CN203775535U - Substrate absorption carrying platform - Google Patents
Substrate absorption carrying platform Download PDFInfo
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- CN203775535U CN203775535U CN201420025717.7U CN201420025717U CN203775535U CN 203775535 U CN203775535 U CN 203775535U CN 201420025717 U CN201420025717 U CN 201420025717U CN 203775535 U CN203775535 U CN 203775535U
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- 239000000758 substrate Substances 0.000 title claims abstract description 85
- 238000010521 absorption reaction Methods 0.000 title abstract description 33
- 238000001179 sorption measurement Methods 0.000 claims abstract description 137
- 239000011148 porous material Substances 0.000 claims description 89
- 206010022000 influenza Diseases 0.000 claims description 10
- 238000000034 method Methods 0.000 description 8
- 238000010586 diagram Methods 0.000 description 5
- 239000012141 concentrate Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 241000486406 Trachea Species 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 210000003437 trachea Anatomy 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000013329 compounding Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000000051 modifying effect Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000012163 sequencing technique Methods 0.000 description 1
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Abstract
A substrate absorption carrying platform comprises a carrying platform body, a first air-blocking module and a plurality of second air-blocking modules. The carrying platform body is provided with a plurality of absorption holes. The first air-blocking module is arranged on one side of the carrying platform body, and selectively closes at least one column of adsorption holes in the X direction. The plurality of second air-blocking modules are respectively arranged on the other side of the carrying platform body, and each second air-blocking module selectively closes at least one row of adsorption holes in the Y direction. Therefore, the user can selectively close the adsorption holes which are not sheltered by a substrate in the X and Y directions according to the length, width and size of the actual substrate, thereby the substrate can be effectively adsorbed on the carrying platform.
Description
Technical field
The utility model relates to a kind of substrate adsorption microscope carrier, particularly a kind of can be according to the length and width size of substrate, and selectivity is closed the substrate adsorption microscope carrier of the adsorption hole of X, Y-direction.
Background technology
In the technique of printed circuit board (PCB), printed circuit board (PCB) must be positioned on absorption microscope carrier, by each adsorption hole on absorption microscope carrier, the absorption affinity producing, is fixed on absorption microscope carrier, so as to being convenient to carry out follow-up related process circuit board.So, in practice application, above-mentioned circuit board absorption microscope carrier, still exists problems.Wherein again cannot be according to the circuit boards of different sizes with absorption microscope carrier, and corresponding to open and close adsorption hole be maximum problem; Because, if printed circuit board (PCB) is not fully adsorbed on absorption microscope carrier, can cause printed circuit board (PCB) to produce and break, damage the problem that maybe cannot aim in technique, will cause the technique yield of printed circuit board (PCB) to decline thus, and affect the quality of product.Therefore, how making circuit board absorption microscope carrier can, according to circuit board size, be current industry urgent problem and close the adsorption hole that inverter circuit plate is corresponding.Edge this, the improving of inventor's thoughts the problems referred to above, is concentrate on studies and coordinate the utilization of scientific principle, and proposes a kind of reasonable in design and effectively improve the utility model of the problems referred to above.
Summary of the invention
Main purpose of the present utility model is to provide a kind of substrate adsorption microscope carrier, it can be according to the length and width size of substrate, and optionally close the adsorption hole of at least one row directions X and the adsorption hole of at least one row's Y-direction, can solve thus known circuit board absorption microscope carrier, cannot be effectively according to circuit board size, and close other non-adsorption holes corresponding to circuit board, and then cause the not good problem of adsorption effect.
To achieve these goals, the utility model provides a kind of substrate adsorption microscope carrier, and it comprises: a microscope carrier body, one first choke module and several the second choke module.Microscope carrier body has several adsorption holes.The first choke module is arranged at a side of microscope carrier body, selectively to close those adsorption holes of at least one row directions X.Several the second choke modules are arranged at the opposite side of microscope carrier body, and each second choke module is selectively closed those adsorption holes of at least one row's Y-direction.
In an execution mode of substrate adsorption microscope carrier of the present invention, described substrate adsorption microscope carrier further comprises:
One main airway, it is connected with an air extractor, and this main airway comprises several main pores;
Several the first air flues, respectively this first air flue is connected with respectively this main pore of this main airway respectively, and respectively this first air flue comprises several the first pores; And
Several the second air flues, respectively this second air flue comprises several the second pores, respectively this second pore is corresponding is respectively connected with those adsorption holes of a row, and respectively this first air flue respectively this first pore respectively correspondence be connected with this second air flue;
Wherein, this first choke module is arranged in this main airway movably, and selectively to close at least one main pore, respectively this second choke module is arranged at respectively respectively in this second air flue, selectively to close at least one this second pore.
