CN205228732U - Electric conductivity liquid weeping tablet - Google Patents
Electric conductivity liquid weeping tablet Download PDFInfo
- Publication number
- CN205228732U CN205228732U CN201520762876.XU CN201520762876U CN205228732U CN 205228732 U CN205228732 U CN 205228732U CN 201520762876 U CN201520762876 U CN 201520762876U CN 205228732 U CN205228732 U CN 205228732U
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- alkali
- acid
- resistance
- lath
- liquid
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Abstract
The utility model relates to a semiconductor device field especially relates to an electric conductivity liquid weeping tablet. The utility model discloses be applied to and detect acid -base conducting solution body drain liquid, leak and spill over. Acid and alkali -resistance weeping tablet includes: bottom plate 1, the lath line of bottom plate sets up on the bottom plate, acid and alkali -resistance conductive coating, directly scribble in the lath line of bottom plate 7 on the surface, sintering in the oven forms the electrically conductive coating of the electrically conductive coating of acid and alkali -resistance 6, pick -up plate finding activate 2 and acid and alkali -resistance 6, alarm signal lath line 3 respectively on a plurality of lath lines, acid and alkali -resistance conductive coating, cover in conducting coating lath line 7 on the surface, form the electrically conductive coating of the electrically conductive coating of acid and alkali -resistance 6, pick -up plate finding activate 2 and acid and alkali -resistance 6, alarm signal lath line 3 respectively at sintering in the oven on the lath line. And acid and alkali -resistance weeping tablet is for the electrically conductive pick -up plate finding activate 2 of acid and alkali -resistance, and the electrically conductive alarm signal lath line 3 of acid and alkali -resistance and bottom plate 1 be compound to be formed, and acid -base indicator solution 5 is scribbled between the current conducting plate finding activate, is convenient for find 10 departments of weeping.
Description
Technical field
The utility model relates to field of semiconductor devices, particularly relates to a kind of electrical conductance liquid leakage liquid tablet.
Background technology
In the production process of semiconductor, more equipment can be used, such as retort, axe, liquid container, cleaning equipment, connecting portion etc., these equipment often produce the leakage of soda acid liquid when in use, if soda acid leak of liquid, floor paint coating and other equipment can be produced, pipeline deep-etching, serious impact is caused on semiconductor manufacturing generation and environment, existing detection mode often can only detect, can not prevent from deep-etching leakage from falling to spread on other equipment and pipeline, produce corrosion, cost is higher simultaneously.
Utility model content
For existing soda acid leakage induction installation existing for defect, the utility model relate to a kind of accurately induction, and inspection a kind of electrical conductance liquid leakage liquid tablet easily.
The utility model adopts following technical scheme:
A kind of electrical conductance liquid leakage liquid tablet, be arranged at the below holding or transmit the liquid device of electric conductivity, described leakage tablet comprises:
Acid and alkali-resistance base plate;
Some acid and alkali-resistances conduction lath line, contact be arranged on base plate;
Acid and alkali-resistance electrically-conducting paint, is coated on described acid and alkali-resistance conduction lath line on the surface, and sinters in baking oven, forms the coating of acid and alkali-resistance conduction respectively, prevent the corrosion of acid & alkali liquid on multiple described acid and alkali-resistance conduction lath line; And
Described leakage tablet is described acid and alkali-resistance conduction lath line and described acid and alkali-resistance base plate rivet or is compounded to form, and soda acid indicator solution is applied between described acid and alkali-resistance conduction lath line, is convenient to find leakage place.
Preferably, described acid and alkali-resistance conduction lath line comprises:
Detect lath line and alerting signal lath line, be connected with a controller, an alarm respectively, for the electricity ginseng signal changed according to the intrusion of conductance liquid, whether have conductance liquid to invade to detect on described acid and alkali-resistance base plate, described controller, described alarm are reported to the police according to described change electricity ginseng signal; And
Mutually roundaboutly between described detection lath line and described alerting signal lath line to be arranged on described base plate.
Preferably, described acid and alkali-resistance electrically-conducting paint comprises the potpourri that conductive nano powder and fluororesin are formed, or the potpourri that described conductive nano powder and fluororesin powder are formed.
Preferably, described acid and alkali-resistance base plate is polyfluortetraethylene plate or polyvinyl chloride panel.
Preferably, described acid and alkali-resistance conduction lath line is sus304 stainless steel lath line or acid and alkali-resistance conductive coating lath line.
Preferably, described acid and alkali-resistance conduction lath wire shaped is square or rectangular or circle.
