CN203204380U - Wire bending monitoring system and wire saw device - Google Patents
Wire bending monitoring system and wire saw device Download PDFInfo
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- CN203204380U CN203204380U CN2012207084610U CN201220708461U CN203204380U CN 203204380 U CN203204380 U CN 203204380U CN 2012207084610 U CN2012207084610 U CN 2012207084610U CN 201220708461 U CN201220708461 U CN 201220708461U CN 203204380 U CN203204380 U CN 203204380U
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/0064—Devices for the automatic drive or the program control of the machines
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
- B28D5/045—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with wires or closed-loop blades
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Abstract
The utility model relates to a wire bending monitoring system used in a semiconductor wire saw device. The wire bending monitoring system includes a sensor assembly; the sensor assembly is configured to be positioned at a position adjacent to a wire of the wire saw device, wherein the sensor assembly is suitable for detecting the curvature of the wire, and comprises at least one of an induction sensor, a capacitive sensor and a contact sensor.
Description
Technical field
The embodiment of disclosure case relates to the crooked supervisory system of line and wire sawing apparatus.Specifically, the embodiment of disclosure case relates to the crooked supervisory system of line and is used for the wire sawing apparatus that sawing is used for the semiconductor material of solar cell.
Background technology
The semiconductor scroll saw of this paper or be " scroll saw ", " wire sawing apparatus " or " semiconductor line saw device " again, the workpiece of being made by hard material (for example, silicon) in order to cutting.Use for pruning, the scroll saw cut workpiece that is cut into square or section or ingot or with workpiece or ingot and make wafer.
In these devices, from the spool fed line, and by the guiding of line guide cylinder and tensioned thread.Dissimilar lines can be used for scroll saw, described dissimilar line for example with slurry in those lines of being used in combination of silicon-carbide particle and usually and the diamond wire that is used in combination of cooling medium.Generally, hard material (such as, silit or adamas) denude workpiece to cut.
During cutting, line is promptly mobile along the length of described line, described direction is also referred to as " flatly " at this paper, and workpiece by workpiece feeding plate or workpiece supply table along cut direction relative to moving lentamente, described cut direction is haply perpendicular to the direction (this paper is also referred to as " vertically ") of line.Apply line to the vertical force of workpiece along cut direction thus, and workpiece makes line along the direction distortion opposite with cut direction or crooked to the antistress of line.Increase if line is crooked, at a certain value place of bending, described line bending may cause thread breakage so, and described thread breakage need be operated more thread-changing of ground consuming time.Thread breakage and follow-up line are changed the whole efficiency that reduces scroll saw.On the other hand, intermittently stop in order to measure bending by the operator that cutting technique expends time in and cost.
Therefore, the generation that needs to reduce the incidence of thread breakage or avoid thread breakage fully is to realize the greater efficiency of scroll saw.
The utility model content
In view of mentioned above, provide the crooked supervisory system of a kind of line for wire sawing apparatus, a kind of wire sawing apparatus, a kind of method and a kind of method for the pilot wire saw device for the bending of monitoring cable saw device center line.
According to an aspect, provide a kind of line for the semiconductor line saw device crooked supervisory system.The crooked supervisory system of described line comprises the sensor layout, described sensor is arranged the line location that is configured to be adjacent to wire sawing apparatus, wherein said sensor is arranged the bending that is fit to detection line, and wherein said sensor is arranged at least one that comprises in induction pick-up, capacitive transducer and the feeler.
According on the other hand, the crooked supervisory system of described line can further comprise the actuator that is fit to the described sensor of rotation.
According to another aspect, provide a kind of wire sawing apparatus.Described wire sawing apparatus comprises the crooked supervisory system of line for the semiconductor line saw device.The crooked supervisory system of described line comprises the sensor layout, described sensor is arranged the line location that is configured to be adjacent to described wire sawing apparatus, wherein said sensor is arranged the bending that is fit to detect described line, and wherein said sensor is arranged at least one that comprises in induction pick-up, capacitive transducer and the feeler.
According on the other hand, described wire sawing apparatus also can comprise at least two line-oriented devices that are used for the described line of guiding.
According on the other hand, provide a kind of method for the bending of monitoring semiconductor line saw device center line.Described method for the monitoring cable bending comprises: at least one of measurement of inductance, capacitance measurement and the contact measurement of execution line; The bending of detection line.
A kind of method for operation semiconductor line saw device is described in addition.Described method comprises: at least one wire sawing apparatus parameter is set and by means of described line cut workpiece.Described method comprises in addition: adjust at least one wire sawing apparatus parameter when the line bending of monitoring cable and online bending surpass threshold value as described herein.
Embodiment is also at the equipment that is used for carrying out disclosed method, and embodiment comprises for the environment division of carrying out described each method step.Can be by nextport hardware component NextPort, by the computer of suitable software programming, carry out these method steps by any combination of the two or with any alternate manner.
Particularly useful to adjusting platform speed and/or cutting speed by the information about bending that the monitoring cable bending provides, thus minimize wearing and tearing and fracture and the maximum throughput of line and cut yield rate.
By dependent claims, instructions and accompanying drawing obviously can with other advantage, feature, aspect and the details of the combination of embodiment above.
