CN203275776U - Device for realizing laser beam long distance precise focusing - Google Patents
Device for realizing laser beam long distance precise focusing Download PDFInfo
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- CN203275776U CN203275776U CN201320271350.2U CN201320271350U CN203275776U CN 203275776 U CN203275776 U CN 203275776U CN 201320271350 U CN201320271350 U CN 201320271350U CN 203275776 U CN203275776 U CN 203275776U
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- beam expander
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Abstract
The utility model provides a device for realizing laser beam long distance precise focusing. The device comprises a focusing device and an autofocusing device. The autofocusing device composed of an autofocusing shrink beam splitter, a hartmann microlens array and a CCD camera can detect the defocusing amount of an emitted laser beam real-timely and accurately, a translation stage can be controlled to carry a focusing beam expander secondary mirror to move along the optical axis of a focusing beam expander according to the detected defocusing amount, thereby achieving the purpose of laser beam long-distance precise focusing. The device for realizing the laser beam long distance precise focusing of the utility model is simple in structure, high in focusing precision, and convenient in use, does not need to calculate a focusing curve in advance, and is suitable for being applied to a long-distance high-precision laser focusing system.
Description
Technical field
The utility model belongs to laser system Beam Control field, is specifically related to a kind of device of realizing the remote vernier focusing of laser beam.Be used for laser system, accurately change in real time the remote focal position of laser beam.
Background technology
In laser guiding emission coefficient, need the guiding Level Change Emission Lasers bundle focal height according to appointment, make the laser beam vernier focusing to specified altitude assignment, improve the power density of laser, be convenient to laser guiding receiving system and obtain the strongest heliogram in specified altitude assignment.At present, the remote focus adjustment means of known laser beam adopts translation stage to carry the laser beam expander secondary mirror or primary mirror moves on precise guide rail, by changing beam expander primary and secondary mirror interval change laser beam focal position.Before adjusting, need to utilize input laser beam and beam expander calculation of parameter focusing curve.During adjusting, utilize focusing curve to determine the spacing distance of beam expander primary and secondary mirror according to the focal position of appointment, then mobile beam expander secondary mirror or primary mirror make the spacing distance of beam expander primary and secondary mirror satisfy setting value.Due to the mismachining tolerance of lens, debug the positioning error of error and precise guide rail, there is deviation in the actual focal position of laser beam with setting focal position, can not satisfy the application demand that distant-range high-precision focuses on.
Summary of the invention
Adopt in mobile laser beam expander secondary mirror or the remote focal position process of primary mirror real time altering laser beam in order to overcome, cause departing from of the remote focal position of laser beam by the mismachining tolerance of lens, the positioning error of debuging error and precise guide rail, the utility model provides a kind of device of realizing the remote vernier focusing of laser beam.
The remote vernier focusing device of laser beam of the present utility model is characterized in: described device comprises focusing beam expander, plane beam splitter, focusing test contracting bundle device, Hartmann wave front sensor, pedestal, translation stage and guide rail.The focusing beam expander is comprised of focusing beam expander primary mirror and focusing beam expander secondary mirror.Focusing test contracting bundle device is comprised of focusing test contracting bundle device primary mirror and focusing test contracting bundle device secondary mirror.Hartmann wave front sensor is comprised of Hartmann's microlens array and CCD camera, and Hartmann's microlens array comprises a plurality of conplane lenticules that are in.Focusing beam expander primary mirror is arranged on pedestal, and focusing beam expander secondary mirror is arranged on translation stage, and translation stage can be along the translation of focusing beam expander optical axis by guide rail.Plane beam splitter is that 45° angle is arranged on pedestal with focusing beam expander optical axis.Focusing test contracting bundle device primary mirror and secondary mirror are arranged on pedestal, and focusing test contracting bundle device primary mirror and focusing test contracting bundle device secondary mirror are confocal.Hartmann's microlens array and CCD camera are arranged on pedestal, and CCD camera target surface is positioned on the focal plane of Hartmann's microlens array.Laser is successively by focusing beam expander secondary mirror, focusing beam expander primary mirror, then through the plane beam splitter light splitting, reflected light is launched, and transmitted light contracts by focusing test successively and restraints device primary mirror, focusing test contracting bundle device secondary mirror, focuses on CCD camera target surface finally by Hartmann's microlens array.