In another execution mode of substrate adsorption microscope carrier of the present invention, respectively this first air flue is parallel to directions X setting, and respectively this second air flue is parallel to Y-direction setting.
In another execution mode of substrate adsorption microscope carrier of the present invention, respectively this first air flue is parallel to Y-direction setting, and respectively this second air flue is parallel to directions X setting.
In another execution mode of substrate adsorption microscope carrier of the present invention, the blocker unit that respectively this second choke module comprises an axis body and several those adsorption hole quantity corresponding to this row, respectively this blocker unit compartment of terrain is arranged on this axis body, and forms a connected space between every two these blocker unit.
In another execution mode of substrate adsorption microscope carrier of the present invention, respectively this second air flue comprises several and intercommunicating pore that respectively this second pore shifts to install, respectively this intercommunicating pore is connected with this first pore respectively respectively, and the spacing of this blocker unit between two of this second choke module respectively, is more than or equal to the spacing of adjacent this intercommunicating pore and this second pore.
For achieving the above object, the utility model also provides a kind of substrate adsorption microscope carrier, and it comprises: a microscope carrier body, one first choke module and one second choke module.Microscope carrier body has several adsorption holes.The first choke module is arranged at a side of microscope carrier body, selectively to close those adsorption holes of at least one row directions X.The second choke module is arranged at the opposite side of microscope carrier body, selectively to close those adsorption holes of at least one row's Y-direction.
In an execution mode of substrate adsorption microscope carrier of the present invention, described substrate adsorption microscope carrier further comprises:
One main airway, it is connected with an air extractor, and this main airway comprises several main pores;
Several the first air flues, respectively this first air flue is connected with those adsorption holes of each row of directions X respectively, and respectively this first air flue is connected with this main pore respectively respectively;
An air flue, it is connected with this air extractor, and this air flue comprises pore several times; And
Several the second air flues, respectively this second air flue is connected with those adsorption holes of each row of Y-direction respectively, and respectively this second air flue is connected with this pore respectively respectively;
Wherein, this first choke module is arranged in this main airway movably, and selectively to close at least one this main pore, this second choke module is arranged in this air flue, selectively to close at least one this pore.
In another execution mode of substrate adsorption microscope carrier of the present invention, this the first choke module or this second choke module comprise an axis body and several those adsorption holes corresponding to each row of directions X or the blocker unit of those pore quantity of each row of Y-direction, respectively this blocker unit compartment of terrain is arranged on this axis body, and forms a connected space between every two these blocker unit.
In another execution mode of substrate adsorption microscope carrier of the present invention, this the first choke module or this second choke module comprises a choke unit and an operating unit, this choke unit is arranged in this main airway or this air flue movably, and the position being connected with this air extractor away from this main airway or this air flue; This operating unit and this choke unit mechanical connection, to control the position of this choke unit in this main airway or this air flue, optionally to close wherein this main pore or wherein this pore.
The beneficial effects of the utility model are: by alternative movement to close the first choke module of at least one row directions X adsorption hole, and alternative mobile to close the second choke module of at least one row's Y-direction adsorption hole, can be according to substrate length and width size to reach, close the adsorption hole not covered by substrate, and only retain the adsorption hole being covered by substrate, and then can make effectively to promote the ability of absorption substrate.
In order further to understand the utility model, be to reach technology, method and the effect that set object is taked, refer to following relevant bright detailed description, the accompanying drawing of the utility model, believe the purpose of this utility model, feature and feature, when being goed deep into thus and concrete understanding, yet appended graphic only provide with reference to and explanation use, be not used for to the utility model limitr in addition.
Accompanying drawing explanation
Fig. 1 is the schematic diagram of substrate adsorption microscope carrier of the present utility model.
Fig. 2 is the upper viewing view of the first embodiment of substrate adsorption microscope carrier of the present utility model.
Fig. 3 is the generalized section of the first choke module of the first embodiment of substrate adsorption microscope carrier of the present utility model.
Fig. 4 is the second choke module of the first embodiment of substrate adsorption microscope carrier of the present utility model and the generalized section of microscope carrier body.
Fig. 5 is the cross-sectional schematic that the second choke module of the first embodiment of substrate adsorption microscope carrier of the present utility model is closed row's Y-direction adsorption hole.