Description of drawings
Therefore, but the mode of understood in detail above-mentioned feature structure of the present utility model, and namely above of the present utility model more specifically description of brief overview can be carried out with reference to embodiment.Accompanying drawing relates to embodiment of the present utility model, and describes accompanying drawing hereinafter:
Fig. 1 illustrates the schematic cross section according to the crooked supervisory system of the line that is used for wire sawing apparatus of embodiment described herein;
Fig. 2 illustrates the schematic cross section according to the crooked supervisory system of the line that is used for wire sawing apparatus of embodiment described herein;
Fig. 3 illustrates the schematic cross section according to the crooked supervisory system of the line in the wire sawing apparatus of embodiment described herein;
Fig. 4 illustrates the schematic cross section of the crooked supervisory system of line in the wire sawing apparatus, and wherein the line of wire sawing apparatus is crooked;
Fig. 5 illustrates the synoptic diagram according to the sensor board of the crooked supervisory system of line of embodiment described herein;
Fig. 6 illustrates the schematic cross section according to the crooked supervisory system of the line in the wire sawing apparatus of embodiment described herein;
Fig. 7 illustrates the schematic cross section according to the crooked supervisory system of the line in the wire sawing apparatus of embodiment described herein;
Fig. 8 illustrates the schematic cross section according to the crooked supervisory system of the line in the wire sawing apparatus of embodiment described herein;
Fig. 9 illustrates the schematic cross section according to the crooked supervisory system of the line in the wire sawing apparatus of embodiment described herein;
Figure 10 illustrates the schematic cross section according to the crooked supervisory system of the line in the wire sawing apparatus of embodiment described herein;
Figure 11 illustrates the schematic cross section according to the crooked supervisory system of the line in the wire sawing apparatus of embodiment described herein;
Figure 12 illustrates the schematic cross section according to the crooked supervisory system of the line that is used for wire sawing apparatus of embodiment described herein;
Figure 13 illustrates the process flow diagram of the method that is used for the bending of monitoring cable saw device center line for illustration purposes; With
Figure 14 illustrates the process flow diagram of the method that is used for the bending of monitoring cable saw device center line for illustration purposes.
Embodiment
Now will be in detail with reference to each embodiment of the present utility model, one or more instance graphs of described each embodiment are shown in the drawings.Provide each example by explanation, and each example does not mean to be to limit.In addition, can use or in conjunction with other embodiment operation instruction or describe feature as the part of an embodiment, to produce another embodiment.Description is intended to comprise these modifications and variations.
This paper uses scroll saw, wire sawing apparatus, scroll saw cutting apparatus and wire-electrode cutting device interchangeably.This paper uses workpiece support plate and workpiece feeding plate interchangeably.Use term sawing and cutting interchangeably herein; And use wafer cutting scroll saw and wafer coupons machine interchangeably.Herein, workpiece can comprise one or more independent pieces, for example, and a plurality of semiconductor pieces or semiconductor junction crystal block.Herein, scroll saw is fit to by using solid wire, many lines, one or more row of one or more line or one or more nets of one or more line to carry out cutting.Term " line " may refer to many lines.
Use workpiece feeding plate, workpiece support plate, feeding plate and back up pad interchangeably herein.Use term " the line part in the workpiece " and " line in the workpiece " interchangeably herein.
According to embodiment, be provided for the crooked supervisory system of line of wire sawing apparatus.The crooked supervisory system of described line comprises the sensor layout, and described sensor is arranged the line location that is configured to be adjacent to wire sawing apparatus.Described sensor is arranged the bending that is fit to detection line.Described sensor is arranged at least one that comprises in induction pick-up, capacitive transducer and the feeler.
Therefore, by obtaining the crooked information of line according to disclosure case, the crooked supervisory system of line and wire sawing apparatus allow to adjust automatically in real time cutting technique.In addition, the line flexural measurement is the splendid index of cutting efficiency.
Fig. 1 illustrates the crooked supervisory system 10 of the line that is used for wire sawing apparatus according to embodiment.The crooked supervisory system of described line comprises sensor layout 20.Sensor is arranged 20 bendings that are fit to be adjacent to the line location of wire sawing apparatus and are fit to detection line.
Described sensor is arranged at least one that comprises in induction pick-up, capacitive transducer and the feeler.Label 22 should refer to sensor, and with sensor be that induction pick-up, capacitive transducer still are that feeler is irrelevant.
It is degree of closeness based on the described line of sensing under the situation of the line of iron that induction pick-up and capacitive transducer usually are fit to online.One or more sensors can be digital sensor or analog sensor.The measurement result output that is also referred to as " measurement result " or " measurement " at this paper of at least one induction pick-up or capacitive transducer can be (under the situation of digital sensor) of continuous (under the situation of analog sensor) or numeral.If result's output is continuous, so described result's output is generally the indication for absolute distance between sensor and the line, for example, represent measurement result output at m, and x represents that under the situation of the distance between sensor and the line, x can be expressed as the function of m, that is x=f (m).According to exemplary embodiments, this function is linear.
Be output as among those embodiment of numeral in the result, with (for example) 0 response, and sensor can be with 1 response when described distance is higher than threshold value when sensor can the distance between sensor and line be lower than threshold distance.Can be set in advance the threshold distance that is also referred to as " threshold value " at this paper by the operator (for example) during the cutting technique or before cutting technique, or described threshold distance can be corresponding to the detection-sensitive distance of sensor, that is, sensor can detect the existence of the line that only is up to detection-sensitive distance.For example, threshold value can be between 0.1mm and 1.0mm, especially between 0.2mm and 0.6mm.
Term " digital sensor " is interpreted as any layout thus, and described any layout comprises provides the digital measurement result sensor of output.Electronic installation be the numeral or the simulation it doesn't matter usually.Digital sensor advantageous particularly under following situation is provided: numerous sensors are provided, and the measurement result of these sensors of joint assessment output usually.
According on the other hand, the crooked supervisory system of line can further comprise the actuator that is fit to rotation sensor.
According to another aspect, provide a kind of wire sawing apparatus.Wire sawing apparatus comprises the crooked supervisory system of line for the semiconductor line saw device.The crooked supervisory system of line comprises the sensor layout, sensor is arranged the line location that is configured to be adjacent to wire sawing apparatus, wherein sensor is arranged the bending that is fit to detection line, and wherein sensor is arranged at least one that comprises in induction pick-up, capacitive transducer and the feeler.