Preferably, described acid and alkali-resistance conduction lath line is welded on described base plate by rivet.
Preferably, insulation course is provided with between described acid and alkali-resistance electrically-conducting paint and described acid and alkali-resistance base plate.
Preferably, the thickness of described acid and alkali-resistance conduction lath line is 0.05-1.0 millimeter.The thickness of described acid and alkali-resistance conductive coating lath line is 0.05-0.2 millimeter.
Preferably, described acid and alkali-resistance base plate and acid and alkali-resistance conduct electricity the thickness of lath line is 0.35-1.5 millimeter altogether.
The utility model has following beneficial effect:
The utility model can keep clean and environmental protection, and it can at the high lower of erecting equipment and pipe connection portion position or passageway, walkway place, alert always, and Accident prevention is safe and reliable; The advanced reasonable process design of the utility model, directly can install, in unit area, have ultra-sensitivity, be convenient to change size and modularization, be particularly suitable for complex space; Can under corrosion environment, non-maintaining, reusable, with analogy long service life tens times; The features such as the utility model has light quality, and thickness is thin, more tough mechanical property, corrosion-resistant, high temperature resistant, nonflammable.The utility model is widely used in the seepage detecting electrical conductance liquid, and reveal, Ying goes out to monitor occasion, and manufacturing cost is lower.
Accompanying drawing explanation
Fig. 1 is the structural representation of the utility model soda acid leakage tablet;
Fig. 2 a-2b is the sectional drawing of the utility model soda acid leakage tablet;
Fig. 3 is the structural representation of the utility model square soda acid leakage tablet;
Fig. 4-Fig. 5 is the structural representation of the utility model circular soda acid leakage tablet;
Fig. 6 a-6c is the structural representation of the utility model rectangle soda acid leakage tablet;
Fig. 7, Fig. 8, Fig. 9 a-9b, Figure 10 a-10b is mounting means figure of the present utility model.
Embodiment
It should be noted that, when not conflicting, following technical proposals, can combine between technical characteristic mutually.
Below in conjunction with accompanying drawing, embodiment of the present utility model is further described:
The scope of application of the present utility model can be: the seepage of any electrical conductance liquid, and reveal, Ying goes out to monitor occasion.Such as: semiconductor manufacturing industry: semiconductor-fabricating device (detection that liquid is revealed, the detection that waste liquid overflows); Semiconductor-fabricating device pipe-fitting joint and valve, liquid container, pump groove place (detection that liquid is revealed, the detection that waste liquid overflows); Chemical industry, medicine, the seepage of any electrical conductance liquid of the industries such as military project, leakage monitoring occasion; Also can be that other industry is widely used in number acid alkali lye body and any liquid is revealed, Ying goes out to monitor occasion.
Fig. 1 is the structural representation of the utility model soda acid leakage tablet; As shown in Figure 1, one comprises base plate 1 and responds to lath line with acid and alkali-resistance leakage, acid and alkali-resistance leakage induction lath line is that conductive nano powder and fluororesin (or polyvinyl chloride powder) coating certain proportion are mixed into acid and alkali-resistance electrically-conducting paint, A, this acid and alkali-resistance electrically-conducting paint is directly coated in the conductive coating lath line 7 of base plate on the surface, covered by fluoropolymer conductive coating, and in baking oven, after sintering, form fluoropolymer conductive coating circuit printed line 2,3.B, this acid and alkali-resistance electrically-conducting paint is coated in Sus304 or sus316 stainless steel lath line 7 on the surface, is contained by fluoropolymer conductive coating, and in baking oven, form fluoropolymer conductive coating circuit printed line 2,3 after sintering.Base plate 1 is polyfluortetraethylene plate or polyvinyl chloride panel, and lath line is responded in base plate and acid and alkali-resistance leakage, and rivet or laminating form fluoropolymer conductive coating wiring board.The features such as it has light quality, and sheet material is more soft, corrosion-resistant, and heatproof is wear-resisting, nonflammable, safety, reliable, and there is ultra-sensitivity feature.Wherein, fluoropolymer conductive coating wiring board is soda acid leakage tablet.
