CN202562842U - Device for detecting concentration of trace vapor employing optoacoustic spectroscopy - Google Patents
Device for detecting concentration of trace vapor employing optoacoustic spectroscopy Download PDFInfo
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- CN202562842U CN202562842U CN2012202119539U CN201220211953U CN202562842U CN 202562842 U CN202562842 U CN 202562842U CN 2012202119539 U CN2012202119539 U CN 2012202119539U CN 201220211953 U CN201220211953 U CN 201220211953U CN 202562842 U CN202562842 U CN 202562842U
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- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
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Abstract
A device for detecting concentration of trace vapor employing optoacoustic spectroscopy belongs to the technical field of a trace gas detection device. The device comprises a photoacoustic cell, a heater, a rheomicrophone, a chopper, a chopper control unit, a power supply source, a light filter, an infrared light source, an infrared light source control unit, a display screen, an analogue-digital signal converter and a central processing unit; an air inlet pipe and an air outlet pipe of the photoacoustic cell are respectively connected with a gas circuit control valve and an air pump; the infrared light source is connected with the infrared light source control unit; the chopper is connected with the chopper control unit; the central processing unit, the chopper control unit, the infrared light source control unit and the analogue-digital signal converter are in electric control connection; the photoacoustic cell is connected with the rheomicrophone; the rheomicrophone is connected with the analogue-digital signal converter; the heater, the display screen and the central processing unit are in electric control connection while the display screen is electrically connected with the analogue-digital signal converter. The concentration of PPM (parts per million)-level trace vapor can be detected; any chemical substance is not needed to use; the concentration does not need to be adjusted again after being calibrated once; condensation of the vapor can be prevented; the detection precision is high; the sensitivity is good, and the stability is excellent.
Description
Technical field
The utility model belongs to trace gas pick-up unit technical field, is specifically related to a kind of device that utilizes photocaustic spectroscopy to detect the minor amount of water vapor concentration, is applicable to the detection such as environmental monitoring and packaging material for food.
Background technology
Under conditions such as industrial environment and laboratory environment, need come judgment device situation and properties of product through detecting the minor amount of water vapor concentration.Such as, in power industry, need the concentration of minor amount of water steam in the monitoring high-tension switch gear, thereby judge whether high-tension switch gear exists potential safety hazard; And for example, need to detect the micro-moisture-vapor transmission of packaging material for food in the packaging for foodstuff industry, thus analyzing and packaging reliability of material and leakproofness.Because under these application scenarios, water vapor concentration is micro-, be generally tens to a hundreds of ppm volume ratio, thereby the sensor of requirement detection minor amount of water steam should possess the performance characteristics of high sensitivity, high precision and high linearity etc.
To the detection of minor amount of water steam, the Environmental Protection in China standard has mainly defined three kinds of detection methods: electrolytic process, cooling minute surface method and infrared detection method.
Aforesaid electrolytic process is based on Faraday's laws of electrolysis.According to faraday's electrolysis principle, separating out any mole of required electric weight of material is 96485 coulombs, therefore can calculate the amount of electrolysis by the electric weight that consumes.In the minor amount of water vapor concentration detects, be water by the material of electrolysis, when tested minor amount of water steam passed through electrolytic cell continuously, the phosphorus pentoxide rete that the minor amount of water steam is applied on the electrolytic cell all absorbed and electrolysis.In certain minor amount of water vapor concentration and flow rates, can think that the speed of minor amount of water steam absorption and the speed of electrolysis are identical.This measuring method requires the minor amount of water steam all to be absorbed; And it is constant that flow velocity must keep, but in the actual use these 2 be difficult to be guaranteed, cause accuracy of detection and poor stability; And the phosphorus pentoxide rete of this kind instrument is shorter serviceable life; Be generally half a year to one year, and need regularly demarcate again, so the suitable long-time monitoring of the method is used.
Aforesaid cooling minute surface method adopts a metallic mirror surface; Gas passes through this metallic mirror surface with certain flow velocity; This metallic mirror surface cools off with artificial method, when the minor amount of water steam in the gas reaches capacity with the cooling of minute surface, will have moisture film on minute surface, to form.Moisture film that adheres on the minute surface and the minor amount of water steam in the gas are in mobile equilibrium.This moment, mirror temperature was called dewpoint temperature, can measure the minor amount of water vapor concentration thus.The shortcoming of this detection method is that response speed is slower, especially below dew point-60 ℃, and equilibration time even reach several hrs, and also the method requires also higher to the spatter property and the corrosivity of appearance gas.
Aforesaid infrared detection method is to utilize the minor amount of water steam to carry out measurement of concetration in the light absorption of mid infrared region (6.82 ~ 9 μ m); When the infrared light of a branch of constant 6.82～9 μ m when containing the medium of minor amount of water steam; Absorbed by the minor amount of water steam; Luminous flux is attenuated, and measures the fast luminous energy of decay, can obtain the concentration of minor amount of water steam.This method is used comparatively general, but must pay attention to influencing the disturbing factor of measuring accuracy when measuring, and wherein, the carbon dioxide in the mixed gas can have very big influence to accuracy of detection with other gas; If water vapor produces condensation, also can cause the testing result out of true, and this method can't detect the minor amount of water steam that is low to moderate 20000ppm concentration.
Can know by above-mentioned explanation; If will break away from puzzling and creating other method that is different from these three kinds of methods of aforementioned three kinds of detection methods, testing equipment is undoubtedly the basis that detection method relies on so, for this reason; The applicant has done patent and non-patent literature retrieval; But not seeing has referential teachings, and this applicant that reflects has done useful design, and the technical scheme that will introduce below produces under this background.
Summary of the invention
The task of the utility model be to provide a kind of help to detect PPM level minor amount of water vapor concentration and need not to rely on any chemical substance, need not to carry out recalibration, can avoid other interference gas and water vapor condensation effectively and influence accuracy of detection, have excellent sensitivity, the photocaustic spectroscopy that utilizes of accuracy of detection and stability detects the device of minor amount of water vapor concentration.
The task of the utility model is accomplished like this; A kind of device that utilizes photocaustic spectroscopy to detect the minor amount of water vapor concentration; Comprise: photoacoustic cell, well heater, microphone, chopper, chopper control module, power supply, optical filter, infrared light supply, infrared light supply control module, display screen, modulus signal converter and CPU; The draft tube of photoacoustic cell is connected with air pump with the gas path control valve door respectively with escape pipe; Infrared light supply, chopper and optical filter are formed light path, and infrared light supply is connected by electrical control with the infrared light supply control module, and chopper is connected by electrical control with the chopper control module; By the motion of chopper control module control chopper; Be emitted to said optical filter after infrared light supply cut light, and filter the light inlet that is emitted to photoacoustic cell behind the light source by optical filter, wherein: CPU is connected with chopper control module, infrared light supply control module and the electrical control of modulus signal converter; Photoacoustic cell is connected with microphone; And microphone is connected with the modulus signal converter, and described well heater, display screen are connected with the CPU electrical control, and display screen and described modulus signal converter are electrically connected.
In one of the utility model concrete embodiment, the power of described infrared light is the mid-infrared light of 8W.
In another concrete embodiment of the utility model, described optical filter is a middle infrared spectrum membrane filtration optical filter.
In another concrete embodiment of the utility model, described photoacoustic cell is the resonant mode photoacoustic cell.
In another concrete embodiment of the utility model, described microphone is the electret capacitor type microphone.
Also having among the concrete embodiment of the utility model, the microphonic electric capacity of described electret capacitor type is that 10PF, signal to noise ratio (S/N ratio) are that 56dB and sensitivity are-42dB.
At more and among concrete embodiment of the utility model, described middle infrared spectrum membrane filtration optical filter is the membrane filtration optical filter that the spectrum of 2.5-3 mu m range passes through for make wavelength through membrane filtration process.
The technical scheme that the utility model provides has following effect with respect to prior art: the advantage that can detect PPM level minor amount of water vapor concentration; Need not to use any chemicals and use embodiment safety and environmental protection; After the adjustment of demarcating, need not to set up once more and use and embody the convenience of using; Can prevent condensation by heater heats during water vapor process photoacoustic cell; Because the minor amount of water steam has than the platform absorption peak at 2.5-3 μ m place, other interference gas can not cause the influence to minor amount of water steam accuracy of detection; Have the accuracy of detection height, sensitivity is good and the strong point of excellent in stability.
Description of drawings
Fig. 1 is the abosrption spectrogram of minor amount of water steam at 2.5-3 μ m place.
Fig. 2 is the synoptic diagram that is electrically connected of the used pick-up unit of the utility model.
Fig. 3 is the synoptic diagram of microphonic resonant cavity.
Embodiment
Embodiment and application examples 1:
Monochromatic light with the adjustable system of a beam intensity is modulated through chopper, and spectrum shines on the minor amount of water steam sample that is sealed in the photoacoustic cell through optical filter then; The minor amount of water steam absorbs luminous energy; And to discharge the mode de excitation of heat energy, the heat energy of release makes the minor amount of water vapour molecule produce the periodic pressure fluctuation, and this pressure surge can use sensitive microphone to detect; And obtain photoacoustic signal, optoacoustic effect that Here it is through amplification.Utilize the optoacoustic effect after optoacoustic spectroscopy sensor minor amount of water vapor concentration just is based on gas absorption spectra.
Ask for an interview Fig. 1 to Fig. 3; The method of utilizing photocaustic spectroscopy to detect the minor amount of water vapor concentration of the utility model is the method for utilizing optoacoustic spectroscopy sensor minor amount of water vapor concentration; This optoacoustic spectroscopy sensor is as shown in Figure 2, comprising: infrared light supply 1, chopper 2, optical filter 3, chopper control module 4, infrared light supply control module 5, air pump 6, valve 7, photoacoustic cell 8, power supply 9, well heater 10, microphone 11, central processing unit 12, display screen 13, modulus signal converter 14, digital and analogue signals converter 15.
At first; Launch the middle infrared spectrum that wavelength is 8W by infrared light supply 1; Give chopper 2 by this middle infrared spectrum as tunable light source; Make chopper 2 obtain the spectrum of the adjustable system of a beam intensity, the spectrum that this intensity can be modulated obtains the middle infrared spectrum that wavelength is 2.5-3 μ m behind optical filter 3 (optical filter), particularly; Optical filter 3 is a middle infrared spectrum membrane filtration optical filter, and this middle infrared spectrum membrane filtration optical filter is the membrane filtration optical filter that the spectrum of 2.5-3 mu m range passes through for make wavelength through membrane filtration process.Water vapor and reference gas are that air gets into photoacoustic cell 8 simultaneously, and are heated to 50 ℃ by 10 pairs of photoacoustic cells 8 of well heater, to prevent the condensation of water steam, in photoacoustic cell 8, form gaseous state minor amount of water steam; Then; Middle infrared spectrum is shone on the aforementioned gaseous state minor amount of water steam in the photoacoustic cell 8; So gaseous state minor amount of water steam is that 2.7 μ m places absorb luminous energy and discharge the energy that is absorbed through intermolecular collision with the mode of heat at wavelength, makes minor amount of water steam gas molecule through radiationless transition said luminous energy is converted into heat energy by this energy; Minor amount of water steam gas temperature is changed and cause pressure surge and produce sound wave by heat energy; This sound wave detects and obtains photoacoustic signal through being configured in photoacoustic cell 8 outer microphones 11, and photoacoustic signal converts digital electric signal to by the analog to digital conversion circuit of peripheral modulus signal converter 14 on the one hand, and digital electric signal is admitted to display screen and supplies image data; The data of gathering calculate minor amount of water vapor concentration value through formula; And on display screen 13, demonstrate the minor amount of water vapor concentration of final detection, the D/A converting circuit by digital and analogue signals converter 15 converts industrial simulating signal on the other hand, offers the user.
For aforesaid infrared light supply 1; Use 4.5V, 1.8 amperes infrared light supply to produce the light beam of 8W in the present embodiment; Cooperate allowing through wavelength is that mid-infrared spectral optical filter 3 and the chopper 2 of 2.5-3 μ m obtains the spectrum that wavelength is 2.5-3 μ m, and the minor amount of water steam absorbs on spectral coverage at this has very strong receptivity.
For aforesaid photoacoustic cell 8, adopt the photoacoustic cell 8 of resonant mode.Photoacoustic cell 8 is that the principle of resonant mode photoacoustic cell is that sound wave transmits in cavity, and sound wave resonance in chamber forms standing wave, need not sealed chamber, and plays the effect that resonance is amplified.The eigenfrequency that itself and sound wave is propagated through the modulated light source irradiation frequency in chamber overlaps and forms resonance, like this can be with the photoacoustic signal amplification of resonating.Resonant mode optical cavity chamber has practicality, is prone to characteristics such as making, sensitivity height.The expand border of propagation of the size that produces hot sound wave in the gas and the luminous energy of gas absorption and gas is relevant.In the optoacoustic gas detection system, gas is in the photoacoustic cell of certain design, through the structure sensitivity that can improve gas of design photoacoustic cell.For certain gas; Own specific absorption spectrum is arranged; Through the wavelength of selection light source, thereby make to have only certain specific gas to produce bigger absorption, just have only this gas absorption luminous energy to produce hot sound wave; Thereby can judge the concentration of this kind gas through the size that detects hot sound wave, also realize the high selectivity of detection of gas simultaneously.The energy of gas absorption is relevant with gas concentration in the absorption coefficient and the intensity of light source of this wavelength with gas; The size that produces hot sound wave is directly proportional with the heat of gas absorption, can realize high selectivity, the high sensitivity of detection system through correct selection photoacoustic cell.
For aforesaid microphone 11; Present embodiment is selected the electret capacitor type microphone, and the electret capacitor microphone has two sheet metals, and wherein a surface scribbles electret film; Another piece sheet metal is connected to the grid of FET, is connected to a diode between grid and the source electrode.The characteristics of electret diaphragm are: when diaphragm receives vibration, friction, surface charge can occur on the diaphragm.If surface charge is Q, cartridge electric capacity is C, the voltage U=Q/C on the cartridge then, and electric capacity is constant, and the quantity of electric charge on the electret diaphragm is owing to the sound variations in flow changes.Acoustic pressure is big more, and electric weight is big more, and it is big more to produce voltage.The electric quantity change speed has reflected the variation speed of voltage, has also reflected the frequency of sound.The electret capacitor type microphone sensitivity that we use is-42dB, 10pF electric capacity, and signal to noise ratio (S/N ratio) is greater than 56dB, and its sensitivity is high.
Ask for an interview Fig. 1 and Fig. 3, Fig. 1 is a minor amount of water steam detection curve, and this spectrogram has proved the testing result that detects the minor amount of water steam with the optoacoustic spectroscopy of 2.5-3 μ m light source.
The absorption line of minor amount of water steam other interference gas minor amount of water steam on the infrared absorption spectral coverage of 2.5-3 μ m disturbs less, so select to allow through the mid-infrared spectral optical filter of 2.5-3 μ m.Photoacoustic cell 8 is closed containers, in be full of the minor amount of water steam sample, and place microphone 11.Because photoacoustic spectroscopy is the size of absorption of sample luminous energy; Thereby reflected light, scattered light etc. are very little to measuring interference; Absorb light intensity and very little weak absorption sample and the low concentration sample of incident intensity ratio so optoacoustic spectroscopy is suitable for measuring, be suitable for very much detecting the minor amount of water steam gas of trace.
Can provide the mathematical model that hot sound wave produces in the gas through the fluid mechanics and the law of thermodynamics.Acoustic disturbance in the gas can be used acoustic pressure p, and (r t) describes, and acoustic pressure is the poor of general pressure P and average value P 0: p=P-P0.Because of absorbing light produce hot H (r, t) and the excitation acoustical signal, this process can be described as:
Wherein: r is the gas coefficient of heat insulation, and Co is the velocity of propagation of sound wave in the gas.The boundary condition of equation is by light path decision in optoacoustic chamber and the optoacoustic chamber.The applicant adopts the vertical acoustic resonance of one dimension chamber: if the sectional dimension of resonant cavity is much smaller than wave length of sound; The acoustic signals that then is excited only changes along the resonant cavity length direction; This cavity can be considered to the one dimension resonant cavity can be by shown in Figure 3; Two ends all the cavity of opening or sealing to require length be the integral multiple of half-wavelength, resonant frequency is:
The cavity that one end opening, one end is remained silent, requiring length is the odd of 1/4 wavelength, resonant frequency is:
Wherein: △ l is the open end correction, generally approximate △ l=6r, and r is a section radius, is zero to blind end △ l.The cavity of both ends open or sealing, standing wave mode is different: the cavity hatch place of both ends open is a node, and the cavity end of closed at both ends is an antinode.
It is as follows that the vertically harmless optoacoustic chamber of one dimension acoustic equation can be write an accepted way of doing sth, and wherein p is a gas density, and S is a sectional area in the optoacoustic chamber, and f is the velocity of sound:
Its in form with four-pole network in the equation (2) that satisfies of the relation of voltage and current close, set up mathematical model
Thereby through LC oscillatory circuit simulation sonic transmissions.
In practical application; As shown in Figure 2; Minor amount of water steam optoacoustic spectroscopy pick-up unit is mainly by photoacoustic cell 8; Microphone 11, the chopper 2 with chopper control module 4 is formed with the infrared light supply 1 with power supply 9 and optical filter 3, infrared light supply control module 5, modulus signal converter 14 and CPU 12.The draft tube in optoacoustic chamber links to each other with air pump 6 with the valve 7 of gas circuit controller respectively with escape pipe.Infrared light supply 1 and chopper 2 (Fig. 2 shows) are formed light path; Infrared light supply control module 5 control light sources; Chopper control module 4 control choppers 2 move to the light inlet of photoacoustic cell, and chopper control module 4 is controlled by CPU 12 with infrared light supply control module 5, and photoacoustic cell 8 outer walls link to each other with microphone 11; Microphone 11 links to each other with modulus signal converter 14, and modulus signal converter 14 is by CPU 12 controls.Modulus signal converter 14 is connected with display screen 13 and digital and analogue signals converter 15, the signal of digital and analogue signals converter 15 output 0-20mA/4-20mA and 0-10V.Display screen 13 demonstrates detected gas concentration.
Cooperate optical filter 3 to launch 2.5-3 μ m middle infrared spectrum by infrared light supply 1; Shine on the chopper 2; Chopper 2 is through 4 controls of chopper control module; Make accurately that the light source of 2.5-3 μ m incides in the resonant mode photoacoustic cell 8, owing to be flooded with minor amount of water steam gas to be measured in the photoacoustic cell 8, therefore make the minor amount of water steam absorb luminous energy and discharge the energy of absorption through intermolecular collision with the mode of heat; Make minor amount of water steam gas molecule luminous energy is converted into heat energy through the energy that discharges again, make minor amount of water steam gas local temperature change and cause pressure surge by heat energy through radiationless transition.This pressure surge is that to be 56dB and sensitivity detect for the microphone 11 of-42dB for 10PF, signal to noise ratio (S/N ratio) by being configured in outer electret capacitor type of photoacoustic cell 8 and electric capacity; And Pressure Fluctuation Signal is amplified through change-over circuit; Obtain photoacoustic signal; Photoacoustic signal is a simulating signal, converts digital electric signal to by peripheral modulus signal converter 14.Wherein, the concentration of photoacoustic signal and minor amount of water steam gas is proportional.The data of being gathered are after formula calculates minor amount of water vapor concentration value.In this flow process, CPU 12 is used to control chopper control module 4 and infrared light supply control module 5, modulus signal converter 14.All the other are all with the description to embodiment and application examples 1.
In sum, the technical scheme that the utility model provides has the advantage that can detect PPM level minor amount of water steam, and the little strong point of sensitivity, high precision, high stability and device volume.The principle of optoacoustic spectroscopy gas sensor micrometer water gaging steam is based on the optoacoustic effect of gas, realizes the high-sensitivity detection to the minor amount of water steam through selecting 2.5-3 μ m light source and acoustic sounding equipment microphone.This inventive method need not to add any chemical substance, has avoided the shortcoming of electrolytic process with cooling minute surface method.Compare with the non-dispersion infrared analytic approach; He uses 2.6 microns light source; Avoided of the interference of other gas, and can avoid the water vapor condensation phenomenon that the accuracy of detection of minor amount of water steam is exerted an influence through the method that photoacoustic cell is heated to 45-55 ℃ to detection signal.
Claims (7)
1.
a kind of device that utilizes photocaustic spectroscopy to detect the minor amount of water vapor concentration; It is characterized in that comprising: photoacoustic cell (8), well heater (10), microphone (11), chopper (2), chopper control module (4), power supply (9), optical filter (3), infrared light supply (1), infrared light supply control module (5), display screen (13), modulus signal converter (14) and CPU (12); The draft tube of photoacoustic cell (8) is connected with air pump (6) with gas path control valve door (7) respectively with escape pipe; Infrared light supply (1), chopper (2) and optical filter (3) are formed light path; And infrared light supply (1) is connected by electrical control with infrared light supply control module (5); And chopper (2) is connected by electrical control with chopper control module (4); By chopper control module (4) control chopper (2) motion; Be emitted to said optical filter (3) after infrared light supply (1) cut light, and filter the light inlet that is emitted to photoacoustic cell (8) behind the light source by optical filter (3), wherein: CPU (12) is connected with chopper control module (4), infrared light supply control module (5), modulus signal converter (14) electrical control; Photoacoustic cell (8) is connected with microphone (11); And microphone (11) is connected with modulus signal converter (14), and described well heater (10), display screen (13) are connected with CPU (12) electrical control, and display screen (13) is electrically connected with described modulus signal converter (14).
2.
device that utilizes photocaustic spectroscopy to detect the minor amount of water vapor concentration according to claim 1, the power that it is characterized in that described infrared light is the mid-infrared light of 8W.
3.
device that utilizes photocaustic spectroscopy to detect the minor amount of water vapor concentration according to claim 1 is characterized in that described optical filter (3) is a middle infrared spectrum membrane filtration optical filter.
4.
device that utilizes photocaustic spectroscopy to detect the minor amount of water vapor concentration according to claim 1 is characterized in that described photoacoustic cell (8) is the resonant mode photoacoustic cell.
5.
device that utilizes photocaustic spectroscopy to detect the minor amount of water vapor concentration according to claim 1 is characterized in that described microphone (11) is the electret capacitor type microphone.
6.
device that utilizes photocaustic spectroscopy to detect the minor amount of water vapor concentration according to claim 5 is characterized in that the microphonic electric capacity of described electret capacitor type is that 10PF, signal to noise ratio (S/N ratio) are that 56dB and sensitivity are-42dB.
7.
The device that utilizes photocaustic spectroscopy to detect the minor amount of water vapor concentration according to claim 3 is characterized in that described middle infrared spectrum membrane filtration optical filter is the membrane filtration optical filter that the spectrum of 2.5-3 mu m range passes through for make wavelength through membrane filtration process
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103954580A (en) * | 2014-05-14 | 2014-07-30 | 江苏舒茨测控设备有限公司 | Photoacoustic spectrometry detection device for detecting concentration of trace water vapor |
| CN103954561A (en) * | 2014-05-14 | 2014-07-30 | 江苏舒茨测控设备有限公司 | Photoacoustic spectrum detection device for detecting concentration of sulfur dioxide |
-
2012
- 2012-05-11 CN CN2012202119539U patent/CN202562842U/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103954580A (en) * | 2014-05-14 | 2014-07-30 | 江苏舒茨测控设备有限公司 | Photoacoustic spectrometry detection device for detecting concentration of trace water vapor |
| CN103954561A (en) * | 2014-05-14 | 2014-07-30 | 江苏舒茨测控设备有限公司 | Photoacoustic spectrum detection device for detecting concentration of sulfur dioxide |
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Owner name: JIANGSU SCHUTZ MEASUREMENT AND CONTROL EQUIPMENT C Free format text: FORMER NAME: JIANGSU SCHUTZ MEASURING + CONTROLLING EQUIPMENT CO., LTD. |
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Address after: 215537 Jiangsu province Changshou City District Vanward Bixiling Road No. 39, Vanward industrial square No. seven building 3 floor Patentee after: Jiangsu Schutz measurement and control equipment Limited by Share Ltd Address before: Four Jiangsu Province, Suzhou city Changshou City road 215513 Changshu economic and Technological Development Zone No. 11 branch building five building 507 room Patentee before: Schutz Measurement Engineering Co., Ltd. |
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Granted publication date: 20121128 |