Fig. 6 is the generalized section that Y-direction adsorption hole is arranged in the second choke module conducting one of the first embodiment of substrate adsorption microscope carrier of the present utility model.
Fig. 7 is the first choke module of the first embodiment of substrate adsorption microscope carrier of the present utility model and the generalized section that the second choke module is interconnected.
Fig. 8 is the schematic diagram of the second embodiment of substrate adsorption microscope carrier of the present utility model.
Fig. 9 is the upper viewing view of the second embodiment of substrate adsorption microscope carrier of the present utility model.
Wherein, description of reference numerals is as follows:
1,1 ': substrate adsorption microscope carrier
10,10 ': microscope carrier body
101,101 ': adsorption hole
11, the 11 ': the first air flue
111: the first pores
12, the 12 ': the second air flue
121: the second pores
122: intercommunicating pore
13: baffle plate
20, the 20 ': the first choke module
21,21 ': main airway
211,211 ': main pore
212,212 ': aspirating hole
22,22 ': choke unit
23,23 ': operating unit
30: the second choke modules
301: operating portion
31: axis body
32: blocker unit
33: connected space
40,40 ': substrate
50: the second choke modules
51: inferior air flue
511: inferior pore
512: aspirating hole
52: choke unit
53: operating unit
Embodiment
Refer to Fig. 1, it is the schematic diagram of substrate adsorption microscope carrier of the present utility model.As shown in the figure, substrate adsorption microscope carrier 1 comprises: a microscope carrier body 10, one first choke module 20 and several the second choke module 30.Microscope carrier body 10 comprises several regularly arranged adsorption holes 101; Microscope carrier body 10 mechanical connection one air extractors (figure does not show, can be preferably evacuator), so that each adsorption hole 101 has an absorption affinity.The first choke module 20 is arranged at a wherein side of microscope carrier body 10, and has an operating unit 23, in order to optionally to close the adsorption hole 101 of at least one row directions X.The adsorption hole 101 of respectively arranging that each second choke module 30 corresponds respectively to Y-direction arranges, optionally to close this corresponding row's adsorption hole 101.Specifically, user can be according to the actual length and width size that is arranged at the substrate 40 on microscope carrier body 10, operating unit 23 is moved to the adsorption hole 101 of adjacent substrates directions X side, closes thus the adsorption hole 101 beyond this side of substrate; In the same manner, can be by pressing the second choke module 30 of the Y-direction side that is adjacent to substrate 40, to close the adsorption hole 101 not covered by substrate 40 beyond this side; Can make thus those adsorption holes 101 that covered by substrate 40 on microscope carrier body 10 have absorption affinity, all the other not capped adsorption holes 101 do not have absorption affinity, and then can make the absorption affinity of microscope carrier body 10 concentrate on the scope that substrate 40 covers.Wherein, described substrate 40, such as being circuit substrate or panel etc., is not added restriction in this.
(the first embodiment)
See also Fig. 2 to Fig. 7, it is the schematic diagram of the first embodiment of substrate adsorption microscope carrier of the present utility model.As shown in Figure 2, the upper viewing view of its display base plate absorption microscope carrier 1.Substrate adsorption microscope carrier 1 comprises a microscope carrier body 10, one first choke module 20 and several the second choke module 30.Microscope carrier body 10 comprises several regularly arranged adsorption holes 101, several the first air flue 11 and several the second air flue 12 that is parallel to Y-direction setting that is parallel to respectively directions X setting.The first air flue 11 comprises several the first pores 111, the second air flue comprises several the second pores 121, and each second pore 121 is corresponding to be respectively connected with an adsorption hole 101, and each first pore 111 of each row the first air flue 11 respectively corresponding with one ranked second air flue 12 and be interconnected, that is each second pore 121 that respectively ranked second air flue 12 is connected with the first air flue 11 of row wherein respectively.
As shown in Figures 2 and 3, the first choke module 20 comprises a main airway 21, a choke unit 22 and an operating unit 23, main airway 21 comprises several main pores 211 and an aspirating hole 212, each main pore 211 is connected with each first air flue 11 respectively, and aspirating hole 212 is connected with an air extractor (not shown).Choke unit 22 is arranged in main airway 21 movably; Operating unit 23 exposes to outside the first choke module 20, and with choke unit 22 mechanical connections, control to adjust thus the position of choke unit 22 in main airway 21.Wherein, choke unit 22 can be piston etc., completely the member of hermetic barrier gas; The first choke module 20 can be to be integrally formed with microscope carrier body 10, or can be two dismountable individual members.
