CN206882270U - Synthetic sapphire substrate cleaning apparatus - Google Patents
Synthetic sapphire substrate cleaning apparatus Download PDFInfo
- Publication number
- CN206882270U CN206882270U CN201720836729.1U CN201720836729U CN206882270U CN 206882270 U CN206882270 U CN 206882270U CN 201720836729 U CN201720836729 U CN 201720836729U CN 206882270 U CN206882270 U CN 206882270U
- Authority
- CN
- China
- Prior art keywords
- screen cloth
- synthetic sapphire
- sapphire substrate
- washing bucket
- storage unit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
The utility model belongs to technical field of semiconductors, discloses synthetic sapphire substrate cleaning apparatus, including the water butt and washing bucket set gradually from top to bottom；The bottom of the clear water storage unit of cleaning fluid storage unit and right side of the water butt including left side, cleaning fluid storage unit and clear water storage unit is equipped with liquid outlet, and shower nozzle is equipped with liquid outlet；Is provided with screen cloth in washing bucket, the bottom of screen cloth is provided with vibrator, and the top that screen cloth is located in washing bucket is provided with support, and along longitudinally rotating shaft is provided with support, the bottom of rotating shaft is provided with bristle, and the top of rotating shaft is provided with motor, waterproof cover is externally provided with motor；The bottom of washing bucket is provided with discharge outlet.The problem of the utility model solves prior art and only cleaned by spraying cleaning fluid and water to synthetic sapphire, and cleaning performance is bad.
Description
Technical field
The utility model belongs to semiconductor applications, and in particular to synthetic sapphire substrate cleaning apparatus.
Background technology
Synthetic sapphire substrate, it is a kind of LED manufacture, the critical material of production, belongs to synthetic cut stone crystalline substance.It has hard
The advantages that degree is high, fusing point is high, translucency is good, electrical insulating property is excellent, stable chemical performance, is also widely used in machinery, optics, letter
The high-tech sectors such as breath.
Surface can be stained with various impurity in synthetic sapphire substrate process, not in time clean impurity, can influence
The quality of synthetic sapphire.And the impurity of tool for artificial sapphire surface is generally divided into three kinds of molecule-type, ionic and atom type, molecule
Absorption affinity between type impurity and synthetic sapphire is weaker, the absorption affinity between ionic and atomic impurity and synthetic sapphire
Relatively by force, therefore, only sapphire is cleaned by spraying cleaning fluid and water during cleaning, it is ineffective.
Now need to provide a kind of cleaning device, the impurity that tool for artificial sapphire surface adsorbs all is cleaned up.
The content of the invention
The utility model is intended to provide a kind of synthetic sapphire substrate cleaning apparatus, only passes through sprinkling to solve prior art
The problem of cleaning fluid and water clean to synthetic sapphire, and cleaning performance is bad.
To achieve the above object, the following technical scheme of the utility model offer, synthetic sapphire substrate cleaning apparatus, including
The water butt and washing bucket set gradually from top to bottom；Water butt includes the cleaning fluid storage unit in left side and the clear water storage on right side
The bottom of portion, cleaning fluid storage unit and clear water storage unit is equipped with liquid outlet, and shower nozzle is equipped with liquid outlet；It is provided with washing bucket
Screen cloth, the bottom of screen cloth are provided with vibrator, and the top that screen cloth is located in washing bucket is provided with support, is provided with and turns along longitudinal direction on support
Axle, the bottom of rotating shaft are provided with bristle, and the top of rotating shaft is provided with motor, waterproof cover is externally provided with motor；Washing bucket
Bottom is provided with discharge outlet.
The technique effect of this programme technical characteristic：
Cleaning fluid storage unit is used to store cleaning fluid, and clear water storage unit is used to store clear water, and liquid outlet, which is used to realize, to be cleaned
Liquid and clear water enter washing bucket, and the shower nozzle of cleaning fluid storage unit bottom is used to spray cleaning fluid, and synthetic sapphire substrate is entered
Row cleaning；The shower nozzle of clear water storage unit bottom is used to spray clear water, and the cleaning fluid of tool for artificial sapphire surface is cleaned out.Screen cloth
For placing synthetic sapphire, vibrator vibrates screen cloth, shakes so as to drop the impurity on synthetic sapphire substrate.Bristle
Rubbed for first the lowest point to occur with synthetic sapphire substrate, synthetic sapphire substrate is cleaned.
