The recess 130 is respectively equipped with bleeding point 121, the bleeding point 132 in communication with the suction mouth 131, and the suction mouth 131 is to connect
The vacuum of the offer pull of vacuum of suction nozzle 12 of pipe connection one is drawn device 4, and the vacuum, which is drawn device 4 and is connected to one with pipe, is located at the manipulator
Vacuum controller 5 on arm 2, there is multigroup Y-shaped pipeline 50 and vacuum electromagnetic valve group 51 on the vacuum controller 5；The supporting part
10, which are provided with least more than one, has the difference blocks 100 of more butt joints 101, multigroup Y-shaped pipeline 50 on the vacuum controller 5
More butt joints 101 on the difference block 100 are connected to adapter respectively, every butt joint 101 on the difference block 100 is with the company of adapter
One suction nozzle 12 of order, pull of vacuum switch of the vacuum electromagnetic valve group 51 as every group of Y-shaped pipeline 50, and corresponding effect is true
Suction power is electrically connected with a program-controlled device 6, can set the vacuum electromagnetic valve group 51 in each suction nozzle 12, the vacuum electromagnetic valve group 51
For on or off, it opens or closes the sensor 19 that must also coordinate for detecting the information of glass 3, and the program-controlled device 6 is electrically connected with should
Sensor 19, and also it is electrically connected with an amplifier 102 for electrically driving the sensor 19.
Refer to shown in Fig. 5, when 12 heat of adsorption glass 3 of suction nozzle, the temperature controller 15 knows the drop by the temp.-sensing wire 150
The temperature of the warm steep temperature rise of carrier 13, the temperature controller 15 are set with temperature threshold value, such as 25 degree Celsius, now the cooling carrier 13
When the temperature of heating exceedes the temperature threshold value of the temperature controller 15 setting, the temperature controller 15 is supplied to the cooling chip 14 to work electricity
Pressure, the cooling chip 14 is produced low temperature in the one side of suction nozzle 12, reduce the temperature of the suction nozzle 12, and the cooling chip 14 is relative
Another side produces heat, is radiated by the lower shoe 111 into air, until the temp.-sensing wire 150 knows the temperature of the cooling carrier 13
Degree falls in the range of the temperature threshold value of setting, represents the suction nozzle 12 in the range of certain constant temperature, wherein, the temperature controller 15 supplies
Fixed voltage or the operating voltage with amplitude variations should can be set to the operating voltage of the cooling chip 14.
Please coordinate again shown in Fig. 6, the utility model carries the problem of tooth pitches 11 suction nozzles overheat for that can overcome, and utilizes the cooling
Chip 14 makes the fast cooling of suction nozzle 12, reaches cooling effect at once；Passed again in order to make the cooling carrier 13 absorb the suction nozzle 12
The heat led and the heat retained in the pipeline 110 for carrying tooth fork 11 are discharged as early as possible, and the utility model, which utilizes to be located at, carries tooth fork 11
Air-flow guide unit in pipeline 110, cool exterior air is sent into by the insufflation unit 16, extracted out from the pumping cells 17 in the pipe
Hot gas in road 110, extract the hot gas in the pipeline 110 out using the air extractor 18, the heat energy of the suction nozzle 12 is effectively existed
Carry tooth and pitch quick heat removal in 11 closed conducts 110, to maintain the good cooling efficiency of the cooling chip 14.Wherein, the cold sky
Gas is the big joint 103 that the malleation cold air sent out by pump is accessed on the difference block 100, then is divided by under the difference block 100
The joint 101 of side, and pipe is connected to the insufflation unit 16, then be averagely blown into and carried in tooth fork 11 by the gas outlet 160.
In addition, when the carrying tooth fork 11 on have multiple suction nozzles 12 jointly oven heat glass 3 when, each suction nozzle 12 into
For the heat sink of carrying tooth fork 11.Because multiple suction nozzles 12 can rapidly heat up in the pipeline 110 carried in tooth fork 11, if the pipe
Heat in road 110 does not exclude quickly, it will makes the cooling efficiency of the cooling chip 14 reduce, indirectly imitates the cooling of suction nozzle 12
Fruit is deteriorated.