For instance, choke unit 22 can be to be arranged at the end opposite that is provided with aspirating hole 212 with main airway 21, that is the home position of choke unit 22 can be to be arranged in main airway 21, one end contrary with aspirating hole 212.When choke unit 22 does not cover any main pore 211 and is arranged at one end of main airway 21, each main pore 211 is connected with aspirating hole 212, and makes the adsorption hole 101 of each row directions X of each 11 corresponding connections of the first air flue that are connected with main pore 211 present the state with absorption affinity; When choke unit 22 is subject to operating unit 23 operations, to aspirating hole 212, move, and while covering wherein a main pore 211, the main pore 211 of crested and be positioned at 22 rears, choke unit and away from the main pore 211 of aspirating hole 212, be subject to the obstruct of choke unit 22, and cannot be connected with aspirating hole 212, and then make the adsorption hole 101 of its corresponding this row directions X not there is absorption affinity, and reach the effect of closing directions X adsorption hole 101.
In other words, when choke unit 22 is arranged at respectively the two ends of main airway 21 with aspirating hole 212, at operating unit 23, do not move and (be arranged at home position, and do not cover any one main pore 211) time, the adsorption hole 101 of each row directions X presents the state with absorption affinity, and along with operating unit 23 is close to aspirating hole 212 gradually time, the adsorption hole 101 that corresponds to this row directions X of operating unit 23 is intercepted by choke unit 22, and do not there is absorption affinity, that is the adsorption hole 101 of each row directions X of operating unit 23 processes is all intercepted by choke unit 22 and does not have an absorption affinity.
On the contrary, in other mode, choke unit 22 can also be to be arranged at same one end of main airway 21 with aspirating hole 212, that is the home position of choke unit 22 is positioned at aspirating hole 212 tops, and cover aspirating hole 212, and each adsorption hole 101 is presented do not have the state of absorption affinity.When choke unit 22 is subject to operating unit 23, control, and during away from aspirating hole 212, the adsorption hole 101 of each row directions X of 23 processes of operating unit is intercepted by no longer choke unit 22, can be connected with aspirating hole 212 and have absorption affinity.Briefly, required according to actual use, design that can be by choke unit 22 and the opposite position of aspirating hole 212 (choke unit 22 cover aspirating hole 212 or do not cover and away from aspirating hole 212), when determining on not mobile home position, choke unit 22, the adsorbed state of each adsorption hole 101 (thering is or do not have absorption affinity).
As shown in Figure 4, each second air flue 12 can include several the second pores 121 and several intercommunicating pore 122; Each second pore 121 is corresponding to be respectively connected with an adsorption hole 101, and each intercommunicating pore 122 is corresponding respectively, be connected with first pore 111, and each first pore 111 is connected with the first air flue 11 again, that is each adsorption hole 101 can be connected with each the first air flue 11.Wherein, each second pore 121 and each intercommunicating pore 122 can be dislocation as illustrated in figure be arranged in the second air flue 12, can also be to be arranged on corresponding position, in this, do not limited.Each second choke module 30 comprises an axis body 31 and several spaced blocker unit 32, and 32 of each blocker unit are formed with a connected space 33.In actual applications, at least one end of the second choke module 30 can have an operating portion 301; Each blocker unit 32 can be integrally formed with axis body 31, or is sheathed in addition the individual member on axis body 31, and each blocker unit 32 more can optionally be equipped with sealing rubber circle.
As shown in Figure 5, it shows that the second choke module 30 is arranged in the second air flue 12, and cutaway view during operating portion 301 pressurized of the second choke module 30.As shown in the figure, when operating portion 301 pressurized of the second choke module 30, corresponding each second pore 121 of obstruct of each blocker unit 32 is communicated with 122 of each intercommunicating pores, and intercept being communicated with of adsorption hole 101 and the first air flue 11, close thus the adsorption hole 101 of corresponding this row's Y-direction of the second choke module 30, make it not there is absorption affinity.