The technical principle of this programme is：
Synthetic sapphire is placed on screen cloth, cleaning fluid is entered in washing bucket by shower nozzle, cleaning fluid is sprayed at people
To make in Sapphire Substrate, Vibration on Start-up device, vibrator drives screen cloth vibrations so that the cleaning performance of synthetic sapphire is more preferable, from
And the impurity of tool for artificial sapphire surface is cleaned out；Meanwhile start motor, motor driven axis of rotation so that bristle
Relative friction occurs with synthetic sapphire substrate, so as to which synthetic sapphire substrate be cleaned, after the completion of cleaning, opens clear water
The shower nozzle of storage unit bottom, clear water is sprayed to synthetic sapphire substrate, the cleaning fluid of synthetic sapphire substrate surface is cleaned dry
Only, the cleaning of synthetic sapphire substrate is completed.
Had the technical effect that caused by this programme energy：
The 1st, vibrator is set so that synthetic sapphire vibrates in cleaning process so that tool for artificial sapphire surface
Impurity is more easy to rinse；
The 2nd, bristle is set, and drive bristle to rotate by rotating shaft, it is relative make it that synthetic sapphire substrate occurs with bristle
Friction, can take away the impurity of tool for artificial sapphire surface so that cleaning performance is more preferably.
It is the preferred scheme based on such scheme below：
Preferred scheme one：Based on base case, the bottom of the screen cloth is provided with hydraulic cylinder, the bottom of screen cloth and hydraulic cylinder
Push rod connects.Hydraulic cylinder can promote screen cloth to move up, and synthetic sapphire and the waste liquid after bottom-purge are separated, and avoid artificial
Sapphire can facilitate synthetic sapphire to discharge by waste liquor contamination.
Preferred scheme two：Based on preferred scheme one, the washing bucket, which is located above screen cloth, is provided with air vent, connects on air vent
It is connected to air-heater.Synthetic sapphire substrate after cleaning can be dried.
Preferred scheme three：Based on preferred scheme two, the inwall at the top of the washing bucket is provided with the chute of longitudinal direction, bracket slide
It is connected in chute.Support can be removed, facilitate synthetic sapphire substrate to discharge.
Preferred scheme four：Based on preferred scheme three, the screen cloth is provided with some solid balls.Can be with artificial blue treasured
Relative friction occurs for stone lining bottom so that cleaning performance is more preferably.
Brief description of the drawings
Fig. 1 is the structural representation of the utility model synthetic sapphire substrate cleaning apparatus.
Embodiment
The utility model is described in further detail below by embodiment：
Reference in Figure of description includes：Water butt 1, cleaning fluid storage unit 11, clear water storage unit 12, liquid outlet
13rd, shower nozzle 2, washing bucket 3, screen cloth 4, vibrator 5, ball 6, hydraulic cylinder 7, support 8, rotating shaft 9, bristle 91.
As shown in figure 1, synthetic sapphire substrate cleaning apparatus, including water butt 1, tempering tank 2 and washing bucket 4, water butt 1
The clear water storage unit 12 of cleaning fluid storage unit 11 and right side including left side, right-hand member and the clear water storage of the bottom of cleaning fluid storage unit 11
The left end for depositing the bottom of portion 12 is equipped with liquid outlet 13, and shower nozzle 2 is equipped with liquid outlet 13.
Washing bucket 4 is located at the lower section of water butt 1, and hydraulic cylinder 7, vibrator 5 and screen cloth are sequentially provided with from bottom to up in washing bucket 3
4, the top of the push rod of hydraulic cylinder 7 is connected with the bottom of vibrator 5, and the top of vibrator 5 is connected with screen cloth 4, is set on screen cloth 4
There are multiple solid balls 6.
The side wall at the top of washing bucket 3 is provided with the chute of longitudinal direction, slidably connects support 8 in chute, along longitudinal direction on support 8
Rotating shaft 9 is rotatably connected to, the top of rotating shaft 9 is provided with motor, and the bottom of rotating shaft 9 is provided with bristle 91, the outside of motor
Provided with waterproof cover.The side wall that washing bucket 3 is located at the top of screen cloth 4 is provided with ventilating opening, and ventilating opening is provided with air-heater.
During using the present embodiment, synthetic sapphire is placed on screen cloth 4 first, Vibration on Start-up device 5, vibrator 5 drives
Screen cloth 4 shakes, while opens the shower nozzle 2 of the bottom of cleaning fluid storage unit 11, and shower nozzle 2 sprays cleaning fluid into washing bucket 3, leads to simultaneously
Crossing the vibration of screen cloth 4 drives ball 6 to carry out friction cleaning to synthetic sapphire substrate so that synthetic sapphire substrate cleaning performance
More preferably.And start motor and drive rotating shaft 9 to rotate, Relative friction is occurred by bristle 91 and synthetic sapphire substrate, to people
Sapphire Substrate is made to be cleaned.