According on the other hand, wire sawing apparatus also can comprise at least two line-oriented devices that are used for guide line.
According to embodiment, sensor is arranged and is comprised a plurality of sensors.Usually, all the sensors in described a plurality of sensor is identical sensor type.For example, sensor is arranged and can be provided with a plurality of induction pick-ups or a plurality of capacitive transducer or a plurality of feeler.Be not limited to any embodiment described herein, one or more sensors of disclosure case are usually communicated by letter with control module (such as, the control module 50 among Fig. 2).Communication can be specially data communication, specifically, the data communication from the sensor to the control module, wherein one or more sensors provide measurement result for control module.
Control module can be assessed one or more measurement results.Control module can add or alternatively trigger reaction.In order to do like this, in typical embodiment, control module is fit to communicate by letter with wire sawing apparatus, with the reaction of startup wire sawing apparatus as the response to the flexural measurement result.According to embodiment, control module (such as, the control module 50 of Fig. 2) be the control device of wire sawing apparatus.Yet, also might the crooked supervisory system of line be provided with independent control module, described independent control module and the control module of wire sawing apparatus carry out data communication.
Arranging at the sensor shown in Fig. 2 (among Fig. 2 diagram four sensors 22) provides some sensors can be particularly conducive to existence crooked in the slotted line not only but also measures value corresponding to crooked size.For example, all sensors can be induction pick-up or capacitive transducer.Can be specially the roll off the production line angle of oriented phase line relatively of unstressed situation with line corresponding to the value of described size, this will illustrate hereinafter in more detail.
Fig. 3 illustrates the crooked supervisory system 10 of the line that is used for wire sawing apparatus 100 according to embodiment.Wire sawing apparatus 100 is exemplarily illustrated as and comprises line 30, and line 30 is also referred to as " guide cylinder " or " pulley " by two line-oriented device 130() along the guiding of the length of line 30.As obviously finding out ground among Fig. 5, line can be arranged in parallel, thereby forms the capable or gauze of line.The line that provides forms gauze specifically in the cutting zone of scroll saw.Thereby term " gauze " relates generally to the net that formed by the line between two guide cylinder.Should be understood that line can form more than one gauze, described gauze is defined as the zone of carrying out sawing technology.Therefore, according to embodiment more described herein, one or more line can form a plurality of gauzes, and for example, two gauzes all are fit to cut workpiece.Workpiece or ingot 120 are mounted to platform 110, and platform 110 is configured to move to cut described ingot against line 30.
Line-oriented device is fit to rotation usually with transmission line.Line-oriented device generally is configured to 5m/s at least or even peripheral speed (that is the speed of the excircle) rotation of 10m/s.Usually during the standard operation with the speed operation scroll saw between 10m/s and the 15m/s, and starting and stopping period speed can be less.And mobile if line comes and goes, line slows down every now and then so that described line accelerates in opposite direction so.
During cutting, line moves along the longitudinal length of described line basically.Term " basically " should specifically comprise vibration etc.Compare with the representative vertical motion of workpiece (such as, semiconductor junction crystal block), described movement is quick relatively usually.The line motion can or be carried out in complex way, and is reverse along the period of motion of the length of described line at this mode center line.In the operation, line is contacted with workpiece 120, so that work piece cut is become (for example) a plurality of wafers.
Implement according to difference, line or the line that forms gauze can move with respect to workpiece, and workpiece can move with respect to line or gauze, or line and workpiece both can relative to each other move.
When workpiece and line (such as, gauze) when exerting pressure toward each other, making a concerted effort of applying line is limpened by workpiece to line.The orientation of line bending is consistent with cut direction.When the crooked increase of line was too much, this situation may cause thread breakage.This thing happens in order to avoid, and embodiment described herein allows to become in bending and detects described bending before excessive, and allows to trigger enough reactions to avoid thread breakage.This reaction can be (for example) and reduces against the speed of the workpiece of line and/or increase the speed of line.Modification to the amount of the slurry that provides or paste composition etc. can be provided in other reaction.
According to some embodiment described herein (such as, the embodiment shown in Fig. 3), scroll saw supervisory system 10 comprises that sensor arranges 20 and control module 50.Sensor arranges that 20 are configured to be adjacent to line 30 location, and sensor arranges that 20 can comprise sensor board 24, and sensor board 24 has the some sensors 22 that are mounted to sensor board 24.The number of sensor can be at least 2, at least 4 or even at least 8,10 or even 16.Sensor 22 is configured to the detection line bending.Usually transfer to control module 50 by sensor measurement and the data of collecting, further handle data as described in (as assessment) at control module 50 places.For example, the logic level of each sensor (that is 0 or 1 result output) can be in order to the progress of monitoring cable bending.
Fig. 4 illustrates identical embodiment, and its center line (net) is exerted pressure along cut direction and experienced bending owing to workpiece.As shown in Fig. 3 and Fig. 4, according to the embodiment with some digital sensors, if there is no line is crooked or only have little line bending, and the logic state of all the sensors is identical usually so." little " in this situation means that the line bending is no more than the threshold value of line and sensor distance.
Yet during cutting technique, when platform 110 was mobile along cut direction (arrow 121 indications in by Fig. 4), the line bending may increase, and the one or more logic state in the sensor also may change.For example, near two sensors of workpiece (namely, in with reference to figure 3 and embodiment shown in Figure 4, two sensors to the right) can indicate following result: the distance between these sensors and the line is higher than threshold value, and still can sense the line that is lower than threshold value and the distance between the sensor from two sensors of workpiece away from (that is, among Fig. 3 and Fig. 4 left two sensors).Might obtain information about the crooked size of line from these results, specifically, about the information at the line of actual flexion position and the angle [alpha] (being illustrated among Fig. 4) between the non-sweep or the absolute bending length L that will discuss in more detail hereinafter.