As shown in FIG. 6 and 7, operating portion 301 tensions when the second choke module 30, and axis body 31 and each blocker unit 32 are moved in the second air flue 12, and when connected space 33 correspondences that make 32 of each blocker unit are positioned at 122 of the second pore 121 and intercommunicating pores, each second pore 121 can be connected by this connected space 33 intercommunicating pore 122 corresponding thereto, and each adsorption hole 101 can be connected with the first air flue 11 and main airway 21, and then make each adsorption hole 101 there is absorption affinity.In actual applications, the second choke module 30 can correspondingly be provided with setting element (for example design of various trip or salient point and groove) with 12 of the second air flues, really makes thus the second choke module 30 move to the ad-hoc location of default conducting or each second pore 121 of obstruct and each intercommunicating pore 122.
Special one carry be, in the present embodiment, to press the operating portion 301 of the second choke module 30 for closing the adsorption hole 101 of this corresponding row's Y-direction, and take the operating portion 301 of pull the second choke module 30, as opening adsorption hole 101, be example, but in practical application, it can also be the design of each blocker unit 32, each second pore 121 and each intercommunicating pore 122 of cooperation the second choke module 30, changing while take press operating part 301 is to open adsorption hole 101, during pull operating portion 301 for closing adsorption hole 101.Again, in other execution mode, can also be that the two ends of the second choke module 30 are all exposed to outside microscope carrier body 10, that is the second choke module 30 has two operating portions that expose 301, user can only carry out the keying of adsorption hole 101 by the mode of pressing thus; For example, user can press the operating portion 301 of a side wherein in advance to close the adsorption hole 101 of this row's Y-direction, and when user wants again to open the adsorption hole 101 of this row's Y-direction, can be the operating portion 301 of pressing the second choke module 30 opposite sides.
Please join again Fig. 1 and Fig. 2 (in figure, arrow represents gas flow), when substrate 40 is arranged on microscope carrier body 10, user can be by the operating unit of the first choke module 20 23, move to corresponding to nearest with substrate 40 sides, and being adjacent to substrate 40 of this row directions X closed and the adsorption hole 101 that do not covered by substrate 40 thus in the position of the adsorption hole 101 not covered by substrate 40; Similarly, user can, by pressing the second choke module 30 that is adjacent to substrate 40 sides, close adsorption hole 101 contiguous and Y-direction that do not covered by substrate 40 thus.Briefly, as shown in Figure 1, the adsorption hole 101 on microscope carrier body 10, except 8 adsorption holes 101 that covered by substrate 40 have absorption affinity, all the other adsorption holes 101 are all covered by the first choke module 20 or the second choke module 30, and do not have absorption affinity.
It is worth mentioning that, arrangement mode and the quantity thereof of graphic middle the illustrated adsorption hole 101 of the present embodiment, and the quantity of the second choke module 30, designed according to actual demand, is not limited to the mode in graphic.In addition, in the present embodiment, main airway 21 is for being formed at the passage in the first choke module 20, and each first air flue 11 and each the second air flue 12 are for being formed at the passage in microscope carrier body 10, but in practical application, main airway 21, each first air flue 11 and each the second air flue 12 can also be tracheaes independently, but not are formed at the passage of microscope carrier body 10 inside.
Special instruction, in above-mentioned the present embodiment, is with the first choke module 20, to be arranged at a side of the Y-direction of microscope carrier body 10, and is connected with each first air flue 11 that is parallel to directions X; And the second choke module 30 is that correspondence is arranged in each second air flue 12 that is parallel to Y-direction as example, but in practical application, is not limited to this, and the first choke module 20 and each the second choke module 30 can be contrary settings.
(the second embodiment)
See also Fig. 8 and Fig. 9, it is the schematic diagram of the second embodiment of substrate adsorption microscope carrier of the present utility model.As shown in Figure 8, substrate adsorption microscope carrier 1 ' comprises a microscope carrier body 10 ', one first choke module 20 ' and one second choke module 50.The first choke module 10 ' and the second choke module 50 are arranged at respectively the dual-side of microscope carrier body 10 ', with the corresponding adsorption hole 101 ' that opens and closes each row directions X of difference, and open and close the adsorption hole 101 ' of respectively arranging Y-direction.
As shown in Figure 9, microscope carrier body 10 ' comprises several the first air flue 11 ' and several the second air flues 12 ' that are parallel to Y-direction setting that directions X arranges that are parallel to, and each first air flue 11 ' is the corresponding several adsorption holes 101 ' that are communicated in each row directions X respectively, and each second air flue 12 ' corresponding several adsorption holes 101 ' of respectively arranging Y-direction that are communicated in respectively.Wherein, each first air flue 11 ' and each the second air flue 12 ' can be the passages being formed in microscope carrier body 10 ', can also be the independent tracheaes that is arranged at microscope carrier body 10 ' below.
