CN203859730U - Piezoelectric vibration device - Google Patents
Piezoelectric vibration device Download PDFInfo
- Publication number
- CN203859730U CN203859730U CN201420194456.1U CN201420194456U CN203859730U CN 203859730 U CN203859730 U CN 203859730U CN 201420194456 U CN201420194456 U CN 201420194456U CN 203859730 U CN203859730 U CN 203859730U
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- China
- Prior art keywords
- housing parts
- vibrating device
- piezoelectric vibrating
- alignment mark
- element mounting
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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- 239000000758 substrate Substances 0.000 claims description 21
- 239000011796 hollow space material Substances 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 4
- 238000007789 sealing Methods 0.000 claims description 3
- 239000010453 quartz Substances 0.000 description 37
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 37
- 239000008710 crystal-8 Substances 0.000 description 17
- 239000000853 adhesive Substances 0.000 description 9
- 230000001070 adhesive effect Effects 0.000 description 9
- 239000013078 crystal Substances 0.000 description 9
- 238000007639 printing Methods 0.000 description 6
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 229920003002 synthetic resin Polymers 0.000 description 2
- 239000000057 synthetic resin Substances 0.000 description 2
- 239000002562 thickening agent Substances 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000003550 marker Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
The utility model provides a piezoelectric vibration device. With the piezoelectric vibration device, dislocation between protrusions and a piezoelectric component and dislocation between protrusions and conductive joint parts are not easily generated. In the piezoelectric vibration device (1), mounting electrodes (4a, 4b) and aligning markers (6a, 6b) are formed on a component carrying face of a first shell part (2), protrusions (5a, 5b) are arranged on the mounting electrodes (4a, 4b), and the piezoelectric component (8) uses the conductive joint parts (12a, 12b) to be joined with the mounting electrodes (4a, 4b) in a mode that the lower surface of the piezoelectric component (8) is contacted with the upper ends of the protrusions (5a, 5b).
Description
Technical field
The utility model relates to the piezoelectric vibrating device that is equipped with the such piezoelectric element of quartz crystal on housing parts.
Background technology
In the past, in order to form the oscillator etc. that is equipped on mobile phone, proposed to have the scheme of the various oscillators that used crystal etc.For example, in following patent documentation 1, disclose basal substrate upper cantilever formula carry the quartz crystal that quartz plate forms.In patent documentation 1, on basal substrate, be provided with terminal electrode.Quartz plate at one end side utilizes conductive adhesive to be fixed on terminal electrode via projection.
In the quartz crystal of recording at patent documentation 1, the stress while utilizing conductive adhesive to solidify, it is fulcrum that quartz plate be take the part contacting with projection, the mode with front towards top moves.Thus, the front of quartz plate and other part separate enough distances.
Patent documentation 1: TOHKEMY 2003-283293 communique
In patent documentation 1, in the situation that form terminal electrode and above-mentioned projection by identical metal, cannot identify from top the position of projection.Therefore,, when quartz plate is installed, depart from sometimes the position between projection and quartz plate.In addition, sometimes also produce the dislocation between projection and conductive adhesive.Therefore, after curing conductive adhesive, quartz plate produces, and the danger that has other part of quartz plate and housing substrate, housing to contact.
Utility model content
The purpose of this utility model is to provide the piezoelectric vibrating device of the dislocation between dislocation, projection and the conductivity attachment that are not easy to produce between projection and piezoelectric element.
Piezoelectric vibrating device of the present utility model possesses: the 1st housing parts, and it has element mounting face; Alignment mark, it is arranged on the element mounting face of above-mentioned the 1st housing parts; Installing electrodes, it is arranged on the element mounting face of above-mentioned the 1st housing parts; Projection, it is arranged in above-mentioned installing electrodes; Piezoelectric element, its said elements that is equipped on above-mentioned the 1st housing parts carries face; And conductivity attachment, it engages above-mentioned piezoelectric element and above-mentioned installing electrodes.