For example, if sensor arrange as Fig. 3 and Fig. 4 as shown in longitudinally the line direction comprise four sensors (no matter as will about discuss in view of Fig. 5 illustrated embodiment number of sensors vertically), if and sensor is digital sensor, the threshold value of sensor can be through selecting so that can obtain following information so:
As shown in Table, if all the sensors shows 0 response, do not exist so line crooked or only exist little line bending (such as, be lower than 2 °).If near the sensor measurement of workpiece to the distance that is higher than threshold value that produces measurement result 1, and the distance between other sensor and the line still is lower than threshold value, is 0, this result may be interpreted as angle [alpha] greater than 2 ° but is lower than 4 ° so.Similarly consider to be applicable to other measurement results in other row of showing shown in being depicted in.In case all the sensors is with 1 response, the distance between all the sensors and the line is higher than threshold value so, and described threshold value must be interpreted as angle of bend greater than 8 ° in the limiting examples shown in the table.Significantly, this at least information should trigger reaction, such as, to the modification of at least one wire sawing apparatus operating parameter.
Should be understood that the threshold value that longitudinal length along the line has four sensors and described four sensors arranges this embodiment that the angle [alpha] shown in the generation table distributes, only for illustration purposes.The technician can obvious any other group can be fit to value comparably.
Although example use angle α above also may derive absolute bending length L by measurement result as the indication for the crooked size of line.Absolute bending length L refers in the reach the standard grade maximum deviation of rest position of line of cut direction.Absolute bending length L exemplarily is illustrated among Fig. 4 and represents with label 140.
For example, if sensor arranges that as Fig. 3 and Fig. 4 as shown in longitudinally the line direction comprises four sensors (regardless of number of sensors vertically), if and sensor is digital sensor, the threshold value of sensor can be through selecting so that can obtain following information so:
In addition, sensor described herein is arranged or scroll saw can be configured to trigger reaction, such as, according to measurement result to the modification of (such as, at least one operating parameter) of the mode of operation of scroll saw.With reference to the example about the explanation of above table, as long as being lower than 6 ° or absolute bending length, bent angle alpha is lower than 9mm, just may not trigger any reaction.In case angle surpasses 6 ° or absolute bending length L and surpasses 9mm, the speed of line just may increase (such as, increase by 10%) and/or cutting speed (that is, workpiece is along the translational speed of cut direction) just may reduce (such as, reduce 10%).In case angle surpasses 8 ° or absolute bending length L and surpasses 12mm, the speed of line just may increase even more (such as, increase at least 20%) and/or cutting speed just may reduce in addition more (such as, reduce at least 20%).Perhaps, in case measure maximum bend angle (such as, at least 8 ° or the absolute bending length of 12mm at least in this example, but be not limited to this example), but wire sawing apparatus can stop and/or alarm operation person so.
Should further be mentioned that, any other measurement result, such as, all the sensors with the range observation between described all the sensors and the line for being lower than threshold value, and intermediate sensor or compare the distance that is higher than threshold value from the farther sensor indication of workpiece with at least part of sensor in other sensor, this must be interpreted as thrashing.This situation is because crooked all the time along the direction of cut direction.In other words, not only negative angle α does not represent the situation of actual generation, and with the comparing from the farther adjacent sensors of workpiece of sensor, described sensor also can not sense littler distance.
By using the information about the logic state of sensor, the value of control module 50 definite line bendings and control line saw device are to avoid thread breakage.
According to embodiment, control module 50 is configured to the situation of sight line bending and adjusts the speed of line and/or the speed of platform.Control device can be the backfeed loop control device.
According to embodiment, sensor arranges and further comprises at least one sensor board that wherein sensor is mounted to sensor board with at least two row.Illustrate this layout about Fig. 5, wherein illustrate the edge perpendicular to the four lines sensor of the orientation of line, and diagram is along the four lines sensor of the orientation substantially parallel with the line orientation.
As used herein, term " sensor row " specifically refer to the sensor of different rows be spaced apart from each other (such as, along with the vertical substantially direction of line orientation and/or with the directed substantially parallel orientation of line) layout." basically " in this situation generally includes 20 ° deviation, is more typically 10 ° deviation.
According to embodiment described herein, no matter the number of sensors of direction along the line, but at least two sensors, at least four sensors are provided as along arranging perpendicular to the direction of line direction and embark on journey usually.In other words, each sensor provides about not collinear information.Thereby might locate the local bending of the only single line that (for example) stopped by the dirt inclusion in the ingot.This inclusion is very hard usually, and therefore is difficult to cut off.Therefore, the cutting of all other lines is proceeded and without any problem, and described this root line still is stuck in described inclusion place, makes when promoting ingot along cut direction, the crooked size increase of this root line.According to this embodiment, as described, can measure this catastrophic crooked development, and control device can trigger reaction.
Fig. 5 illustrates the synoptic diagram of sensor board 24, and sensor board 24 has 4 * 4 sensors 22 that are mounted to sensor board 24.Generally, and be not limited to any embodiment, the overall number of sensor is calculated as k times of n usually, wherein k and n both are positive integer, wherein (for example) k represent along and the number of sensors of the directed substantially parallel orientation of line, and n represent along and the number of sensors of the vertical substantially orientation of line orientation.For example, the number of sensors that is substantially perpendicular to the line oriented arrangement can be at least two, at least four or at least six.Additional or alternatively, the number of sensors that is arranged essentially parallel to the line oriented arrangement can be at least two, at least four or at least six.The overall number of sensor can be up to 20 even 30.Additional or alternatively, the overall number of sensor can be at least 9 or at least 16.