The first choke module 20 ' comprises a main airway 21 ', a choke unit 22 ' and an operating unit 23 '.This main airway 21 ' comprises several main pores 211 ' and an aspirating hole 212 ', and each main pore 211 ' is communicated in respectively the first air flue 11 ' of each row directions X.Choke unit 22 ' is arranged in main airway 21 ', and choke unit 22 ' is connected with operating unit 23 ' mechanicalness.Choke unit 22 ' is subject to operating unit 23 ' to control and can in main airway 21 ', move, optionally to intercept one of them main pore 211 '.
The second choke module 50 comprises air flue 51, a choke unit 52 and an operating unit 53 one time.This air flue 51 comprises several pores 511 and an aspirating hole 512, and each pore 511 is communicated in respectively the second air flue 12 ' of respectively arranging Y-direction.Choke unit 52 is connected with operating unit 53 mechanicalnesses, and controlled by operating unit 53, optionally to intercept pore 511 one of them time.
What be worth a topic is, the home position of the choke unit 22 ' of the first choke module 20 ' can be to be arranged at aspirating hole 212 ' top, and cover aspirating hole 212 ', so that the adsorption hole 101 of each row directions X of each first air flue 11 ' presents and does not have a state of absorption affinity under first beginning and end move operation unit 23 '; Or can be as shown in the present embodiment figure, the home position of choke unit 22 ' is to be arranged at one end contrary with aspirating hole 212 ' in main airway 21 ', and when operating unit 23 ' is in the situation that the former beginning and end are moved, the adsorption hole 101 of each row directions X all presents the state with absorption affinity.In the same manner, the choke unit 52 of the second choke module 50 and aspirating hole 512 can also, according to required design, seldom repeat in this.
Refer to the arrow illustrating in Fig. 9 and indicate, it has shown the gas flow in the first air flue 11 ' and the second air flue 12 '; When substrate 40 ' is arranged on microscope carrier body 10 ', user can be according to the length and width of substrate 40 ', corresponding to the choke unit 52 of the choke unit 22 ' of the first choke module 20 ' and the second choke module 50, move to and be adjacent to substrate 40 ' side, and not by near the adsorption hole 101 that substrate 40 ' covered, close thus those not by adsorption hole 101 that substrate 40 ' covered, make thus the absorption affinity of microscope carrier body 10 ' concentrate on those by the adsorption hole 101 that substrate 40 ' covered, and can effectively substrate 40 ' be adsorbed on microscope carrier body 10 '.
In actual applications, microscope carrier body 10 ' the tilting gearing (not shown) that more can be connected, and a wherein side of microscope carrier body 10 ' more can comprise a baffle plate 13.When substrate 40 is arranged at microscope carrier body 10 ', it can be first by tilting gearing, microscope carrier body 10 ' to be tilted to the direction with baffle plate 13, so that a side of substrate 40 ' is resisted against on baffle plate 13, compounding practice is adjusted the first choke module 20 ' and the second choke module 50 again, to close those not by adsorption hole 101 that substrate 40 ' covered.Certainly, above-mentioned adjustment mode is only a kind of execution mode wherein, and the flow process of practical operation and sequencing thereof can be according to demand design modifyings in addition.
What specify is, please join again the first embodiment of the present utility model, contained the second choke module 30 being formed by an axis body 31 and several spaced blocker unit 32 in this embodiment, can also be applied in the present embodiment contained the first air flue 11 ' and the second air flue 12 ', that is the first choke module 20 ' described in the present embodiment and the second choke module 50 can be replaced into the second choke module 30 in above-mentioned the first embodiment.
Only the foregoing is only preferred embodiment of the present utility model; non-ly be intended to limit to scope of patent protection of the present utility model; therefore such as use the equivalence that the utility model specification and accompanying drawing content are done to change, be all in like manner all contained within the scope of rights protection of the present utility model, close and give Chen Ming.
Claims (10)
1. a substrate adsorption microscope carrier, is characterized in that, this substrate adsorption microscope carrier comprises:
One microscope carrier body, it has several adsorption holes;
One first choke module, it is arranged at a side of this microscope carrier body, selectively to close those adsorption holes of at least one row directions X; And
Several the second choke modules, it is arranged at the opposite side of this microscope carrier body, and respectively this second choke module is selectively closed those adsorption holes of at least one row's Y-direction.