In piezoelectric vibrating device of the present utility model, be preferably, above-mentioned installing electrodes and above-mentioned projection are configured to one.
In piezoelectric vibrating device of the present utility model, more preferably, above-mentioned projection and above-mentioned installing electrodes consist of identical material.
In piezoelectric vibrating device of the present utility model, be preferably, above-mentioned alignment mark carries mask at said elements has the part 1 of extending along the 1st direction parallel with this element mounting face with parallel with the face that carries along said elements and along the part 2 of extending with the 2nd direction of above-mentioned the 1st direction quadrature.
Above-mentioned alignment mark can have cross flat shape.Or above-mentioned alignment mark also can have the flat shape of rhombus.
Aspect other specific of piezoelectric vibrating device of the present utility model, also possess the 2nd housing parts, itself and the 1st housing parts connect be incorporated in and the 1st housing parts between form the hollow space of taking in above-mentioned piezoelectric element.
Above-mentioned the 1st housing parts can be also housing substrate, and in this case, the 2nd housing parts also can be for having the lid towards the unlimited opening of this housing substrate-side.
In piezoelectric vibrating device of the present utility model, also can form above-mentioned the 1st housing parts and there is unlimited upward opening, the bottom of this opening is that said elements carries face.In this case, the 2nd housing parts also can be for sealing the cover of opening of the top of the 1st housing parts.
According to piezoelectric vibrating device of the present utility model, the above-mentioned alignment mark of can take carries piezoelectric element as benchmark, and the alignment mark of can also take carries out the joint based on conductivity attachment as benchmark.Therefore, be not easy to produce the dislocation between dislocation, projection and the conductivity attachment between piezoelectric element and installing electrodes.Thus, be not easy to produce piezoelectric element to other part contact, be therefore not easy to produce bad characteristic.In addition, can carry accurately piezoelectric element, can also carry out accurately the joint of conductivity attachment, therefore can realize miniaturization.
Accompanying drawing explanation
Fig. 1 is the main cutaway view of the piezoelectric vibrating device of the 1st execution mode of the present utility model.
Fig. 2 is the exploded perspective view of the piezoelectric vibrating device of the 1st execution mode of the present utility model.
Fig. 3 means the stereogram of the quartz crystal that the piezoelectric vibrating device of the 1st execution mode is used.
Fig. 4 is the vertical view of the housing substrate that uses of the 1st execution mode.
Fig. 5 is equipped with the diagrammatic top view of the structure of quartz crystal in the 1st execution mode on housing substrate.
Fig. 6 is the vertical view of the housing substrate for the 1st variation of the 1st execution mode is described.
Fig. 7 is the vertical view of the housing substrate for the 2nd variation of the 1st execution mode is described.
Fig. 8 is the main cutaway view of the piezoelectric vibrating device of the 2nd execution mode of the present utility model.
Description of reference numerals:
1 ... piezoelectric vibrating device; 2 ... housing substrate; 3 ... lid; 4a, 4b ... installing electrodes; 5a, 5b ... projection; 6a, 6b ... alignment mark; 7 ... attachment; 8 ... quartz crystal; 8a ... front end; 9 ... quartz wafer; 10,11 ... 1st, the 2nd exciting electrode; 10a ... connecting portion; 12a, 12b ... conductivity attachment; 16a, 16b, 26a, 26b ... alignment mark; 31 ... piezoelectric vibrating device; 32 ... the 1st housing parts; 32a ... element mounting face; 33 ... cover; 34 ... attachment.
Embodiment
Below, with reference to accompanying drawing, execution mode of the present utility model is described.
Fig. 1 is the main cutaway view of the piezoelectric vibrating device of the 1st execution mode of the present utility model.
Piezoelectric vibrating device 1 has the housing substrate 2 as the 1st housing parts.Housing substrate 2 consists of insulating ceramicses such as aluminium oxide.Housing substrate 2 also can be formed by synthetic resin.