Fig. 2 a-2b is the sectional drawing of the utility model soda acid leakage tablet; As illustrated in figures 2 a-2b, above-mentioned soda acid leakage tablet can be understood as two kinds of structures: the first: conductive nano powder and fluororesin or Polyvinylchloride powder coating certain proportion are mixed into acid and alkali-resistance electrically-conducting paint.This coating is covered by fluoropolymer conductive coating after being directly coated in conductive coating lath line 7 surface, and in baking oven, form fluorine-containing poly-or Polyvinylchloride compound conductive coating lath circuit after sintering.It two is: conductive nano powder and fluororesin or polyvinyl-chloride powder paint certain proportion are mixed into acid and alkali-resistance electrically-conducting paint.This coating is contained by fluoropolymer conductive coating after being coated in Sus304 or sus316 stainless steel lath line 7 surface, and in baking oven, form fluorine-containing poly-or Polyvinylchloride compound conductive coating lath circuit after sintering.
Conductive coating lath circuit and teflon or polyvinyl chloride panel rivet or fit and form fluoropolymer conductive coating wiring board, i.e. soda acid leakage tablet. under different corrosion environments, safety, reliably, economical, durable for a long time.Wherein, conductive nano powder (nickel, graphite etc.), Sus304 or sus316 corrosion resistant plate all has good electric conductivity, corrosion-resistant, the advantage such as anti-aging; Alkaline-resisting acid-resistant paint, such as Teflon coating or PVC coating, teflon or polyvinyl chloride panel all have good corrosion-resistant, the advantage such as anti-aging, nonflammable.
Technical parameter of the present utility model is: conductive effect :≤0.25 ohm-sq centimetre, many 40 ~ 50 microns of its coating thickness, and application conductive parameters is: 2 ohm/40 micron coatings are thick/and distance 10cm, wherein thick coating: 30-50 micron.Test condition is: during measurement be must coating to be painted cool completely, solid.Should measure with the multimeter of numerical monitor (general multimeter gear should be adjusted to <200 Ω), the result measured should remove the square conduction numerical value for coating of resistance (i.e. the base number of a tender) of multimeter itself and wire.Environment for use is :-50 DEG C ~+200-50 DEG C.
Fig. 3 is the structural representation of the utility model square soda acid leakage tablet; Fig. 4-Fig. 5 is the structural representation of the utility model circular soda acid leakage tablet; Fig. 6 a-6c is the structural representation of the utility model rectangle soda acid leakage tablet; According to the lath of different shapes, soda acid indicator solution 5 is coated between two conductive coating circuits, falls liquid variable color instruction, is convenient to find leakage 10 place.
Coating should stir in paint can completely, can use before using.After stirring, nickel metallics is uniformly dispersed, and spraying conduction fluoro coatings out just can reach electric conductivity.On soda acid leakage induction lath line and the teflon that conductive coating contains or polyvinyl chloride panel, rivet welding (PTFE rivet 4) or stickup compound formation-soda acid leakage tablet.
The utility model preferred embodiment, whether conduction lath line comprises detection lath line 2 and alerting signal lath line 3, have conductance liquid to invade for detecting on base plate; Detect lath line 2 and alerting signal lath 3, be connected respectively with controller 8, alarm 9, for the electricity ginseng signal changed according to the intrusion of conductance liquid, controller 8, alarm 9 are reported to the police according to change electricity ginseng signal; To detect between lath and alerting signal lath mutually roundabout being arranged on base plate.
Fig. 7-10a, 10b are mounting means figure of the present utility model, as shown in Fig. 7-10a, 10b, soda acid leakage tablet is for detecting the seepage of electrical conductance liquid, it directly can be connected with most alarm controller 8, once detect that the electricity ginseng signal that any position of soda acid leakage tablet has conductance liquid to invade on tablet will change, namely signal that alarm controller 8 collects this change produces warning, with soda acid leakage controller 8 with the use of can quick position leakage equipment and leakage place; Check-out console can be made and promptly and accurately react leakage position and timely reset processing signal leakage, bronsted lowry acids and bases bronsted lowry fluid seepage.After reset feature-Leak Detection, may cross naturally dry or remove bronsted lowry acids and bases bronsted lowry liquid and reset.As shown in Fig. 7-10a, 10b, semiconductor, chemical industry, medicine, keeps flat bottom the manufacturing installations such as military project or hangs soda acid leakage tablet.As shown in Fig. 9 a-9b, semiconductor, chemical industry, the manufacturing installation pipe-fitting joints such as medicine and valve, keep flat or hang soda acid leakage tablet bottom liquid container, pump groove place.Leakage is at any time reported to the police, and processes reply in time.Accident prevention occurs.Keep floor-cleaning, environmental protection, safety, be convenient to install.
In sum, the utility model makes it to have tough mechanical property and chemical-resistance, and this induction lath embeds two sense lath lines in conductive nickel fluororesin mixed coating 6, an alerting signal lath line 3 and a detection lath line 2.The structure that induction lath line is firm ensures without any metal exposed except terminals, even can under corrosion environment, permanent Reusability.