2. substrate adsorption microscope carrier according to claim 1, is characterized in that, described substrate adsorption microscope carrier further comprises:
One main airway, it is connected with an air extractor, and this main airway comprises several main pores;
Several the first air flues, respectively this first air flue is connected with respectively this main pore of this main airway respectively, and respectively this first air flue comprises several the first pores; And
Several the second air flues, respectively this second air flue comprises several the second pores, respectively this second pore is corresponding is respectively connected with those adsorption holes of a row, and respectively this first air flue respectively this first pore respectively correspondence be connected with this second air flue;
Wherein, this first choke module is arranged in this main airway movably, and selectively to close at least one main pore, respectively this second choke module is arranged at respectively respectively in this second air flue, selectively to close at least one this second pore.
3. substrate adsorption microscope carrier according to claim 2, is characterized in that, respectively this first air flue is parallel to directions X setting, and respectively this second air flue is parallel to Y-direction setting.
4. substrate adsorption microscope carrier according to claim 2, is characterized in that, respectively this first air flue is parallel to Y-direction setting, and respectively this second air flue is parallel to directions X setting.
5. according to the substrate adsorption microscope carrier described in any one in claim 2 to 4, it is characterized in that, the blocker unit that respectively this second choke module comprises an axis body and several those adsorption hole quantity corresponding to this row, respectively this blocker unit compartment of terrain is arranged on this axis body, and forms a connected space between every two these blocker unit.
6. substrate adsorption microscope carrier according to claim 5, it is characterized in that, respectively this second air flue comprises several and intercommunicating pore that respectively this second pore shifts to install, respectively this intercommunicating pore is connected with this first pore respectively respectively, and the spacing of this blocker unit between two of this second choke module respectively, is more than or equal to the spacing of adjacent this intercommunicating pore and this second pore.
7. a substrate adsorption microscope carrier, is characterized in that, this substrate adsorption microscope carrier comprises:
One microscope carrier body, it has several adsorption holes;
One first choke module, it is arranged at a side of this microscope carrier body, selectively to close those adsorption holes of at least one row directions X; And
One second choke module, it is arranged at the opposite side of this microscope carrier body, selectively to close those adsorption holes of at least one row's Y-direction.
8. substrate adsorption microscope carrier according to claim 7, is characterized in that, described substrate adsorption microscope carrier further comprises:
One main airway, it is connected with an air extractor, and this main airway comprises several main pores;
Several the first air flues, respectively this first air flue is connected with those adsorption holes of each row of directions X respectively, and respectively this first air flue is connected with this main pore respectively respectively;
An air flue, it is connected with this air extractor, and this air flue comprises pore several times; And
Several the second air flues, respectively this second air flue is connected with those adsorption holes of each row of Y-direction respectively, and respectively this second air flue is connected with this pore respectively respectively;
Wherein, this first choke module is arranged in this main airway movably, and selectively to close at least one this main pore, this second choke module is arranged in this air flue, selectively to close at least one this pore.
9. substrate adsorption microscope carrier according to claim 8, it is characterized in that, this the first choke module or this second choke module comprise an axis body and several those adsorption holes corresponding to each row of directions X or the blocker unit of those pore quantity of each row of Y-direction, respectively this blocker unit compartment of terrain is arranged on this axis body, and forms a connected space between every two these blocker unit.