After synthetic sapphire cleaning, the shower nozzle 2 of the lower section of clear water storage unit 12 is opened, clear water is sprayed and synthetic sapphire is served as a contrast
Bottom is rinsed.After the completion of the cleaning of synthetic sapphire substrate, screen cloth 4 is driven to move up by hydraulic cylinder 7, and start hot blast
Machine, synthetic sapphire substrate is dried, then synthetic sapphire substrate is taken out.
For those skilled in the art, on the premise of technical solutions of the utility model are not departed from, can also make
Go out several modifications and improvements, these should also be considered as the scope of protection of the utility model, and these are all without influence the utility model
The effect and practical applicability of implementation.
Claims (5)
1. synthetic sapphire substrate cleaning apparatus, it is characterised in that：Including the water butt and washing bucket set gradually from top to bottom；
Water butt includes the bottom of the cleaning fluid storage unit in left side and the clear water storage unit on right side, cleaning fluid storage unit and clear water storage unit
Liquid outlet is equipped with, shower nozzle is equipped with liquid outlet；Screen cloth is provided with washing bucket, the bottom of screen cloth is provided with vibrator, washing bucket
It is interior to be provided with support positioned at the top of screen cloth, rotating shaft is provided with along longitudinal direction on support, the bottom of rotating shaft is provided with bristle, set at the top of rotating shaft
There is motor, waterproof cover is externally provided with motor；The bottom of washing bucket is provided with discharge outlet.
2. synthetic sapphire substrate cleaning apparatus according to claim 1, it is characterised in that：The bottom of the screen cloth is provided with
Hydraulic cylinder, the bottom of screen cloth and the push rod of hydraulic cylinder connect.
3. synthetic sapphire substrate cleaning apparatus according to claim 2, it is characterised in that：The washing bucket is positioned at sieve
Online side is provided with air vent, and air-heater is connected with air vent.
4. synthetic sapphire substrate cleaning apparatus according to claim 3, it is characterised in that：It is interior at the top of the washing bucket
Wall is provided with the chute of longitudinal direction, and bracket slide is connected in chute.
5. synthetic sapphire substrate cleaning apparatus according to claim 4, it is characterised in that：The screen cloth is provided with some
Solid ball.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720836729.1U CN206882270U (en) | 2017-07-11 | 2017-07-11 | Synthetic sapphire substrate cleaning apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720836729.1U CN206882270U (en) | 2017-07-11 | 2017-07-11 | Synthetic sapphire substrate cleaning apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206882270U true CN206882270U (en) | 2018-01-16 |
Family
ID=61296224
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720836729.1U Expired - Fee Related CN206882270U (en) | 2017-07-11 | 2017-07-11 | Synthetic sapphire substrate cleaning apparatus |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206882270U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108940954A (en) * | 2018-06-21 | 2018-12-07 | 何娟娟 | The amplitude type cobblestone wiping arrangement of disordered motion |
| CN110976360A (en) * | 2019-11-22 | 2020-04-10 | 苏州杰安培机电有限公司 | Belt cleaning device for accurate hardware processing |
| CN111632923A (en) * | 2020-05-27 | 2020-09-08 | 上海吉朗景观工程有限公司 | Stone needle-proof alkali treatment device for stone bonding layer |
| CN112170278A (en) * | 2020-09-03 | 2021-01-05 | 杨恩德 | Method for removing welding slag on welding worktable surface |
-
2017
- 2017-07-11 CN CN201720836729.1U patent/CN206882270U/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108940954A (en) * | 2018-06-21 | 2018-12-07 | 何娟娟 | The amplitude type cobblestone wiping arrangement of disordered motion |
| CN108940954B (en) * | 2018-06-21 | 2020-06-12 | 南通拂莱智能装备有限公司 | Amplitude formula cobble wiping arrangement of unordered motion |
| CN110976360A (en) * | 2019-11-22 | 2020-04-10 | 苏州杰安培机电有限公司 | Belt cleaning device for accurate hardware processing |
| CN111632923A (en) * | 2020-05-27 | 2020-09-08 | 上海吉朗景观工程有限公司 | Stone needle-proof alkali treatment device for stone bonding layer |
| CN112170278A (en) * | 2020-09-03 | 2021-01-05 | 杨恩德 | Method for removing welding slag on welding worktable surface |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180116 Termination date: 20200711 |