The resolving range of described translation stage is 0.01 mm～0.1mm.
Described focusing beam expander and the coaxial setting of focusing test contracting bundle device.
When needing to change the remote focal position of laser beam, translation stage carries focusing beam expander secondary mirror and moves along focusing beam expander optical axis, the Hartmann's hot spot image that receives by the CCD camera calculates the defocusing amount of laser beam in real time, control in real time moving direction and the speed of focusing beam expander secondary mirror according to the variation of defocusing amount, when the defocusing amount of monitoring with the deviation of setting defocusing amount in allowed band the time, focusing beam expander secondary mirror stops mobile, reaches the purpose of the remote focal position of accurate control laser beam.
The focusing test method of the remote vernier focusing device of laser beam of the present utility model, its ultimate principle is: directional light is after Hartmann's microlens array, and on Hartmann's image that on its focal plane, the CCD camera obtains, interlattice distance is just in time the spacing of Hartmann's microlens array.If the spherical wave incident of out of focus, on Hartmann's image of receiving of CCD camera, interlattice distance will change.The spherical wave that converges can make that on Hartmann's image, interlattice distance reduces, and the spherical wave of dispersing can make that on Hartmann's image, interlattice distance increases.Spacing by calculating interlattice mean distance and Hartmann's microlens array on Hartmann's image poor just can accurately obtain the defocusing amount of laser beam.The purpose of focusing test contracting bundle device is to dwindle spot size, increases the hot spot angle of divergence, is convenient on the one hand Hartmann's microlens array and receives laser, can improve on the other hand the accuracy of detection of defocusing amount.
In laser guiding emission coefficient, adopt the remote vernier focusing device of laser beam of the present utility model, the focusing test device that utilizes focusing test contracting bundle device, Hartmann's microlens array and CCD camera to form can detect the defocusing amount of Emission Lasers bundle in real time, control translation stage lift-launch focusing beam expander secondary mirror by the defocusing amount that detects and move along focusing beam expander optical axis, reach the purpose of controlling the remote vernier focusing of laser beam.Due to can be in real time the accurate defocusing amount of detection laser beam, when therefore using the remote vernier focusing device of laser beam of the present utility model to change the laser beam focal position, need not the calculated in advance focusing curve, and can realize remote vernier focusing.Apparatus structure of the present utility model is simple, easy to use, is adapted at using in distant-range high-precision laser focusing system.
Description of drawings
Fig. 1 is the remote vernier focusing apparatus structure of laser beam of the present utility model schematic diagram;
Fig. 2 is Hartmann wave front sensor focusing test principle schematic in the remote vernier focusing device of laser beam of the present utility model;
Fig. 3 is that in the remote vernier focusing device of laser beam of the present utility model, focusing test contracting bundle device changes Emission Lasers bundle focal length schematic diagram;
In figure: 1. device primary mirror 5. focusing tests contracting bundle device secondary mirror 6. Hartmann's microlens array 7.CCD camera 8. translation stage 9. guide rail 10. pedestals are restrainted in the 2. focusing beam expander primary mirror 3. plane beam splitter 4. focusing test contractings of focusing beam expander secondary mirror.
Embodiment
The utility model is described in further detail below in conjunction with accompanying drawing.
Fig. 1 is the remote vernier focusing apparatus structure of laser beam of the present utility model schematic diagram, in Fig. 1, the remote vernier focusing device of laser beam of the present utility model comprises focusing beam expander secondary mirror 1, focusing beam expander primary mirror 2, plane beam splitter 3, focusing test contracting bundle device primary mirror 4, focusing test contracting bundle device secondary mirror 5, Hartmann's microlens array 6, CCD camera 7, translation stage 8, guide rail 9 and pedestal 10.The focusing beam expander is comprised of focusing beam expander primary mirror 2 and focusing beam expander secondary mirror 1.Focusing test contracting bundle device is comprised of focusing test contracting bundle device primary mirror 4 and focusing test contracting bundle device secondary mirror 5.Hartmann wave front sensor is comprised of Hartmann's microlens array 6 and CCD camera 7, and Hartmann's microlens array 6 comprises a plurality of conplane lenticules that are in.Focusing beam expander primary mirror 2, plane beam splitter 3, focusing test contracting bundle device primary mirror 4, focusing test contracting bundle device secondary mirror 5, Hartmann's microlens array 6, CCD camera 7 are arranged on pedestal 10 successively, focusing beam expander secondary mirror 1 is arranged on translation stage 8, translation stage 8 is arranged on guide rail 9, and guide rail 9 be arranged in parallel with the optical axis of focusing beam expander.Plane beam splitter 3 is the 45° angle setting with focusing beam expander optical axis.Focusing test contracting bundle device primary mirror 4 is confocal with focusing test contracting bundle device secondary mirror 5.The target surface of CCD camera 7 is positioned on the focal plane of Hartmann's microlens array 6.The light shaft coaxle setting of the optical axis of focusing beam expander and focusing test contracting bundle device.Utilize the defocusing amount of Hartmann's image accurate Calculation Emission Lasers bundle of CCD camera 7 Real-time Collections, control translation stage 8 lift-launch focusing beam expander secondary mirrors 1 according to the variation of defocusing amount and move along focusing beam expander optical axis, change the distance of focusing between beam expander secondary mirror 1 and focusing beam expander primary mirror 2 and come accurate adjustment laser beam focal position.
Fig. 2 is Hartmann wave front sensor focusing test principle schematic in the remote vernier focusing device of laser beam of the present utility model, and in Fig. 2, the CCD target surface is positioned on the focal plane of microlens array, and the focal length of microlens array is
, the spacing of microlens array is
, the laser beam of supposing incident is the spherical wave that converges,
Be focal length.Chosen any two contiguous microlens I 601 and lenticule II 602 as analytic target, the light beam of crossing lenticule I 601, lenticule II 602 centers forms picture point respectively on the CCD target surface.Made the parallel lines of lenticule II 602 central light beam through lenticule I 601 centers, easily saw in figure
The distance of expression lenticule I 601, lenticule II 602 picture points is poor with the microlens array spacing.Consider remote focusing situation,
Very little, so
The angle is very little, formula
Set up, approximate have
Accurately detect the defocusing amount of Emission Lasers bundle by the difference of interlattice average headway and microlens array spacing on the Hartmann's image that calculates the acquisition of CCD camera.Control the movement of focusing beam expander secondary mirror by the defocusing amount of real-time detection, realize the remote vernier focusing of laser beam.
Fig. 3 is that in the remote vernier focusing device of laser beam of the present utility model, focusing test contracting bundle device changes Emission Lasers bundle focal length schematic diagram, and in Fig. 3, the spot radius of incoming laser beam before focusing test contracting bundle device primary mirror 4 is
, the angle of divergence is
Laser beam through the spot radius of focusing test contracting bundle device after focusing test contracting bundle device secondary mirror 5 is
, the angle of divergence is
If
Contracting bundle multiplying power for focusing test contracting bundle device has formula
,
, easily see the focal length of incoming laser beam before focusing test contracting bundle device from figure
, the focal length of outgoing laser beam after focusing test contracting bundle device
, the angle of divergence is very little, and approximate have
, can see that laser beam becomes original by the focusing test bundle device back focal length that contracts
Claims (3)
1. device of realizing the remote vernier focusing of laser beam is characterized in that: described device comprises focusing beam expander, plane beam splitter (3), focusing test contracting bundle device, Hartmann wave front sensor, pedestal (10), translation stage (8), guide rail (9); The focusing beam expander is comprised of focusing beam expander primary mirror (2) and focusing beam expander secondary mirror (1); Focusing test contracting bundle device is comprised of focusing test contracting bundle device primary mirror (4) and focusing test contracting bundle device secondary mirror (5); Hartmann wave front sensor is comprised of Hartmann's microlens array (6) and CCD camera (7), and Hartmann's microlens array comprises a plurality of conplane lenticules that are in; Focusing beam expander secondary mirror (1) is arranged on translation stage (8), and translation stage (8) is by the translation of guide rail (9) edge focusing beam expander optical axis; Focusing beam expander primary mirror (2), plane beam splitter (3), focusing test contracting bundle device primary mirror (4), focusing test contracting bundle device secondary mirror (5), Hartmann's microlens array (6), CCD camera (7) are arranged on pedestal (10) successively; Plane beam splitter (3) is the 45° angle setting with focusing beam expander optical axis; Focusing test contracting bundle device primary mirror (4) and the confocal setting of focusing test contracting bundle device secondary mirror (5); The target surface of CCD camera (7) is positioned on the focal plane of Hartmann's microlens array (6).
2. a kind of device of realizing the remote vernier focusing of laser beam according to claim 1 is characterized in that: described focusing beam expander and focusing test contracting bundle device are with the optical axis setting.
3. a kind of device of realizing the remote vernier focusing of laser beam according to claim 1, it is characterized in that: the resolving range of described translation stage (8) is 0.01 mm～0.1mm.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201320271350.2U CN203275776U (en) | 2013-05-17 | 2013-05-17 | Device for realizing laser beam long distance precise focusing |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103246065A (en) * | 2013-05-17 | 2013-08-14 | 中国工程物理研究院应用电子学研究所 | Device for remotely and accurately focusing laser beam |
| CN103674839A (en) * | 2013-11-12 | 2014-03-26 | 清华大学 | Visual sample positioning operating system and method based on light spot detection |
| CN104459999A (en) * | 2014-12-29 | 2015-03-25 | 中国科学院长春光学精密机械与物理研究所 | Illuminating system of imaging flow cytometry |
| CN107533234A (en) * | 2015-06-22 | 2018-01-02 | 业纳光学系统有限公司 | The method of the spacing of beam broadening device, optical system and two lens for setting beam broadening device |
-
2013
- 2013-05-17 CN CN201320271350.2U patent/CN203275776U/en not_active Withdrawn - After Issue
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103246065A (en) * | 2013-05-17 | 2013-08-14 | 中国工程物理研究院应用电子学研究所 | Device for remotely and accurately focusing laser beam |
| CN103246065B (en) * | 2013-05-17 | 2015-07-15 | 中国工程物理研究院应用电子学研究所 | Device for remotely and accurately focusing laser beam |
| CN103674839A (en) * | 2013-11-12 | 2014-03-26 | 清华大学 | Visual sample positioning operating system and method based on light spot detection |
| CN103674839B (en) * | 2013-11-12 | 2016-01-06 | 清华大学 | A kind of visual Sample location operating system based on spot detection and method |
| CN104459999A (en) * | 2014-12-29 | 2015-03-25 | 中国科学院长春光学精密机械与物理研究所 | Illuminating system of imaging flow cytometry |
| CN104459999B (en) * | 2014-12-29 | 2017-02-01 | 中国科学院长春光学精密机械与物理研究所 | Illuminating system of imaging flow cytometry |
| CN107533234A (en) * | 2015-06-22 | 2018-01-02 | 业纳光学系统有限公司 | The method of the spacing of beam broadening device, optical system and two lens for setting beam broadening device |
| US10732423B2 (en) | 2015-06-22 | 2020-08-04 | Jenoptik Optical Systems Gmbh | Device for optical beam expansion, optical system, and method for setting a spacing of two lenses of a device for optical beam expansion |
| CN107533234B (en) * | 2015-06-22 | 2020-11-27 | 业纳光学系统有限公司 | Beam widening device, optical system and method for setting the distance between two lenses of a beam widening device |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20131106 Effective date of abandoning: 20150715 |
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| AV01 | Patent right actively abandoned |
Granted publication date: 20131106 Effective date of abandoning: 20150715 |
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| RGAV | Abandon patent right to avoid regrant |