The upper surface of housing substrate 2 is element mounting face.Upper surface joint at housing substrate 2 has the lid 3 with unlimited opening downwards.Lid 3 the 2nd housing parts that are equivalent in the utility model.Lid 3 consists of metal.In addition, lid 3 also can consist of synthetic resin or pottery.Lid 3 upper surfaces via attachment 7 and housing substrate 2 engage.Thus, form the hollow space A by housing substrate 2 and lid 3 sealings.
Above-mentioned attachment 7 can be formed by solder bonding metal parts or adhesive etc.
As shown in Fig. 2 and Fig. 4, at the upper surface of housing substrate 2, be formed with installing electrodes 4a, 4b.And on installing electrodes 4a, 4b, be provided with projection 5a, 5b.In the present embodiment, installing electrodes 4a, 4b and projection 5a, 5b are formed as one by identical parts.In addition, projection 5a, 5b also can form split by the material different with installing electrodes 4a, 4b.
Printing by conducting paste of installing electrodes 4a, 4b and being solidified to form.In the present embodiment, the also coating by conducting paste and being solidified to form of projection 5a, 5b.
Yet projection 5a, 5b are outstanding upward from the upper surface of installing electrodes 4a, 4b.
In addition, in the different part of the part with being provided with installing electrodes 4a, 4b, be provided with alignment mark 6a, 6b.Above-mentioned alignment mark 6a, 6b form by the printing conducting paste identical with projection 4a, 4b.Particularly, in order to form installing electrodes 4a, 4b, during printing conductive thickener, going back printing conductive thickener and forming alignment mark 6a, 6b.
In the present embodiment, alignment mark 6a, 6b have cross flat shape.In Fig. 4, the Width that is quartz crystal described later by the direction that links installing electrodes 4a, 4b is made as directions X, by the direction parallel with element mounting face and with the direction of above-mentioned directions X quadrature, is made as Y-direction.Y-direction forms the direction parallel with the length direction of quartz crystal described later.
Alignment mark 6a, 6b have criss-cross shape.Therefore, it has the part 1 of extending along above-mentioned directions X and the part 2 of extending along the Y-direction with directions X quadrature.That is,, when directions X is made as to the 1st direction, alignment mark 6a, 6b form has the part of extending along the 1st direction and along the part of extending with the 2nd direction of the 1st direction quadrature.
As shown in Figure 2, utilize conductivity attachment 12a, 12b that quartz crystal 8 and installing electrodes 4a, 4b are engaged.As above-mentioned conductivity attachment 12a, 12b, can preferably use conductive adhesive.As this conductive adhesive, can preferably use silicon is conductive adhesive.In addition, the material of conductivity attachment is not particularly limited.
Though quartz crystal 8 is schematically shown in Fig. 1, its details shown in Figure 3.With reference to Fig. 3, quartz crystal 8 has quartz wafer 9.Upper surface at quartz wafer 9 is formed with the 1st exciting electrode 10, at lower surface, is formed with the 2nd exciting electrode 11.The 1st exciting electrode 10 has the connecting portion 10a that arrives lower surface via the side of quartz wafer 9.
1st, the 2nd exciting electrode 10,11 can be formed by suitable conducting film.The 2nd exciting electrode 11 of connecting portion 10a and lower surface is electrically connected to respectively by conductivity attachment 12b, 12a and installing electrodes 4b, 4a.In addition, by being electrically connected to, and utilize above-mentioned conductivity attachment 12a, 12b is distolateral at length direction one by quartz crystal 8 and the upper surface of housing substrate 2 engages.In this case, owing to being provided with projection 5a, 5b, so be connected to the fixing quartz crystal 8 of state of the upper end of projection 5a, 5b with the lower surface of quartz crystal 8.In Fig. 5, with diagrammatic top view, quartz crystal 8 is shown and is equipped on the structure on housing substrate 2.