As Fig. 5 illustrated ground, sensor can pattern of diagonal lines be located onboard.At least four sensors that pattern of diagonal lines need be arranged in the mode of parallelogram.Specifically, and be not limited to any embodiment described herein, the center of each sensor is higher or lower than line, and described line is different from the line that the center of all other sensors is higher or lower than.
According to embodiment, numerous sensors can be specially induction pick-up or capacitive transducer.Induction pick-up is useful especially, because described induction pick-up is insensitive to the ability of water, oil, dirt, non-metallic particle, color of object, the high vibrations of tolerance and vibration environment.
Usually, structuring line or diamond wire are used for the wire sawing apparatus of disclosure case.Line can be the monofilament steel wire.According to some embodiment, line is the grade of steel line from approximate 80 microns to 350 microns (for example, 120 microns).According to some embodiment, the line of structuring line for curling, wherein (for example) is provided with a plurality of gauffers by the thread sawline of metal.Diamond wire is the line with coating, and wherein diamond particles embeds in the described coating.
According to embodiment described herein, can be by means of the method for computer program, software, computer software product and correlation control unit executable operations and/or the crooked supervisory system of control line and wire sawing apparatus, described correlation control unit can have CPU, storer, user interface and the input and output device of communicating by letter with the corresponding assembly of wire sawing apparatus usually.These assemblies can be one or more in the following assembly of will be hereinafter describing in more detail: engine, thread breakage detecting unit, line following device etc.
For the modern scroll saw as trimmer, square shaper (squarer), slice systems or multi-thread saw, wish with high-speed cutting hard material (such as, semiconductor material (for example, silicon, quartz etc.)).The speed of line, namely line moves through the speed of scroll saw, can be (for example) 10m/s or even higher.Usually, the speed of line can be in the scope of 10m/s to 15m/s.Yet, (such as) speed of the higher line of 20m/s, 25m/s or 30m/s also can be desirable.For the speed with required line winds off line, have the feeding bobbin that does not use line and rotate with the rotational speed up to the thousands of revolutions of per minute usually.For instance, can be provided for winding off the 1000rpm of line to the 2000rpm rotating speed.
Might carry out sawing simultaneously at top gauze and gauze (if there is) place, bottom.Gauze can flatly be arranged, as shown in each figure of this paper.Scroll saw can further comprise two vertically arranged nets.According to some embodiment, vertically arranged net is used for transmission line between the perform region of horizontal orientation.Between the perform region between transmission period, line can cool off.According to other embodiment, the perform region vertical orientation.
According to exemplary embodiments, use multi-thread saw.Multi-thread saw allows high productivity and the high quality slices of the Silicon Wafer of semicon industry and photoelectricity industry.Multi-thread saw generally includes the high strength steel wire, and described high strength steel wire can unidirectional (that is, only along forward direction) mobile or two-way (that is, backward and forward) is mobile, to carry out cutting action.Line can described line the surface be provided with adamas.By using the diamond wire according to disclosure case, to compare with conventional steel wire, output can increase by 2 times or even more.Treat that the sawing material can be described as rate of feed with respect to the speed that mobile line moves.Rate of feed among the embodiment described herein can be in 2 μ m/s in the scope of 15 μ m/s for wafer cuts scroll saw, be in about 6 μ m/s usually in the scope of 10 μ m/s.
According to embodiment, arrange at least one sensor that is used for the slotted line bending movably.By mobile at least one sensor, might follow line and keep high sensing accuracy thus.This is that measurement result has higher quality near sensor because compare with the sensor farther place.
As the control operation of embodiment described herein, for example, when not existing work piece cut and line to be in non-bending position, one or more sensors might be positioned at apart from the selectable distance of line.In case cutting beginning and line bending, so according to sensor signal, one or more to follow bending in removable at least one sensor of control device.For example, control device can be fit to by making one or more sensors keep constant mode to guide described one or more sensor to the distance of line.Might derive crooked size by one or more sensors constant distance that moves to keep at a distance.
According to embodiment, be not all the sensors, but only some sensors in the described sensor are arranged movably.
As mentioning ground, according to embodiment, the crooked supervisory system of line comprises control module, and described control module is fit to look from sensor to be arranged the situation of the data that receive and control sensor layout and/or wire sawing apparatus.According to embodiment, the crooked supervisory system of line further comprises actuator, and described actuator is fit to change the distance between sensor layout and the line.
According to embodiment, sensor arranges and further to comprise at least one rod, and wherein sensor (for example) is embarked on journey and is mounted to described rod or a plurality of sensor (for example) and embarks on journey and be mounted to described rod.Rod can be movably.
Fig. 6 illustrates the synoptic diagram according to the crooked supervisory system of the line that is used for wire sawing apparatus of embodiment.Sensor is arranged and to be comprised that removable excellent 40, removable excellent 40 have and are mounted to removable excellent 40 sensor 22.Sensor can be feeler, induction pick-up or capacitive transducer.As shown in the figure, and be not limited to the embodiment of Fig. 6, sensor is embarked on journey and is mounted to rod.The embodiment that can be not limited to Fig. 6 provides linear actuators 60 substantially, can move along cut direction to allow rod 40, and indicated as the arrow 105 among Fig. 6, vice versa.Actuator control module common and the crooked supervisory system of line or wire sawing apparatus carries out data communication.
Owing to use linear actuators, automatically detect zero position.According to embodiment, linear actuators is for driving the ledex of screw ball.Since use linear actuators, can pin-point accuracy slotted line deflection distance.Be not limited to this embodiment, can preserve line flexural measurement result, to provide about the line function information of crooked dependence time.This information may for association's (specifically) consider other cutting parameter (such as, the speed of line, line tension, the amount of slurry that provides and platform speed) to understand cutting technique (particularly crooked produce) better useful.