10. substrate adsorption microscope carrier according to claim 8, it is characterized in that, this the first choke module or this second choke module comprises a choke unit and an operating unit, this choke unit is arranged in this main airway or this air flue movably, and the position being connected with this air extractor away from this main airway or this air flue; This operating unit and this choke unit mechanical connection, to control the position of this choke unit in this main airway or this air flue, optionally to close wherein this main pore or wherein this pore.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420025717.7U CN203775535U (en) | 2014-01-16 | 2014-01-16 | Substrate absorption carrying platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420025717.7U CN203775535U (en) | 2014-01-16 | 2014-01-16 | Substrate absorption carrying platform |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203775535U true CN203775535U (en) | 2014-08-13 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420025717.7U Expired - Fee Related CN203775535U (en) | 2014-01-16 | 2014-01-16 | Substrate absorption carrying platform |
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| Country | Link |
|---|---|
| CN (1) | CN203775535U (en) |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105072814A (en) * | 2015-08-31 | 2015-11-18 | 广州超音速自动化科技股份有限公司 | High-efficiency special-shaped material adsorption apparatus |
| CN105583749A (en) * | 2014-10-23 | 2016-05-18 | 富鼎电子科技(嘉善)有限公司 | Adsorption mechanism |
| CN105583663A (en) * | 2014-10-23 | 2016-05-18 | 富鼎电子科技(嘉善)有限公司 | Adsorption mechanism |
| CN107390405A (en) * | 2017-09-22 | 2017-11-24 | 京东方科技集团股份有限公司 | False pressure head component |
| CN105472958B (en) * | 2014-09-30 | 2018-05-22 | 倍科有限公司 | Flat-shaped part adsorbent equipment |
| CN109093576A (en) * | 2018-08-30 | 2018-12-28 | 京东方科技集团股份有限公司 | A kind of vacuum suction microscope carrier |
| CN109143624A (en) * | 2018-08-28 | 2019-01-04 | 武汉华星光电技术有限公司 | Panel adsorbent equipment and the automatic absorbing method for using the device |
| CN109427640A (en) * | 2017-08-22 | 2019-03-05 | 京东方科技集团股份有限公司 | Adsorbent equipment and adsorption method |
| WO2019061708A1 (en) * | 2017-09-30 | 2019-04-04 | 武汉华星光电半导体显示技术有限公司 | Protective cover |
| CN112476295A (en) * | 2020-12-15 | 2021-03-12 | 霸州市云谷电子科技有限公司 | Vacuum adsorption device |
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2014
- 2014-01-16 CN CN201420025717.7U patent/CN203775535U/en not_active Expired - Fee Related
Cited By (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105472958B (en) * | 2014-09-30 | 2018-05-22 | 倍科有限公司 | Flat-shaped part adsorbent equipment |
| CN105583749A (en) * | 2014-10-23 | 2016-05-18 | 富鼎电子科技(嘉善)有限公司 | Adsorption mechanism |
| CN105583663A (en) * | 2014-10-23 | 2016-05-18 | 富鼎电子科技(嘉善)有限公司 | Adsorption mechanism |
| CN105583663B (en) * | 2014-10-23 | 2018-11-06 | 富鼎电子科技(嘉善)有限公司 | Adsorbing mechanism |
| CN105072814B (en) * | 2015-08-31 | 2018-04-03 | 广州超音速自动化科技股份有限公司 | Abnormity material efficient absorption device |
| CN105072814A (en) * | 2015-08-31 | 2015-11-18 | 广州超音速自动化科技股份有限公司 | High-efficiency special-shaped material adsorption apparatus |
| CN109427640A (en) * | 2017-08-22 | 2019-03-05 | 京东方科技集团股份有限公司 | Adsorbent equipment and adsorption method |
| CN109427640B (en) * | 2017-08-22 | 2020-08-04 | 京东方科技集团股份有限公司 | Adsorption device and adsorption method |
| CN107390405B (en) * | 2017-09-22 | 2020-06-05 | 京东方科技集团股份有限公司 | False pressure head assembly |
| CN107390405A (en) * | 2017-09-22 | 2017-11-24 | 京东方科技集团股份有限公司 | False pressure head component |
| WO2019061708A1 (en) * | 2017-09-30 | 2019-04-04 | 武汉华星光电半导体显示技术有限公司 | Protective cover |
| CN109143624A (en) * | 2018-08-28 | 2019-01-04 | 武汉华星光电技术有限公司 | Panel adsorbent equipment and the automatic absorbing method for using the device |
| WO2020042548A1 (en) * | 2018-08-28 | 2020-03-05 | 武汉华星光电技术有限公司 | Panel adsorption apparatus and automatic adsorption method using apparatus |
| CN109143624B (en) * | 2018-08-28 | 2020-06-16 | 武汉华星光电技术有限公司 | Panel adsorption device and automatic adsorption method adopting same |
| US10803344B2 (en) | 2018-08-28 | 2020-10-13 | Wuhan China Star Optoelectronics Technology Co., Ltd. | Panel adsorption device and automatic adsorption method using the same |
| CN109093576A (en) * | 2018-08-30 | 2018-12-28 | 京东方科技集团股份有限公司 | A kind of vacuum suction microscope carrier |
| CN112476295A (en) * | 2020-12-15 | 2021-03-12 | 霸州市云谷电子科技有限公司 | Vacuum adsorption device |
| CN112476295B (en) * | 2020-12-15 | 2023-04-28 | 霸州市云谷电子科技有限公司 | Vacuum adsorption device |
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| CF01 | Termination of patent right due to non-payment of annual fee | ||
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Granted publication date: 20140813 |