For by this Resolving probiems, exemplified by carrying and have two suction nozzles 12 on tooth fork 11, the utility model removes the utility model
It is sent into from insufflation unit 16 outside first suction nozzle 12 of cool exterior air, in follow-up each cooling carrier below suction nozzle 12
Multiple air-flow adjustment holes 116 are opened up on 13 biside plates 115 other before the pipeline 110, so as to introducing extraneous air, are mixed into pipeline
In 110 after hot gas, the hot gas in the pipeline 110 is extracted out from the pumping cells 17 so that the suction nozzle 12 is in continuously heat of adsorption
Glass 3 and cold glass 3 are passed in and out in oven heating technique, still with good air conducting and radiating effect, make the suction nozzle 12
All remain perseverance（Often）Temperature, the lathe work of the absorption of suction nozzle 12 will not be left on glass 3（mura）, described constant temperature refers to dust free room
Temperature standard under environment.
Working environment of its application of the utility model can be general job environment, or dust free room operating environment.This reality
With new in the carrying tooth fork of mechanical arm, installing is with the suction nozzle carrier that can cool, and the air cooling for coordinating air-flowing type to guide
Effect, carry tooth fork disengaging oven heating glass when, can continued down, maintain the cooling efficiency that the cooling chip is good,
The temperature of suction nozzle is maintained constant temperature, avoid in the prior art often because the heated rear temperature of suction nozzle is too high, and coloured silk is left on glass
The situation of line (mura), effective lifting process production capacity and qualification rate.
The utility model has the advantages that in light of the disclosure herein or teaching can derive derive many change with repairing
Just, if according to the equivalent change of the present utility model for conceiving to be made, effect caused by it is still contained without departing from specification and accompanying drawing
During the connotation of lid, it is regarded as within technology category of the present utility model, it is hereby stated that.
Claims (8)
1. a kind of carrier with constant temperature suction nozzle, it is characterised in that the carrier has a supporting part, and the upper square shaft of the supporting part connects
In the spindle end of mechanical arm, the supporting part is pitched provided with the carrying tooth of at least more than one, and carrying tooth fork is led for strip
Thermometal, it is pipeline in it；Carrying tooth fork is provided with an at least suction nozzle above, and the suction nozzle produces pull of vacuum on suction nozzle face,
So as to adsorbing cold heat glass, the suction nozzle bottom, which is sticked, a cooling carrier, for absorbing the hot glass transition of the suction
Heat, the cooling carrier are contained in the pipeline of carrying tooth fork, and its bottom surface, which is embedded with a pair of suction nozzles, has cooling down effect
Cooling chip, the cooling chip another side is attached on the lower shoe below the pipeline, and the cooling chip is electrically connected with a temperature
Device is controlled, the temperature controller is electrically connected with a temp.-sensing wire, and the temp.-sensing wire one end is located at the cooling carrier over or around, to know the drop
The temperature of warm carrier, the temperature controller are supplied to the cooling chip operating voltage, and cooling chip one side quickly absorbs suction nozzle suction
The heat of attached hot glass transition, another side are conducted heat to outside air by the lower shoe；In addition, the cooling carrier surface heat and
The heat remained in the pipeline space, an insufflation unit of the pipeline front end and a pumping of the rear end of pipeline is located at using being located at
Unit and discharge, cool exterior air is sent into by the insufflation unit, hot gas in the pipeline is extracted out from the pumping cells, so as to dimension
The good cooling efficiency of the cooling chip is held, the temperature of the suction nozzle is remained constant.
2. there is the carrier of constant temperature suction nozzle as claimed in claim 1, it is characterised in that carrying tooth fork is set above the pipeline
Have a upper cover plate, the upper cover plate is provided with an opening and a sensing hole, and the suction nozzle is exposed in the opening, the suction nozzle be used to adsorb and
Bearing glass, sensing hole lower section are provided with a sensor, and the glass is carried for detecting on the suction nozzle whether to have.
3. there is the carrier of constant temperature suction nozzle as claimed in claim 1, it is characterised in that the cooling carrier below the suction nozzle exists
Multiple air-flow adjustment holes can be opened up on other biside plate before the pipeline, so as to introducing extraneous air.