Also line bending system and the thread breakage detection system according to embodiment described herein might be coupled.For example, existing thread breakage detection system may comprise sensor, and described sensor also can be advantageously used in line curved detection described herein.
According to embodiment, sensor is feeler.The reliable near line of feeler location for example, is positioned at X place, position.The explanation of position X can be as follows: make if the bending of line increases and should trigger the reaction of wire sawing apparatus so in X place, described line in-position.
When the crooked increase of line during cutting technique, line contacts (referring to Fig. 7) with rod 40 above feeler.In response, control module drives linear actuators, moving an increment away from line downwards along rod, up to do not exist between rod and the line contact till (referring to Fig. 8).The position of the position of actuator and rod also may be preserved by control module by the control module assessment.Because linear actuators, can well accuracy measurement as the line bending of the function of time.For example, but the rod electronics is connected to the control module of the crooked supervisory system of line and/or the control module of wire sawing apparatus.Use is about the information of line bending, control module can adjust the scroll saw operating parameter (such as, the speed of line or platform speed), crooked and avoid thread breakage to reduce line.
Also illustrate with reference to figure 7 and Fig. 8 illustrated embodiment: according to general embodiment described herein, can provide at least one sensor in each side of workpiece.Thereby might detect the bending in place, the both sides accumulation of workpiece.Under standard situation may the situation for the symmetric curvature around the workpiece centre, can detect asymmetric crooked the generation by these embodiment.Not only crooked size can be in order to triggering the reaction of wire sawing apparatus, and crooked asymmetric level also can be in order to trigger reaction.
Illustrate another example of disclosure case with reference to figure 9 to Figure 11.Described accompanying drawing illustrates the workpiece to be cut 120 that is promoted to line 30 nets by platform 110.Two sensor 22(namely, sensor of each side of workpiece) be positioned the rod 40 on.In addition, schematically be illustrated as 60 actuator and can link to rod 40, with along the cut direction mover bar, or vice versa.
Under the situation that does not have the line bending, the existing of sensor (for example, induction pick-up) detection line (referring to Fig. 9).Increase and line when moving away from sensor the increase of distance between at least one described sensor of sensor 22 sensings and the line when line during cutting technique is crooked.When sensor signal surpassed or is lower than selectable threshold value, this situation may take place.Under the situation of analog sensor, the increase of measuring distance stably.Therefore, the distance along with line increases the output change (referring to Figure 10) of sensor.In response, actuator is mobile along bending direction (that is the cut direction of representing with the arrow 70 among Figure 10).For example, actuator can move rod an increment, so that rod 40 and sensor are again near line.The information that obtains from sensor and necessary displacement can be in order to the expansions of deriving the line bending and therefore can be in order to by triggering appropriate reaction as discussed after the crooked expansion of the line that surpasses threshold value, thereby avoid thread breakage.Can be by the current location of the crooked supervisory system preservation of line actuator.
According to described herein can with the embodiment of all other embodiment combination, one or more sensors are located pivotly.The turning axle of one or more sensors is usually perpendicular to the line orientation.If there is gauze, turning axle usually and the formed plane parallel of gauze so.One or more sensors can pivot by making the rod that described one or more sensors are installed.
Such embodiment exemplarily is illustrated among Figure 11, and wherein rod 40 can be around the axle rotation of rod 40.With arrow 45 diagram rotations.Sense of rotation shown in the sensor (that is, the rotation of the counter clockwise direction of the clockwise direction of left side sensor rotation and right sensor) is corresponding to the situation of crooked increase wherein, and sensor is followed this increase by the anglec of rotation that increases described sensor.Generally, the sensor of Bu Zhiing is fit to be controlled or to be controlled respectively pivotally, although so that revised bending, sensor surface about line to keeping substantial constant." basically " in this situation comprises no more than 5 ° deviation, no more than 2 ° usually.
Usually, sensor has the surface that is parallel to the line orientation, to obtain best measurement result.If line begins bending, and sensor orientation remains unchanged, and line will no longer be parallel to sensor surface so, and the result is the position of depending on the sensor, and line has the different distance to sensor.In certain embodiments, this situation may reduce the sensing quality.By adjusting the orientation of sensor, the sensing quality can remain on high-quality.
According to embodiment, control module is fit to according to the position of line sensor be pivoted.This operation can be carried out synchronously with translation (that is, moving up and down along the orientation of the exemplary embodiment of each figure) movable sensor, with (such as) follow the line bending by moving up and down rod.Because best sensor orientation can be of a size of known for each bending, and since this information can be stored in the control module of the crooked supervisory system of the line of wire sawing apparatus (such as, be stored in the memory cell of control module), so control module can be adjusted the anglec of rotation of sensor according to crooked size.The typical anglec of rotation of sensor is corresponding to bent angle alpha.The described typical anglec of rotation is usually up to 20 °, or only up to 15 °.
As shown in the embodiment of Figure 11, when linear actuators and rod moved down an increment, the rotatable angle step of rod was with the detection-sensitive distance between optimization sensor and the line and the sensor orientation with respect to line.
Figure 12 describes the cross-sectional side view of the embodiment of Figure 10 and Figure 11.Specifically, apparent, all the sensors can synchronously pivot.For example, sensor 22 can be arranged on the plate 40 of rotation as a whole.
According to further embodiment, wire sawing apparatus is provided, comprise the crooked supervisory system of line according to above-described embodiment.Specifically, scroll saw can be fit to one of synchronous cutting, two, three or even four workpiece (such as, ingot).In addition, typical scroll saw described herein is provided with four guide cylinder for guide line, and wherein two nets form and be used as cutting zone.Therefore, according to embodiment, each net that can be in two nets provides at least one sensor described herein to arrange that described two nets are suitable for cut workpiece.