When the conductivity attachment 12a, the 12b that consist of conductive adhesive solidify because of heating, convergent force works.Due to this convergent force, the contact portion between the upper end of projection 5a, 5b and quartz crystal 8 becomes fulcrum, the front end 8a side direction top displacement of quartz crystal 8.Therefore, can suppress reliably quartz crystal 8 contacts with housing substrate 2.
The piezoelectric vibrating device 1 of present embodiment is characterised in that and is provided with above-mentioned alignment mark 6a, 6b.Thus, can suppress reliably the dislocation between dislocation, projection 5a, 5b and conductivity attachment 12a, the 12b between projection 5a, 5b and quartz crystal 8.This is more specifically described.
When manufacturing piezoelectric vibrating device 1, apply the conducting paste that forms installing electrodes 4a, 4b, make it semi-solid preparation.Next, by the printing of conducting paste, and apply alignment mark 6a, 6b and projection 5a, 5b simultaneously, and suitably make it semi-solid preparation.Next, installing electrodes 4a, 4b, alignment mark 6a, 6b and projection 5a, 5b are solidified simultaneously.In this case, can determine that accurately the position of alignment mark 6a, 6b and projection 5a, 5b forms by printing process.
Because installing electrodes 4a, the 4b of projection 5a, 5b and below looks the same, therefore, in the situation that overlooking, be difficult to difference.With this relatively, alignment mark 6a, 6b and above-mentioned installing electrodes 4a, 4b are arranged on different positions.Therefore, alignment mark 6a, 6b and installing electrodes 4a, 4b overlook lower easy difference.So, can use alignment mark 6a, 6b as the benchmark of location.
Therefore, take alignment mark 6a, 6b as benchmark, can identify accurately the position of projection 5a, 5b.So, take alignment mark 6a, 6b as benchmark, conductivity attachment 12a, 12b can be coated in to the position as object accurately.In addition, take the position of above-mentioned alignment mark 6a, 6b is benchmark, quartz crystal 8 can be carried accurately in desired position.Therefore, be not easy to produce the dislocation between projection 5a, 5b and quartz crystal 8, and be also not easy to produce the dislocation between projection 5a, 5b and conductivity attachment 12a, 12b.As described above quartz crystal 8 is being configured in behind correct position, by heating, above-mentioned conductivity attachment 12a, 12b is being solidified.Thus, quartz crystal 8 is carried in correct position.
According to present embodiment, as mentioned above, can locate accurately and engage quartz crystal 8 with respect to projection 5a, 5b.Therefore, can reduce the size of projection 5a, 5b, installing electrodes 4a, 4b.
In the present embodiment, as piezoelectric element, use quartz crystal 8, but also can use the piezoelectric element of piezoelectric ceramic.
In addition, alignment mark 6a, 6b have cross shape, but the shape of alignment mark is not particularly limited.That is, alignment mark 16a, 16b that also can be as shown in Figure 6 like that, have roughly cross flat shape, form the shape attenuating along with trend front end in directions X and Y-direction.The shape in addition, also can alignment mark 26a, 26b as shown in Figure 7 like that with rhombus.In this case, the direction on the summit respect to one another of link rhombus becomes directions X and Y-direction.Therefore, alignment mark 26a, 26b also have along the part 2 of the part 1 of the 1st direction extension and the 2nd direction extension of edge and the 1st direction quadrature.
And in the utility model, alignment mark preferably has the part 2 that the 2nd direction of the part 1 of extending along the 1st direction and edge and the 1st direction quadrature is extended, but the 1st direction and the 2nd direction in this situation is not limited to above-mentioned directions X and Y-direction.And alignment mark also can not have along the part of the 1st direction and the extension of the 2nd direction.For example, also can use alignment mark of having leg-of-mutton flat shape etc.
Fig. 8 is the main cutaway view of the piezoelectric vibrating device of the 2nd execution mode.The piezoelectric vibrating device 31 of the 2nd execution mode has the 1st housing parts 32 and as the cover 33 of the 2nd housing parts.That is, the 1st housing parts 32 is the shape with unlimited upward opening.The bottom surface of the opening of the 1st housing parts 32 is element mounting face 32a.
Utilize attachment 34 to engage using it with as the cover 33 of the 2nd housing parts, to seal the opening of the top of above-mentioned the 1st housing parts 32.Thus, form hollow space A.Like this, except the shape difference of the 1st, the 2nd housing parts, the 2nd execution mode is identical with the 1st execution mode.Therefore, for same section, by marking identical reference marker, omit their explanation.
In the present embodiment, owing to being also provided with alignment mark 6a, so play and the identical effect of the 1st execution mode.
Claims (10)
1. a piezoelectric vibrating device, possesses:
The 1st housing parts, it has element mounting face;
Alignment mark, it is arranged on the element mounting face of described the 1st housing parts;
Installing electrodes, it is arranged on the element mounting face of described the 1st housing parts;
Projection, it is arranged in described installing electrodes;
Piezoelectric element, it is equipped on the described element mounting face of described the 1st housing parts; And
Conductivity attachment, it engages described piezoelectric element and described installing electrodes.
2. piezoelectric vibrating device according to claim 1, is characterized in that,
Described installing electrodes and described projection are configured to one.
3. piezoelectric vibrating device according to claim 1 and 2, is characterized in that,
Described projection and described installing electrodes consist of identical material.
4. piezoelectric vibrating device according to claim 1 and 2, is characterized in that,
Described alignment mark has the part 1 of extending along parallel with this element mounting face the 1st direction with parallel with described element mounting face and along the part 2 of extending with the 2nd direction of described the 1st direction quadrature at element mounting mask.
5. piezoelectric vibrating device according to claim 3, is characterized in that,
Described alignment mark has the part 1 of extending along parallel with this element mounting face the 1st direction with parallel with described element mounting face and along the part 2 of extending with the 2nd direction of described the 1st direction quadrature at element mounting mask.
6. piezoelectric vibrating device according to claim 4, is characterized in that,
Described alignment mark has cross flat shape.
7. piezoelectric vibrating device according to claim 4, is characterized in that,
Described alignment mark has the flat shape of rhombus.
8. piezoelectric vibrating device according to claim 1 and 2, is characterized in that,
Also possess the 2nd housing parts, the 2nd housing parts and the 1st housing parts connect be incorporated in and the 1st housing parts between form the hollow space take in piezoelectric element.
9. piezoelectric vibrating device according to claim 8, is characterized in that,
Described the 1st housing parts is housing substrate, and described the 2nd housing parts is the lid having towards the unlimited opening of described housing substrate-side.
10. piezoelectric vibrating device according to claim 8, is characterized in that,
Described the 1st housing parts has unlimited upward opening, and the bottom of this opening is described element mounting face, and described the 2nd housing parts is the cover of the opening of the top of described the 1st housing parts of sealing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420194456.1U CN203859730U (en) | 2014-04-21 | 2014-04-21 | Piezoelectric vibration device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420194456.1U CN203859730U (en) | 2014-04-21 | 2014-04-21 | Piezoelectric vibration device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203859730U true CN203859730U (en) | 2014-10-01 |
Family
ID=51609575
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420194456.1U Expired - Lifetime CN203859730U (en) | 2014-04-21 | 2014-04-21 | Piezoelectric vibration device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203859730U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107850962A (en) * | 2015-09-30 | 2018-03-27 | 株式会社村田制作所 | Vibrating device and tactile cue device |
-
2014
- 2014-04-21 CN CN201420194456.1U patent/CN203859730U/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107850962A (en) * | 2015-09-30 | 2018-03-27 | 株式会社村田制作所 | Vibrating device and tactile cue device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20141001 |