By illustrating and accompanying drawing, giving the exemplary embodiments of the ad hoc structure of embodiment, based on the utility model spirit, also can do other conversion.Although above-mentioned utility model proposes existing preferred embodiment, but these contents are not as limitation.
For a person skilled in the art, after reading above-mentioned explanation, various changes and modifications undoubtedly will be apparent.Therefore, appending claims should regard the whole change and correction of containing true intention of the present utility model and scope as.In Claims scope, the scope of any and all equivalences and content, all should think and still belong in intention of the present utility model and scope.
Claims (9)
1. an electrical conductance liquid leakage liquid tablet, is characterized in that, be arranged at the below holding or transmit the liquid device of electric conductivity, described leakage tablet comprises:
Acid and alkali-resistance base plate;
Some acid and alkali-resistances conduction lath line, contact be arranged on base plate;
Acid and alkali-resistance electrically-conducting paint, is coated on described acid and alkali-resistance conduction lath line on the surface, sinters in baking oven, forms the coating of acid and alkali-resistance conduction respectively, prevent the corrosion of acid & alkali liquid on multiple described acid and alkali-resistance conduction lath line; And
Described leakage tablet is described acid and alkali-resistance conduction lath line and the bottom plate combined formation of described acid and alkali-resistance, and soda acid indicator solution is applied between described acid and alkali-resistance conduction lath line, is convenient to discovery leakage place.
2. electrical conductance liquid leakage liquid tablet according to claim 1, is characterized in that, described acid and alkali-resistance conduction lath line comprises:
Detect lath line and alerting signal lath line, be connected with a controller, an alarm respectively, for the electricity ginseng signal changed according to the intrusion of conductance liquid, whether have conductance liquid to invade to detect on described acid and alkali-resistance base plate, described controller, described alarm are reported to the police according to described change electricity ginseng signal; And
Mutually roundaboutly between described detection lath line and described alerting signal lath line to be arranged on described base plate.
3. electrical conductance liquid leakage liquid tablet according to claim 1, it is characterized in that, described acid and alkali-resistance base plate is polyfluortetraethylene plate or polyvinyl chloride panel.
4. electrical conductance liquid leakage liquid tablet according to claim 1, is characterized in that, described acid and alkali-resistance conduction lath line is Sus304 stainless steel lath line or acid and alkali-resistance conductive coating lath line.
5. electrical conductance liquid leakage liquid tablet according to claim 1, is characterized in that, described acid and alkali-resistance conduction lath wire shaped is square or rectangular or circle.
6. electrical conductance liquid leakage liquid tablet according to claim 1, is characterized in that, described acid and alkali-resistance conduction lath line is welded on described base plate by rivet.
7. electrical conductance liquid leakage liquid tablet according to claim 1, is characterized in that, be provided with insulation course between described acid and alkali-resistance electrically-conducting paint and described acid and alkali-resistance base plate.
8. electrical conductance liquid leakage liquid tablet according to claim 4, is characterized in that, the thickness of described acid and alkali-resistance conduction lath line is 0.05-1.0 millimeter, and the thickness of described acid and alkali-resistance conductive coating lath line is 0.05-0.2 millimeter.
9. electrical conductance liquid leakage liquid tablet according to claim 1, is characterized in that, it is 0.35-1.5 millimeter altogether that described acid and alkali-resistance base plate and acid and alkali-resistance conduct electricity the thickness of lath line.
Priority Applications (1)
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CN201520762876.XU CN205228732U (en) | 2015-09-29 | 2015-09-29 | Electric conductivity liquid weeping tablet |
Applications Claiming Priority (1)
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CN201520762876.XU CN205228732U (en) | 2015-09-29 | 2015-09-29 | Electric conductivity liquid weeping tablet |
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CN205228732U true CN205228732U (en) | 2016-05-11 |
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CN201520762876.XU Expired - Fee Related CN205228732U (en) | 2015-09-29 | 2015-09-29 | Electric conductivity liquid weeping tablet |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111447897A (en) * | 2017-12-22 | 2020-07-24 | 科洛普拉斯特公司 | Ostomy appliance with angular leak detection |
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2015
- 2015-09-29 CN CN201520762876.XU patent/CN205228732U/en not_active Expired - Fee Related
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111447897A (en) * | 2017-12-22 | 2020-07-24 | 科洛普拉斯特公司 | Ostomy appliance with angular leak detection |
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Legal Events
Date | Code | Title | Description |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160511 Termination date: 20160929 |