According to the embodiment that has described in detail, be provided for the method for monitoring cable saw device center line bending.The method that is used for the monitoring cable bending comprises at least one of measurement of inductance, capacitance measurement and the contact measurement of carrying out line.Described method also comprises the bending of detection line.Specifically, detection can comprise that (specifically) come assessment of the measurement result by means of control module.
According to embodiment, control module is controlled sensor according to the data that receive from the sensor layout and is arranged and/or wire sawing apparatus.
Figure 13 and Figure 14 will illustrate the method that this paper describes for illustration purposes.Figure 13 illustrates the process flow diagram according to the method that is used for the bending of monitoring cable saw device center line of embodiment described herein.Described method comprises: at least one (square 101) in measurement of inductance, capacitance measurement and the contact measurement of execution line; Bending (square 102) with detection or definite line.Figure 14 describes similar method, has wherein added following steps: use from sensor and arrange Data Control sensor layout and/or the wire sawing apparatus (square 103) that receives.
Although above at embodiment of the present utility model, can under the situation that does not break away from base region of the present utility model, design other and further embodiment of the present utility model, and determine scope of the present utility model by following claims.
Claims (15)
1. the crooked supervisory system (10) of a line, the crooked supervisory system of described line (10) comprises:
Sensor is arranged (20), described sensor arranges that (20) are configured to be adjacent to line (30) location of described wire sawing apparatus (100), wherein said sensor arranges that (20) are fit to detect the bending of described line (30), and wherein said sensor arranges that (20) comprise at least one in induction pick-up (22), capacitive transducer (22) and the feeler (22).
2. the crooked supervisory system of line as claimed in claim 1 is characterized in that, described sensor arranges that (20) comprise a plurality of sensors (22).
3. the crooked supervisory system of line as claimed in claim 1 is characterized in that, described sensor arranges that (20) comprise at least one in a plurality of induction pick-ups, a plurality of capacitive transducer and a plurality of feeler.
4. the crooked supervisory system of line as claimed in claim 1 is characterized in that, described sensor arranges that (20) further comprise at least one sensor board (24), and wherein said sensor (22) is mounted to described sensor board (24) with at least two row.
5. the crooked supervisory system of line as claimed in claim 4 is characterized in that described sensor (22) is positioned on the described sensor board with pattern of diagonal lines.
6. the crooked supervisory system of line as claimed in claim 1, it is characterized in that, described sensor arranges that (20) comprise at least one in a plurality of induction pick-ups, a plurality of capacitive transducer and a plurality of feeler, and wherein said sensor arranges that (20) further comprise at least one sensor board (24), and wherein said sensor (22) is mounted to described sensor board (24) with pattern of diagonal lines with at least two row.
7. the crooked supervisory system of line as claimed in claim 1 is characterized in that at least one sensor is arranged movably.
8. the crooked supervisory system of line as claimed in claim 1 is characterized in that at least one sensor is arranged pivotally.
9. the crooked supervisory system of line as claimed in claim 2 is characterized in that, described sensor arranges and further comprise at least one removable rod (40) that wherein said sensor (22) is embarked on journey and is mounted to described rod.
10. the crooked supervisory system of line as claimed in claim 1 is characterized in that described at least one sensor is digital sensor or analog sensor.
11. the crooked supervisory system of line as claimed in claim 1 is characterized in that, the crooked supervisory system of described line further comprises:
Control module (50), described control module (50) are fit to according at least one that control from the data of described sensor layout reception described sensor layout (20) and the described wire sawing apparatus.
12. the crooked supervisory system of line as claimed in claim 1 is characterized in that, the crooked supervisory system of described line further comprises:
Be fit to change the actuator of the distance between described sensor layout and the described line.
13. the crooked supervisory system of line as claimed in claim 1 is characterized in that, the crooked supervisory system of described line further comprises:
The actuator that is fit to the described sensor of rotation.
14. a wire sawing apparatus, described wire sawing apparatus comprise as described above the crooked supervisory system of the described line of arbitrary claim in the claim.
15. wire sawing apparatus as claimed in claim 14 is characterized in that, described wire sawing apparatus also comprises at least two line-oriented devices (130) that are used for the described line of guiding.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP12184353.6 | 2012-09-14 | ||
| EP12184353.6A EP2708342B1 (en) | 2012-09-14 | 2012-09-14 | Wire bow monitoring system for a wire saw |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203204380U true CN203204380U (en) | 2013-09-18 |
Family
ID=47189706
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2012207084610U Expired - Lifetime CN203204380U (en) | 2012-09-14 | 2012-12-19 | Wire bending monitoring system and wire saw device |
| CN201210556851.5A Pending CN103676770A (en) | 2012-09-14 | 2012-12-19 | Wire bow monitoring system for a wire saw |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
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| CN201210556851.5A Pending CN103676770A (en) | 2012-09-14 | 2012-12-19 | Wire bow monitoring system for a wire saw |
Country Status (3)
| Country | Link |
|---|---|
| EP (1) | EP2708342B1 (en) |
| JP (1) | JP2014060397A (en) |
| CN (2) | CN203204380U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103676770A (en) * | 2012-09-14 | 2014-03-26 | 应用材料瑞士有限责任公司 | Wire bow monitoring system for a wire saw |
| FR3010922A1 (en) * | 2013-09-24 | 2015-03-27 | Commissariat Energie Atomique | METHOD AND DEVICE FOR WIRED CUTTING OF A MATERIAL |
| CN105269695A (en) * | 2014-06-11 | 2016-01-27 | 应用材料瑞士有限责任公司 | Method and system for sawing ingot |
| CN106313353A (en) * | 2015-07-03 | 2017-01-11 | 天津职业技术师范大学 | Online monitoring device and method for wire bow of wire mesh of multi-wire sawing machine |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016518996A (en) * | 2013-04-09 | 2016-06-30 | マイヤー ブルガー アーゲー | Monitoring device, wire web monitoring method, and wire saw |
| WO2015188859A1 (en) * | 2014-06-11 | 2015-12-17 | APPLIED MATERIALS SWITZERLAND SàRL | Wire saw system |
| FR3026035B1 (en) * | 2014-09-23 | 2017-06-02 | Commissariat Energie Atomique | WIRE CUTTING DEVICE HAVING A WIREBREAK DETECTION AND MEASURING SYSTEM |
| EP3015238A1 (en) * | 2014-10-29 | 2016-05-04 | Applied Materials Switzerland Sàrl | Wire monitoring system |
| EP3015237A1 (en) * | 2014-10-29 | 2016-05-04 | Applied Materials Switzerland Sàrl | Wire monitoring system |
| JP6919852B2 (en) * | 2016-09-27 | 2021-08-18 | 株式会社テック技販 | Ingot cutting device and load detector used for ingot cutting device |
| CN106891451A (en) * | 2017-02-22 | 2017-06-27 | 平凉中电科新能源技术有限公司 | A kind of diamond wire multi-line cutting machine wire break detection method |
| CN107214868B (en) * | 2017-07-04 | 2019-02-01 | 杨凌美畅新材料股份有限公司 | A kind of multi-line cutting machine entirety additional tension detection method |
| JP7105433B2 (en) * | 2017-08-07 | 2022-07-25 | 株式会社クリハラント | CUTTING AUXILIARY DEVICE AND WIRE-TYPE CUTTING DEVICE HAVING THE SAME |
| FR3090432B1 (en) | 2018-12-14 | 2023-04-07 | Commissariat Energie Atomique | Method for monitoring the cut as a function of the deflection of at least one cutting line and associated device |
| CN113334595B (en) * | 2021-06-08 | 2023-03-07 | 福州天瑞线锯科技有限公司 | Method and equipment for cutting irregular brittle and hard material workpiece |
| FR3129627B1 (en) | 2021-11-29 | 2023-10-27 | Commissariat Energie Atomique | Installation and disassembly process of a photovoltaic module |
| CN116277559B (en) * | 2023-05-17 | 2023-08-18 | 浙江求是半导体设备有限公司 | Crystal bar cutting system and diamond wire service life detection method |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55153963A (en) * | 1979-05-21 | 1980-12-01 | Ricoh Co Ltd | Charge wire diagnosis system of copying machine |
| JPH11188603A (en) * | 1997-12-25 | 1999-07-13 | Tokyo Seiko Co Ltd | Device and method for controlling feed speed of work to be cut in wire-type cutting device |
| JP4066112B2 (en) * | 1999-01-28 | 2008-03-26 | 株式会社スーパーシリコン研究所 | Wire saw control method and wire saw |
| JP2003127058A (en) * | 2001-10-23 | 2003-05-08 | Sharp Corp | Wire saw |
| JP2007030117A (en) * | 2005-07-28 | 2007-02-08 | Shin Etsu Handotai Co Ltd | Method for manufacturing wafer and wire saw |
| JP2007276097A (en) * | 2006-04-03 | 2007-10-25 | Takatori Corp | Wire saw |
| US7503831B2 (en) * | 2006-04-26 | 2009-03-17 | Siemens Medical Solutions Usa, Inc. | System and method for cutting soluble scintillator material |
| JP2007326167A (en) * | 2006-06-07 | 2007-12-20 | Toyo Advanced Technologies Co Ltd | Wire saw |
| JP5475772B2 (en) * | 2008-07-11 | 2014-04-16 | サンーゴバン アブレイシブズ，インコーポレイティド | Wire slicing system |
| WO2011070386A1 (en) * | 2009-12-11 | 2011-06-16 | Applied Materials, Inc. | Monitoring device for the wire of a wire saw device and method for operating the same |
| JP5610976B2 (en) * | 2010-10-22 | 2014-10-22 | トーヨーエイテック株式会社 | Wire saw |
| CN202428570U (en) * | 2011-04-07 | 2012-09-12 | 苏州协鑫光伏科技有限公司 | Multi-wire cutting machine with wire arc detectors |
| EP2708342B1 (en) * | 2012-09-14 | 2017-05-03 | Toyo Advanced Technologies Co., Ltd. | Wire bow monitoring system for a wire saw |
-
2012
- 2012-09-14 EP EP12184353.6A patent/EP2708342B1/en active Active
- 2012-12-19 CN CN2012207084610U patent/CN203204380U/en not_active Expired - Lifetime
- 2012-12-19 CN CN201210556851.5A patent/CN103676770A/en active Pending
-
2013
- 2013-09-11 JP JP2013187972A patent/JP2014060397A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103676770A (en) * | 2012-09-14 | 2014-03-26 | 应用材料瑞士有限责任公司 | Wire bow monitoring system for a wire saw |
| FR3010922A1 (en) * | 2013-09-24 | 2015-03-27 | Commissariat Energie Atomique | METHOD AND DEVICE FOR WIRED CUTTING OF A MATERIAL |
| WO2015044145A1 (en) * | 2013-09-24 | 2015-04-02 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Method and device for wire cutting of a material |
| CN105269695A (en) * | 2014-06-11 | 2016-01-27 | 应用材料瑞士有限责任公司 | Method and system for sawing ingot |
| CN106313353A (en) * | 2015-07-03 | 2017-01-11 | 天津职业技术师范大学 | Online monitoring device and method for wire bow of wire mesh of multi-wire sawing machine |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2014060397A (en) | 2014-04-03 |
| EP2708342A1 (en) | 2014-03-19 |
| EP2708342B1 (en) | 2017-05-03 |
| CN103676770A (en) | 2014-03-26 |
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