4. there is the carrier of constant temperature suction nozzle as claimed in claim 1, it is characterised in that be ladder around the cooling carrier both sides
Shape.
5. as claimed in claim 1 have constant temperature suction nozzle carrier, it is characterised in that the suction nozzle for flake, its be with
The engineering plastics of low thermal conduction characteristic, its surface have a suction inlet, and the cooling carrier surface has a recess, and the suction inlet is placed in this
In recess, the cooling carrier is provided with a suction mouth, and the suction inlet and the recess are respectively equipped with taking out in communication with the suction mouth
Gas port, the suction mouth with take over connection one offer the suction nozzle pull of vacuum vacuum be drawn device.
6. there is the carrier of constant temperature suction nozzle as claimed in claim 5, it is characterised in that the vacuum, which is drawn device and is connected to one with pipe, to be set
Vacuum controller on the mechanical arm, there is multigroup Y-shaped pipeline and vacuum electromagnetic valve group, the carrying on the vacuum controller
Portion, which is provided with least more than one, has the difference blocks of more butt joints, and multigroup Y-shaped pipeline on the vacuum controller is respectively to connect
Pipe is connected to more butt joints on the difference block, and every butt joint on the difference block connects single individual suction nozzle, the vacuum to take over
Pull of vacuum switch of the solenoid valve block as every group of Y-shaped pipeline, corresponding action vacuum suction is in each suction nozzle.
7. there is the carrier of constant temperature suction nozzle as claimed in claim 1, it is characterised in that the insufflation unit is elongate body, bag
Include a gas outlet, an air inlet, the air inlet accesses cool exterior air with pipeline, and the gas outlet is linear outlet, the gas outlet
In face of the average blows cold air of the cooling carrier.
8. there is the carrier of constant temperature suction nozzle as claimed in claim 1, it is characterised in that the pumping cells have a bleeding point,
The bleeding point connecting line is to an air extractor, to extract the hot gas in the pipeline out.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720371207.9U CN206886203U (en) | 2017-04-11 | 2017-04-11 | Carrier with constant temperature suction nozzle |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720371207.9U CN206886203U (en) | 2017-04-11 | 2017-04-11 | Carrier with constant temperature suction nozzle |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206886203U true CN206886203U (en) | 2018-01-16 |
Family
ID=61323728
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720371207.9U Expired - Fee Related CN206886203U (en) | 2017-04-11 | 2017-04-11 | Carrier with constant temperature suction nozzle |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206886203U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108526862A (en) * | 2018-04-08 | 2018-09-14 | 合肥研力电子科技有限公司 | It is suitble to the filature of sizes |
| CN109018958A (en) * | 2018-09-19 | 2018-12-18 | 苏州精濑光电有限公司 | A kind of material conveying method |
| CN111003407A (en) * | 2018-10-08 | 2020-04-14 | 纬创资通（成都）有限公司 | Production line material supplementing method and material supplementing device |
| CN113734806A (en) * | 2021-09-03 | 2021-12-03 | 深圳市华星光电半导体显示技术有限公司 | Vacuum adsorption device, conveying mechanical arm and conveying system |
-
2017
- 2017-04-11 CN CN201720371207.9U patent/CN206886203U/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108526862A (en) * | 2018-04-08 | 2018-09-14 | 合肥研力电子科技有限公司 | It is suitble to the filature of sizes |
| CN109018958A (en) * | 2018-09-19 | 2018-12-18 | 苏州精濑光电有限公司 | A kind of material conveying method |
| CN109018958B (en) * | 2018-09-19 | 2020-02-21 | 苏州精濑光电有限公司 | Material conveying method |
| CN111003407A (en) * | 2018-10-08 | 2020-04-14 | 纬创资通（成都）有限公司 | Production line material supplementing method and material supplementing device |
| CN113734806A (en) * | 2021-09-03 | 2021-12-03 | 深圳市华星光电半导体显示技术有限公司 | Vacuum adsorption device, conveying mechanical arm and conveying system |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180116 Termination date: 20190411 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |